Grinding equipment for polishing disc assembly

Abstract

The utility model discloses grinding equipment of a polishing disk assembly, and belongs to the technical field of machining equipment of polishing machine parts. A grinding device of a polishing disc assembly is structurally characterized in that a cold and hot all-in-one machine is communicated with a rotary connector of a water cooling shaft assembly through a water conveying pipeline, the water cooling shaft assembly penetrates through an inner hole of a speed reducer and is fixed to the speed reducer, an output shaft of a motor is connected with the speed reducer, and the polishing disc assembly is fixed to the upper end of the water cooling shaft assembly. The grinding ring is placed on the upper surface of the polishing disc assembly, the water inlet connector and the water outlet connector of the water cooling shaft assembly are both communicated with an inner labyrinth groove of the polishing disc assembly, and a liquid outlet of the grinding liquid conveying pipe is formed above the polishing disc assembly. The grinding device is high in working efficiency, simple in structure and easy to operate, the disc shape of the polishing disc assembly can be ground at the specified disc surface temperature, the grinding precision is high, and the personnel cost and the production cost are reduced.

Description

Technical Field

[0001] The utility model relates to a grinding device for grinding a polishing disc assembly of a double-sided polishing machine, belonging to the technical field of processing equipment for polishing machine parts. Background Art

[0002] When processing silicon wafers on a double-sided polishing machine, the profile accuracy of the upper and lower polishing plates directly impacts the precision of the wafer. The wafer is placed in a circular workpiece fixture with curved teeth. The drivable inner and outer pin ring assemblies drive the workpiece fixture and workpiece in planetary motion around the inner pin ring. The upper and lower polishing plates rotate, causing the wafer, held between them, to rub against the polishing plates, achieving double-sided polishing. During wafer processing, the surface profile accuracy of the polishing plates directly impacts the final polished wafer. Therefore, the profile accuracy of the polishing plates in the polishing plate assembly must be guaranteed. However, due to the unique material of the polishing plates, their deformation is significantly affected by temperature. Therefore, during polishing, the plate temperature must be consistent with the actual processing temperature to achieve the desired profile accuracy.

[0003] At present, in order to achieve the disc shape accuracy during polishing disc processing, most people use double-sided polishing machines to grind the disc shape themselves. However, in actual application, the disc shape accuracy is difficult to guarantee, the operation is complicated, and it is difficult for workers to figure out the grinding rules. In addition, the cost of double-sided polishing machines is high. It is a waste to use them specifically to grind the disc shape of the polishing disc assembly, which increases personnel costs and production costs. Summary of the Invention

[0004] The present invention is to solve the above-mentioned technical problems and provides a grinding device for a polishing disc assembly. The purpose is to provide a device with high efficiency, simple structure and easy operation. It can grind the disc shape of the polishing disc assembly at a specified disc surface temperature with high grinding accuracy.

[0005] In order to achieve the above-mentioned purpose, the present invention is realized by the following technical solutions:

[0006] A grinding device with a polishing disc assembly has the following structure: a hot and cold integrated machine is connected to the rotary joint of a water-cooled shaft assembly through a water supply pipeline, the water-cooled shaft assembly passes through the inner hole of a reducer and is fixed on the reducer, the output shaft of the motor is connected to the reducer, the polishing disc assembly is fixed to the upper end of the water-cooled shaft assembly, the water inlet interface and the water outlet interface of the water-cooled shaft assembly are both connected to the internal labyrinth groove of the polishing disc assembly, the grinding ring is placed on the upper surface of the polishing disc assembly, and the outlet of the grinding liquid delivery pipe is arranged above the polishing disc assembly.

[0007] Preferably, the specific structure of the above-mentioned water-cooled shaft assembly is as follows: a water inlet pipe is provided inside the water-cooled shaft body, the water inlet pipe is connected to the rotary joint, the output shaft is fixedly connected to the upper end face of the water-cooled shaft body by bolts, and a water inlet interface and a water outlet interface are provided on the output shaft, the water inlet interface is connected to the water inlet pipe, the water outlet interface is connected to the water outlet hole provided on the water-cooled shaft body, and the water outlet hole is connected to the outlet of the rotary joint.

[0008] Preferably, the output shaft of the motor is connected to the reducer via a belt.

[0009] Preferably, the motor and reducer are fixedly mounted on the frame.

[0010] Preferably, the grinding liquid delivery pipe is connected to the grinding liquid supply system.

[0011] Due to the adoption of the above technical solution, the utility model has the following beneficial effects:

[0012] The utility model realizes the grinding of the disk surface of a single polishing disk assembly at a specified temperature, has high working efficiency, simple structure and easy operation, and can grind the disk shape of the polishing disk assembly at the specified disk surface temperature to achieve the disk shape accuracy required by the process, thereby reducing personnel costs and production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic diagram of the main structure of a grinding device of a polishing disc assembly according to the present invention.

[0014] Figure 2 yes Figure 1 Schematic diagram of the cross-sectional structure of the water-cooled shaft assembly.

[0015] In the figure: 1. Frame; 2. Motor; 3. Reducer; 4. Water-cooled shaft assembly; 5. Polishing disc assembly; 6. Grinding ring; 7. Grinding liquid delivery pipe; 8. Hot and cold integrated machine; 11. Output shaft; 12. Water-cooled shaft body; 13. Water inlet interface; 14. Water outlet interface; 15. Water inlet pipe; 16. Rotary joint. DETAILED DESCRIPTION

[0016] The following embodiments are only specific embodiments of the present invention. In order to make the purpose, technical solutions and advantages of the present invention clear at a glance, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. The protection scope of the present invention is not limited by the embodiments.

[0017] like Figure 1As shown, a grinding device with a polishing disc assembly has the following structure: a hot and cold integrated machine 8 is connected to the rotary joint 16 of the water-cooled shaft assembly 4 through a water pipeline. The water-cooled shaft assembly 4 passes through the inner hole of the reducer 3 and is fixed to the reducer 3. The output shaft of the motor 2 is connected to the reducer 3 via a belt. The polishing disc assembly 5 is fixed to the upper end of the water-cooled shaft assembly 4. The water inlet interface 13 and the water outlet interface 14 of the water-cooled shaft assembly 4 are both connected to the internal labyrinth groove of the polishing disc assembly 5. The motor 2 and the reducer 3 are fixedly mounted on the frame 1. The grinding ring 6 is placed on the upper surface of the polishing disc assembly 5. The outlet of the grinding liquid delivery pipe 7 is set above the polishing disc assembly 5. The grinding liquid delivery pipe 7 is connected to the grinding liquid supply system, which is a prior art.

[0018] like Figure 2 As shown, the specific structure of the above-mentioned water-cooled shaft assembly 4 is as follows: a water inlet pipe 15 is provided inside the water-cooled shaft body 12, the water inlet pipe 15 is connected to the rotary joint 16, the output shaft 11 is fixedly connected to the upper end face of the water-cooled shaft body 12 by bolts, and a water inlet interface 13 and a water outlet interface 14 are provided on the output shaft 11, the water inlet interface 13 is connected to the water inlet pipe 15, the water outlet interface 14 is connected to the water outlet hole provided on the water-cooled shaft body 12, and the water outlet hole is connected to the outlet of the rotary joint 16.

[0019] The above-mentioned integrated cold and hot machine 8 is an existing commercially available product, preferably an integrated cold and hot machine with model LR-08D produced by Beijing Jiuzhou Tongcheng Technology Co., Ltd.

[0020] The working principle of this utility model is as follows:

[0021] Start the motor 2, which drives the water-cooled shaft assembly 4 on the reducer 3 to rotate. The polishing disc assembly 5 is fixed on the water-cooled shaft assembly 4, thereby realizing the rotation of the polishing disc assembly 5; the grinding ring 6 is placed on the upper surface of the polishing disc assembly 5, and the rotation of the polishing disc assembly 5 drives the grinding ring 6 to rotate. The grinding liquid is delivered by the grinding liquid delivery pipe 7, thereby realizing the grinding of the upper surface of the polishing disc assembly 5 by the grinding ring 6. By adjusting the radial position of the grinding ring 6 on the polishing disc assembly 5, the disc shape accuracy can be controlled.

[0022] The water-cooled shaft assembly 4 consists of an output shaft 11, a water-cooled shaft body 12, a water inlet interface 13, a water outlet interface 14, a water inlet pipe 15, and a rotary joint 16. The lower end of the water-cooled shaft body 12 is connected to the rotary joint 16. A water inlet pipe 15 is provided inside the water-cooled shaft body 12, connecting the rotary joint 16 and the water inlet interface 13 provided on the output shaft 11. The output shaft 11 also has a water outlet interface 14, wherein the lower end of the water outlet interface 14 is connected to the water outlet hole of the water-cooled shaft body 12. The temperature control liquid of the hot and cold integrated machine 8 enters through the water inlet of the rotary joint 16, then flows through the water inlet pipe 15 to the water inlet interface 13, enters the internal labyrinth groove of the polishing disc assembly 5, fills the entire internal labyrinth groove, then flows from the water outlet interface 14 into the water-cooled shaft body 12, and finally flows back to the hot and cold integrated machine 8 from the outlet of the rotary joint 16, thereby controlling the surface temperature of the polishing disc assembly 5 and ensuring the required surface temperature during the grinding process. It is easy to operate and has good practicality.

[0023] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A grinding device for a polishing disc assembly, characterized in that The structure is as follows: the hot and cold integrated machine (8) is connected to the rotary joint (16) of the water-cooled shaft assembly (4) through a water pipeline, the water-cooled shaft assembly (4) passes through the inner hole of the reducer (3) and is fixed on the reducer (3), the output shaft of the motor (2) is connected to the reducer (3), the polishing disc assembly (5) is fixed to the upper end of the water-cooled shaft assembly (4), the water inlet interface (13) and the water outlet interface (14) of the water-cooled shaft assembly (4) are both connected to the internal labyrinth groove of the polishing disc assembly (5), the grinding ring (6) is placed on the upper surface of the polishing disc assembly (5), and the liquid outlet of the grinding liquid delivery pipe (7) is set above the polishing disc assembly (5).

2. The grinding device of the polishing disc assembly according to claim 1, characterized in that The specific structure of the water-cooled shaft assembly (4) is as follows: a water inlet pipe (15) is provided inside the water-cooled shaft body (12), the water inlet pipe (15) is connected to the rotary joint (16), the output shaft (11) is fixedly connected to the upper end surface of the water-cooled shaft body (12) by bolts, a water inlet interface (13) and a water outlet interface (14) are provided on the output shaft (11), the water inlet interface (13) is connected to the water inlet pipe (15), the water outlet interface (14) is connected to the water outlet hole provided on the water-cooled shaft body (12), and the water outlet hole is connected to the outlet of the rotary joint (16).

3. The grinding device of the polishing disc assembly according to claim 1, characterized in that The output shaft of the motor (2) is connected to the reducer (3) via a belt.

4. A grinding device for a polishing disc assembly according to claim 1 or 3, characterized in that The motor (2) and the reducer (3) are fixedly mounted on the frame (1).

5. The grinding device of the polishing disc assembly according to claim 1, characterized in that The grinding liquid delivery pipe (7) is connected to the grinding liquid supply system.

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