Single crystal furnace with guide cylinder on cover plate

Abstract

The utility model discloses a single crystal furnace with a guide cylinder on a cover plate, which relates to the technical field of single crystal furnaces and comprises a single crystal furnace, a heater is arranged on the inner side wall of the single crystal furnace, a crucible is arranged in the heater, a discharge pipe movably penetrates through the bottom of the single crystal furnace and is communicated with the crucible, the cover plate is arranged on the top of the single crystal furnace, and the guide cylinder is arranged on the cover plate. A guide cylinder is arranged at the bottom of the cover plate, a feeding pipe is arranged at the top of the cover plate in a penetrating and communicating mode, a discharging control assembly is arranged in the feeding pipe, and the size of an opening in the feeding pipe can be controlled under the action of the discharging control assembly, so that the size of the opening in the feeding position can be changed according to needs, and the feeding amount can be adjusted.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal furnace with a guide tube arranged on a cover plate. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas environment and grows dislocation-free single crystals using the Czochralski method. It is mainly composed of a sub-chamber, a furnace cover, a furnace barrel, a lower furnace barrel, a base frame, a crucible lower transmission device, a water distributor, an argon gas pipeline, a vacuum pump and a vacuum dust removal device, a power supply and an electric control cabinet. Currently, when using a single crystal furnace, it is necessary to load the material. When loading the material, the size of the loading tube is mostly fixed, and the size of the loading point is difficult to change, thereby making it difficult to adjust the loading amount and limiting its use. Therefore, we propose a single crystal furnace with a guide tube on the cover. Utility Model Content

[0003] The purpose of the utility model is to provide a single crystal furnace with a guide tube provided on a cover plate, so as to solve the problems raised in the above background technology.

[0004] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: a single crystal furnace with a guide tube provided on a cover plate, comprising a single crystal furnace, a heater provided on the inner side wall of the single crystal furnace, a crucible provided in the heater, a discharge pipe provided movably through the bottom of the single crystal furnace, the discharge pipe being connected to the crucible, a cover plate provided on the top of the single crystal furnace, a guide tube provided on the bottom of the cover plate, a feeding pipe provided through the top of the cover plate, a control feeding assembly provided in the feeding pipe, the control feeding assembly comprising guide plates hingedly provided on the left and right side walls of the feeding pipe, two groups of the guide plates being provided with springs away from the side walls, and the two groups of One end of the spring is respectively connected to the left and right side walls of the feeding tube, and the left and right side walls of the feeding tube are each provided with a sleeve, and sliding plates are slidably connected in the two groups of sleeves, and the opposite side walls of the two groups of sliding plates are provided with pull ropes, and one end of the two groups of pull ropes are respectively connected to the side walls away from the two groups of guide plates, and the side walls away from the two groups of sliding plates are each provided with a return spring, and one end of the two groups of return springs are respectively connected to the side walls away from the two groups of sleeves, and the top of the two groups of sliding plates is provided with a slider, and the left and right side walls of the feeding tube are hinged with an electric telescopic rod, and one end of the two groups of electric telescopic rods are respectively hinged to the top of the two groups of sliders.

[0005] Furthermore, two groups of limiting rods are provided in the feeding tube, and the two ends of the two groups of limiting rods are respectively connected to the front and rear side walls of the feeding tube, and the limiting rods are in contact with the outer side wall of the pull rope.

[0006] Furthermore, a sliding groove is provided on the top of the sleeve, and the slider is slidably connected in the sliding groove.

[0007] Furthermore, through holes are provided on the left and right side walls of the feeding tube, and the pull rope matches the through holes.

[0008] Furthermore, a limiting groove is provided at the inner bottom of the sleeve, and a limiting block matching the limiting groove is provided at the bottom of the sliding plate.

[0009] Furthermore, a funnel is provided on the top of the feeding tube.

[0010] Furthermore, the guide tube is arranged in a frustum shape.

[0011] Compared with the prior art, the beneficial effect of the present invention is that the present invention can control the size of the opening in the feeding tube under the action of controlling the blanking component, thereby being able to change the size of the opening at the feeding point according to needs and to adjust the feeding amount. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic diagram of the structure of the utility model;

[0013] Figure 2 This is a schematic diagram of the internal structure of the feed pipe of the utility model;

[0014] Figure 3 This is a schematic diagram of the structure A of the utility model.

[0015] In the figure: 1. discharge pipe; 2. single crystal furnace; 3. heater; 4. crucible; 5. guide tube; 6. cover plate; 7. loading pipe; 8. funnel; 9. control unloading assembly; 90. guide plate; 91. spring; 92. pull rope; 93. limit rod; 94. sleeve; 95. electric telescopic rod; 96. slider; 97. slide; 98. reset spring; 99. sliding plate. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0017] Example 1:

[0018] See also Figure 1-3The utility model provides a technical solution: a single crystal furnace with a guide tube provided on a cover plate, comprising a single crystal furnace 2, a heater 3 provided on the inner wall of the single crystal furnace 2, a crucible 4 provided in the heater 3, a discharge pipe 1 movably passing through the bottom of the single crystal furnace 2, the discharge pipe 1 is connected to the crucible 4, a cover plate 6 is provided on the top of the single crystal furnace 2, a guide tube 5 is provided at the bottom of the cover plate 6, the guide tube 5 is arranged in a truncated cone shape, a feeding pipe 7 is passed through the top of the cover plate 6, a funnel 8 is provided on the top of the feeding pipe 7, and a feeding control component is provided in the feeding pipe 7. 9. The control unloading assembly 9 includes a guide plate 90 hingedly provided on the left and right side walls of the feeding tube 7. The two sets of guide plates 90 are provided with springs 91 away from the side walls. One end of the two sets of springs 91 is respectively connected to the left and right side walls of the feeding tube 7. The left and right side walls of the feeding tube 7 are provided with sleeves 94. The two sets of sleeves 94 are slidably connected with sliding plates 99. A limiting groove is provided at the bottom of the sleeve 94. A limiting block matching the limiting groove is provided at the bottom of the sliding plate 99. Under the action of the limiting groove and the limiting groove, the sliding plate 99 moves in the sleeve. 94 is more stable, and the two sets of sliding plates 99 are provided with pull ropes 92 on the opposite side walls. One end of the two sets of pull ropes 92 is connected to the side walls away from the two sets of guide plates 90 respectively. Through holes are provided on the left and right side walls of the feeding tube 7. The pull ropes 92 match the through holes. Two sets of limit rods 93 are provided in the feeding tube 7. The two ends of the two sets of limit rods 93 are connected to the front and rear side walls of the feeding tube 7 respectively. The limit rods 93 are in contact with the outer wall of the pull rope 92. Under the action of the limit rods 93, the pull rope 92 is more stable when pulling the guide plate 90. Stable, the two sets of sliding plates 99 are provided with return springs 98 on the side walls away from each other, and one end of the two sets of return springs 98 is respectively connected to the side walls away from each other in the two sets of sleeves 94, and the top of the two sets of sliding plates 99 is provided with sliders 96, and the top of the sleeve 94 is provided with a slide groove 97. The slider 96 is slidably connected in the slide groove 97. Under the action of the slide groove 97, the movement of the slider 96 is more stable. The left and right side walls of the feeding tube 7 are hinged with electric telescopic rods 95, and one end of the two sets of electric telescopic rods 95 is respectively hinged to the top of the two sets of sliders 96.

[0019] Working principle: Pour the material into the funnel 8, and then the material enters the crucible 4 through the feeding pipe 7 and the guide tube 5. Under the action of the heater 3, the material in the crucible 4 can be heated, and then discharged through the discharge pipe 1. The electric telescopic rod 95 drives the slider 96 to move in the slide 97, and the slider 96 drives the sliding plate 99 to move in the sleeve 94. The sliding plate 99 squeezes the reset spring 98, and the sliding plate 99 pulls the pull rope 92. The pull rope 92 pulls the guide plate 90. The guide plate 90 can squeeze the spring 91, so that the opening size of the two sets of guide plates 90 can be adjusted, and the opening size of the feeding place can be changed according to needs, so that the feeding amount can be adjusted.

[0020] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A single crystal furnace with a guide tube provided on a cover plate, comprising a single crystal furnace (2), a heater (3) provided on the inner side wall of the single crystal furnace (2), a crucible (4) provided in the heater (3), a discharge pipe (1) movably passing through the bottom of the single crystal furnace (2), the discharge pipe (1) being connected to the crucible (4), and a cover plate (6) provided on the top of the single crystal furnace (2), characterized in that: The bottom of the cover plate (6) is provided with a guide tube (5), the top of the cover plate (6) is connected to the top of the cover plate (6), a feeding tube (7) is provided in the feeding tube (7), and a control feeding assembly (9) is provided in the feeding tube (7), and the control feeding assembly (9) includes a guide plate (90) hingedly provided on the left and right side walls of the feeding tube (7), two groups of the guide plates (90) are provided with springs (91) away from the side walls, one end of the two groups of the springs (91) is respectively connected to the left and right side walls of the feeding tube (7), the left and right side walls of the feeding tube (7) are provided with sleeves (94), and the two groups of the sleeves (94) are slidably connected with sliding plates (99). The two groups of sliding plates (99) are provided with pull ropes (92) on the opposite side walls, one end of the two groups of pull ropes (92) is respectively connected to the two groups of guide plates (90) away from the side wall, the two groups of sliding plates (99) are provided with reset springs (98) on the away side wall, one end of the two groups of reset springs (98) is respectively connected to the two groups of sleeves (94) away from the side wall, the two groups of sliding plates (99) are provided with sliders (96) on the top, the left and right side walls of the feeding tube (7) are hinged with electric telescopic rods (95), one end of the two groups of electric telescopic rods (95) is respectively hinged to the top of the two groups of sliders (96); Two groups of limiting rods (93) are provided in the feeding tube (7), and the two ends of the two groups of limiting rods (93) are respectively connected to the front and rear side walls of the feeding tube (7), and the limiting rods (93) are in contact with the outer side wall of the pull rope (92); A sliding groove (97) is provided on the top of the sleeve (94), and the slider (96) is slidably connected in the sliding groove (97).

2. The single crystal furnace with a guide tube on the cover plate according to claim 1, characterized in that: The left and right side walls of the feeding tube (7) are both provided with through holes, and the pull rope (92) matches the through holes.

3. The single crystal furnace with a guide tube on the cover plate according to claim 1, characterized in that: A limiting groove is provided at the bottom of the sleeve (94), and a limiting block matching the limiting groove is provided at the bottom of the sliding plate (99).

4. The single crystal furnace with a guide tube on the cover plate according to claim 1, characterized in that: A funnel (8) is provided on the top of the feeding tube (7).

5. The single crystal furnace with a guide tube provided on the cover plate according to claim 1, characterized in that: The guide tube (5) is arranged in a truncated cone shape.

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