Tool for polishing equipment, polishing equipment and polishing machine

Abstract

The embodiment of the utility model provides a tool for polishing equipment, the polishing equipment and a polishing machine. The polishing equipment at least comprises a polishing machine and a tool. The tool comprises a first mounting mechanism, a first supporting mechanism and a first adjusting assembly. The first mounting mechanism is configured to mount a workpiece to be polished; the first mounting mechanism is arranged on the first supporting mechanism; the first adjusting assembly comprises a plurality of first pressure transmission mechanisms, the multiple first pressure transmission mechanisms are arranged on the first supporting mechanism, and the output ends of the multiple first pressure transmission mechanisms are all connected with the first mounting mechanism. The multiple first pressure transmission mechanisms drive the first mounting mechanism to move in the first direction.

Description

Technical Field

[0001] The present invention relates to the technical field of optical lens processing, and in particular to a tooling for polishing equipment, polishing equipment and a polishing machine. Background Art

[0002] With the development of technology, the manufacturing process of optical lenses has gradually matured and is widely used in products such as glasses and camera lenses. The quality of the polishing process is the key to determining the quality of optical lenses. The existing polishing process is still relatively dependent on the operator's experience. For example, when the process of polishing the lens plane of an optical lens is usually carried out on a ring grinder, the back of the lens is bonded to the pressing block, and the operator manually adds or removes the counterweight blocks on the lens pressing block according to the size of the lens and the required grinding and polishing dimensions based on the operator's manual experience to adjust the pressure to meet the polishing requirements. For another example, when the fine polishing process of an optical lens is carried out on a three-axis CNC polishing machine, the approximate position of the polishing head may also need to be determined by the operator. In this way, if the operator is not experienced enough, the polishing accuracy and polishing quality are difficult to guarantee. Utility Model Content

[0003] One or more embodiments of the present specification provide a tool for polishing equipment, the tool comprising: a first mounting mechanism, the first mounting mechanism being configured to mount a workpiece to be polished; a first supporting mechanism, the first mounting mechanism being disposed on the first supporting mechanism; a first adjusting assembly, the first adjusting assembly comprising a plurality of first pressure transmission mechanisms, the plurality of first pressure transmission mechanisms being disposed on the first supporting mechanism, and the output ends of the plurality of first pressure transmission mechanisms being connected to the first mounting mechanism; wherein the plurality of first pressure transmission mechanisms drive the first mounting mechanism to move in a first direction.

[0004] In some embodiments, the first supporting mechanism includes a base, a connecting portion, a first driving member and a second driving member; the first driving member is arranged on the base, and the output end of the first driving member is connected to the connecting portion to drive the connecting portion to move along the first direction; the second driving member is arranged on the connecting portion, and the output end of the second driving member is connected to the first adjusting component to drive the first adjusting component to move along the second direction; wherein, the first direction is perpendicular to the second direction.

[0005] In some embodiments, the first adjustment component further includes a force control mechanism, which is connected to the output end of the second driving member, and the output end of the force control mechanism is connected to multiple first pressure transmission mechanisms to drive multiple first pressure transmission mechanisms to move along the first direction.

[0006] In some embodiments, the first mounting mechanism includes a fixed part and a rotating part; the fixed part is connected to the output end of each of the multiple first pressure transmission mechanisms; the rotating part is connected to the fixed part through a rotating shaft, and the extension direction of the rotating shaft is parallel to the first direction.

[0007] In some embodiments, a ball bearing is provided between the fixed part and the rotating part, and the ball bearing is configured to enable the rotating part to rotate relative to the fixed part; and / or a locking mechanism is provided between the fixed part and the rotating part, and the locking mechanism is configured to fix the rotating part to the fixed part.

[0008] In some embodiments, the plurality of first pressure transmission mechanisms include hydraulic cylinders or pneumatic cylinders.

[0009] In some embodiments, the tooling further includes a controller, which is electrically connected to the first driving member, the second driving member, a plurality of the first pressure transmission mechanisms, and the force control mechanism; the controller is configured to: respectively control the driving direction and driving amount of the first driving member and the second driving member; and respectively control the pressure provided by the force control mechanism and the plurality of the first pressure transmission mechanisms.

[0010] One or more embodiments of the present specification also provide a polishing device, which includes the aforementioned tooling and a polishing assembly, wherein the polishing assembly is configured to polish the workpiece to be polished, and the tooling is fixed relative to the polishing assembly; the polishing assembly includes a ring grinder, and the first mounting mechanism of the tooling is arranged above the polishing disk of the ring grinder.

[0011] One or more embodiments of the present specification also provide a polishing machine, which includes a second mounting mechanism, a second supporting mechanism and a second adjusting assembly, wherein the second supporting mechanism includes a supporting seat and a driving device arranged on the supporting seat, and the driving device is connected to the second adjusting assembly; the driving device drives the movement of the second adjusting assembly to have at least a first translational degree of freedom, a second translational degree of freedom and a first rotational degree of freedom; the direction of the first rotational degree of freedom is perpendicular to the plane formed by the direction of the first translational degree of freedom and the direction of the second translational degree of freedom; the second mounting mechanism includes a polishing drive shaft for mounting a polishing head, the second adjusting assembly includes a second pressure transmission mechanism, and the output end of the second pressure transmission mechanism is connected to the polishing drive shaft; the second pressure transmission mechanism drives the polishing drive shaft to move along the direction of the first translational degree of freedom.

[0012] One or more embodiments of the present specification also provide another polishing device, which includes the aforementioned polishing machine, a polishing liquid supply device and a rotary drive mechanism, wherein the polishing liquid supply device includes: a pool body, which is constructed to contain polishing liquid; a polishing liquid supply pipeline, which is configured to supply the polishing liquid into the pool body or recover the polishing liquid in the pool body; a tooling assembly is at least partially located in the pool body, and the tooling assembly is spaced from the polishing head of the polishing machine along the direction of the first translational degree of freedom, and the tooling assembly is connected to the output end of the rotary drive mechanism.

[0013] In some embodiments, the tooling assembly includes the aforementioned tooling. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] This specification will be further described in the form of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. These embodiments are not limiting, and in these embodiments, like numbers represent like structures, wherein:

[0015] Figure 1 is a schematic diagram of the overall structure of a polishing device according to some embodiments of this specification;

[0016] Figure 2 is a side view of the overall structure of the polishing equipment shown in some embodiments of this specification;

[0017] Figure 3 yes Figure 2 Cross-section at AA in the middle;

[0018] Figure 4 yes Figure 2 A magnified schematic diagram of point B in the middle;

[0019] Figure 5 is a side view of the overall structure of the polishing machine shown in some embodiments of this specification;

[0020] Figure 6 This is a schematic diagram of the overall structure of the polishing equipment shown in other embodiments of this specification. Figure 1 ;

[0021] Figure 7 This is a schematic diagram of the overall structure of the polishing equipment shown in other embodiments of this specification. Figure 2 ;

[0022] Figure 8 yes Figure 7 Enlarged view of point C in the middle.

[0023] In the picture:

[0024] 100. Workwear;

[0025] 110, first mounting mechanism; 111, fixing portion; 112, rotating portion; 113, ball bearing; 114, locking mechanism; 1141, locking cylinder; 1142, locking pin; 125, connecting seat; 126, connecting rod; 127, pressing block;

[0026] 120. First supporting mechanism; 121. Base; 122. Connecting portion; 123. First driving member; 124. Second driving member;

[0027] 130. First adjustment assembly; 131. First pressure transmission mechanism; 132. Force control mechanism;

[0028] 140. Workpiece to be polished;

[0029] 200. Polishing equipment;

[0030] 210, polishing assembly; 211, ring grinder; 2111, polishing disc;

[0031] 300, polishing machine;

[0032] 310, second mounting mechanism; 311, polishing drive shaft; 320, second supporting mechanism; 321, supporting seat; 322, driving device; 3221, first driving unit; 3222, second driving unit; 3223, third driving unit; 330, second adjusting assembly; 331, second pressure transmission mechanism; 340, polishing head;

[0033] 400. Another polishing device;

[0034] 410. Polishing liquid supply equipment; 411. Pool body; 412. Polishing liquid supply pipeline; 4121. Liquid storage tank; 4122. Supply pipeline; 4123. Recovery pipeline; 4124. First valve; 420. Rotary drive mechanism; 430. Polishing liquid; 440. Tooling assembly. DETAILED DESCRIPTION

[0035] To more clearly illustrate the technical solutions of the embodiments of this specification, the following briefly describes the drawings required for describing the embodiments. Obviously, the drawings described below are merely examples or embodiments of this specification. Those skilled in the art can apply this specification to other similar scenarios based on these drawings without inventive effort. Unless otherwise apparent from the context or otherwise noted, the same reference numerals in the figures represent the same structure or operation.

[0036] It should be understood that the terms "system," "device," "unit," and / or "module" used herein are a method for distinguishing different components, elements, parts, portions, or assemblies at different levels. However, if other terms can achieve the same purpose, the terms may be replaced by other expressions.

[0037] As used in this specification and claims, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" do not refer to the singular but also include the plural. Generally speaking, the terms "comprises" and "include" only indicate the inclusion of the steps and elements specifically identified, and these steps and elements do not constitute an exclusive list. A method or apparatus may also include other steps or elements.

[0038] Figure 1 is a schematic diagram of the overall structure of a polishing device according to some embodiments of this specification; Figure 2 is a side view of the overall structure of the polishing equipment shown in some embodiments of this specification; Figure 3 yes Figure 2 Cross-section at AA in the middle; Figure 4 yes Figure 2 Enlarged schematic diagram of point B in the middle.

[0039] Some embodiments of this specification provide a tool for polishing equipment (hereinafter referred to as tool). Figures 1-4 As shown, tooling 100 includes a first mounting mechanism 110, a first support mechanism 120, and a first adjustment assembly 130. In some embodiments, first mounting mechanism 110 is configured to mount a workpiece 140 to be polished and is disposed on first support mechanism 120. First adjustment assembly 130 includes a plurality of first pressure transmission mechanisms 131, which are disposed on first support mechanism 120. The output ends of the plurality of first pressure transmission mechanisms 131 are all connected to first mounting mechanism 110. The plurality of first pressure transmission mechanisms 131 drive first mounting mechanism 110 to move in a first direction.

[0040] The first mounting mechanism 110 is used to mount a workpiece 140 to be polished. The workpiece 140 to be polished is a workpiece that has undergone preliminary machining but requires further surface treatment to achieve the desired smoothness, flatness, or reflectivity. For example, the workpiece 140 to be polished may include, but is not limited to, an optical lens.

[0041] In some embodiments, the first mounting mechanism 110 can be directly or indirectly disposed on the first supporting mechanism 120. For example, the first mounting mechanism 110 can be connected to the first supporting mechanism 120 via other structural members (such as connectors), thereby being indirectly disposed on the first supporting mechanism 120.

[0042] It should be noted that the structural form of the first mounting mechanism 110 is not limited, as long as it can be used to mount the workpiece 140 to be polished.

[0043] In some embodiments, the workpiece 140 to be polished can be positioned proximal to the first mounting mechanism 110 to facilitate polishing. The workpiece 140 to be polished can be connected to the first mounting mechanism 110 in a variety of ways, including but not limited to bonding and clamping. The proximal end refers to the end closest to the workpiece 140 to be polished.

[0044] The first supporting mechanism 120 is a mechanism for supporting and installing the first mounting mechanism 110. In some embodiments, the first supporting mechanism 120 can be used to drive the first mounting mechanism 110 to move.

[0045] Just as an example, Figure 1-Figure 2 As shown, the first support mechanism 120 may include at least two vertically arranged components, one of which is capable of moving in a first direction, and the first mounting mechanism 110 is arranged on the other component. When one of the components of the first support mechanism 120 moves in the first direction, it can drive the first mounting mechanism 110 arranged on the other component to move in the first direction, thereby driving the workpiece 140 to be polished arranged on the first mounting mechanism 110 to move in the first direction, thereby facilitating the installation and polishing of the workpiece 140 to be polished. In some embodiments, the first direction can be used Figure 4 The Z-axis direction is shown in FIG.

[0046] It should be noted that the structural form of the first supporting mechanism 120 is not limited, as long as it can be used to set the first mounting mechanism 110 .

[0047] The first adjustment component 130 is a component used to adjust the contact force between the workpiece 140 to be polished and the polishing component (such as a polishing plate) during the polishing process.

[0048] The first pressure transmission mechanism 131 is a mechanism or device that transmits power through changes in the pressure of a fluid (such as a gas or liquid). Since the basic principle of pressure transmission is to control the force during the transmission process by controlling the pressure of the fluid, precise control of the pressure of the fluid in the first pressure transmission mechanism 131 can achieve precise control of the force applied to the workpiece 140 to be polished.

[0049] In some embodiments, the plurality of first pressure transmission mechanisms 131 may be spaced apart. For example, spaced apart around the first direction. For example, Figure 1-Figure 2As shown, the plurality of first pressure transmission mechanisms 131 can be arranged on the first mounting mechanism 110 at equal intervals around the first direction, that is, the plurality of first pressure transmission mechanisms 131 are distributed on the first mounting mechanism 110 in a ring shape.

[0050] In some embodiments, the plurality of first pressure transmission mechanisms 131 can be connected to the first mounting mechanism 110 in various ways, such as welding, threaded connection, and the like.

[0051] In some embodiments, multiple first pressure transmission mechanisms 131 can be used to control the force applied to the workpiece 140 being polished. For example, the first pressure transmission mechanism 131 can provide a load range of 0kg to 50kg, a floating range of 0mm to 20mm, and a pressure range of 2N to 100N. Based on these parameter ranges, the operator can pre-set the required pressure value according to actual application requirements to apply force to the workpiece 140 being polished. The floating range of the first pressure transmission mechanism 131 refers to the range of movement distance of the first pressure transmission mechanism 131 along the first direction. In some embodiments, the pressure value provided by the first pressure transmission mechanism 131 corresponds to its movement distance.

[0052] It is worth noting that the specific number of multiple first pressure transmission mechanisms 131 is not limited (such as 3, 4, etc.), and the types of multiple first pressure transmission mechanisms 131 can be the same or different, and can be set according to actual application requirements (such as floating stroke requirements, pressure floating range requirements, etc.).

[0053] In some embodiments, the plurality of first pressure transmission mechanisms 131 include hydraulic cylinders or pneumatic cylinders.

[0054] A hydraulic cylinder is a hydraulic actuator that converts hydraulic energy into mechanical energy and performs linear reciprocating motion (or swinging motion). A pneumatic cylinder is a pneumatic actuator that converts air pressure into mechanical energy and performs linear reciprocating motion (or swinging motion).

[0055] Since the hydraulic cylinder and the pneumatic cylinder have a simple structure and reliable operation, they can be used to achieve reciprocating motion without a deceleration device, and there is no transmission gap and the movement is smooth. Therefore, the multiple first pressure transmission mechanisms 131 use hydraulic cylinders or pneumatic cylinders, which is conducive to providing relatively stable pressure and ensuring smooth operation, and thus helping to ensure the stability and reliability of the polishing process and improve the polishing quality and polishing effect.

[0056] In some embodiments, the plurality of first pressure transmission mechanisms 131 may further include sensing elements. Exemplary sensing elements may include force sensors, displacement sensors, and the like. The force sensors may be used to measure and provide real-time feedback on the force applied by the first pressure transmission mechanisms 131 to the workpiece 140 during the polishing process. The displacement sensors may be used to measure and provide real-time feedback on the travel distance of the first pressure transmission mechanisms 131, thereby ensuring precise control of the contact force between the workpiece 140 and the polishing assembly (e.g., polishing plate) during the polishing process.

[0057] In some embodiments of this specification, the tooling utilizes a first mounting mechanism, a first support mechanism, and a first adjustment assembly, resulting in a simple overall structure, ease of implementation, and low manufacturing cost. Furthermore, the first adjustment assembly includes multiple first pressure transmission mechanisms, which precisely control the force applied to the workpiece by precisely controlling the pressure of the fluid. Furthermore, these multiple first pressure transmission mechanisms can utilize sensors to monitor the force and displacement of the workpiece during the polishing process in real time, allowing for timely correction of the force applied to the workpiece, thereby improving polishing accuracy and quality.

[0058] For more information about tooling used for polishing equipment, please refer to the relevant description below.

[0059] In some embodiments, as Figure 4 As shown, the first support mechanism 120 includes a base 121, a connecting portion 122, a first driving member 123, and a second driving member 124. The first driving member 123 is disposed on the base 121, and the output end of the first driving member 123 is connected to the connecting portion 122 to drive the connecting portion 122 to move in a first direction. The second driving member 124 is disposed on the connecting portion 122, and the output end of the second driving member 124 is connected to the first adjustment assembly 130 to drive the first adjustment assembly 130 to move in a second direction.

[0060] The base 121 is a structural member used to fix and support other components. The base 121 can be designed into various structural shapes, such as a square, a rectangle, a truncated cone, etc.

[0061] In some embodiments, the base 121 can be used to fix the first driving member 123. The first driving member 123 can be set on the base 121 in various ways. Exemplary ways may include but are not limited to welding, threaded connection, etc.

[0062] The connecting portion 122 is a structural member used to connect the first driving member 123 and the second driving member 124. The structural shape of the connecting portion 122 can be designed to be a flat plate or any other feasible shape.

[0063] In some embodiments, the connecting portion 122 is disposed along the second direction and connected to the output end of the first driving member 123 .

[0064] In some embodiments, the second driving member 124 can be disposed on the connecting portion 122 along the second direction by welding, threaded connection, or the like.

[0065] The second direction may be perpendicular to the first direction. In some embodiments, the second direction may be perpendicular to the first direction. Figure 4 For more information about the polishing disc, please refer to the relevant description below.

[0066] The first driving member 123 and the second driving member 124 are components of the first support mechanism 120 used to drive the first mounting mechanism 110 to move in different directions. Specifically, the first driving member 123 can be used to drive the first mounting mechanism 110 to move in a first direction, while the second driving member 124 can be used to drive the first mounting mechanism 110 to move in a second direction.

[0067] In some embodiments, the structures of the first driving member 123 and the second driving member 124 may be the same or different. Figure 2 、 Figure 4 As shown, the first driving member 123 can be a piston cylinder, and the second driving member 124 can be a hydraulic cylinder or a pneumatic cylinder. In some embodiments, the first driving member 123 and the second driving member 124 can also adopt any other feasible structural form, such as a combination of a motor and a sliding guide rail or a ball screw.

[0068] In some embodiments, the first support mechanism 120 may further include a third driving member (not shown). The third driving member may be disposed on the output end of the second driving member 124 along the third direction, and the output end of the third driving member is connected to the first adjustment assembly 130 to drive the first adjustment assembly 130 to move along the third direction.

[0069] In some embodiments, the third driving member can drive the first adjusting assembly 130 to drive the first mounting mechanism 110 to move along the third direction.

[0070] The third direction is different from the first direction and the second direction. The third direction may be perpendicular to the second direction or not perpendicular to the second direction (i.e., there is an angle between the second direction and the third direction, and the angle may not be equal to 90°). In some embodiments, the third direction may be preferably perpendicular to the second direction and also perpendicular to the first direction. In this case, the third direction may be used Figure 4 The Y-axis direction is shown in .

[0071] It should be noted that the structure of the third driving member may be the same as or different from the structure of the first driving member 123 and the second driving member 124 .

[0072] In some embodiments of the present specification, the first supporting mechanism includes driving members arranged in different directions, which can drive the first mounting mechanism to move in different directions, and further drive the workpiece to be polished to move in different directions.

[0073] In some embodiments, as Figure 1-Figure 2 、 Figure 4 As shown, the first adjustment assembly 130 further includes a force control mechanism 132. The force control mechanism 132 is connected to the output end of the second driving member 124, and the output end of the force control mechanism 132 is connected to the plurality of first pressure transmission mechanisms 131 to drive the plurality of first pressure transmission mechanisms 131 to move along the first direction.

[0074] The force control mechanism 132 is also a mechanism or device that performs power control through pressure transmission. For example, the force control mechanism 132 may include a hydraulic cylinder, a pneumatic cylinder, etc. In some embodiments, the force control mechanism 132 may also be other devices or apparatuses capable of achieving power control, such as a motor.

[0075] In some embodiments, the force control mechanism 132 can be used to control the force of multiple first pressure transmission mechanisms 131. For example, the force control mechanism 132 can provide a load range of 0kg to 50kg, a floating range of 0mm to 20mm, and a pressure range of 5N to 500N. Based on these parameter ranges, the operator can set the required pressure value in advance according to actual application requirements to apply force to the multiple first pressure transmission mechanisms 131. The floating range of the force control mechanism 132 refers to the range of the drive amount (or movement distance) of the force control mechanism 132 along the first direction. In some embodiments, there is a corresponding relationship between the pressure value provided by the force control mechanism 132 and its movement distance.

[0076] In some embodiments, the force control mechanism 132 may be integrated with sensing elements such as force sensors and displacement sensors to respectively monitor and provide feedback of the applied force and movement distance in real time.

[0077] In some embodiments, the force control mechanism 132 can be directly or indirectly connected to the output end of the second driving member 124. For example, the force control mechanism 132 can be connected to the output end of the second driving member 124 through other structural members (such as a connecting seat). Figure 4 As shown, the connecting seat 125 can be fixedly connected to the output end of the second driving member 124 , and the force control mechanism 132 can be connected to the output end of the second driving member 124 by being arranged on the connecting seat 125 .

[0078] In some embodiments, the output end of the force control mechanism 132 can be directly or indirectly connected to the plurality of first pressure transmission mechanisms 131. Similarly, the output end of the force control mechanism 132 can be connected to the plurality of first pressure transmission mechanisms 131 through other structural members (such as connecting components). Figure 2 、 Figure 4 As shown, the connection assembly includes a connecting rod 126 and a pressure block 127. The connecting rod 126 is disposed at the center of the pressure block 127 and is connected to one end of the pressure block 127. The other end of the pressure block 127 is connected to multiple first pressure transmission mechanisms 131. By connecting the output end of the force control mechanism 132 to the connecting rod 126, the output end of the force control mechanism 132 is connected to multiple first pressure transmission mechanisms 131. In some embodiments, the connecting rod 126 and the pressure block 127 can also be an integrally formed structure.

[0079] In some embodiments of this specification, a force control mechanism is provided to precisely control the force applied to the plurality of first pressure transmission mechanisms, thereby facilitating further improvement in polishing accuracy.

[0080] In some embodiments, the tool 100 further includes a controller (not shown), which is electrically connected to the first driving member 123, the second driving member 124, the plurality of first pressure transmission mechanisms 131, and the force control mechanism 132. The controller is configured to: control the driving direction and amount of the first driving member 123 and the second driving member 124, respectively; and control the pressure provided by the force control mechanism 132 and the plurality of first pressure transmission mechanisms 131, respectively.

[0081] The controller can be used to uniformly manage and control multiple devices to achieve collaborative work. In some embodiments, the controller has multiple types, including but not limited to microcontrollers, combinational logic controllers, CPU controllers, etc.

[0082] In some embodiments, the controller can control the driving direction and driving amount of the first driving member 123 and the second driving member 124 according to preset control parameters, so that the first driving member 123 and the second driving member 124 move to the target position. The driving amount can be understood as the moving distance.

[0083] In some embodiments, the controller may further control the pressure provided by the force control mechanism 132 and the plurality of first pressure transmission mechanisms 131 according to preset control parameters to ensure that the force control mechanism 132 and the plurality of first pressure transmission mechanisms 131 provide appropriate pressure.

[0084] Preset control parameters refer to pre-set control parameters. In some embodiments, the preset control parameters may include the target driving direction and target driving amount of the first and second driving members 123, 124, as well as the target pressure values to be provided by the force control mechanism 132 and the plurality of first pressure transmission mechanisms 131. In some embodiments, the preset control parameters may be set in advance by the operator based on actual needs.

[0085] In some embodiments, the controller may further control the second driving member 124 to perform reciprocating linear motion along the second direction according to preset control parameters to further improve polishing efficiency and polishing effect. The preset control parameters may further include a target reciprocating motion range and a target motion speed.

[0086] In some embodiments, the controller may be further electrically connected to the third driving member. The controller may be used to control the driving direction and driving amount of the third driving member so as to move the third driving member to a target position.

[0087] In some embodiments, the controller may also be electrically connected to a sensor element (such as a force sensor or a displacement sensor). The controller can adjust the control parameters of the corresponding device based on the data obtained in real time by the sensor element so that the operation of the corresponding device meets the preset control parameters.

[0088] As an example only, the sensing element may include three displacement sensors, which are respectively provided on the first driving member 123, the second driving member 124, and the third driving member to respectively measure the displacement direction (i.e., the driving direction) and the displacement distance (i.e., the driving amount) of the three driving members. When the current displacement distance of one of the three driving members (e.g., the first driving member 123) does not meet the preset control parameters, the controller can promptly adjust the control parameters of the first driving member 123 so that it can achieve the target driving amount, ensuring that it can move to the target position.

[0089] Some embodiments of this specification utilize a controller to uniformly control and manage multiple devices within a tooling setup, enabling coordinated operation without the need for human adjustment or intervention. This effectively improves polishing efficiency while maintaining polishing results. Furthermore, the controller is electrically connected to sensor elements to obtain real-time measurement data and promptly adjust the control parameters of the corresponding devices, further ensuring polishing quality and results.

[0090] In some embodiments, as Figure 2 、 Figure 4As shown, the first mounting mechanism 110 includes a fixed portion 111 and a rotating portion 112. The fixed portion 111 is connected to the output end of each of the plurality of first pressure transmission mechanisms 131. The rotating portion 112 is connected to the fixed portion 111 via a rotating shaft (not shown), the extending direction of the rotating shaft being parallel to the first direction.

[0091] The fixing portion 111 is a structural component that maintains a fixed position in the first mounting mechanism 110. The fixing portion 111 can be designed in various structural shapes, including but not limited to a flat plate shape, a cylindrical shape, and the like.

[0092] In some embodiments, the fixing portion 111 can be connected to the output end of each of the plurality of first pressure transmission mechanisms 131 by threaded connection, welding, clamping, etc. In some embodiments, the first pressure transmission mechanisms 131 can be evenly distributed in a ring shape on the fixing portion 111 to drive the first mounting mechanism 110 to move along the first direction.

[0093] The rotating portion 112 is a structural component of the first mounting mechanism 110 that can rotate relative to the fixed portion 111. In some embodiments, the structural shape of the rotating portion 112 can be the same as or different from the structural shape of the fixed portion 111 to which it is opposite.

[0094] The rotating shaft is a structural member that enables the rotating portion 112 to rotate relative to the fixing portion 111 .

[0095] In some embodiments, one end of the rotating shaft is connected to the rotating portion 112, and the other end of the rotating shaft can be connected to the fixed portion 111. In order to enable the rotating portion 112 to rotate relative to the fixed portion 111, the end of the rotating shaft connected to the fixed portion 111 and / or the rotating portion 112 can adopt a structure that can be used for multi-directional rotation, such as a universal joint. For example, the end of the rotating shaft connected to the fixed portion 111 is provided with a universal joint, or the end of the rotating shaft connected to the rotating portion 112 is provided with a universal joint. For another example, both ends of the rotating shaft are provided with universal joints.

[0096] In some embodiments, the rotating portion 112 can be directly or indirectly connected to the workpiece 140 to be polished. For example, the workpiece 140 to be polished can be directly bonded to the proximal end surface of the rotating portion 112. In another example, the workpiece 140 to be polished can be bonded to the proximal end surface of another structural component (such as a bonding block), which is then connected to the proximal end of the rotating portion 112.

[0097] In some embodiments of the present specification, the first mounting mechanism adopts a fixed part and a rotating part, wherein the fixed part can ensure a stable output environment for multiple first pressure transmission mechanisms, and the rotating part can rotate relative to the fixed part, enabling the workpiece to rotate freely during the polishing process to accelerate polishing, thereby helping to improve polishing efficiency.

[0098] In some embodiments, as Figure 3-Figure 4 As shown, a ball 113 is provided between the fixed portion 111 and the rotating portion 112 , and the ball 113 is configured to enable the rotating portion 112 to rotate relative to the fixed portion 111 .

[0099] The ball bearings 113 are spherical parts. In some embodiments, a plurality of evenly distributed ball bearings 113 may be provided between the fixed portion 111 and the rotating portion 112. The number of ball bearings 113 is not limited, and the specific number may be set according to the structural dimensions of the fixed portion 111 and the rotating portion 112.

[0100] In some embodiments, at least one of the two end faces of the fixed portion 111 and the rotating portion 112 facing each other may be provided with a plurality of arc grooves, the arc profile of the arc groove being adapted to the partial profile of the ball 113, and the ball 113 being partially accommodated in the arc groove, thereby ensuring that the rotating portion 112 can rotate relative to the fixed portion 111 while preventing the ball 113 from falling.

[0101] By disposing a plurality of balls 113 between the fixed portion 111 and the rotating portion 112 , the plurality of balls 113 can not only play a supporting role between the fixed portion 111 and the rotating portion 112 , but also ensure that the two can rotate stably relative to each other.

[0102] In some embodiments, as Figure 3 As shown, a locking mechanism 114 may be provided between the fixed portion 111 and the rotating portion 112. The locking mechanism 114 is configured to securely connect the rotating portion 112 to the fixed portion 111. Exemplary secure connection methods may include, but are not limited to, snap-fitting, welding, and threaded connection.

[0103] The locking mechanism 114 is a structural member that realizes the fixed connection between the rotating part 112 and the fixed part 111. In some embodiments, Figure 3 As shown, the locking mechanism 114 may include a locking cylinder 1141 and a locking pin 1142 , and the locking pin 1142 is connected to the output end of the locking cylinder 1141 .

[0104] In some embodiments, the locking cylinder 1141 can be disposed at the center of the distal end surface of the fixed portion 111. A through hole for the locking pin 1142 to pass through is provided at the central position, and a corresponding groove is provided on the distal end surface of the rotating portion 112 opposite the fixed portion 111. The distal end refers to the end opposite to the proximal end, i.e., the end away from the workpiece 140 to be polished.

[0105] When the fixed portion 111 and the rotating portion 112 need to be fixedly connected, the locking cylinder 1141 only needs to be controlled to drive the locking pin 1142 to move in the first direction so that the proximal end of the locking pin 1142 is located in the groove on the distal end surface of the rotating portion 112. When the rotating portion 112 needs to be kept rotatable relative to the fixed portion 111, the locking cylinder 1141 only needs to be controlled to drive the locking pin 1142 to move in the first direction so that the proximal end of the locking pin 1142 is disengaged from the groove on the distal end surface of the rotating portion 112 and finally located in the through hole of the fixed portion 111.

[0106] It is understandable that the locking cylinder 1141 can also be set on the rotating part 112, and the groove can be correspondingly set on the fixing part 111, thereby achieving the same function as the above-mentioned setting method.

[0107] In some embodiments, the locking cylinder 1141 can be electrically connected to a controller, and the controller can realize automatic control and coordinated operation with other devices in the tooling 100 to improve polishing efficiency.

[0108] In some embodiments, the locking mechanism 114 may also adopt any other feasible structural form that can securely connect the rotating portion 112 to the fixed portion 111. For example, the locking mechanism 114 may adopt a telescopic rod or a snap-fit structure. In another example, the locking mechanism 114 may adopt an electromagnetic suction cup, which includes an electromagnet and a suction cup, both of which are respectively disposed at opposite ends of the fixed portion 111 and the rotating portion 112. By energizing the electromagnet, it generates an electromagnetic force to attract the suction cup, thereby achieving a secure connection between the fixed portion 111 and the rotating portion 112.

[0109] It is worth noting that the ball 113 and the locking mechanism 114 can be simultaneously disposed between the fixed portion 111 and the rotating portion 112 , or can be separately disposed between the fixed portion 111 and the rotating portion 112 .

[0110] In some embodiments of this specification, by providing a ball and / or locking mechanism between the fixed portion and the rotating portion, the operator can select whether the rotating portion rotates or not according to actual needs to switch the state of the rotating portion.

[0111] Some embodiments of this specification also provide a polishing device. Figure 1 、 Figure 4 As shown, the polishing device 200 includes the aforementioned tool 100 and a polishing assembly 210 , wherein the tool 100 is fixed relative to the polishing assembly 210 . The polishing assembly 210 includes a ring grinder 211 , and the first mounting mechanism 110 of the tool 100 is disposed above a polishing plate 2111 of the ring grinder 211 .

[0112] For more information about tooling, please refer to the relevant description in the previous article.

[0113] The polishing assembly 210 refers to a related assembly for polishing the workpiece 140. In some embodiments, the tool 100 can be fixedly disposed on one side of the polishing assembly 210.

[0114] The ring grinder 211 refers to a device or apparatus for performing precision grinding and polishing on the workpiece 140. In some embodiments, the ring grinder 211 may include at least a polishing disc 2111 and a motor (not shown).

[0115] The polishing disc 2111 is the core component of the ring grinder 211. Figure 1 As shown, the polishing plate 2111 of the ring grinder 211 is located at the center of the polishing assembly 210 .

[0116] Before polishing, the operator can adhere the workpiece 140 to be processed to the first mounting mechanism 110 (such as the end of the rotating part 112 close to the ring grinder 211), and then control the movement of the first driving member 123, the second driving member 124 and the third driving member through the controller respectively, so as to move the workpiece 140 to be polished mounted on the first mounting mechanism 110 to the center position of the polishing disk 2111 (i.e., the target position).

[0117] In some embodiments, the motor is electrically connected to the polishing disk 2111 to drive the polishing disk 2111 to rotate.

[0118] During polishing, the controller can control the pressure provided by the multiple first pressure transmission mechanisms 131 and the force control mechanism 132, as well as the downward movement distance in the first direction, to ensure close contact between the workpiece 140 to be polished and the polishing plate 2111. For example, if the pressure provided by the force control mechanism 132 is 25N, the downward movement distance in the first direction is 10mm; if the pressure provided by the first pressure transmission mechanism 131 is 5N, the downward movement distance in the first direction is 7mm. The controller controls the motor to start synchronously, and the motor drives the polishing plate 2111 to rotate at high speed. The polishing plate 2111 rubs against the surface of the workpiece 140 to be polished, thereby achieving the desired polishing effect. Simultaneously, the controller can also control the second drive member 124 to perform reciprocating linear motion in the second direction to further improve polishing efficiency and polishing results. For example, the reciprocating movement range of the second drive member 124 in the second direction is 10mm to 300mm, and the movement speed is 20m / min.

[0119] It should be noted that the polishing disc 2111 of the ring grinder 211 can also be replaced with a grinding disc to grind the workpiece 140 to be polished.

[0120] In some embodiments of the present specification, the polishing equipment can quickly polish the workpiece to be polished by using the polishing assembly and the aforementioned tooling.

[0121] Figure 5 It is a side view of the overall structure of the polishing machine shown in some embodiments of this specification.

[0122] Some embodiments of this specification also provide a polishing machine. Figure 5 As shown, the polishing machine 300 includes a second mounting mechanism 310, a second support mechanism 320, and a second adjustment assembly 330. The second support mechanism 320 includes a support base 321 and a drive device 322 disposed on the support base 321, and the drive device 322 is connected to the second adjustment assembly 330. The drive device 322 drives the movement of the second adjustment assembly 330 to have at least a first translational degree of freedom, a second translational degree of freedom, and a first rotational degree of freedom. The second mounting mechanism 310 includes a polishing drive shaft 311 for mounting a polishing head 340. The second adjustment assembly 330 includes a second pressure transmission mechanism 331, and the output end of the second pressure transmission mechanism 331 is connected to the polishing drive shaft 311. The second pressure transmission mechanism 331 drives the polishing drive shaft 311 to move in the direction of the first translational degree of freedom.

[0123] The direction of the first translational degree of freedom is perpendicular to the direction of the second translational degree of freedom. In some embodiments, the direction of the first translational degree of freedom can be represented by Figure 5 Z shown ′ The direction of the second translational degree of freedom can be expressed as Figure 5 Y shown ′ Direction is indicated.

[0124] In some embodiments, the direction of the first rotational degree of freedom is perpendicular to the plane formed by the direction of the first translational degree of freedom and the direction of the second translational degree of freedom. It is worth noting that the direction of the first rotational degree of freedom refers to the extension direction of the rotation axis of the first rotational degree of freedom when rotating (i.e., the direction of the rotation axis of the first rotational degree of freedom). In some embodiments, the direction of the rotation axis of the first rotational degree of freedom can be expressed as Figure 5 X shown ′ Direction is indicated.

[0125] The second mounting mechanism 310 is used to mount a polishing head 340. The polishing head 340 is a structural component used to polish a workpiece 140. The polishing head 340 can have a variety of shapes to suit different polishing requirements. For example, the polishing head 340 can have shapes including, but not limited to, cylindrical and conical.

[0126] The polishing drive shaft 311 is a structure used by the second mounting mechanism 310 to mount the polishing head 340. In some embodiments, the polishing drive shaft 311 may be provided with a hole structure for mounting the polishing head 340, with the hole structure extending along the direction of the first translational degree of freedom. It should be noted that the polishing drive shaft 311 may adopt any feasible structure as long as it can be used to mount the polishing head 340.

[0127] In some embodiments, the polishing drive shaft 311 can be directly or indirectly connected to the output end of the second pressure transmission mechanism 331. For example, the polishing drive shaft 311 can be directly connected to the second pressure transmission mechanism 331 through threaded connection, welding, etc. For another example, the polishing drive shaft 311 can be indirectly connected to the second pressure transmission mechanism 331 by connecting to other structural components.

[0128] For more details about the second pressure transmission mechanism, please refer to the relevant description below.

[0129] The second supporting mechanism 320 is a mechanism for supporting and installing the second installation mechanism 310. The supporting base 321 is a base of the second supporting mechanism 320 and can be used to install the driving device 322.

[0130] The driving device 322 refers to a device or apparatus for driving the second adjustment component 330. In some embodiments, the driving device 322 includes a plurality of driving units, and the plurality of driving units can be arranged in different directions to drive the second adjustment component 330 to move in different directions.

[0131] Just as an example, Figure 5 As shown, the driving device 322 may include a first driving unit 3221, a second driving unit 3222 and a third driving unit 3223. The first driving unit 3221 moves in the direction of the second translational freedom (Y ′ direction) is arranged on the support base 321; the second driving unit 3222 moves along the direction of the first translational freedom (Z ′ direction) is provided on the first driving unit 3221 and is connected to the output end of the first driving unit 3221; the third driving unit 3223 is along the direction of the rotation axis of the first rotational freedom degree (X ′ The first drive unit 3221, the second drive unit 3222, and the third drive unit 3223 are respectively arranged along the direction of the first translational degree of freedom, the direction of the second translational degree of freedom, and the direction of the rotation axis of the first rotational degree of freedom, thereby driving the second adjustment component 330 to move in the first translational degree of freedom, the second translational degree of freedom, and the first rotational degree of freedom.

[0132] It is worth noting that the three drive units mentioned above can be connected by a connecting structure. Among them, the connecting structure can adopt any feasible structural form, such as a connecting plate, a connecting support, etc. Moreover, the structural forms of the three drive units mentioned above can be the same or different. For example, the drive units arranged along the direction of the first translational degree of freedom and the direction of the second translational degree of freedom (such as the first drive unit 3221 and the second drive unit 3222) can adopt a combination of a motor and a slide rail structure or a hydraulic cylinder, etc., while the drive unit arranged along the direction of the rotation axis of the first rotational degree of freedom (such as the third drive unit 3223) adopts a drive motor, etc.

[0133] In some embodiments, the driving device 322 may further include a fourth driving unit (not shown). The third driving unit may be disposed on the support base 321 along the direction of the third translational degree of freedom, and the output end of the third driving unit may be connected to the first driving unit 3221 to drive the first driving unit 3221, the second driving unit 3222, and the third driving unit 3223 to move along the direction of the third translational degree of freedom.

[0134] The direction of the third translational degree of freedom is different from the direction of the first translational degree of freedom and the direction of the second translational degree of freedom. The direction of the third translational degree of freedom may be perpendicular to or not perpendicular to the direction of the second translational degree of freedom (i.e., there is an angle between the direction of the second translational degree of freedom and the direction of the third translational degree of freedom, and the angle is ≠90°). In some embodiments, the direction of the third translational degree of freedom may preferably be perpendicular to the direction of the second translational degree of freedom and also perpendicular to the direction of the first translational degree of freedom. In this case, the direction of the third translational degree of freedom can be expressed as Figure 5 Y in ′ Direction is indicated.

[0135] It should be noted that the structure of the third drive unit may be the same as or different from the structure of the first drive unit and the second drive unit.

[0136] The second adjustment assembly 330 is similar to the first adjustment assembly 130 and can be used to adjust the contact force between the polishing head 340 and the workpiece 140 to be polished during the polishing process.

[0137] The second pressure transmission mechanism 331, similar to the first pressure transmission mechanism 131, is a mechanism or device that transmits power through changes in the pressure of a fluid (such as a gas or liquid). As previously mentioned, since the basic principle of pressure transmission is to control the force during the transmission process by controlling the pressure of the fluid, precise control of the fluid pressure in the second pressure transmission mechanism 331 can achieve precise control of the force applied to the polishing head 340.

[0138] In some embodiments, the second pressure transmission mechanism 331 can be connected to the output end of the driving device 322, so that the driving device 322 can drive its movement with at least a first translational degree of freedom, a second translational degree of freedom and a first rotational degree of freedom, thereby driving the polishing head 340 to move at least along the direction of the first translational degree of freedom and the direction of the second translational degree of freedom, and rotate around the direction of the first rotational degree of freedom.

[0139] In some embodiments, the second pressure transmission mechanism 331 can be connected to the output end of the driving device 322 in a variety of ways. Exemplary connection methods include, but are not limited to, welding, threaded connection, and the like.

[0140] It should be noted that the second pressure transmission mechanism 331 and the first pressure transmission mechanism 131 may be of the same or different types, and no limitation is imposed herein.

[0141] In some embodiments of the present specification, the polishing machine adopts a second mounting mechanism, a second supporting mechanism and a second adjusting assembly, wherein the driving device is connected to the second adjusting assembly so that the movement of the second adjusting assembly has at least a first translational degree of freedom, a second translational degree of freedom and a first rotational degree of freedom, thereby enabling the polishing drive shaft connected to the second pressure transmission mechanism to drive the polishing head to move in different directions and rotate around the direction of the first rotational degree of freedom.

[0142] Figure 6 This is a schematic diagram of the overall structure of the polishing equipment shown in other embodiments of this specification. Figure 1 ; Figure 7 This is a schematic diagram of the overall structure of the polishing equipment shown in other embodiments of this specification. Figure 2 ; Figure 8 yes Figure 7 Enlarged view of point C in the middle.

[0143] Some embodiments of this specification also provide another polishing device. Figure 6-Figure 8 As shown, another polishing device 400 includes a polishing machine 300 , a polishing liquid supply device 410 and a rotation drive mechanism 420 .

[0144] For more information about polishing machines, please refer to Figure 5 and its related descriptions.

[0145] The polishing liquid supply device 410 is a device for providing the polishing liquid 430. In some embodiments, the polishing liquid supply device 410 includes a tank body 411 and a polishing liquid supply pipeline 412.

[0146] The tank body 411 is a cavity for the polishing liquid 430. In some embodiments, the tooling assembly 440 is at least partially located in the tank body 411, and the tooling assembly 440 is spaced apart from the polishing head 340 of the polishing machine 300 along the direction of the first translational degree of freedom, and the tooling assembly 440 is connected to the output end of the rotation drive mechanism.

[0147] The tooling assembly 440 refers to a component used to mount the workpiece 140 to be polished. In some embodiments, the tooling assembly may include the aforementioned tooling 100. For more information about tooling, see Figures 1-4 Related description in .

[0148] In some embodiments, the tooling 100 is at least partially located within the tank body 411. A through hole is provided on the bottom wall of the tank body 411, and the tooling 100 at least partially passes through the through hole to connect to the output end of the rotary drive mechanism. For example, the first driving member 123 of the tooling 100 can pass through the through hole to connect to the output end of the rotary drive mechanism.

[0149] In some embodiments, a seal (such as a sealing ring, etc.) can be provided in the through hole to seal between the bottom wall of the pool body 411 and the tooling 100 (such as the first driving member 123) to ensure the liquid storage function of the pool body 411 and the safe and stable operation of the tooling 100.

[0150] In some embodiments of the present specification, the tooling assembly can coordinately control the polishing head and the workpiece to be polished by adopting the aforementioned tooling, thereby facilitating improvement of polishing process efficiency and polishing accuracy.

[0151] The rotary drive mechanism refers to a mechanism or device for driving the rotation of the tooling assembly 440. The rotary drive mechanism may have any structural form, including but not limited to an electric motor, a hydraulic motor, and the like.

[0152] In some embodiments, the rotary drive mechanism can provide power for the rotation of the tooling assembly 440 so that during the polishing process of another polishing device 400, its polishing head 340 and the workpiece 140 to be polished can maintain relative rotation, thereby accelerating the polishing process and effectively improving the polishing efficiency.

[0153] The polishing liquid supply line 412 is a piping system used to supply the polishing liquid 430 into the tank body 411 or to recover the polishing liquid 430 from the tank body 411. In some embodiments, the polishing liquid supply line 412 can be disposed on one side of the tank body 411 to deliver the polishing liquid 430 into the tank body 411 without affecting the operator's field of view.

[0154] In some embodiments, as Figure 7As shown, the polishing liquid supply pipeline 412 includes at least a liquid storage tank 4121, a supply pipeline 4122 and a recovery pipeline 4123. Among them, the liquid storage tank 4121 may include a polishing liquid storage tank (not shown in the figure) and a polishing liquid recovery tank (not shown in the figure). The polishing liquid storage tank can be used to store unused polishing liquid 430, and the polishing liquid recovery tank can be used to recover and store used polishing liquid 430. The supply pipeline 4122 can be used to transport unused polishing liquid 430 into the pool body 411. The recovery pipeline 4123 can be used to recover the used polishing liquid 430 in the pool body 411.

[0155] In some embodiments, one end of the supply line 4122 is connected to the polishing liquid storage tank, and the other end of the supply line 4122 at least partially extends into the pool body 411 to transport unused polishing liquid 430 into the pool body 411 .

[0156] In some embodiments, a first valve 4124 is provided on the supply line 4122. The first valve 4124 can be a solenoid valve or the like.

[0157] The first valve 4124 can be used to control the flow of the supply line 4122. When the first valve 4124 is open, the supply line 4122 is open; when the first valve 4124 is closed, the supply line 4122 is closed. In some embodiments, the opening and closing time of the first valve 4124 can be determined based on the volume of the tank 411 and the delivery rate of the supply line 4122, so as to ensure that both the workpiece 140 to be polished and the polishing head 340 are immersed in the polishing liquid 430.

[0158] It should be noted that the recovery line 4123 is similar to the supply line 4122 and their similarities are not repeated here. The difference is that one end of the recovery line 4123 is connected to the polishing liquid recovery tank, and the other end of the recovery line 4123 is arranged below the tank body 411 and connected to the tank body 411.

[0159] In some embodiments, the electronic components in another polishing device 400 (such as a rotary drive motor, a drive device, a second pressure transmission mechanism and a first valve, etc.) can be electrically connected to the controller to achieve coordinated control and operation and improve control efficiency.

[0160] In some embodiments of this specification, by combining a polishing machine, a polishing liquid supply device, and a rotary drive mechanism, the rotary drive mechanism and the pressure transmission mechanism can be coordinated to achieve floating polishing and / or constant pressure polishing, thereby improving accuracy, reducing human error, and avoiding adverse consequences such as damage caused by program errors and / or human error. Furthermore, by immersing both the polishing head and the workpiece to be polished in the polishing liquid during the polishing process, defects such as bright streaks and shallow scratches can be reduced.

[0161] While the basic concepts have been described above, it will be apparent to those skilled in the art that the detailed disclosure is merely illustrative and does not limit this specification. Although not explicitly stated herein, various modifications, improvements, and revisions to this specification may be made by those skilled in the art. Such modifications, improvements, and revisions are suggested in this specification and remain within the spirit and scope of the exemplary embodiments of this specification.

Claims

1. A tool for polishing equipment, characterized in that: include: a first mounting mechanism configured to mount a workpiece to be polished; a first supporting mechanism, wherein the first mounting mechanism is disposed on the first supporting mechanism; The first adjustment component includes multiple first pressure transmission mechanisms, multiple first pressure transmission mechanisms are arranged on the first supporting mechanism, and the output ends of the multiple first pressure transmission mechanisms are all connected to the first mounting mechanism; wherein, the multiple first pressure transmission mechanisms drive the first mounting mechanism to move along the first direction.

2. The tooling for polishing equipment according to claim 1, characterized in that: The first supporting mechanism includes a base, a connecting portion, a first driving member and a second driving member; The first driving member is disposed on the base, and an output end of the first driving member is connected to the connecting portion to drive the connecting portion to move along the first direction; The second driving member is provided on the connecting portion, and an output end of the second driving member is connected to the first adjusting component to drive the first adjusting component to move along the second direction; The first direction is perpendicular to the second direction.

3. The tooling for polishing equipment according to claim 2, characterized in that: The first adjustment component also includes a force control mechanism, The force control mechanism is connected to the output end of the second driving member, and the output end of the force control mechanism is connected to the plurality of first pressure transmission mechanisms to drive the plurality of first pressure transmission mechanisms to move along the first direction.

4. The tooling for polishing equipment according to claim 1, characterized in that: The first mounting mechanism includes a fixing portion and a rotating portion; The fixing portion is connected to the output end of each of the plurality of first pressure transmission mechanisms; The rotating part is connected to the fixing part via a rotating shaft, and an extending direction of the rotating shaft is parallel to the first direction.

5. The tooling for polishing equipment according to claim 4, characterized in that: A ball bearing is provided between the fixed portion and the rotating portion, and the ball bearing is configured to enable the rotating portion to rotate relative to the fixed portion; and / or A locking mechanism is provided between the fixing portion and the rotating portion, and the locking mechanism is configured to securely connect the rotating portion to the fixing portion.

6. The tool for polishing equipment according to claim 3, characterized in that: The plurality of first pressure transmission mechanisms include hydraulic cylinders or pneumatic cylinders; and / or, The tool further includes a controller, which is electrically connected to the first driving member, the second driving member, the plurality of first pressure transmission mechanisms, and the force control mechanism.

7. A polishing device, characterized in that: Comprising the tooling and polishing assembly according to any one of claims 1 to 6, wherein the polishing assembly is configured to polish the workpiece to be polished, and the tooling is fixedly arranged relative to the polishing assembly; The polishing assembly includes a ring grinder, and the first mounting mechanism of the tool is arranged above the polishing disk of the ring grinder.

8. A polishing machine, characterized in that: comprising a second mounting mechanism, a second supporting mechanism and a second adjusting assembly, The second supporting mechanism includes a supporting base and a driving device provided on the supporting base, wherein the driving device is connected to the second adjusting assembly; The driving device drives the second adjustment assembly to move with at least a first translational degree of freedom, a second translational degree of freedom, and a first rotational degree of freedom; The direction of the first rotational degree of freedom is perpendicular to a plane formed by the direction of the first translational degree of freedom and the direction of the second translational degree of freedom; The second mounting mechanism includes a polishing drive shaft for mounting the polishing head, the second adjustment assembly includes a second pressure transmission mechanism, and the output end of the second pressure transmission mechanism is connected to the polishing drive shaft; the second pressure transmission mechanism drives the polishing drive shaft to move along the direction of the first translational degree of freedom.

9. A polishing device, characterized in that: The polishing machine according to claim 8, a polishing liquid supply device and a rotation drive mechanism are included, wherein the polishing liquid supply device includes: a tank body configured to contain a polishing liquid; a polishing liquid supply pipeline, the polishing liquid supply pipeline being configured to supply the polishing liquid into the pool body or to recover the polishing liquid in the pool body; The tooling assembly is at least partially located in the pool body, and the tooling assembly is spaced apart from the polishing head of the polishing machine along the direction of the first translational degree of freedom, and the tooling assembly is connected to the output end of the rotary drive mechanism.

10. The polishing apparatus according to claim 9, wherein The tooling assembly includes the tooling according to any one of claims 1 to 6.

Images