Transmission device

Abstract

The utility model discloses a transmission device which is used for transmitting a bearing boat between a feeding area and a discharging area, the transmission device comprises a first support and a first driving mechanism, the first support comprises at least two bearing parts, the bearing parts are used for bearing the bearing boat, the at least two bearing parts are distributed around a first axis, and the first driving mechanism is used for driving the at least two bearing parts to rotate. The first driving mechanism is connected with the first support and used for driving the first support to rotate around the first axis. And under the condition that the first driving mechanism drives the first support to rotate until part of the at least two bearing parts is located in the discharging area, at least one bearing part in the other part of the bearing parts is located in the feeding area. According to the scheme, the problem that in the prior art, when a mechanical arm is adopted for conveying the wafer boat between the feeding area and the discharging area, the conveying efficiency is low can be solved.

Description

Technical Field

[0001] The utility model relates to the field of photovoltaic production equipment, in particular to a transmission device. Background Art

[0002] With the rapid development and widespread application of photovoltaic power generation technology, the installed capacity of photovoltaic equipment has continued to increase, placing higher demands on the efficiency of photovoltaic production equipment. Silicon wafers, as the core components of photovoltaic equipment, undergo multiple processing steps during their production, including cutting, cleaning, diffusion, and printing. Between these steps, silicon wafers are typically placed in wafer boats for transportation. Currently, in the silicon wafer production process, after the wafer boat is filled with silicon wafers in the loading area, a robotic arm grabs the wafer boat in the loading area and transfers it to the unloading area.

[0003] Each time the robot grabs a wafer boat from the loading area or places it in the unloading area, it must perform precise positioning to ensure accurate grasping or placement of the wafer boat. However, this process typically takes a considerable amount of time, resulting in low transfer efficiency when the robot is used to transfer wafer boats between the loading and unloading areas. Utility Model Content

[0004] The utility model discloses a transmission device to solve the problem of low transmission efficiency when a manipulator is used to transmit a wafer boat between a loading area and a unloading area in the related art.

[0005] In order to solve the above technical problems, the utility model is achieved as follows:

[0006] The present application discloses a transmission device for transmitting a carrying boat between a loading area and a unloading area, wherein the transmission device includes a first bracket and a first driving mechanism, wherein:

[0007] The first bracket includes at least two bearing parts, the bearing parts are used to bear the carrying boat, the at least two bearing parts are distributed around a first axis, and the first driving mechanism is connected to the first bracket, and is used to drive the first bracket to rotate around the first axis;

[0008] When the first driving mechanism drives the first bracket to rotate until some of the at least two bearing parts are located in the unloading area, at least one of the other bearing parts is located in the loading area.

[0009] The technical solution adopted by the utility model can achieve the following technical effects:

[0010] The transmission device disclosed in the embodiment of the present application is configured to include at least two bearing parts, and the two bearing parts are distributed around a first axis, so that the first driving mechanism can drive the first bracket to rotate around the first axis, so that when the first driving mechanism drives the first bracket to rotate until some of the at least two bearing parts are located in the unloading area, at least one of the other bearing parts is located in the loading area. At this time, the bearing part located in the unloading area and the bearing part located in the loading area can perform unloading and loading operations at the same time, thereby avoiding the situation where one of the unloading and loading operations can be completed before the other is performed, thereby saving the time occupied by the loading operation, and thus improving the efficiency of the transmission device in transmitting the carrier boat. After the unloading and loading operations are completed, the switching of the bearing part between the loading area and the unloading area can be achieved by simply driving the first bracket to rotate around the first axis, eliminating the time occupied by grabbing and placing the carrier boat when using a robot to transmit the carrier boat, thereby facilitating improving the efficiency of the transmission device in transmitting the carrier boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is a schematic structural diagram of the first bracket and the first driving mechanism disclosed in an embodiment of the present utility model;

[0012] Figure 2 for Figure 1 Schematic diagram in first person perspective;

[0013] Figure 3 for Figure 1 Schematic diagram from the second perspective;

[0014] Figure 4 A partially enlarged schematic diagram of a transmission device disclosed in an embodiment of the present utility model;

[0015] Figure 5 Schematic diagram of the cooperation between the first limiting post and the first limiting notch or the second limiting post and the second limiting notch disclosed in the embodiment of the present utility model;

[0016] Figure 6 A schematic diagram of a transmission device according to an embodiment of the present utility model carrying a carrying boat;

[0017] Figure 7 for Figure 6 Schematic diagram from another perspective;

[0018] Figure 8 This is a schematic structural diagram of the second driving mechanism disclosed in an embodiment of the present utility model;

[0019] Figure 9 This is an axonometric view of the second driving mechanism disclosed in an embodiment of the present utility model;

[0020] Figure 10 Schematic diagram of a carrier boat for transporting wafers according to an embodiment of the present invention, wherein A2 represents a wafer boat;

[0021] Figure 11 This is a structural diagram of the platform disclosed in an embodiment of the present utility model without lifting the boat bracket;

[0022] Figure 12 This is a structural schematic diagram of the platform supporting the boat bracket disclosed in an embodiment of the present utility model.

[0023] Description of reference numerals:

[0024] A-carrying boat, A1-boat bracket, A11-first limiting notch, A12-second limiting notch, A2-crystal boat,

[0025] 100-first bracket, 101-avoidance space, 110-bearing part, 111-support arm, 120-second limiting column, 121-second guide slope, 130-second suction cup,

[0026] 200-first driving mechanism,

[0027] 300-second drive mechanism, 310-rotation and lifting module, 311-lifting drive member, 312-first fixed frame, 313-rotation drive member, 314-guide telescopic member, 315-second fixed frame, 320-carrying platform, 321-carrying platform body, 321a-avoidance hole, 322-first limiting column, 322a-first guide slope, 323-first suction cup, 324-adapter,

[0028] 400 - base, 500 - first in-position sensor, 600 - second in-position sensor. DETAILED DESCRIPTION

[0029] To make the objectives, technical solutions, and advantages of the present invention more clearly apparent, the following will provide a clear and complete description of the technical solutions of the present invention in conjunction with specific embodiments of the present invention and the corresponding drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without inventive effort are also within the scope of protection of the present invention.

[0030] The technical solutions disclosed in various embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0031] Please refer to Figures 1 to 12 , an embodiment of the present utility model discloses a transmission device, which is used to transmit a carrying boat A between a loading area and a unloading area.

[0032] The transmission device includes a first bracket 100 and a first driving mechanism 200. The first bracket 100 includes at least two bearing parts 110, and the bearing parts 110 are used to bear the carrying boat A. The transmission device may include a base 400, the first bracket 100 can be rotatably arranged on the base 400 around a first axis, and the first driving mechanism 200 can be arranged on the base 400. The extension direction of the first axis can be as follows: Figure 1 For details, please refer to the vertical direction in Figure 10 , the dotted line indicated by 601 in the figure is the first axis.

[0033] It should be noted that, when the carrier boat A only includes a wafer boat, the loading area may be a location for loading the wafer boat onto the carrying portion 110 of the first bracket 100, and the unloading area may be a location for unloading the wafer boat from the carrying portion 110 of the first bracket 100. When the carrier boat A includes a boat bracket A1 and a wafer boat, the loading area may be a location for placing the boat bracket A1 on the carrying portion 110 and loading the wafer boat onto the boat bracket A1, and the unloading area may be a location for unloading the wafer boat from the boat bracket A1 or unloading the boat bracket A1 and the loaded wafer boat together.

[0034] At least two supporting portions 110 are distributed around a first axis. A first drive mechanism 200 is connected to the first bracket 100 and is configured to drive the first bracket 100 to rotate around the first axis. The first drive mechanism 200 can be a hydraulic drive mechanism, a pneumatic drive mechanism, a drive motor, or the like. The present embodiment does not limit the type of the first drive mechanism 200.

[0035] When the first drive mechanism 200 drives the first bracket 100 to rotate until some of the at least two support portions 110 are located in the unloading area, at least one of the other support portions 110 is located in the loading area. At this point, the support portion 110 located in the unloading area can perform unloading operations, i.e., unloading a wafer boat from the support portion 110, unloading a wafer boat from the boat support A1, or unloading the boat support A1 and a loaded wafer boat together. The support portion 110 located in the loading area can perform loading operations, i.e., loading a wafer boat onto the support portion 110 of the first bracket 100, or placing the boat support A1 on the support portion 110 and then loading the wafer boat onto the boat support A1. The support portions 110 located in the loading area and the support portions 110 located in the unloading area can perform loading and unloading operations simultaneously.

[0036] The transmission device disclosed in the embodiment of the present application is configured to have a first bracket 100 including at least two load-bearing parts 110, and the two load-bearing parts 110 are distributed around a first axis, so that the first driving mechanism 200 can drive the first bracket 100 to rotate around the first axis, so that when the first driving mechanism 200 drives the first bracket 100 to rotate until some of the at least two load-bearing parts 110 are located in the unloading area, at least one of the other load-bearing parts 110 is located in the loading area. At this time, the load-bearing part 110 located in the unloading area and the load-bearing part 110 located in the loading area can perform unloading and loading operations at the same time, thereby avoiding the situation where one of the unloading and loading operations can be completed before the other can be transmitted, thereby saving the time occupied by the loading operation, and thus improving the efficiency of the transmission device in transmitting the load boat A. After the unloading and loading work is completed, the load-bearing part 110 can be switched between the loading area and the unloading area by simply driving the first bracket 100 to rotate around the first axis, thereby eliminating the time taken for grabbing and placing the load-bearing boat when using a robot to transport the load-bearing boat, thereby helping to improve the efficiency of the transport device in transporting the load-bearing boat A.

[0037] Specifically, at least two bearing portions 110 can be evenly distributed around the first axis. For example, when there are two bearing portions 110, the bearing portions 110 can be distributed at 180° around the first axis. When there are three bearing portions 110, the three bearing portions 110 can be distributed at 120° around the first axis. Of course, the at least two bearing portions 110 may not be evenly distributed around the first axis. For example, there may be four bearing portions 110, two of which can be located at the first end of the first bracket 100, and the other two bearing portions 110 can be located at the second end of the first bracket 100. The first end of the first bracket 100 and the second end of the first bracket 100 are distributed opposite each other. When the two bearing portions 110 at the first end of the first bracket 100 are located in the unloading area, the two bearing portions 110 at the second end of the first bracket 100 are located in the upper area. Of course, the at least two supporting parts 110 can also be distributed in other ways. The embodiment of the present application does not impose any specific restrictions on the distribution method of the at least two supporting parts 110, as long as it can be satisfied that some of the supporting parts 110 in the at least two supporting parts 110 are located in the unloading area, and at least one of the other supporting parts 110 is located in the loading area.

[0038] In the case where the carrying boat A includes a boat bracket A1, a plurality of crystal boat mounting positions may be provided on the boat bracket A1, so that more crystal boats can be loaded or unloaded in the loading area and the unloading area each time, thereby improving the transmission efficiency. When loading a crystal boat at a crystal boat mounting position, the crystal boat mounting position needs to face a preset position. In order to be able to load crystal boats to multiple crystal boat mounting positions, the carrying boat A optionally includes a boat bracket A1, the boat bracket A1 may have multiple crystal boat mounting positions, and the bearing portion 110 may be used to bear the boat bracket A1. The transmission device may further include a second driving mechanism 300, which may be located in the loading area, and is used to drive the boat bracket A1 on the bearing portion 110 located in the loading area to lift and rotate a preset angle around the second axis, so that the crystal boat mounting position where the crystal boat needs to be loaded faces the preset position, wherein the plurality of crystal boat mounting positions are distributed around the second axis. The extension direction of the second axis may be as follows Figure 6 For details, please refer to the vertical direction in Figure 10 The dotted line indicated by 602 in the figure is the second axis, and the extension direction of the second axis can be parallel to the extension direction of the first axis.

[0039] The transmission device disclosed in the embodiment of the present application is provided with a second driving mechanism 300, so that the second driving mechanism 300 drives the boat bracket A1 on the carrying part 110 located in the loading area to rotate around the second axis at a preset angle, so that the crystal boat mounting position where the crystal boat needs to be loaded faces the preset position, so that the boat bracket A1 on the carrying part 110 located in the loading area can load multiple crystal boats, and then when the boat bracket A1 on the carrying part 110 located in the loading area is transferred to the unloading area, multiple crystal boats can be carried each time, which is beneficial to improve the transmission efficiency of the transmission device.

[0040] Specifically, the second driving mechanism 300 can be a robot. When the robot drives the boat bracket A1 on the supporting part 110 located in the loading area to rotate around the second axis at a preset angle, the robot can clamp the side wall of the boat bracket A1, and carry the boat bracket A1 up and rotate around the second axis at a preset angle.

[0041] In another embodiment, the second driving mechanism 300 may include a rotating lifting module 310 and a platform 320. The rotating lifting module 310 may be connected to the platform 320, and the supporting portion 110 may have an escape space 101. The rotating lifting module 310 may be used to drive the platform 320 into the escape space 101 to lift the boat bracket A1 on the supporting portion 110 to a preset height, and drive the platform 320 to rotate the boat bracket A1 around the second axis by a preset angle.

[0042] The transmission device disclosed in the embodiment of the present application sets the second driving mechanism 300 to a structure including a rotating lifting module 310 and a carrier 320, so that the rotating lifting module 310 drives the carrier 320 to enter the avoidance space 101, so as to lift the boat bracket A1 located on the bearing part 110 to a preset height and then drive the carrier 320 to drive the boat bracket A1 to rotate around the second axis by a preset angle. Since the rotating lifting module 310 is used to lift the boat bracket A1 located on the bearing part 110, the placement of the boat bracket A1 is more stable.

[0043] In order to make the structure of the transmission device more compact, optionally, the rotating lifting module 310 can be located below the bearing part 110 and opposite to the avoidance space 101, so that the rotating lifting module 310 only needs to drive the carrier 320 to rise to lift the boat bracket A1, and the rotating lifting module 310 is located below the bearing part 110, which is conducive to the compact structure of the transmission device.

[0044] Of course, in another embodiment, the rotating lifting module 310 can be arranged horizontally side by side with the supporting portion 110. The rotating lifting module 310 can drive the carrier 320 to move horizontally from the opening of the avoidance space 101 to the avoidance space 101, and move the carrier 320 to the bottom of the boat bracket A1. The rotating lifting module 310 uses the carrier 320 to lift the boat bracket A1 located on the supporting portion 110 to a preset height and then drives the carrier 320 to rotate the boat bracket A1 around the second axis by a preset angle. Of course, the distribution method of the rotating lifting module 310 and the supporting portion 110 can also be other methods, which will not be repeated in this embodiment of the application.

[0045] Optionally, the rotary lifting module 310 may include a first drive motor, a first cylindrical member, and a second cylindrical member threadedly connected thereto. The first drive motor may be connected to the first cylindrical member, and the second cylindrical member may be connected to the carrier 320. When the first drive motor drives the first cylindrical member to rotate relative to the second cylindrical member in a first rotational direction, the first and second cylindrical members extend as a whole. After the first and second cylindrical members extend as a whole to a predetermined length, the carrier 320 lifts the boat support A1 located on the support portion 110 to a predetermined height. When the first drive motor drives the first cylindrical member to continue rotating in the first rotational direction, the first and second cylindrical members drive the carrier 320 to rotate as a whole in the first rotational direction, thereby causing the carrier 320 to rotate the boat support A1 around the second axis by a predetermined angle. When the first drive motor drives the first cylindrical member to rotate relative to the second cylindrical member in a second rotational direction, the first and second cylindrical members shorten as a whole, causing the carrier 320 to descend below the avoidance space 101, and the boat support A1 to land on the support portion 110.

[0046] In another embodiment, the rotary lifting module 310 may include a lifting drive 311, a first fixed frame 312, and a rotary drive 313. The lifting drive 311 may be connected to the first fixed frame 312, the rotary drive 313 may be disposed on the first fixed frame 312, the rotary drive 313 may be connected to the carrier 320, the rotary drive 313 may be directly connected to the carrier 320, or the rotary drive 313 may be connected to the carrier 320 through a transmission mechanism. The lifting drive 311 is used to drive the carrier 320 to rise and fall through the first fixed frame 312, and the rotary drive 313 is used to drive the carrier 320 to rotate about the second axis. The carrier 320, the first fixed frame 312, and the lifting drive 311 are stacked and distributed in sequence.

[0047] The transmission device disclosed in the embodiment of the present application makes the structure of the rotation lifting module 310 relatively simple by configuring the rotation lifting module 310 to include a lifting drive 311, a first fixed frame 312 and a rotation driving member 313. The structure of the rotation lifting module 310 is made compact by stacking and distributing the carrier 320, the first fixed frame 312 and the lifting drive 311 in sequence, which is beneficial to the compactness of the transmission device.

[0048] To ensure more stable lifting of the platform 320 by the lifting drive 311 via the first fixed frame 312, the rotary lifting module 310 may optionally further include a guide telescopic member 314 and a second fixed frame 315. The second fixed frame 315 may be located on a side of the first fixed frame 312 facing away from the platform 320. The lifting drive 311 may be located on the second fixed frame 315 within the space enclosed by the first and second fixed frames 312, 315. The guide telescopic member 314 may be connected between the first and second fixed frames 312, 315, and may be used to guide and cooperate with the first fixed frame 312 in the direction of lifting or lowering the first fixed frame 312.

[0049] The transmission device disclosed in the embodiment of the present application is provided with a guide telescopic member 314 and a second fixed frame 315, so that the second fixed frame 315 is located on the side of the first fixed frame 312 away from the carrier 320, and the lifting drive member 311 is located on the second fixed frame 315 and is located within the space enclosed by the first fixed frame 312 and the second fixed frame 315, thereby preventing the lifting drive member 311 from occupying other space alone, thereby facilitating a compact structure of the transmission device. The guide telescopic member 314 can be connected between the first fixed frame 312 and the second fixed frame 315, and can be used to guide and cooperate with the first fixed frame 312 in the lifting direction of the first fixed frame 312, thereby making the lifting drive member 311 more stable in driving the carrier 320 to rise and fall through the first fixed frame 312.

[0050] To ensure that the boat bracket A1 can be stably placed on the carrier 320 while the carrier 320 drives the boat bracket A1 to rotate about the second axis by a preset angle, the carrier 320 can optionally include a carrier body 321 and a first limiting portion. The first limiting portion can be provided on the carrier body 321, and the boat bracket A1 can include a second limiting portion. When the carrier 320 lifts the boat bracket A1 on the supporting portion 110 to a preset height, the first limiting portion can cooperate with the second limiting portion to limit the movement of the boat bracket A1 relative to the carrier body 321. When the carrier 320 is separated from the boat bracket A1, the first limiting portion can separate from the second limiting portion.

[0051] The transmission device disclosed in the embodiment of the present application is configured to have a structure in which the carrier 320 includes a carrier body 321 and a first limiting portion, so that when the carrier 320 lifts the boat bracket A1 located on the bearing portion 110 to a preset height, the first limiting portion can cooperate with the second limiting portion to limit the movement of the boat bracket A1 relative to the carrier body 321. In this way, when the carrier 320 drives the boat bracket A1 to rotate around the second axis by a preset angle, the boat bracket A1 can be stably placed on the carrier 320 under the limiting cooperation between the first limiting portion and the second limiting portion.

[0052] It should be noted that when the platform 320 lifts the boat bracket A1 located on the carrying portion 110 to a preset height, the platform body 321 may lift the boat bracket A1 to the preset height, or another component disposed on the platform body 321 may lift the boat bracket A1 to the preset height. Restricting the movement of the boat bracket A1 relative to the platform body 321 means restricting the boat bracket A1 from translating or rotating along the platform body 321.

[0053] Specifically, the first limiting portion and the second limiting portion can be a first magnetic member and a second magnetic member, respectively. When the carrier 320 lifts the boat bracket A1 located on the carrying portion 110 to a preset height, the first magnetic member and the second magnetic member come into contact and magnetically cooperate with each other. Under the magnetic cooperation of the first and second magnetic members, the boat bracket A1 can be stably placed on the carrier 320. When the carrier 320 is separated from the boat bracket A1, the boat bracket A1 is supported on the carrying portion 110. Under the support and cooperation between the boat bracket A1 and the carrying portion 110, the first magnetic member and the second magnetic member are separated.

[0054] In another embodiment, the first limiting portion may include a first limiting post 322, which may be provided on the platform body 321 and spaced apart from the rotation center of the platform body 321. The second limiting portion may include a first limiting notch A11 formed on the boat bracket A1. When the platform 320 lifts the boat bracket A1 on the supporting portion 110 to a preset height, the first limiting post 322 may extend into the first limiting notch and come into contact with the sidewall of the first limiting notch to limit the movement of the boat bracket A1 relative to the platform body 321.

[0055] The transmission device disclosed in the embodiment of the present application sets the first limiting part to a structure including a first limiting column 322, and sets the second limiting part to a structure including a first limiting notch A11 opened on the boat bracket A1, so that the first limiting column 322 extends into the first limiting notch and contacts with the side wall of the first limiting notch A11 to limit the movement of the boat bracket A1 relative to the carrier body 321, and the structure of the first limiting column 322 and the first limiting notch A11 is also relatively simple.

[0056] In order to place the boat bracket A1 more stably on the carrier 320, optionally, there can be multiple first limiting columns 322, and multiple first limiting columns 322 can form a first limiting space. The first limiting columns 322 can have a first guide slope 322a, and the first guide slope 322a can be used to cooperate with the side wall guide of the first limiting notch A11 to move the boat bracket A1 into the first limiting space.

[0057] The transmission device disclosed in the embodiment of the present application comprises a plurality of first limiting posts 322, which define a first limiting space. This allows the boat bracket A1 to be positioned within the first limiting space defined by the plurality of first limiting posts 322, thereby enabling the boat bracket A1 to be more stably placed on the platform 320. Furthermore, the first limiting posts 322 have first guiding slopes 322a, allowing the boat bracket A1 to be accurately moved into the first limiting space under the guidance of the first guiding slopes 322a and the sidewalls of the first limiting notch A11.

[0058] To ensure a more stable placement of the boat bracket A1 on the carrier 320, the carrier 320 may optionally include a carrier body 321, a first suction cup 323, and an air extraction pipe. The first suction cup 323 may be provided on the carrier body 321, and the air extraction pipe may be connected to the first suction cup 323. When the carrier 320 lifts the boat bracket A1 on the carrying portion 110 to a predetermined height, the first suction cup 323 may secure the boat bracket A1 to the carrier body 321 under the action of the air extraction pipe.

[0059] The transmission device disclosed in the embodiment of the present application is configured to have a structure in which the carrier 320 includes a carrier body 321, a first suction cup 323 and an exhaust pipe, so that when the carrier 320 lifts the boat bracket A1 located on the carrying portion 110 to a preset height, the first suction cup 323 can generate negative pressure under the action of the exhaust pipe, thereby fixing the boat bracket A1 to the carrier body 321, thereby making the boat bracket A1 placed on the carrier 320 more stably.

[0060] In an optional embodiment, a relief hole 321a may be defined at the rotation center of the carrier body 321, there may be multiple first suction cups 323, and the carrier body 321 may be defined with an air inlet channel connected to the first suction cups 323. The air inlet of the air inlet channel may be located on the inner wall of the relief hole. The exhaust pipe may include an adapter 324, which may have multiple air outlets. The adapter 324 may extend into the relief hole, and the multiple air outlets of the adapter 324 may respectively connect to the air inlets of the air inlet channel connected to the multiple first suction cups 323. When the carrier 320 drives the boat bracket A1 to rotate about the second axis by a preset angle, the adapter 324 rotates relative to the inner wall of the relief hole 321a. When the carrier 320 drives the boat bracket A1 to rotate about the second axis to the preset angle, the multiple air outlets of the adapter 324 move to connect to the air inlet of the air inlet channel connected to the multiple first suction cups 323.

[0061] The transmission device disclosed in the embodiment of the present application utilizes a relief hole 321a formed at the rotational center of the carrier body 321, allowing the multiple air outlets of the adapter 324 of the air extraction pipe to be connected to the air inlets of the air inlet channel connected to the multiple first suction cups 323, thereby enabling air to be extracted from the multiple suction cups 323 through a single air extraction pipe. As the carrier 320 drives the boat bracket A1 to rotate about the second axis by a predetermined angle, the adapter 324 rotates relative to the inner wall of the relief hole 321a, thereby securing the adapter 324 and preventing deformation of the air extraction pipe caused by the rotation of the adapter 324.

[0062] In an optional embodiment, the carrying portion 110 may include two supporting arms 111 that are opposite to each other and spaced apart. The two supporting arms 111 may be supported on the bottom edge of the carrying boat A.

[0063] The transmission device disclosed in the embodiment of the present application is configured to have a bearing portion 110 including two supporting arms 111 that are opposite and spaced apart, so that the middle area of the two bearing portions 110 is a hollow area, thereby facilitating weight reduction of the bearing portion 110 .

[0064] Of course, the supporting portion 110 may also be a whole plate-shaped structure or other structures. The embodiment of the present application does not impose any specific limitation on the structure of the supporting portion 110 .

[0065] To ensure a more stable support of the boat bracket A1 on the support portion 110, the boat A may optionally include the boat bracket A1, the first bracket 100 may further include a third position-limiting portion, and the third position-limiting portion may be provided on the support portion 110. The boat bracket A1 may also include a fourth position-limiting portion. When the support portion 110 supports the boat A, the third position-limiting portion may cooperate with the fourth position-limiting portion to restrict movement of the boat bracket A1 along the support portion 110, thereby ensuring a more stable support of the boat bracket A1 on the support portion 110.

[0066] Specifically, the third limiting portion and the fourth limiting portion can be the third magnetic part and the fourth magnetic part respectively. When the carrying part 110 carries the carrying boat A, the third magnetic part can contact and magnetically cooperate with the fourth magnetic part. When the carrying part 110 is separated from the carrying boat A, the third magnetic part can be separated from the fourth magnetic part.

[0067] In another embodiment, the third limiting portion may include a plurality of second limiting columns 120, and the plurality of second limiting columns 120 may be spaced apart to form a second limiting space. The fourth limiting portion may include a plurality of second limiting notches A12, and the plurality of second limiting columns 120 may correspond one-to-one to the plurality of second limiting notches A12, and the second limiting columns 120 may be in limiting contact with the side walls of the second limiting notches A12 to limit the boat bracket A1 within the second limiting space.

[0068] The transmission device disclosed in the embodiment of the present application sets the third limiting part to a structure including multiple second limiting columns 120, and sets the fourth limiting part to a structure including multiple second limiting notches A12, so that when the bearing part 110 carries the bearing boat A, the multiple second limiting columns 120 can correspondingly enter the multiple second limiting notches A12, and the second limiting columns 120 are in limiting contact with the side walls of the second limiting notches A12 to limit the boat bracket A1 within the second limiting space, thereby making the boat bracket A1 more stably carried on the bearing part 110.

[0069] In order to ensure that the second limiting column 120 can accurately enter the second limiting gap A12, optionally, the second limiting column 120 can have a second guide slope 121, and the second guide slope 121 can be used to cooperate with the side wall of the second limiting gap A12 to guide the boat bracket A1 to move into the second limiting space.

[0070] The transmission device disclosed in the embodiment of the present application sets a second guide slope 121 on the second limiting column 120, so that when the second limiting column 120 enters the second limiting gap A12, it can enter the second limiting gap A12 under the guidance of the second guide slope 121 and the side wall of the second limiting gap A12, so that the boat bracket A1 can be accurately moved into the second limiting space.

[0071] Optionally, the first bracket 100 may further include a second suction cup 130 . The second suction cup 130 may be provided on the carrying portion. The second suction cup 130 may be used to fix the carrying boat A to the carrying portion 110 .

[0072] The transmission device disclosed in the embodiment of the present application is provided with a second suction cup 130 on the first bracket 100, so that when the carrying part 110 carries the carrying boat A, the second suction cup 130 can fix the carrying boat A to the carrying part 110, thereby making the carrying part 110 more stable when carrying the carrying boat A.

[0073] In order to enable the transmission device to automatically confirm whether the load-bearing part 110 supports the boat bracket A1, optionally, the transmission device may further include a first in-place sensor 500. The first in-place sensor 500 may be provided on the load-bearing part 110. The first in-place sensor 500 is used to detect whether the load-bearing part 110 supports the boat bracket A1, so that the transmission device can confirm whether the load-bearing part 110 supports the boat bracket A1 based on the detection result of the first in-place sensor 500, thereby eliminating the need to confirm whether the load-bearing part 110 supports the boat bracket A1 through human observation, thereby saving labor and improving transmission efficiency.

[0074] Optionally, the transmission device may also include a second in-place sensor 600, which may be provided on the carrier body 321. The second in-place sensor 600 is used to detect whether the carrier 320 carries the boat bracket A1, so that the transmission device can confirm whether the carrier 320 carries the boat bracket A1 based on the detection result of the second in-place sensor 600, thereby eliminating the need to confirm whether the carrier 320 carries the boat bracket A1 through human observation, thereby saving labor and improving transmission efficiency.

[0075] The above embodiments of the present invention focus on the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here.

[0076] The embodiments of the present invention are described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present invention, ordinary technicians in this field can also make many forms without departing from the scope of protection of the purpose of the present invention and the claims, all of which are within the protection of the present invention.

Claims

1. A transport device for transporting a carrying boat (A) between a loading area and a unloading area, characterized in that: The transmission device comprises a first bracket (100) and a first driving mechanism (200), wherein: The first bracket (100) comprises at least two bearing parts (110), the bearing parts (110) being used to bear the bearing boat (A), the at least two bearing parts (110) being distributed around a first axis, and the first driving mechanism (200) being connected to the first bracket (100) and being used to drive the first bracket (100) to rotate around the first axis; When the first driving mechanism (200) drives the first bracket (100) to rotate until some of the at least two bearing parts (110) are located in the unloading area, at least one of the other bearing parts (110) is located in the loading area.

2. The transmission device according to claim 1, characterized in that The carrying boat (A) comprises a boat bracket (A1), the boat bracket (A1) has a plurality of wafer boat mounting positions, and the carrying portion (110) is used to carry the boat bracket (A1); The transmission device also includes a second driving mechanism (300), which is located in the loading area and is used to drive the boat bracket (A1) located in the loading area to lift and rotate around a second axis at a preset angle, wherein the multiple crystal boat mounting positions are distributed around the second axis.

3. The transmission device according to claim 2, characterized in that The second driving mechanism (300) includes a rotating lifting module (310) and a carrier (320), wherein the rotating lifting module (310) is connected to the carrier (320), and the supporting portion (110) has an avoidance space (101). The rotating lifting module (310) is used to drive the carrier (320) into the avoidance space (101) to lift the boat bracket (A1) located on the supporting portion (110) to a preset height, and drive the carrier (320) to drive the boat bracket (A1) to rotate around the second axis by a preset angle.

4. The transmission device according to claim 3, characterized in that The rotating lifting module (310) is located below the carrying portion (110) and is opposite to the avoidance space (101).

5. The transmission device according to claim 3, characterized in that The rotary lifting module (310) includes a lifting drive member (311), a first fixed frame (312) and a rotating drive member (313), wherein the lifting drive member (311) is connected to the first fixed frame (312), and the rotating drive member (313) is arranged on the first fixed frame (312) and connected to the carrier (320), wherein the lifting drive member (311) is used to drive the carrier (320) to lift and lower via the first fixed frame (312), and the rotating drive member (313) is used to drive the carrier (320) to rotate around the second axis, and the carrier (320), the first fixed frame (312) and the lifting drive member (311) are stacked and distributed in sequence.

6. The transmission device according to claim 5, characterized in that The rotary lifting module (310) further includes a guiding telescopic member (314) and a second fixed frame (315), wherein the second fixed frame (315) is arranged on a side of the first fixed frame (312) away from the carrier (320), and the lifting drive member (311) is arranged on the second fixed frame (315) and is located in a space enclosed by the first fixed frame (312) and the second fixed frame (315), and the guiding telescopic member (314) is connected between the first fixed frame (312) and the second fixed frame (315) and is used for guiding and cooperating with the first fixed frame (312) in the lifting direction of the first fixed frame (312).

7. The transmission device according to claim 3, characterized in that The platform (320) includes a platform body (321) and a first limiting portion, wherein the first limiting portion is provided on the platform body (321), and the boat bracket (A1) includes a second limiting portion; When the platform (320) lifts the boat bracket (A1) located on the carrying portion (110) to a preset height, the first limiting portion and the second limiting portion cooperate to limit the movement of the boat bracket (A1) relative to the platform body (321); When the carrier (320) is separated from the boat bracket (A1), the first limiting portion is separated from the second limiting portion.

8. The transmission device according to claim 7, characterized in that The first limiting portion includes a first limiting column (322), which is provided on the carrier body (321) and is spaced apart from the rotation center of the carrier body (321). The second limiting portion includes a first limiting notch (A11) provided on the boat bracket (A1). When the carrier (320) lifts the boat bracket (A1) located on the bearing portion (110) to a preset height, the first limiting column (322) extends into the first limiting notch and comes into limiting contact with the side wall of the first limiting notch to limit the movement of the boat bracket (A1) relative to the carrier body (321).

9. The transmission device according to claim 8, characterized in that There are a plurality of first limiting columns (322), and the plurality of first limiting columns (322) enclose a first limiting space. The first limiting columns (322) have a first guiding slope (322a), and the first guiding slope (322a) is used to guide and cooperate with the side wall of the first limiting notch (A11) to move the boat bracket (A1) into the first limiting space.

10. The transmission device according to claim 3, characterized in that The carrier (320) includes a carrier body (321), a first suction cup (323) and an exhaust pipe, wherein the first suction cup (323) is provided on the carrier body (321), and the exhaust pipe is connected to the first suction cup (323). When the carrier (320) lifts the boat bracket (A1) located on the bearing portion (110) to a preset height, the first suction cup (323) fixes the boat bracket (A1) to the carrier body (321) under the action of the exhaust pipe.

11. The transmission device according to claim 10, characterized in that The rotation center of the platform body (321) is provided with an avoidance hole (321a), there are multiple first suction cups (323), and the platform body (321) is provided with an air inlet channel connected to the first suction cup (323). The air inlet of the air inlet channel is located on the inner wall of the avoidance hole. The exhaust pipe has an adapter (324), and the adapter (324) has multiple air outlets. The adapter extends into the avoidance hole, and the multiple air outlets of the adapter (324) are respectively connected to the air inlet of the air inlet channel connected to the multiple first suction cups (323). In the process of the platform (320) driving the boat bracket (A1) to rotate around the second axis by a preset angle, the adapter (324) rotates relative to the inner wall of the avoidance hole (321a).

12. The transmission device according to claim 1, characterized in that The carrying portion (110) comprises two supporting arms (111) that are opposite to each other and spaced apart, and the two supporting arms (111) are supported on the bottom edge of the carrying boat (A).

13. The transmission device according to claim 1, characterized in that The carrying boat (A) includes a boat bracket (A1), the first bracket (100) also includes a third limiting portion, the third limiting portion is arranged on the carrying portion (110), and the boat bracket (A1) includes a fourth limiting portion. When the carrying portion (110) carries the carrying boat (A), the third limiting portion and the fourth limiting portion are limitedly matched to limit the boat bracket (A1) from moving along the carrying portion (110).

14. The transmission device according to claim 13, characterized in that The third limiting portion includes a plurality of second limiting columns (120), and the plurality of second limiting columns (120) are spaced apart to enclose a second limiting space. The fourth limiting portion includes a plurality of second limiting notches (A12), and the plurality of second limiting columns (120) correspond one-to-one to the plurality of second limiting notches (A12), and the second limiting columns (120) are in limiting contact with the side walls of the second limiting notches (A12) to limit the boat bracket (A1) within the second limiting space.

15. The transmission device according to claim 14, characterized in that The second limiting column (120) has a second guiding inclined surface (121), and the second guiding inclined surface (121) is used for guiding and cooperating with the side wall of the second limiting notch (A12) to move the boat bracket (A1) into the second limiting space.

16. The transmission device according to claim 1, characterized in that The first bracket (100) further includes a second suction cup (130), which is provided on the bearing portion and is used to fix the bearing boat (A) to the bearing portion (110).

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