Silicon carbide suction cup cleaning box

Abstract

The utility model relates to the technical field of silicon carbide ceramics, in particular to a silicon carbide sucker cleaning box which comprises an upper cover, a sucker and a lower disc, and the sucker is located between the upper cover and the lower disc. Wherein a fixing ring used for fixing the suction cup is arranged on the inner side of a cover plate of the upper cover along the circumference, a cover column extends out of the inner side of the side wall of the upper cover, an opening groove is further formed in the inner side wall of the cover column, and the inner side of the opening groove extends into the side wall of the upper cover and is further provided with a sealing groove; a positioning ring corresponding to the fixing ring is arranged in the lower disc, and a sealing block corresponding to the sealing groove is arranged on the outer side wall of the positioning ring. The utility model has the beneficial effects that through the close fit of the sealing groove and the sealing block and the design of the whole box body structure, an almost completely closed clean space is constructed, dust, particles, moisture and other pollutants in the air are effectively prevented from entering the box, and the service life of the box body is prolonged. Therefore, it is ensured that the suction cup is always in an extremely high-cleanliness environment in the treatment, storage and transportation processes.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide ceramics, in particular to a silicon carbide suction cup clean box. Background Art

[0002] Silicon carbide ceramics have excellent room-temperature mechanical properties, such as high strength, high hardness, and high elastic modulus, excellent high-temperature stability, such as high thermal conductivity and low thermal expansion coefficient, as well as good specific stiffness and optical processing performance. They are particularly suitable for precision ceramic components used in semiconductor integrated circuit equipment. For example, silicon carbide vacuum ceramic chucks are widely used in semiconductor photolithography etching, wafer thinning, wafer detection, and laser processing.

[0003] Silicon carbide suction cups are key fixtures, and their cleanliness directly impacts product quality and production efficiency. However, existing cleanroom equipment lacks sealing performance, making it difficult to meet these requirements. Utility Model Content

[0004] The technical problem to be solved by the utility model is to provide a silicon carbide suction cup clean box, which effectively solves the problems in the background technology.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is: a silicon carbide suction cup clean box, including an upper cover, a suction cup and a lower plate,

[0006] The suction cup is located between the upper cover and the lower plate;

[0007] Among them, a fixing ring for fixing the suction cup is provided along the circumference of the inner side of the cover plate of the upper cover, a cover column extends from the inner side of the side wall of the upper cover, an open groove is also provided on the inner side wall of the cover column, and a sealing groove is also provided on the inner side of the open groove extending to the inside of the side wall of the upper cover; a positioning ring corresponding to the fixing ring is provided in the lower plate, and a sealing block corresponding to the sealing groove is provided on the outer side wall of the positioning ring.

[0008] Furthermore, the opening groove and the sealing groove are centrally symmetrically arranged along the circumferential center of the upper cover.

[0009] Furthermore, the sealing blocks are centrally symmetrically arranged along the circumferential center of the positioning ring.

[0010] Furthermore, a plurality of reference grooves are provided on the outer side wall of the upper cover at intervals; the reference grooves are arranged in a centrosymmetrical manner along the circumferential center of the outer side wall of the upper cover.

[0011] Furthermore, a positioning groove corresponding to the reference groove is provided on the outer side wall of the lower plate.

[0012] Furthermore, the upper portion of the suction cup is arranged on the positioning ring, and the lower portion of the suction cup extends to the inside of the positioning ring.

[0013] Furthermore, first grooves are provided on both sides of the positioning ring, and second grooves corresponding to the first grooves are provided on the outer side wall of the lower plate.

[0014] Furthermore, a mounting groove is provided along the edge of the bottom of the lower plate, and a positioning is also provided at the center of the bottom of the lower plate.

[0015] Furthermore, the suction cup is made of corrosion-resistant material.

[0016] Furthermore, the upper cover and the lower plate are both made of lightweight materials.

[0017] The beneficial effect of the present invention is that through the close cooperation between the sealing groove and the sealing block, as well as the design of the entire box structure, an almost completely enclosed clean space is constructed, which effectively prevents dust, particles, moisture and other pollutants in the air from entering the box, thereby ensuring that the suction cup is always in an extremely high clean environment during handling, storage and transportation. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 This is a schematic structural diagram of a silicon carbide suction cup clean box in an embodiment of the present utility model;

[0020] Figure 2 This is a schematic structural diagram of the upper cover in an embodiment of the present utility model;

[0021] Figure 3 This is a schematic structural diagram of the suction cup in an embodiment of the present utility model;

[0022] Figure 4 This is a schematic diagram of the upper structure of the lower plate in the embodiment of the present utility model;

[0023] Figure 5 It is a schematic diagram of the bottom structure of the lower plate in an embodiment of the present utility model.

[0024] Figure numerals: 1, upper cover; 11, fixing ring; 12, cover column; 121, opening groove; 122, sealing groove; 13, reference groove; 2, suction cup; 3, lower plate; 31, positioning ring; 311, sealing block; 312, first groove; 313, second groove; 32, positioning groove; 33, mounting groove; 34, positioning ring. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0026] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly attached to the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meanings as those commonly understood by those skilled in the art to which this invention pertains. The terms used in this specification are for the purpose of describing specific embodiments only and are not intended to limit this invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0028] like Figures 1 to 5 The silicon carbide suction cup clean box shown includes an upper cover 1, a suction cup 2 and a lower plate 3, wherein the suction cup 2 is located between the upper cover 1 and the lower plate 3; wherein, a fixing ring 11 for fixing the suction cup 2 is provided along the circumference on the inner side of the cover plate of the upper cover 1, a cover column 12 extends from the inner side of the side wall of the upper cover 1, an open groove 121 is further provided on the inner side wall of the cover column 12, and a sealing groove 122 is further provided on the inner side of the open groove 121 extending to the inner side of the side wall of the upper cover 1; a positioning ring 31 corresponding to the fixing ring 11 is provided in the lower plate 3, and a sealing block 311 corresponding to the sealing groove 122 is provided on the outer side wall of the positioning ring 31.

[0029] The implementation process of the present utility model is to place the lower part of the suction cup 2 into the interior of the positioning ring 31, and the upper part of the suction cup 2 is placed on the positioning ring 31, and then the sealing block 311 is placed in the open groove 121. When the sealing block 311 is against the top of the open groove 121, the upper cover 1 is rotated, and the sealing block 311 enters the sealing groove 122. When the sealing block 311 enters the innermost part of the sealing groove 122, the reference groove 13 on the outer wall of the upper cover 1 is exactly aligned with the positioning groove 32 on the outer wall of the lower plate 3, and the installation process of the upper cover 1 and the lower plate 3 is completed.

[0030] In the present invention, the opening groove 121 and the sealing groove 122 are arranged in a centrally symmetrical manner along the circumferential center of the upper cover 1. The symmetrical arrangement of the sealing groove 122 helps to ensure that the seal can be evenly compressed during installation, forming a uniform sealing surface, reducing the risk of leakage, and improving the sealing performance of the product. The centrally symmetrical design simplifies the structural design of the upper cover, making the mold design, manufacturing and processing processes more efficient. At the same time, due to the symmetry of the structure, it can also reduce errors and deviations in the manufacturing process, and improve the consistency and yield rate of the product. The centrally symmetrical design of the opening groove 121 and the sealing groove 122 makes the installation process more intuitive and simple, reducing the possibility of installation errors. At the same time, it is also easier to locate and replace components such as seals during maintenance.

[0031] In the present invention, the sealing block 311 is arranged in a centrally symmetrical manner along the circumferential center of the positioning ring 31. The centrally symmetrical arrangement of the sealing block 311 can ensure that the sealing surfaces are subjected to uniform pressure distribution when in contact, which helps to form a tight sealed connection, reduce the risk of leakage, and improve the overall sealing effect. The centrally symmetrical arrangement of the sealing block 311 makes installation more intuitive and accurate, making it easier to find the correct position and install the seal 311, thereby reducing assembly errors and unnecessary adjustments. Because the sealing block 311 is evenly stressed and has a stable structure, it can maintain effective sealing performance for a longer period of time, helping to extend the service life of the product and reduce maintenance costs and downtime caused by seal failure.

[0032] In the present invention, the outer wall of the upper cover 1 is provided with a number of reference grooves 13 spaced apart. These grooves 13 are arranged symmetrically about the center of the circumference of the outer wall of the upper cover 1. These grooves 13 serve as reference points or positioning marks during assembly. Their symmetrical arrangement facilitates precise alignment of the upper cover 1 with the lower plate 3, helping to reduce assembly errors and improve overall assembly accuracy. Guided by the reference grooves 13, the correct assembly position and orientation can be found more quickly, simplifying the assembly process and improving production efficiency. Furthermore, the symmetrical design makes the assembly process more intuitive and reduces the difficulty.

[0033] As a preferred embodiment of the above embodiment, a positioning groove 32 corresponding to the reference groove 13 is provided on the outer side wall of the lower plate 3. The corresponding arrangement of the positioning groove 32 and the reference groove 13 provides a more accurate positioning reference for the assembly between the upper cover 1 and the lower plate 3. During the assembly process, the precise alignment of the reference groove 13 and the positioning groove 32 can significantly reduce assembly errors and ensure an accurate connection between the upper cover 1 and the lower plate 3. During the assembly process, if the positioning between the components is inaccurate, it may cause collisions and friction during the assembly process, thereby causing damage to the components. The precise alignment of the reference groove 13 and the positioning groove 32 can effectively avoid this situation and reduce the risk of damage during the assembly process.

[0034] In the present invention, the upper part of the suction cup 2 is arranged on the positioning ring 31, and the lower part of the suction cup 2 extends to the inside of the positioning ring 31. This forms a tighter and more stable connection between the suction cup 2 and the positioning ring 31. The extended portion of the lower part of the suction cup 2 contacts the inside of the positioning ring 31, increasing the contact area, thereby improving the stability and reliability of the connection, and helping to ensure that the crystal 2 will not loosen or fall off due to vibration or external force during use. In addition, the design of the positioning ring 31 itself has a positioning function, which can ensure that the suction cup 2 can be accurately placed in the predetermined position during assembly. The extended portion of the lower part of the suction cup 2 further enhances the positioning effect, making the installation position of the suction cup more precise.

[0035] In the present invention, first grooves 312 are provided on either side of the positioning ring 31, and second grooves 313 corresponding to the first grooves 312 are provided on the outer sidewall of the lower plate 3. The corresponding arrangement of the first and second grooves 312, 313, provides a precise positioning reference for assembly between the positioning ring 31 and the lower plate 3. During assembly, the two can be precisely aligned, reducing assembly errors and improving assembly accuracy. The clear correspondence between the first and second grooves 312, 313 makes it easier for assemblers to locate and confirm the assembly position, eliminating the need for complex adjustments and calibrations. This significantly simplifies the assembly process and improves efficiency.

[0036] In the present invention, mounting grooves 33 are provided along the bottom edge of the lower plate 3, and a positioning ring 34 is located in the center of the bottom of the lower plate 3. Mounting grooves 33 provide a secure interface for mounting the lower plate 3 with other components (such as the base, frame, etc.). Through mounting grooves 33, screws, clips, or other fasteners can be used to secure the lower plate in place, preventing movement or loosening during use. Positioning ring 34, located in the center of the bottom of the lower plate, ensures precise positioning and centering of the lower plate during installation. It cooperates with corresponding structures on other components to achieve precise centering.

[0037] In the present invention, the suction cup 2 is made of a corrosion-resistant material. This material exhibits excellent corrosion resistance and is able to withstand erosion by various corrosive media (such as acids, alkalis, and salts). This effectively protects the suction cup 2 from corrosion damage, allowing it to maintain stability and reliability for extended periods of use, significantly extending its service life.

[0038] In the present invention, both the upper cover 1 and the lower plate 3 are made of lightweight materials. The use of lightweight materials significantly reduces the weight of the upper cover 1 and the lower plate 3, thereby reducing the overall weight of the entire device or equipment.

[0039] Those skilled in the art should understand that the present invention is not limited to the above-described embodiments. The above-described embodiments and the specification are merely illustrative of the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A silicon carbide suction cup clean box, comprising an upper cover (1), a suction cup (2) and a lower plate (3), characterized in that: The suction cup (2) is located between the upper cover (1) and the lower plate (3); A fixing ring (11) for fixing the suction cup (2) is provided along the circumference of the inner side of the cover plate of the upper cover (1), a cover column (12) extends from the inner side of the side wall of the upper cover (1), an opening groove (121) is provided on the inner side wall of the cover column (12), and a sealing groove (122) is provided on the inner side of the opening groove (121) extending to the inner side of the side wall of the upper cover (1); a positioning ring (31) corresponding to the fixing ring (11) is provided in the lower plate (3), and a sealing block (311) corresponding to the sealing groove (122) is provided on the outer side wall of the positioning ring (31).

2. The silicon carbide suction cup clean box according to claim 1, characterized in that: The opening groove (121) and the sealing groove (122) are arranged in a centrosymmetrical manner along the circumferential center of the upper cover (1).

3. The silicon carbide suction cup clean box according to claim 1, characterized in that: The sealing blocks (311) are centrally symmetrically arranged along the circumferential center of the positioning ring (31).

4. The silicon carbide suction cup clean box according to claim 1, characterized in that: A plurality of reference grooves (13) are provided on the outer side wall of the upper cover (1) at intervals; the reference grooves (13) are arranged in a centrosymmetrical manner along the circumferential center of the outer side wall of the upper cover (1).

5. The silicon carbide suction cup clean box according to claim 4, characterized in that: A positioning groove (32) corresponding to the reference groove (13) is provided on the outer side wall of the lower plate (3).

6. The silicon carbide suction cup clean box according to claim 1, characterized in that: The upper portion of the suction cup (2) is arranged on the positioning ring (31), and the lower portion of the suction cup (2) extends to the interior of the positioning ring (31).

7. The silicon carbide suction cup clean box according to claim 1, characterized in that: First grooves (312) are provided on both sides of the positioning ring (31), and second grooves (313) corresponding to the first grooves (312) are provided on the outer side wall of the lower plate (3).

8. The silicon carbide suction cup clean box according to claim 1, characterized in that: A mounting groove (33) is provided along the edge of the bottom of the lower plate (3), and a positioning ring (34) is also provided at the center of the bottom of the lower plate (3).

9. The silicon carbide suction cup clean box according to claim 1, characterized in that: The suction cup (2) is made of corrosion-resistant material.

10. The silicon carbide suction cup clean box according to claim 1, characterized in that: The upper cover (1) and the lower plate (3) are both made of lightweight materials.

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