Silicon carbide coating carrying disc convenient to take and place

Abstract

The utility model discloses a silicon carbide coating loading disc convenient to take and place, which comprises a bottom plate and a graphite box, the upper end of the bottom plate is provided with a first supporting structure and a second supporting structure, the graphite box comprises a tray and a top cover, the first supporting structure comprises at least three top cover supporting columns which are arranged at equal intervals by taking the center of the loading disc as the circle center, and the second supporting structure comprises a second supporting structure. A tray supporting piece is coaxially arranged at the lower end of the top cover supporting column, the second supporting structure comprises at least three carrier supporting columns which are arranged at equal intervals with the center of the carrying disc as the circle center, and the outer sides of the top ends of the carrier supporting columns are circular arcs with the center of the carrying disc as the circle center; the inner side of the top end of the carrier supporting column is another arc with the center of the carrying disc as the circle center, and the height of the inner side of the carrier supporting column is smaller than that of the outer side of the carrier supporting column, so that the carrier can automatically fall to the center of the carrying disc when placed, and the carrier is prevented from being clamped by the top cover and the tray when the graphite box and the carrier are taken subsequently.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a silicon carbide coating carrier which is easy to take and place. Background Art

[0002] Silicon carbide (SiC), a third-generation semiconductor material, is being applied in smart grids, electric vehicles, rail transit, renewable energy grid integration, switching power supplies, industrial motors, and household appliances, and demonstrates promising development prospects. Unlike traditional silicon power device manufacturing processes, SiC power devices cannot be fabricated directly on SiC single crystals. Instead, high-quality epitaxial material must be grown on a conductive single crystal substrate, and various devices are fabricated on this epitaxial layer.

[0003] Silicon carbide epitaxial layers are produced by placing a silicon carbide substrate within a carrier plate and growing it epitaxially under a specific atmosphere. However, in existing techniques, the carrier plate, supported by a graphite cartridge, and then heated requires the individual assembly of the cartridge, lid, and carrier plate before heating. After heating, the assembled cartridge and lid must be opened and the carrier removed. This complex process significantly impacts the carrier's heating efficiency.

[0004] In response to the above problems, some improvements have been proposed in the prior art. For example, the patent with authorization announcement number CN117174644B discloses a heating support device, including a base plate, a graphite box, and a first ejector pin group and a second ejector pin group arranged on the base plate, the first ejector pin group including a first ejector pin, the first ejector pin being provided with a first support step, the second ejector pin group including a second ejector pin; the height of the first ejector pin is greater than the height of the second ejector pin, and the height of the second ejector pin is greater than the height of the first support step; the graphite box includes a tray and a top cover.

[0005] Although the above-mentioned heating supporting device can support the tray, carrier and top cover in layers, making it easy to place the carrier in the graphite box and to layer the heated graphite box and carrier, thereby improving the convenience of taking and placing the carrier, the following problems still exist: (1) The second ejector pin group can only play a supporting role in the height direction. When the carrier is placed on the upper end of the second ejector pin group, it cannot be placed in the middle, which can easily cause deviation. When the graphite box and carrier are subsequently picked up together, the tray and top cover can easily clamp the carrier and cause damage; (2) There is a lack of positioning components between the tray and the top cover, which makes it impossible for the top cover to be covered in the correct position. Utility Model Content

[0006] Purpose of the utility model:

[0007] In order to overcome the problems existing in the prior art, the utility model provides a silicon carbide coated carrier that is easy to take and place. The outer side of the top end of the carrier support column is an arc with the center of the carrier as the center of the circle, and the inner side of the top end of the carrier support column is another arc with the center of the carrier as the center of the circle. The height of the inner side of the carrier support column is lower than the height of the outer side, so that the carrier can automatically fall in the center of the carrier when placed, preventing the top cover and the tray from clamping the carrier when the graphite box and the carrier are taken out later.

[0008] In order to solve the above problems, the present invention adopts the following technical solutions:

[0009] A silicon carbide coated carrier that is easy to take and place, comprising a base plate and a graphite box, wherein a first supporting structure and a second supporting structure are provided at the upper end of the base plate, the graphite box comprises a tray and a top cover, the first supporting structure comprises at least three top cover supporting columns equidistantly arranged with the center of the carrier as the center of a circle, the lower end of the top cover supporting column is coaxially provided with a tray support member, the second supporting structure comprises at least three carrier support columns equidistantly arranged with the center of the carrier as the center of a circle, the height of the top cover supporting column is greater than that of the carrier support column, the height of the top supporting position of the carrier support column is higher than that of the tray support member, the outer side of the top end of the carrier support column is an arc with the center of the carrier as the center of the circle, the inner side of the top end of the carrier support column is another arc with the center of the carrier as the center of the circle, the height of the inner side of the carrier support column is lower than the height of the outer side, the tray comprises an outer ring, an inner ring and a connecting member adapted to the tray support member, the distance between the outer ring and the inner ring is less than the diameter of the tray support member and greater than the diameter of the top cover supporting column, and the carrier support plate is provided inwardly extending from the inner ring.

[0010] Preferably, the top cover is provided with an annular enclosure extending downward, and the outer edge of the tray is an annular groove structure adapted to the annular enclosure.

[0011] Preferably, the height of the installation space formed between the top cover and the tray is greater than the height of the carrier.

[0012] Preferably, the carrier support plate is inclined downward from the end close to the inner ring toward the center of the inner ring.

[0013] Preferably, the number of the top cover support columns is three, the number of the carrier support columns is three, and the top cover support columns and the carrier support columns are arranged in an alternating manner.

[0014] Preferably, the number of the connecting members is three, the number of the carrier support plates is three, and the connecting members and the carrier support plates are arranged in an alternating manner.

[0015] Beneficial effects: Compared with the prior art, the utility model has the following advantages:

[0016] 1. The outer side of the top of the carrier support column is an arc with the center of the carrier plate as the center, and the inner side of the top of the carrier support column is another arc with the center of the carrier plate as the center. The height of the inner side of the carrier support column is lower than the height of the outer side, so that the carrier can automatically fall into the center of the carrier plate when placed, preventing the top cover and tray from clamping the carrier when taking the graphite box and carrier later.

[0017] 2. The top cover is extended downwards to be provided with an annular enclosure, and the outer edge of the tray is an annular slot structure adapted to the annular enclosure, so as to facilitate the buckling of the top cover and the tray. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the decomposition of the utility model Figure 1 ;

[0019] Figure 2 This is a schematic diagram of the decomposition of the utility model Figure 2 ;

[0020] Figure 3 It is a three-dimensional diagram of the bottom plate of the utility model;

[0021] Figure 4 It is a three-dimensional diagram of the tray of the utility model;

[0022] Figure 5 This is a three-dimensional diagram of the graphite box of the utility model placed on the bottom plate;

[0023] Figure 6 This is a cutaway perspective view of the utility model graphite cartridge placed on a base plate;

[0024] Figure 7 This is a three-dimensional diagram of the utility model when the graphite box is separated from the bottom plate and the cover is closed;

[0025] Figure 8 This is a cutaway perspective view of the utility model when the graphite box is separated from the bottom plate and the cover is closed;

[0026] Description of reference numerals:

[0027] 1. Bottom plate; 2. Top cover support column; 3. Tray support member; 4. Carrier support column; 5. Tray; 51. Outer ring; 52. Inner ring; 53. Connector; 54. Carrier support plate; 55. Annular slot structure; 6. Top cover; 61. Annular enclosure; 7. Carrier. DETAILED DESCRIPTION

[0028] All features disclosed in this specification, or all steps in the disclosed methods or processes, except mutually exclusive features and / or steps, can be combined in any manner.

[0029] Any feature disclosed in this specification (including any appended claims, abstract and drawings), unless otherwise stated, may be replaced by other equivalent or alternative features with similar purposes. That is, unless otherwise stated, each feature is only an example of a series of equivalent or similar features.

[0030] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0031] like Figure 1-4 As shown, a silicon carbide coating carrier that is easy to pick up and place includes a base plate 1 and a graphite box. The upper end of the base plate 1 is provided with a first supporting structure and a second supporting structure. The graphite box includes a tray 5 and a top cover 6. The first supporting structure includes at least three top cover supporting columns 2 that are equidistantly arranged with the center of the carrier as the center of a circle. The lower end of the top cover supporting column 2 is coaxially provided with a tray support member 3. The second supporting structure includes at least three carrier support columns 4 that are equidistantly arranged with the center of the carrier as the center of a circle. The height of the top cover supporting column is greater than that of the carrier support column 4. The top support position of the carrier support column 4 is The height is higher than the height of the tray support 3, the outer side of the top end of the carrier support column 4 is an arc with the center of the carrier plate as the center, and the inner side of the top end of the carrier support column 4 is another arc with the center of the carrier plate as the center. The height of the inner side of the carrier support column 4 is lower than the height of the outer side. The tray 5 includes an outer ring 51, an inner ring 52 and a connecting member 53 adapted to the tray support 3. The distance between the outer ring 51 and the inner ring 52 is smaller than the diameter of the tray support 3 and larger than the diameter of the top cover support column 2. The inner ring 52 extends inward to provide a carrier support plate 54 for supporting the carrier.

[0032] The outer side of the top end of the carrier support column is an arc with the center of the carrier plate as the center, and the inner side of the top end of the carrier support column is another arc with the center of the carrier plate as the center. The height of the inner side of the carrier support column is lower than the height of the outer side, so that the carrier can automatically fall on the center of the carrier plate when placed, and the setting of the inner and outer rings can also limit the tray, so that the tray is also located in the center of the carrier plate, preventing the top cover and tray from clamping the carrier when taking the graphite box and the carrier later.

[0033] In this embodiment, the top cover is provided with an annular enclosure 61 extending downward, and the outer edge of the tray 5 is an annular groove structure 55 adapted to the annular enclosure 61, so as to facilitate the buckling of the top cover and the tray. At the same time, the top cover and the tray are coaxial when taking it, and the tray is coaxial with the carrier, so that the carrier is located in the center of the graphite box when taking it.

[0034] In this embodiment, the height of the installation space formed between the top cover and the tray 5 is greater than the height of the carrier 7 to prevent the carrier from being pressed.

[0035] In this embodiment, the carrier support plate 54 is inclined downward from the end close to the inner ring toward the center of the inner ring, so that the carrier will not deviate during the movement in the graphite box.

[0036] In this embodiment, there are three top cover support columns 2 and three carrier support columns 4 . The top cover support columns 2 and the carrier support columns 4 are staggered to prevent mutual influence during operation.

[0037] In this embodiment, there are three connecting members 53 and three carrier support plates 54 . The connecting members 53 and the carrier support plates 54 are staggered to prevent mutual interference during operation.

[0038] like Figure 5-8 As shown, the working principle is: first place the tray on the tray support 3, the structure of the inner and outer rings makes the tray located in the center of the carrier, then place the carrier on the carrier support column 4, the structure of the carrier support column 4 makes the wafer also located in the center of the carrier, then place the top cover on the top cover support column, and then lift the tray up. During this process, the tray will lift the carrier and the top cover in turn, and the carrier will automatically fall in the middle of the tray. The top cover is also coaxial with the tray through the annular enclosure 61 and the annular slot structure 55 of the tray.

[0039] The purpose of the above embodiments is to exemplify and deduce the technical solution of the utility model, and to fully describe the technical solution, purpose and effect of the utility model. Its purpose is to enable the public to have a more thorough and comprehensive understanding of the disclosed content of the utility model, and it does not limit the scope of protection of the utility model.

[0040] The above embodiments are not exhaustive of the present invention, and there may be many other embodiments not listed. Any replacements and improvements made without violating the concept of the present invention are within the scope of protection of the present invention.

Claims

1. A silicon carbide coated carrier that is easy to pick up and place, characterized by: The invention comprises a bottom plate (1) and a graphite box, wherein the upper end of the bottom plate (1) is provided with a first supporting structure and a second supporting structure, the graphite box comprises a tray (5) and a top cover (6), the first supporting structure comprises at least three top cover supporting columns (2) equidistantly arranged with the center of the carrier plate as the center of a circle, the lower end of the top cover supporting column (2) is coaxially provided with a tray supporting member (3), the second supporting structure comprises at least three carrier supporting columns (4) equidistantly arranged with the center of the carrier plate as the center of a circle, the height of the top cover supporting column is greater than that of the carrier supporting column (4), and the height of the top supporting position of the carrier supporting column (4) is higher than that of the tray supporting member ( 3), the outer side of the top end of the carrier support column (4) is an arc with the center of the carrier disc as the center, the inner side of the top end of the carrier support column (4) is another arc with the center of the carrier disc as the center, the height of the inner side of the carrier support column (4) is lower than the height of the outer side, the tray (5) comprises an outer ring (51) adapted for the tray support member (3), an inner ring (52) and a connecting member (53), the distance between the outer ring (51) and the inner ring (52) is smaller than the diameter of the tray support member (3) and larger than the diameter of the top cover support column (2), and the inner ring (52) is provided with a carrier support plate (54) extending inward.

2. The easy-to-take-in / out silicon carbide coated carrier according to claim 1, characterized in that: The top cover is provided with an annular enclosure (61) extending downward, and the outer edge of the tray (5) is an annular slotted structure (55) adapted to the annular enclosure (61).

3. The easy-to-take-in / out silicon carbide coating carrier according to claim 1 or 2, characterized in that: The height of the installation space formed between the top cover and the tray (5) is greater than the height of the carrier (7).

4. The easy-to-take-in / out silicon carbide coated carrier according to claim 1, characterized in that: The carrier support plate (54) is inclined downward from one end close to the inner ring toward the center of the inner ring.

5. The easy-to-take-in / out silicon carbide coated carrier according to claim 1, characterized in that: The number of the top cover support columns (2) is three, the number of the carrier support columns (4) is three, and the top cover support columns (2) and the carrier support columns (4) are arranged in a staggered manner.

6. The easy-to-take-in / out silicon carbide coating carrier according to claim 1, characterized in that: The number of the connecting members (53) is three, the number of the carrier support plates (54) is three, and the connecting members (53) and the carrier support plates (54) are arranged in an alternating manner.

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