Probe card convenient to adjust

Abstract

The utility model discloses a probe card convenient to adjust, which relates to the field of probe cards and comprises a substrate, an adjusting screw is mounted in an inner cavity of the substrate, a mounting screw is mounted on the back of the adjusting screw, an adjusting nut is in threaded connection with the outer wall of the mounting screw, and a fastening nut is in threaded connection with the outer wall of the adjusting screw. Installation legs are symmetrically installed on the periphery of the outer wall of the base plate, an auxiliary assembly is installed on the back face of the base plate, an adaptive groove is formed in the front face of the auxiliary assembly, and an adaptive block is inserted into an inner cavity of the adaptive groove. According to the utility model, the plurality of adjusting screws, the mounting screws, the adjusting nuts and the fastening nuts are arranged in a matched manner, so that the levelness of the corresponding area on the PCB can be finely adjusted by adjusting the adjusting screws, and the leveling of the probes on the PCB is assisted, so that the leveling of the probes in different areas on the PCB can be considered; the horizontal problem of the probe on the PCB can be effectively solved, and subsequent wafer detection can be conveniently carried out.

Description

Technical Field

[0001] The utility model relates to the field of probe cards, in particular to a probe card which is easy to adjust. Background Art

[0002] Probe cards are used to test bare die. Specifically, the probes on the probe card are brought into direct contact with the pads or bumps on the chip to extract chip signals. This is then combined with peripheral test instruments and software control to achieve automated measurement. Probe cards are used before IC packaging to perform functional tests on bare die, screening out defective products before proceeding to the subsequent packaging process. Therefore, probe card testing is one of the most important processes in IC manufacturing, significantly impacting manufacturing costs.

[0003] A probe card consists of a probe card head and a PCB, which is attached to a base for secure mounting. However, the probes on the PCB can deform slightly during use, affecting the accuracy of subsequent wafer inspections. Therefore, a probe card with easy adjustment is necessary to address this issue. Utility Model Content

[0004] The main purpose of the present invention is to provide a probe card that is easy to adjust, which can effectively solve the problems in the background technology.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A probe card that is easy to adjust, comprising a base plate, an adjusting screw installed in an inner cavity of the base plate, a mounting screw installed on the back of the adjusting screw, an adjusting nut threadedly connected to the outer wall of the mounting screw, and a fastening nut threadedly connected to the outer wall of the adjusting screw;

[0007] The outer wall of the base plate is symmetrically provided with mounting legs, the back of the base plate is provided with an auxiliary component, the front of the auxiliary component is provided with an adaption groove, an adaption block is inserted into the inner cavity of the adaption groove, a card block is movably connected to the side of the adaption block, and a lifting plate is movably connected to the inner cavity of the auxiliary component.

[0008] Preferably, the number of the adjusting screws is at least sixteen, the mounting screws and the adjusting screws are both rotatably connected in the inner cavity of the base plate, the adjusting nut is fixedly connected in the inner cavity of the base plate, and the fastening nut is movably connected in the inner cavity of the base plate.

[0009] Preferably, a telescopic rod is installed on the back of the left mounting leg, and the telescopic rod is rotatably connected to the left side of the front of the auxiliary component. There are three adapter blocks, and the three adapter blocks are installed on the back of the remaining mounting legs. A card slot is opened on the side of the auxiliary component, and the inner cavity of the card slot and the adapter slot are communicated, and the card block is inserted into the inner cavity of the card slot.

[0010] Preferably, a movable groove is provided on the side of the adapting block, a fixing rod is installed in the inner cavity of the movable groove, a spring is wound around the outer wall of the fixing rod, and a limit block is installed on the side of the spring.

[0011] Preferably, the limit block is arranged in the inner cavity of the movable groove, the limit block is installed on the side of the fixed rod, the clamping block is sleeved in the inner cavity of the limit block and the fixed rod, the other end of the spring is installed in the inner cavity of the clamping block, and the back of the clamping block is inclined.

[0012] Preferably, support columns are symmetrically installed around the back of the auxiliary component, a screw rod is threadedly connected in the middle of the back of the inner cavity of the auxiliary component, a turning handle is installed on the back of the screw rod, and a lifting plate is rotatably connected to the front of the screw rod.

[0013] Beneficial effects

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. The probe card, which is easy to adjust, can fine-tune the horizontality of the probes in the corresponding areas on the PCB board by adjusting the adjusting screws, in conjunction with the provided mounting screws, adjusting nuts and fastening nuts, thereby assisting in the leveling of the PCB board. This can take into account the leveling of different areas on the PCB board, and can effectively prevent the level of the probes on the PCB board from differing too much, making it convenient to adjust and facilitate subsequent wafer inspection.

[0016] 2. The probe card, which is easy to adjust, can drive the screw to rotate by rotating the set handle, so that it can be threadedly connected to the auxiliary component. At this time, it can drive the lifting plate to move. When leveling the PCB board, its levelness can be further improved. When it is subsequently transferred to another position, it can also provide support for it, and can better adapt to the leveling work of PCB boards of various sizes.

[0017] 3. The probe card, which is easy to adjust, can always bounce the card block outward through the provided spring, so that the card block can be inserted into the inner cavity of the card slot. In this way, the mounting legs can be installed on the front of the auxiliary component, which can cover the PCB board when leveling it. By pressing the provided card block, the adapter block can be separated from the inner cavity of the adapter slot, making it convenient to take and place the PCB board. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural diagram of the front side of the utility model;

[0019] Figure 2 This is a schematic diagram of the structure of the adjusting screw of the utility model;

[0020] Figure 3 It is a structural diagram of the auxiliary component of the utility model;

[0021] Figure 4 It is a structural schematic diagram of the mounting legs of the utility model.

[0022] In the figure: 1. Base plate; 2. Adjusting screw; 3. Mounting screw; 4. Adjusting nut; 5. Fastening nut; 6. Mounting leg; 7. Adapter block; 8. Movable slot; 9. Fixing rod; 10. Spring; 11. Limit block; 12. Clamping block; 13. Auxiliary component; 14. Support column; 15. Clamping slot; 16. Adapter slot; 17. Lifting plate; 18. Screw; 19. Turn handle. DETAILED DESCRIPTION

[0023] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0024] like Figure 1 、 Figure 2 As shown, a probe card for easy adjustment includes a substrate 1, an adjusting screw 2 is installed in the inner cavity of the substrate 1, a mounting screw 3 is installed on the back of the adjusting screw 2, an adjusting nut 4 is threadedly connected to the outer wall of the mounting screw 3, and a fastening nut 5 is threadedly connected to the outer wall of the adjusting screw 2. There are at least sixteen adjusting screws 2, the mounting screw 3 and the adjusting screw 2 are both rotatably connected to the inner cavity of the substrate 1, the adjusting nut 4 is fixedly connected to the inner cavity of the substrate 1, and the fastening nut 5 is movably connected to the inner cavity of the substrate 1;

[0025] By setting up multiple adjustment screws 2, in conjunction with the set mounting screws 3, adjustment nuts 4 and fastening nuts 5, the horizontality of the corresponding area on the PCB board can be fine-tuned by adjusting the adjustment screws 2, thereby assisting in the leveling of the PCB board. In this way, the leveling of different areas on the PCB board can be taken into account, which can be effectively used to prevent the PCB board from deformation and facilitate subsequent wafer inspection.

[0026] like Figure 1 、 Figure 3 、 Figure 4As shown, a probe card that is easy to adjust, with mounting legs 6 symmetrically installed around the outer wall of the substrate 1, an auxiliary component 13 installed on the back of the substrate 1, an adapter slot 16 provided on the front of the auxiliary component 13, an adapter block 7 inserted in the inner cavity of the adapter slot 16, a card block 12 movably connected to the side of the adapter block 7, a lifting plate 17 movably connected to the inner cavity of the auxiliary component 13, a telescopic rod installed on the back of the left mounting leg 6, the telescopic rod is rotatably connected to the left side of the front of the auxiliary component 13, there are three adapter blocks 7, all of which are installed on the back of the remaining mounting legs 6, a card slot 15 provided on the side of the auxiliary component 13, the card slot 15 and the inner cavity of the adapter slot 16 are communicated, and the card block 12 is inserted in the card slot 15. In the inner cavity, a movable groove 8 is provided on the side of the adapter block 7, and a fixed rod 9 is installed in the inner cavity of the movable groove 8. A spring 10 is wound on the outer wall of the fixed rod 9, and a limit block 11 is installed on the side of the spring 10. The limit block 11 is arranged in the inner cavity of the movable groove 8, and the limit block 11 is installed on the side of the fixed rod 9. The clamping block 12 is sleeved in the inner cavity of the limit block 11 and the fixed rod 9. The other end of the spring 10 is installed in the inner cavity of the clamping block 12. The back of the clamping block 12 is inclined. Support columns 14 are symmetrically installed around the back of the auxiliary component 13. A screw rod 18 is threadedly connected to the center of the back of the inner cavity of the auxiliary component 13. A turning handle 19 is installed on the back of the screw rod 18. The front of the screw rod 18 is rotatably connected to the lifting plate 17;

[0027] By rotating the provided handle 19, the screw rod 18 can be driven to rotate, so that it can be threadedly connected to the auxiliary component 13. At this time, the lifting plate 17 can be driven to move. When leveling the PCB board, its levelness can be further improved. When its position is subsequently transferred, it can also support it, and it can better adapt to PCB boards of various sizes for leveling work. The provided spring 10 can always bounce the card block 12 outward so that the card block 12 can be inserted into the inner cavity of the card slot 15. In this way, the mounting leg 6 can be installed on the front side of the auxiliary component 13. When leveling the PCB board, it can cover it. By pressing the provided card block 12, the adapter block 7 can be separated from the inner cavity of the adapter slot 16, which facilitates the taking and placing of the PCB board.

[0028] It should be noted that the utility model is a probe card that is easy to adjust. When in use, press the card block 12 into the inner cavity of the movable slot 8, move the mounting leg 6 outward, disengage the adapter block 7 from the inner cavity of the adapter slot 16, rotate the substrate 1, place the PCB board on the front of the auxiliary component 13, reset the substrate 1, install the adapter block 7 in the inner cavity of the adapter slot 16, and install the card block 12 in the inner cavity of the card slot 15. Operate the adjusting screw 2, mounting screw 3, adjusting nut 4 and fastening nut 5 to connect the PCB board and the substrate 1. After the connection is completed, rotate the handle 19 to drive the screw rod 18 to be threadedly connected with the auxiliary component 13, so that the lifting plate 17 can move forward until it fits against the outer wall of the PCB board. At this time, subsequent operations can be performed on the PCB board.

[0029] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements are intended to fall within the scope of the present invention. The scope of protection claimed in this invention is defined by the appended claims and their equivalents.

Claims

1. A probe card that is easy to adjust, comprising a substrate (1), characterized in that: An adjusting screw (2) is installed in the inner cavity of the base plate (1), a mounting screw (3) is installed on the back of the adjusting screw (2), an adjusting nut (4) is threadedly connected to the outer wall of the mounting screw (3), and a fastening nut (5) is threadedly connected to the outer wall of the adjusting screw (2); The outer wall of the base plate (1) is symmetrically provided with mounting legs (6), the back of the base plate (1) is provided with an auxiliary component (13), the front of the auxiliary component (13) is provided with an adapting groove (16), an adapting block (7) is inserted into the inner cavity of the adapting groove (16), the side of the adapting block (7) is movably connected to a clamping block (12), and the inner cavity of the auxiliary component (13) is movably connected to a lifting plate (17).

2. The probe card according to claim 1, wherein: The number of the adjusting screws (2) is at least sixteen, the mounting screws (3) and the adjusting screws (2) are both rotatably connected in the inner cavity of the base plate (1), the adjusting nut (4) is fixedly connected in the inner cavity of the base plate (1), and the fastening nut (5) is movably connected in the inner cavity of the base plate (1).

3. The easily adjustable probe card according to claim 1, characterized in that: A telescopic rod is installed on the back of the left mounting leg (6), and the telescopic rod is rotatably connected to the left side of the front of the auxiliary component (13). There are three adapter blocks (7), and the three adapter blocks (7) are installed on the back of the remaining mounting legs (6). A card slot (15) is opened on the side of the auxiliary component (13), and the inner cavity of the card slot (15) and the adapter slot (16) are connected, and the card block (12) is inserted into the inner cavity of the card slot (15).

4. The probe card according to claim 1, wherein: A movable groove (8) is provided on the side of the adapter block (7), a fixing rod (9) is installed in the inner cavity of the movable groove (8), a spring (10) is wound around the outer wall of the fixing rod (9), and a limiting block (11) is installed on the side of the spring (10).

5. The probe card according to claim 4, wherein: The limit block (11) is arranged in the inner cavity of the movable groove (8), the limit block (11) is installed on the side of the fixed rod (9), the clamping block (12) is sleeved in the inner cavity of the limit block (11) and the fixed rod (9), the other end of the spring (10) is installed in the inner cavity of the clamping block (12), and the back side of the clamping block (12) is inclined.

6. The easily adjustable probe card according to claim 1, characterized in that: Support columns (14) are symmetrically installed around the back of the auxiliary component (13), a screw rod (18) is threadedly connected in the middle of the back of the inner cavity of the auxiliary component (13), a rotating handle (19) is installed on the back of the screw rod (18), and a lifting plate (17) is rotatably connected to the front of the screw rod (18).

Images