Device for detecting content of sodium persulfate in copper dissolving liquid and water electroplating device

Abstract

The utility model relates to a device for detecting the content of sodium persulfate in copper dissolving liquid and a water electroplating device, and the detection device comprises a detection container, a silver ion selection electrode, a controller and a copper ion concentration detection component, the first conveying part is used for conveying copper dissolving liquid, the second conveying part is used for conveying silver nitrate standard liquid, the third conveying part is used for conveying potassium iodide standard liquid, at least the silver ion selection electrode and the second conveying part are electrically connected with the controller, and the silver ion selection electrode is arranged in the detection container and used for detecting silver ions in the detection container. The silver ion selection electrode transmits a detection signal to the controller, and the controller is used for controlling starting and stopping of the second conveying part according to the received signal; the measuring method is simple and reliable, the content of the sodium persulfate in the copper dissolving liquid can be effectively detected, the concentration of the sodium persulfate in the copper dissolving tank in the water electroplating device can be monitored in real time, the sodium persulfate is supplemented into the copper dissolving tank in time, and the copper dissolving capacity of the copper dissolving liquid in the copper dissolving tank is guaranteed.

Description

Technical Field

[0001] The utility model belongs to the technical field of electroplating equipment, and particularly relates to a device for detecting the content of sodium persulfate in a copper solution and a water electroplating device. Background Art

[0002] In the prior art, when a water electroplating device uses a conductive clamp to clamp a thin film for electroplating, the conductive clamp will inevitably come into contact with the plating solution, which will cause metal ions in the plating solution to deposit on the surface of the conductive clamp, eventually forming larger raised particles or copper thorns, which will scratch or puncture the electroplated film, affecting the final product quality.

[0003] Existing methods for dissolving copper deposited on a conductive clip typically utilize a sodium persulfate solution to dissolve the deposited copper. During the copper dissolution process, the amount of sodium persulfate in the copper dissolving tank is continuously consumed, resulting in the sodium persulfate content in the copper dissolving solution being a dynamically changing parameter. To prevent the sodium persulfate content in the copper dissolving solution from being too low due to the continuous consumption of sodium persulfate in the copper dissolving reaction, thereby affecting the copper dissolving effect, it is necessary to continuously monitor the sodium persulfate content.

[0004] In summary, there is an urgent need to provide a sodium persulfate content detection device and a water electroplating device that have a simple and reliable measurement method and can effectively detect and monitor the sodium persulfate content in a copper solution. Utility Model Content

[0005] The utility model aims to provide a sodium persulfate content detection device and a water electroplating device, which have a simple and reliable measurement method and can effectively detect and monitor the sodium persulfate content in a copper solution.

[0006] The above object is achieved through the following technical solution: a device for detecting the sodium persulfate content in a copper solution, comprising a detection container, a silver ion selective electrode, a controller, a copper ion concentration detection component, and a first conveying member for conveying the copper solution to the detection container and the copper ion concentration detection component and capable of measuring the conveying amount, a second conveying member for conveying a silver nitrate standard solution to the detection container and capable of measuring the conveying amount, and a third conveying member for conveying a potassium iodide standard solution to the detection container and capable of measuring the conveying amount, at least the silver ion selective electrode and the second conveying member are electrically connected to the controller, the silver ion selective electrode is arranged in the detection container and is used to detect silver ions in the detection container, the silver ion selective electrode transmits a detection signal to the controller, and the controller is used to control the start and stop of the second conveying member according to the received signal.

[0007] The utility model is used for detecting the content of sodium persulfate in a copper solution. In actual application, a first conveying member first conveys the copper solution to a copper ion concentration detection component to detect the molar concentration (C3) of the copper solution; the first conveying member conveys the copper solution to a detection container and measures the volume (V0) of the conveyed copper solution; the third conveying member conveys an excess potassium iodide standard solution (with a molar concentration of C1) to the detection container and measures the volume (V1) of the conveyed potassium iodide standard solution; the oxidizing property of sodium persulfate is utilized to react with potassium iodide, so that the potassium iodide is oxidized to generate elemental iodine, and copper ions also react with the potassium iodide; after the reaction is completed, the excess iodide ions are titrated with a silver nitrate solution to control the content of the copper solution; the copper ... ions; the copper ions are titrated with a silver nitrate solution to control the content of the copper ions; the copper ions are titrated with a silver nitrate solution to control the content of the copper ions; the copper ions are titrated with a silver nitrate solution to control the content of the copper ions; the copper ions are titrated with a silver nitrate solution to control the content of the copper ions; the copper ions are The controller controls the second conveyor to convey the silver nitrate standard solution (with a molar concentration of C2) to the detection container for titration, and uses the silver ion selective electrode as an indicator electrode to determine the titration end point. The specific process is as follows: the second conveyor conveys the silver nitrate standard solution to the detection container and drips the silver nitrate standard solution. The silver nitrate reacts with potassium iodide to generate a silver iodide precipitate. When the potassium iodide in the detection container is completely reacted, the silver nitrate standard solution continues to drip, and the silver nitrate will not be reacted. The silver ion selective electrode will immediately detect the silver ions and transmit the signal to the controller. The controller controls the second conveyor to stop dripping the silver nitrate standard solution. The second conveyor records and measures the delivery volume (V2) of the silver nitrate standard solution this time.

[0008] The chemical reactions involved in this detection process are as follows:

[0009] 2Cu2++4I-=2CuI↓+I2

[0010] Na2S2O8+2KI=K2SO4+Na2SO4+I2

[0011] AgNO3+KI=AgI↓+KNO3

[0012] The calculation formula for the molar concentration (C4) of sodium persulfate in the copper solution is as follows:

[0013] C4=[C1*V1-(C2*V2+C3*2*V0)] / (2*V0)

[0014] Wherein, V0 is the volume (L) of the copper solution extracted into the detection tank; C1 is the molar concentration (mol / L) of potassium iodide in the potassium iodide standard solution; V1 is the volume (L) of the potassium iodide solution added to the detection container; C2 is the molar concentration (mol / L) of silver nitrate in the silver nitrate standard solution; V2 is the volume (L) of the silver nitrate standard solution added to the detection container; C3 is the molar concentration (mol / L) of copper ions contained in the copper solution; C4 is the molar concentration (mol / L) of sodium persulfate in the copper solution.

[0015] A further technical solution is that the first conveying member includes a first conveying pipe and a first metering pump, the second conveying member includes a second conveying pipe and a second metering pump, and the third conveying member includes a third conveying pipe and a third metering pump. The first metering pump, the second metering pump, the third metering pump and the copper ion concentration detection component are communicatively connected to the controller and transmit the metering detection results to the controller. The controller calculates the sodium persulfate content in the copper solution after performing data processing based on the received data signal.

[0016] During the application process, the molar concentration of potassium iodide in the potassium iodide standard solution and the molar concentration of silver nitrate in the silver nitrate standard solution are first input into the controller, and the controller can directly calculate the sodium persulfate content in the copper solution based on the above information.

[0017] A further technical solution is that the second metering pump is a peristaltic pump. The use of a peristaltic pump facilitates control of the calibration endpoint and results in more accurate results.

[0018] Further technical scheme is, described copper ion concentration detection member includes cuvette, laser transmitter and photoelectric sensor, described cuvette is used for depositing copper molten solution, described laser transmitter is used for radiating the laser of predetermined intensity through described cuvette, described photoelectric sensor is connected for detecting the laser intensity after through described cuvette, described photoelectric sensor is connected with described controller communication and described detection signal is delivered to described controller, described controller calculates the amount concentration of copper ion substance of described copper molten solution according to the detection signal received.Like this, copper molten solution is passed into cuvette, the certain laser of emission intensity of laser transmitter can be because of the characteristic absorption of copper ion and intensity attenuation occurs after through cuvette, and its attenuation amount and the concentration of copper ion are positively correlated.Receiving and detecting laser intensity signal is sent to controller by photoelectric sensor, controller is used for calculating sodium persulfate content in copper molten solution after calculating the concentration of copper ion according to attenuation degree.

[0019] A further technical solution is that a liquid level sensor for detecting the liquid level is provided in the detection container, the liquid level sensor is communicatively connected to the controller and is used to transmit a detection signal to the controller, and a drain valve is provided at the bottom of the detection container.

[0020] The liquid level sensor is used to measure the liquid level in the detection container. When the copper solution is just input into the detection container, when the copper solution reaches the liquid level sensor page, the controller controls the first metering pump to close and stop the introduction of the copper solution; the drain valve at the bottom of the detection container is used to discharge waste liquid.

[0021] A further technical solution is that a stirrer is provided in the detection container.

[0022] A further technical solution is that a three-way valve is provided on the first delivery pipeline, and the three-way valve controls the copper solution to be input into the detection container or the copper ion concentration detection component.

[0023] A further technical solution is that the ends of the first, second, and third delivery pipes extending into the detection container are each equipped with an anti-diffusion valve plug. Generally, to prevent solution splashing, the nozzles of the first, second, and third delivery pipes are located above the liquid surface. If a metering pump measures 50 milliliters of solution, some of the 50 milliliters will remain in the pipes between the nozzles and the metering pump and will not enter the detection tank. This would cause errors if the measurement were based on 50 milliliters. Therefore, for greater accuracy, a plug with an anti-diffusion valve is provided. After the metering pump measures 50 milliliters, the solution entering the detection container is exactly 50 milliliters, resulting in more accurate measurement results.

[0024] To achieve the above-mentioned objectives, the present invention also provides a water electroplating device, comprising an electroplating mechanism, the electroplating mechanism comprising a conductive clip, the water electroplating device further comprising a storage tank for storing a sodium persulfate solution, a copper dissolving tank for dissolving copper deposited on the conductive clip using the sodium persulfate solution, and any of the above-mentioned devices for detecting the sodium persulfate content in the copper dissolving solution, wherein the storage tank is connected to the copper dissolving tank via a fourth conveying member, the fourth conveying member comprising a fourth conveying pipe and a fourth metering pump, the fourth metering pump being communicatively connected to the controller, the controller being configured to control the start and stop of the fourth metering pump, thereby controlling the replenishment of the sodium persulfate solution in the copper dissolving tank, and the copper dissolving tank being connected to the detection container and the copper ion concentration detection component via the first conveying member.

[0025] The water electroplating device of the utility model dissolves the copper deposited on the conductive clip using a sodium sulfate solution. During the dissolution process, sodium persulfate is continuously consumed. A sodium persulfate content detection device in the copper dissolving solution is used to monitor the sodium persulfate content in the copper dissolving solution in real time. When the sodium persulfate content in the copper dissolving solution is lower than a predetermined value, a controller controls the fourth metering pump to start, replenishing the sodium persulfate solution in the storage tank to the copper dissolving tank, thereby ensuring the copper dissolving capacity of the copper dissolving solution. In actual application, the online detection and replenishment process of the sodium persulfate content in the copper dissolving tank can be detected once every 30 minutes.

[0026] Compared with the prior art, the utility model uses multiple conveying parts to convey and measure potassium iodide standard solution and silver nitrate standard solution, uses a silver ion indicator electrode to monitor the indication end point, and feeds back the signal to a controller. The controller controls the stop of dropwise addition of silver nitrate at the indication end point, and uses the consumption of silver nitrate and potassium iodide standard solution to calculate the content of sodium persulfate in the copper-containing solution, thereby realizing real-time monitoring of the sodium persulfate concentration in the copper dissolving tank in the water electroplating device, and timely replenishing sodium persulfate in the copper dissolving tank to ensure the copper dissolving capacity of the copper dissolving solution in the copper dissolving tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The accompanying drawings, which constitute a part of the present invention, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation to the present invention.

[0028] Figure 1 The present invention is a flow chart of an application scenario of a device for detecting sodium persulfate content in a copper solution according to one embodiment of the present invention.

[0029] In the picture:

[0030] 1 Detection container 2 Controller 3 Silver ion selective electrode 4 Cuvette

[0031] 5 Laser emitter 6 Photoelectric sensor 7 First delivery pipeline 8 First metering pump

[0032] 9 Second delivery pipeline 10 Second metering pump 11 Third delivery pipeline 12 Third metering pump

[0033] 13 Liquid level sensor 14 Drain valve 15 Agitator 16 Storage tank

[0034] 17 Copper dissolving tank 18 Fourth delivery pipeline 19 Fourth metering pump 20 Three-way valve DETAILED DESCRIPTION

[0035] The present invention is described in detail below in conjunction with the accompanying drawings. The description in this section is merely exemplary and explanatory and should not have any limiting effect on the scope of protection of the present invention. In addition, those skilled in the art can combine the features in the embodiments and different embodiments of the present invention accordingly based on the description of this document.

[0036] The utility model embodiments are as follows, referring to Figure 1A device for detecting the content of sodium persulfate in a copper solution comprises a detection container 1, a silver ion selective electrode 3, a controller 2, a copper ion concentration detection component, and a first conveying member for conveying the copper solution to the detection container 1 and the copper ion concentration detection component and capable of measuring the conveying amount, a second conveying member for conveying a silver nitrate standard solution to the detection container 1 and capable of measuring the conveying amount, and a third conveying member for conveying a potassium iodide standard solution to the detection container 1 and capable of measuring the conveying amount. At least the silver ion selective electrode 3 and the second conveying member are electrically connected to the controller 2. The silver ion selective electrode 3 is arranged in the detection container 1 and is used to detect silver ions in the detection container 1. The silver ion selective electrode 3 transmits a detection signal to the controller 2, and the controller 2 is used to control the start and stop of the second conveying member according to the received signal.

[0037] The utility model is used to detect the content of sodium persulfate in copper solution. In actual application, Figure 1 The first conveyor first conveys the copper solution to the copper ion concentration detection component to detect the molar concentration (C3) of the copper solution; the first conveyor conveys the copper solution to the detection container 1 and measures the volume (V0) of the copper solution conveyed, and the third conveyor conveys an excess of potassium iodide standard solution (the molar concentration is C1) to the detection container 1 and measures the volume (V1) of the potassium iodide standard solution conveyed, and utilizes the oxidizing property of sodium persulfate to react with potassium iodide to oxidize potassium iodide to generate elemental iodine, and copper ions also react with potassium iodide; after the reaction is completed, the excess iodine ions are titrated with silver nitrate solution, and the controller 2 controls the second conveyor to convey the silver nitrate standard solution (the molar concentration of the substance is C2) is titrated to the detection container 1, and the silver ion selective electrode 3 is used as the indicator electrode to determine the titration end point. The specific process is: the second conveyor conveys the silver nitrate standard solution to the detection container 1 and drips the silver nitrate standard solution into the detection container 1. The silver nitrate reacts with potassium iodide to generate a silver iodide precipitate. When the potassium iodide in the detection container 1 is completely reacted, the silver nitrate standard solution is still dripping, and the silver nitrate will not be reacted. The silver ion selective electrode 3 will immediately detect the silver ions and transmit the signal to the controller 2. The controller 2 controls the second conveyor to stop dripping the silver nitrate standard solution. The second conveyor records and measures the delivery amount (V2) of the silver nitrate standard solution this time.

[0038] The chemical reactions involved in this detection process are as follows:

[0039] 2Cu2++4I-=2CuI↓+I2

[0040] Na2S2O8+2KI=K2SO4+Na2SO4+I2

[0041] AgNO3+KI=AgI↓+KNO3

[0042] The calculation formula for the molar concentration (C4) of sodium persulfate in the copper solution is as follows:

[0043] C4=[C1*V1-(C2*V2+C3*2*V0)] / (2*V0)

[0044] Wherein, V0 is the volume (L) of the copper solution extracted into the detection tank; C1 is the molar concentration (mol / L) of potassium iodide in the potassium iodide standard solution; V1 is the volume (L) of the potassium iodide solution added to the detection container 1; C2 is the molar concentration (mol / L) of silver nitrate in the silver nitrate standard solution; V2 is the volume (L) of the silver nitrate standard solution added to the detection container 1; C3 is the molar concentration (mol / L) of copper ions contained in the copper solution; C4 is the molar concentration (mol / L) of sodium persulfate in the copper solution.

[0045] On the basis of the above embodiment, in another embodiment of the present invention, Figure 1 The first conveying member includes a first conveying pipe 7 and a first metering pump 8, the second conveying member includes a second conveying pipe 9 and a second metering pump 10, and the third conveying member includes a third conveying pipe 11 and a third metering pump 12. The first metering pump 8, the second metering pump 10, the third metering pump 12 and the copper ion concentration detection component are communicatively connected to the controller 2 and transmit the metering detection results to the controller 2. The controller 2 calculates the sodium persulfate content in the copper solution after performing data processing based on the received data signal.

[0046] During the application process, the molar concentration of potassium iodide in the potassium iodide standard solution and the molar concentration of silver nitrate in the silver nitrate standard solution are first input into the controller 2, and the controller 2 can directly calculate the sodium persulfate content in the copper solution based on the above information.

[0047] Based on the above embodiment, in another embodiment of the present invention, the second metering pump 10 is a peristaltic pump. The use of a peristaltic pump facilitates the control of the calibration endpoint and results in a more accurate result.

[0048] On the basis of the above embodiment, in another embodiment of the present invention, as Figure 1, described copper ion concentration detecting member comprises cuvette 4, laser emitter 5 and photoelectric sensor 6, described cuvette 4 is used for depositing copper molten solution, described laser emitter 5 is used for radiating the laser of predetermined intensity through described cuvette 4, described photoelectric sensor 6 is connected for detecting the laser intensity after through described cuvette 4, described photoelectric sensor 6 is connected with described controller 2 communication and described detection signal is delivered to described controller 2, described controller 2 calculates the amount concentration of copper ion substance of described copper molten solution according to the detection signal received.Like this, copper molten solution is passed into cuvette 4, the certain laser of the emission intensity of laser emitter 5 can be because of the characteristic absorption of copper ion and intensity attenuation occurs after the cuvette 4, and its attenuation amount and the concentration of copper ion are positively correlated.Receiving and detecting laser intensity signal by photoelectric sensor 6 is sent to controller 2, controller 2 is used to calculate sodium persulfate content in copper molten solution after calculating the concentration of copper ion according to attenuation degree.

[0049] On the basis of the above embodiment, in another embodiment of the present invention, as Figure 1 The detection container 1 is provided with a liquid level sensor 13 for detecting the liquid level. The liquid level sensor 13 is in communication with the controller 2 and is used to transmit a detection signal to the controller 2. A drain valve 14 is provided at the bottom of the detection container 1. The liquid level sensor 13 is used to measure the liquid level in the detection container 1. When the copper solution is just added to the detection container 1, when the copper solution reaches the liquid level of the liquid level sensor 13, the controller 2 controls the first metering pump 8 to close, stopping the introduction of the copper solution. The drain valve 14 at the bottom of the detection container 1 is used to discharge waste liquid.

[0050] On the basis of the above embodiment, in another embodiment of the present invention, as Figure 1 The detection container 1 is provided with a stirrer 15.

[0051] On the basis of the above embodiment, in another embodiment of the present invention, as Figure 1 A three-way valve 20 is provided on the first delivery pipeline 7, and the three-way valve 20 controls the copper solution to be input into the detection container 1 or the copper ion concentration detection component.

[0052] Based on the above embodiment, in another embodiment of the present invention, the ends of the first delivery pipe 7, the second delivery pipe 9, and the third delivery pipe 11 extending into the detection container 1 are all provided with stoppers with anti-diffusion valves. Generally, in order to avoid splashing of the solution, the nozzles of the first delivery pipe 7, the second delivery pipe 9, and the third delivery pipe 11 are located in the liquid surface. If the metering pump measures 50 ml of solution, part of the 50 ml of solution will remain in the pipe between the nozzle and the metering pump and will not enter the detection tank. If the calculation is based on 50 ml, it will cause errors. Therefore, in order to be more accurate, a stopper with an anti-diffusion valve is provided. After the metering pump measures 50 ml, the solution entering the detection container 1 is exactly 50 ml, and the measurement result is more accurate.

[0053] The present invention also provides a water electroplating device, the embodiment of which is as follows: comprising an electroplating mechanism (not shown in the figure), the electroplating mechanism comprising a conductive clip, such as Figure 1 The water electroplating device also includes a storage tank 16 for storing sodium persulfate solution, a copper dissolving tank 17 for dissolving copper deposited on the conductive clip using the sodium persulfate solution, and any of the above-mentioned devices for detecting the sodium persulfate content in the copper dissolving solution. The storage tank 16 is connected to the copper dissolving tank 17 through a fourth conveying member. The fourth conveying member includes a fourth conveying pipe 18 and a fourth metering pump 19. The fourth metering pump 19 is communicatively connected to the controller 2. The controller 2 is used to control the start and stop of the fourth metering pump 19, thereby controlling the replenishment of the sodium persulfate solution in the copper dissolving tank 17. The copper dissolving tank 17 is connected to the detection container 1 and the copper ion concentration detection component through the first conveying member.

[0054] The water electroplating device of the present invention dissolves the copper deposited on the conductive clip using a sodium sulfate solution. During the dissolution process, sodium persulfate is continuously consumed. A sodium persulfate content detection device for the copper-dissolving solution is used to monitor the sodium persulfate content in the copper-dissolving solution in the copper-dissolving tank 17 in real time. When the sodium persulfate content in the copper-dissolving solution is lower than a predetermined value, the controller 2 controls the fourth metering pump 19 to start, replenishing the sodium persulfate solution in the storage tank 16 into the copper-dissolving tank 17, thereby ensuring the copper-dissolving capacity of the copper-dissolving solution. In actual application, the online detection and replenishment process of the sodium persulfate content in the copper-dissolving tank 17 can be performed once every 30 minutes.

[0055] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A device for detecting the content of sodium persulfate in a copper solution, characterized in that: The invention comprises a detection container, a silver ion selective electrode, a controller, a copper ion concentration detection component, a first conveying member for conveying a copper solution to the detection container and the copper ion concentration detection component and capable of measuring the conveying amount, a second conveying member for conveying a silver nitrate standard solution to the detection container and capable of measuring the conveying amount, and a third conveying member for conveying a potassium iodide standard solution to the detection container and capable of measuring the conveying amount. At least the silver ion selective electrode and the second conveying member are electrically connected to the controller. The silver ion selective electrode is arranged in the detection container and is used to detect silver ions in the detection container. The silver ion selective electrode transmits a detection signal to the controller, and the controller is used to control the start and stop of the second conveying member according to the received signal.

2. The device for detecting the content of sodium persulfate in copper dissolving solution according to claim 1, wherein The first conveying member includes a first conveying pipe and a first metering pump, the second conveying member includes a second conveying pipe and a second metering pump, and the third conveying member includes a third conveying pipe and a third metering pump. The first metering pump, the second metering pump, the third metering pump and the copper ion concentration detection component are communicatively connected to the controller and transmit the metering detection results to the controller. The controller calculates the sodium persulfate content in the copper solution after performing data processing based on the received data signal.

3. The device for detecting the content of sodium persulfate in copper dissolving solution according to claim 2, wherein: The copper ion concentration detection component includes a cuvette, a laser emitter and a photoelectric sensor. The cuvette is used to store a copper solution. The laser emitter is used to radiate a laser of a predetermined intensity through the cuvette. The photoelectric sensor is used to detect the intensity of the laser after passing through the cuvette. The photoelectric sensor is communicatively connected to the controller and transmits the detection signal to the controller. The controller calculates the amount concentration of the copper ion substance in the copper solution based on the received detection signal.

4. The device for detecting the content of sodium persulfate in copper dissolving solution according to claim 1, wherein: A liquid level sensor for detecting the liquid level is provided in the detection container. The liquid level sensor is in communication with the controller and is used to transmit a detection signal to the controller. A drain valve is provided at the bottom of the detection container.

5. The device for detecting the content of sodium persulfate in a copper dissolving solution according to any one of claims 1 to 4, characterized in that: The detection container is provided with a stirrer.

6. The device for detecting the content of sodium persulfate in copper dissolving solution according to claim 2, wherein: A three-way valve is provided on the first delivery pipeline, and the three-way valve controls the copper solution to be input into the detection container or the copper ion concentration detection component.

7. The device for detecting the content of sodium persulfate in a copper dissolving solution according to claim 6, wherein: The ends of the first delivery pipeline, the second delivery pipeline and the third delivery pipeline extending into the detection container are all provided with anti-diffusion valve plugs.

8. A water electroplating device, comprising an electroplating mechanism, wherein the electroplating mechanism comprises a conductive clip, characterized in that: The water electroplating device also includes a storage tank for storing sodium persulfate solution, a copper dissolving tank for dissolving copper deposited on the conductive clip using the sodium persulfate solution, and a device for detecting the sodium persulfate content in the copper dissolving solution according to any one of claims 1 to 7, wherein the storage tank is connected to the copper dissolving tank via a fourth conveying member, the fourth conveying member includes a fourth conveying pipe and a fourth metering pump, the fourth metering pump is communicatively connected to the controller, the controller is used to control the start and stop of the fourth metering pump, and thereby control the replenishment of the sodium persulfate solution in the copper dissolving tank, and the copper dissolving tank is connected to the detection container and the copper ion concentration detection component via the first conveying member.

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