Semiconductor equipment exhaust mechanism convenient to install and maintain
Through the design of tee pipe fittings and elastic seals, the problem of the indiscretion of the exhaust mechanism of traditional semiconductor equipment is solved, convenient maintenance and efficient gas sealing are achieved, and maintenance costs and resource waste are reduced.
Patent Information
- Application Number
- CN202422633559.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-30
- Publication Date
- 2025-08-08
- Estimated Expiration
- 2034-10-30
AI Technical Summary
Integrated welding of traditional semiconductor equipment exhaust mechanisms leads to non-detachable and fixed size, and overall scrapping of components when they fail, and high maintenance costs, resulting in serious waste of resources.
The three-way pipe fitting design is adopted, combined with elastic seals and flange structure, allowing the disassembly and installation and maintenance of the connecting mechanism, left pipelines and right pipelines, and the exhaust port orientation can be rotated and adjusted, and the connection gap is filled through elastic seals to adapt to temperature and air pressure changes.
It realizes convenient installation and maintenance, reduces maintenance costs, reduces resource waste, improves airtightness and stability, and prevents harmful gas leakage.
Smart Images
Figure CN223203938U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor equipment exhaust, in particular to a semiconductor equipment exhaust mechanism which is convenient to install and maintain. Background Art
[0002] The exhaust system of semiconductor equipment refers to the system used to remove excess gases or contaminants from the equipment and process environment during the semiconductor manufacturing process. These gases may include volatile organic compounds (VOCs), water vapor, reaction byproducts, etc. The effective operation of the exhaust system can ensure the cleanliness of the production environment and avoid affecting the quality and performance of semiconductor materials. The exhaust system is usually composed of pumps, pipes, valves, and control systems. By extracting and filtering gases, it ensures that the equipment maintains a low pressure or vacuum state, thereby improving process efficiency and product yield. In addition, the exhaust system also needs to consider safety to prevent the leakage or accumulation of harmful gases and ensure the safety and stability of the production environment.
[0003] In semiconductor manufacturing, the design of the exhaust mechanism significantly impacts equipment performance and maintenance. Traditional exhaust mechanisms are typically welded together, making them non-detachable and dimensionally fixed. While this design provides structural stability during initial installation, it also presents numerous inconveniences. If a component deviates or malfunctions during production, installers may face significant challenges due to the complex disassembly and replacement of the entire mechanism. Furthermore, due to the integrated structure, any failure of a single component may necessitate the entire exhaust mechanism being scrapped, resulting in high repair costs and wasted resources.
[0004] Based on this, we propose a semiconductor equipment exhaust mechanism that is easy to install and maintain to solve the above-mentioned problems. Utility Model Content
[0005] The purpose of this section is to summarize some aspects of the embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and in the abstract and title of the present invention to avoid obscuring the purpose of this section, the abstract and the title of the utility model, and such simplifications or omissions shall not be used to limit the scope of the present invention.
[0006] Therefore, the purpose of the present invention is to provide a semiconductor equipment exhaust mechanism that is easy to install and maintain, which can solve the problems of non-disassembly, fixed size, and high maintenance cost and resource waste caused by the integral welding of traditional exhaust mechanisms and the overall scrapping when components fail.
[0007] To solve the above technical problems, the present invention provides an exhaust mechanism for semiconductor equipment that is easy to install and maintain, and adopts the following technical solution: comprising a connecting mechanism, the connecting mechanism comprising a three-way pipe fitting, an exhaust pipe being installed on one side of the three-way pipe fitting, one end of the three-way pipe fitting being connected to a left pipeline, and the end of the three-way pipe fitting away from the left pipeline being connected to a right pipeline, and elastic sealing members being respectively provided between the three-way pipe fitting and the left pipeline and the right pipeline;
[0008] The elastic seal includes two groups of rubber shells, an annular rubber plate is arranged between the two groups of rubber shells, and the inner sides of the two groups of rubber shells are opened with telescopic adjustment grooves, which match the structure of the annular rubber plate. Several groups of compression springs distributed in a circumferential array are also connected between the telescopic adjustment grooves and the annular rubber plate.
[0009] Optionally, the left pipeline and the right pipeline have the same structure, and are both composed of a first exhaust branch pipe and a second exhaust branch pipe, and the second exhaust branch pipe is connected to the top of one end of the first exhaust branch pipe.
[0010] Optionally, a first connecting flange is installed at one end of the first exhaust branch pipe away from the second exhaust branch pipe, and air intake mounting flanges are respectively provided at both ends of the second exhaust branch pipe.
[0011] Optionally, a second connecting flange is provided on both sides of the three-way pipe fitting, and an exhaust mounting flange is installed at one end of the exhaust pipe away from the three-way pipe fitting.
[0012] Optionally, the second connecting flange has the same structure as the first connecting flange, and a plurality of flange holes distributed in a circumferential array are provided around the outer side of the second connecting flange. An annular sealing groove is also provided on the inner side of the second connecting flange near the flange holes.
[0013] Optionally, the annular sealing groove matches the rubber shell structure, and there is a transition fit between the annular sealing groove and the rubber shell.
[0014] In summary, the present invention has at least one of the following beneficial effects:
[0015] 1. The exhaust mechanism of the semiconductor equipment designed in this scheme is mainly composed of a connecting mechanism, a left pipeline and a right pipeline. The design adopts a first connecting flange installed at one end of the first exhaust branch pipe, and a second connecting flange is set on both sides of the three-way pipe fitting. The second connecting flange has the same structure as the first connecting flange, and both include flange holes and annular sealing grooves. Therefore, the connecting mechanism, the left pipeline and the right pipeline can be easily disassembled, connected and maintained according to actual usage. At the same time, the exhaust mechanism can also rotate and adjust the installation angle of the connecting mechanism, thereby realizing the change and adjustment of the exhaust port orientation of the exhaust pipe.
[0016] 2. This solution installs an elastic seal between the three-way pipe fitting and the left and right pipelines. The elastic seal is mainly composed of two sets of rubber shells and annular rubber plates, and multiple sets of compression springs are arranged between them. This design ensures that the three-way pipe fitting, the left pipeline and the right pipeline can be adaptively adjusted when connected, effectively filling the connection gap between them, thereby preventing the leakage of volatile organic compounds (VOCs), water vapor and reaction by-products. The structure of the elastic seal also allows for effective compensation for small displacements caused by temperature or air pressure changes during the operation of the semiconductor equipment, further enhancing the airtightness and stability of the connection between the three-way pipe fitting and the left and right pipelines. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;
[0019] Figure 2 This is a schematic diagram of the connecting mechanism structure of the utility model;
[0020] Figure 3 This is a schematic diagram of the elastic sealing structure of the utility model;
[0021] Figure 4 This is a schematic plan view of the elastic sealing element of the present invention;
[0022] Figure 5 This is a schematic diagram of the left pipeline structure of the present utility model;
[0023] Figure 6 This is a schematic diagram of the annular sealing groove structure of the present utility model.
[0024] Explanation of the accompanying symbols: 1. Connecting mechanism; 2. Three-way pipe fitting; 3. Exhaust pipe; 4. Left pipeline; 5. Right pipeline; 6. Elastic seal; 7. Rubber shell; 8. Annular rubber plate; 9. Telescopic adjustment groove; 10. Compression spring; 11. First exhaust branch pipe; 12. Second exhaust branch pipe; 13. First connecting flange; 14. Inlet mounting flange; 15. Second connecting flange; 16. Exhaust mounting flange; 17. Flange hole; 18. Annular sealing groove. DETAILED DESCRIPTION
[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0026] Example: Refer to Figures 1 to 6 The utility model provides an embodiment of a semiconductor equipment exhaust mechanism that is easy to install and maintain, including a connecting mechanism 1, the connecting mechanism 1 includes a three-way pipe fitting 2, an exhaust pipe 3 is installed on one side of the three-way pipe fitting 2, one end of the three-way pipe fitting 2 is connected to a left pipeline 4, and the end of the three-way pipe fitting 2 away from the left pipeline 4 is connected to a right pipeline 5. Elastic seals 6 are also provided between the three-way pipe fitting 2 and the left pipeline 4 and the right pipeline 5 respectively. The elastic seal 6 includes two groups of rubber shells 7, an annular rubber plate 8 is provided between the two groups of rubber shells 7, and the inner sides of the two groups of rubber shells 7 are open. A telescopic adjustment groove 9 is provided, which matches the structure of the annular rubber plate 8. Several groups of compression springs 10 distributed in a circumferential array are also connected between the telescopic adjustment groove 9 and the annular rubber plate 8. Through the combined use of the first connecting flange 13 and the second connecting flange 15, the exhaust mechanism can disassemble, connect, repair and replace the connecting mechanism 1, the left pipeline 4 and the right pipeline 5 according to the usage. The installation angle of the connecting mechanism 1 can also be rotated and adjusted, and the exhaust port orientation of the exhaust pipe 3 can be changed and adjusted according to the usage of the semiconductor equipment.
[0027] The left pipeline 4 and the right pipeline 5 have the same structure, and both are composed of a first exhaust branch pipe 11 and a second exhaust branch pipe 12. The second exhaust branch pipe 12 is connected to the top of one end of the first exhaust branch pipe 11. The left pipeline 4 and the right pipeline 5 have the same structure, and both are composed of the first exhaust branch pipe 11 and the second exhaust branch pipe 12 connected. They are used for the through connection between the exhaust chamber of the semiconductor equipment and the connecting mechanism 1. The first exhaust branch pipe 11 is equipped with a first connecting flange 13 at the end away from the second exhaust branch pipe 12, and the two ends of the second exhaust branch pipe 12 are respectively provided with an air intake mounting flange 14. The air intake mounting flanges 14 respectively installed at both ends of the second exhaust branch pipe 12 are used to connect and fix the air intake ports of the left pipeline 4 and the right pipeline 5 to the exhaust chamber of the semiconductor equipment. Second connecting flanges 15 are respectively provided on both sides of the three-way pipe fitting 2, and an exhaust mounting flange 16 is installed at the end of the exhaust pipe 3 away from the three-way pipe fitting 2. The exhaust mounting flange 16 installed at one end of the exhaust pipe 3 is used to connect and fix the exhaust port of the exhaust pipe 3 to the exhaust purification equipment.
[0028] The second connecting flange 15 is constructed in the same manner as the first connecting flange 13. A plurality of flange holes 17 arranged in a circumferential array are provided around the outer side of the second connecting flange 15. An annular sealing groove 18 is also provided on the inner side of the second connecting flange 15 near the flange hole 17. The second connecting flange 15 is constructed in the same manner as the first connecting flange 13, and both are composed of flange holes 17 and annular sealing grooves 18, so that the exhaust mechanism can disassemble, connect, repair, and replace the connecting mechanism 1, the left pipeline 4, and the right pipeline 5 according to the usage. At the same time, the exhaust mechanism can also perform the operation of connecting the connecting mechanism. 1 can be rotated and adjusted, the annular sealing groove 18 matches the structure of the rubber shell 7, and there is a transition fit between the annular sealing groove 18 and the rubber shell 7. Through the structural design of the transition fit between the annular sealing groove 18 and the rubber shell 7, it can be ensured that the three-way pipe fitting 2 and the left pipeline 4 and the right pipeline 5 can be adaptively adjusted when connected, and the gap between the three-way pipe fitting 2 and the left pipeline 4 and the right pipeline 5 can be effectively filled to prevent volatile organic compounds (VOCs), water vapor, and reaction by-products from leaking from the gap between the three.
[0029] Working principle: The exhaust mechanism of the semiconductor equipment designed in this scheme is mainly composed of a connecting mechanism 1, a left pipeline 4 and a right pipeline 5. Through the first connecting flange 13 installed at one end of the first exhaust branch pipe 11, and the second connecting flanges 15 installed on both sides of the three-way pipe fitting 2, since the second connecting flange 15 has the same structure as the first connecting flange 13, both are composed of a flange hole 17 and an annular sealing groove 18, the exhaust mechanism can disassemble, connect, repair and replace the connecting mechanism 1, the left pipeline 4 and the right pipeline 5 according to the usage. At the same time, the exhaust mechanism can also rotate and adjust the installation angle of the connecting mechanism 1, thereby realizing the change and adjustment of the exhaust port orientation of the exhaust pipe 3.
[0030] This solution installs an elastic seal 6 at the connection between the three-way pipe fitting 2 and the left pipeline 4 and the right pipeline 5. The elastic seal 6 is composed of two sets of rubber shells 7 and an annular rubber plate 8, and multiple sets of compression springs 10 are connected between the two sets of rubber shells 7 and the annular rubber plate 8. This design ensures that the three-way pipe fitting 2 and the left pipeline 4 and the right pipeline 5 can be adaptively adjusted when connected, and can effectively fill the gap between the three-way pipe fitting 2 and the left pipeline 4 and the right pipeline 5 to prevent volatile organic compounds (VOCs), water vapor, and reaction by-products from leaking from the gap between the three, thereby improving the sealing performance of the entire equipment. At the same time, the structure of the elastic seal 6 also allows the slight displacement of the connection gap between the three due to temperature changes or air pressure changes during the operation of the semiconductor equipment to be effectively compensated, further enhancing the airtightness and stability of the connection between the three-way pipe fitting 2 and the left pipeline 4 and the right pipeline 5.
[0031] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. A semiconductor equipment exhaust mechanism that is easy to install and maintain, comprising a connecting mechanism (1), wherein the connecting mechanism (1) comprises a three-way pipe fitting (2), and is characterized in that: An exhaust pipe (3) is installed on one side of the three-way pipe fitting (2), one end of the three-way pipe fitting (2) is connected to a left pipeline (4), and the end of the three-way pipe fitting (2) away from the left pipeline (4) is connected to a right pipeline (5), and elastic sealing members (6) are respectively provided between the three-way pipe fitting (2) and the left pipeline (4) and the right pipeline (5); The elastic sealing member (6) comprises two groups of rubber shells (7), an annular rubber plate (8) is provided between the two groups of rubber shells (7), and a telescopic adjustment groove (9) is provided on the inner side of the two groups of rubber shells (7), the telescopic adjustment groove (9) matches the structure of the annular rubber plate (8), and a plurality of groups of compression springs (10) distributed in a circumferential array are further connected between the telescopic adjustment groove (9) and the annular rubber plate (8).
2. The semiconductor equipment exhaust mechanism that is easy to install and maintain according to claim 1, characterized in that: The left pipeline (4) and the right pipeline (5) have the same structure, and are both composed of a first exhaust branch pipe (11) and a second exhaust branch pipe (12), wherein the second exhaust branch pipe (12) is connected to the top of one end of the first exhaust branch pipe (11).
3. The semiconductor equipment exhaust mechanism that is easy to install and maintain according to claim 2, characterized in that: A first connecting flange (13) is installed at one end of the first exhaust branch pipe (11) away from the second exhaust branch pipe (12), and intake mounting flanges (14) are respectively provided at both ends of the second exhaust branch pipe (12).
4. The semiconductor equipment exhaust mechanism that is easy to install and maintain according to claim 1, characterized in that: Second connecting flanges (15) are respectively provided on both sides of the three-way pipe fitting (2), and an exhaust mounting flange (16) is installed at one end of the exhaust pipe (3) away from the three-way pipe fitting (2).
5. The semiconductor equipment exhaust mechanism that is easy to install and maintain according to claim 4, characterized in that: The second connecting flange (15) has the same structure as the first connecting flange (13). A plurality of flange holes (17) distributed in a circumferential array are provided around the outer side of the second connecting flange (15). An annular sealing groove (18) is also provided on the inner side of the second connecting flange (15) near the flange hole (17).
6. The semiconductor equipment exhaust mechanism that is easy to install and maintain according to claim 5, characterized in that: The annular sealing groove (18) matches the structure of the rubber housing (7), and there is a transition fit between the annular sealing groove (18) and the rubber housing (7).