Water-gas separation box special for wastewater discharge of wet etching and grinding equipment in chip factory

Abstract

The utility model discloses a water-gas separation box special for wastewater discharge of wet etching and grinding equipment in a chip factory, which comprises a hollow rectangular box body, the top or the left side part of the rectangular box body is connected with a water inlet pipeline, the bottom or the right side part of the rectangular box body is connected with a water outlet pipeline, and the top of the rectangular box body is connected with a waste gas discharge pipe. The technical scheme of the utility model has the beneficial effects that: 1, the volume is small, the secondary distribution space below the raised floor of the ultra-clean plant can be effectively managed and controlled, and the full use of other system installation spaces is facilitated; 2, a reliable water seal structure is provided, so that waste gas in a waste water pipeline can be effectively blocked in the box body; and 3, the structure is firm, and the service life of the U-shaped trap pipe fitting is longer than that of a common U-shaped trap pipe fitting.

Description

Technical Field

[0001] The utility model belongs to the technical field of wastewater discharge from wet etching and grinding equipment in chip factories, and particularly relates to a water-gas separation box specially used for wastewater discharge from wet etching and grinding equipment in chip factories. Background Art

[0002] In the wafer cleaning and polishing (CMP) process areas following the wet etching process in integrated circuit chip manufacturing plants, specialized manufacturing equipment uses large quantities of high-purity chemical liquids, such as NH3·H2O (ammonia), HF (hydrofluoric acid), and H2SO4 (sulfuric acid), to treat the wafers. After completing this process, the equipment discharges a large amount of highly concentrated chemical waste, which is highly corrosive and has a strong odor. If the drainage system is not properly designed and installed, the waste gas can flow back into the manufacturing equipment through the wastewater pipes, corroding the equipment's pipes and electrical components, shortening the equipment's service life. This can affect equipment performance and ultimately reduce chip quality and yield.

[0003] Currently, in the wastewater discharge piping system of the wet etching process (CLEAN) and polishing process (CMP) area of integrated circuit chip manufacturing, a U-shaped water trap structure is often used to isolate the backflow of waste gas. The two most commonly used methods are: single U-shaped water trap method (such as Figure 1 、 Figure 2 As shown) and U-shaped water trap + water-gas separation method (as shown Figure 3 、 Figure 4As shown). A U-trap is a process where a portion of the drainage pipe is formed into a U-bend. Wastewater accumulates at the U-bend, forming a water trap greater than 150mm deep. This serves to isolate the equipment's water outlet from the main plant wastewater pipeline, preventing the backflow of corrosive and harmful gases generated by the wastewater into the equipment. The so-called water-gas separation method involves installing an independent exhaust pipe at a higher position in the wastewater discharge piping system. This pipe discharges the exhaust gas and the mixed gas subsequently generated by the discharged wastewater into the main plant exhaust pipe for centralized treatment by the central exhaust gas treatment system. According to the structure of the cleanroom in an integrated circuit chip manufacturing plant, cleaning (CLEAN) and polishing (CMP) equipment are installed on a raised floor. Below the raised floor is the plant secondary distribution area, which is narrow and densely packed with numerous input pipes. Actual measurements show that the total vertical space below is approximately 1000-1200mm, but only approximately 300-450mm of vertical space is available for wastewater discharge. Therefore, this type of conventional wastewater pipe system has the following defects: 1. The overall volume of the pipe system is too large: in order to achieve smooth drainage and good blocking effect, the wastewater pipe system needs to retain a certain drainage height difference and U-shaped water trap water storage depth, which requires at least 450mm height and 600mm length, thus occupying the limited usable space below; 2. Difficult installation due to height / angle restrictions: The installation space under the elevated floor is small, and most of the space has been occupied by various input pipes and power configuration systems of the equipment, which brings great difficulties to the installation and daily maintenance of the wastewater pipe system; 3. It is easy to cause corrosion and damage to pipes and exhaust fans: The installation of 1 / 2-inch to 3 / 4-inch water-gas separation exhaust pipes is insufficient due to space limitations or the impact force is strong when the equipment has a large drainage volume, which easily inhales waste liquid, causing the water-gas separation exhaust pipe itself to be damaged due to corrosion. If the waste liquid enters the exhaust main system pipe system of the plant system, it will cause damage to the main system pipe and exhaust fan. Utility Model Content

[0004] In view of this, the purpose of the present invention is to provide a water-gas separation box specially used for wastewater discharge from wet etching and grinding equipment in chip factories, so as to solve the shortcomings of the existing technology.

[0005] In order to achieve the above-mentioned purpose, the present invention is realized by the following technical solutions:

[0006] A water-gas separation box is provided, which is specially used for wastewater discharge from wet etching and grinding equipment in chip factories. The box comprises a hollow rectangular box body, the top or left side of which is connected to a water inlet pipe, the bottom or right side of which is connected to a water outlet pipe, and the top of which is connected to an exhaust gas discharge pipe.

[0007] As described in the water-gas separation box specially used for wastewater discharge from wet etching and grinding equipment in chip factories, a water retaining baffle is provided in the middle position of the bottom plate inside the rectangular box, and the water retaining baffle divides the internal space of the rectangular box into a water inlet buffer area and a water discharge area. The water inlet pipe is connected to the water inlet buffer area, and the water outlet pipe is connected to the water discharge area. The bottom surface height of the water inlet pipe is lower than the upper edge of the water retaining baffle.

[0008] As described above, the water-gas separation box is specially used for wastewater discharge from wet etching and grinding equipment in chip factories, wherein the water inlet pipe located on the top of the rectangular box is a straight pipe, and the water inlet pipe located on the left side of the rectangular box is a 90° bend pipe.

[0009] As described above, the water-gas separation box is specially used for wastewater discharge from wet etching and grinding equipment in chip factories, wherein the internal space of the rectangular box is at least 2 to 3 times larger than the internal space of the waste gas discharge pipe.

[0010] As described above, the water-gas separation box is specially used for wastewater discharge from wet etching and grinding equipment in chip factories, wherein the rectangular box body, the water inlet pipe, the water outlet pipe and the waste gas discharge pipe are made of hard polyvinyl chloride or polypropylene or weldable polytetrafluoroethylene.

[0011] The beneficial effects of the technical solution of this utility model are:

[0012] 1. Its small size can effectively manage and control the secondary distribution space under the elevated floor of the clean room, which is conducive to the full use of the installation space for other systems;

[0013] 2. With a reliable water seal structure, the waste gas in the wastewater pipe can be effectively blocked in the box;

[0014] 3. The structure is strong and can achieve a longer service life than ordinary U-shaped water trap pipe fittings. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] To further illustrate the above-mentioned purpose, structural features and effects of the present invention, the present invention will be described in detail below with reference to the accompanying drawings.

[0016] Figure 1 、 Figure 2 This is a schematic diagram of the structure of a single U-shaped water trap in the prior art;

[0017] Figure 3 、 Figure 4 This is a schematic diagram of the structure of the U-shaped water trap + water-gas separation method in the prior art;

[0018] Figure 5 This is a schematic structural diagram of a preferred embodiment of the utility model;

[0019] Figure 6This is a schematic diagram of a top-inlet and side-outlet PID installation in a preferred embodiment of the present invention;

[0020] Figure 7 This is a schematic diagram of the PID installation with top in and bottom out in a preferred embodiment of the utility model;

[0021] Figure 8 This is a schematic diagram of a PID installation with side inlet and bottom outlet in a preferred embodiment of the present invention;

[0022] Figure 9 This is a schematic diagram of a side-in and side-out PID installation in a preferred embodiment of the present invention;

[0023] In the figure: 1. Rectangular box; 2. Upper inlet pipe; 3. Side inlet pipe; 4. Lower outlet pipe; 5. Side outlet pipe; 6. Exhaust gas discharge pipe; 7. Water retaining baffle. DETAILED DESCRIPTION

[0024] The terms "utility model" and "the present invention" as used in this specification are intended to refer broadly to all subject matter of this specification and any patent claims below. Statements containing these terms should not be understood to limit the subject matter described herein or to limit the meaning or scope of any patent claim below. In addition, this specification does not attempt to describe or limit the subject matter covered by any claim of any specific component, paragraph, statement or figure of this application. The subject matter should be understood with reference to the entire specification, all drawings and any claims below. The present invention may have other embodiments and be practiced or implemented in other ways. Moreover, it should be understood that the wording and terminology used herein are for illustrative purposes and should not be considered as limiting.

[0025] The details of the present invention will now be discussed with reference to the accompanying drawings which illustrate the present invention by way of example only. In the accompanying drawings, similar features or components may be marked with the same reference numerals.

[0026] The use of "including," "having," and "comprising" and variations thereof herein is intended to encompass the items listed thereafter and equivalents thereof, as well as additional items. Although reference may be made to directions such as above, below, upward, downward, rearward, bottom, top, front, and rear in describing the drawings, for convenience, reference is made relative to the drawings. These directions are not intended to literally define or limit the present invention in any manner. Furthermore, terms such as "first," "second," and "third" are used herein for descriptive purposes and are not intended to indicate or imply importance or significance.

[0027] See Figure 5As shown, in a preferred embodiment, the utility model is specifically used for the water-gas separation box for wastewater discharge of wet etching and grinding equipment in chip factories. It includes a hollow rectangular box body 1. The top or left side of the rectangular box body 1 is connected to a water inlet pipe. For convenience, the water inlet pipe at the top of the rectangular box body 1 is called the upper inlet pipe 2. The water inlet pipe on the left side of the rectangular box body 1 is called the side inlet pipe 3. The bottom or right side of the rectangular box body 1 is connected to a water outlet pipe, wherein the water outlet pipe at the bottom of the rectangular box body 1 is called the lower outlet pipe 4, and the water outlet pipe on the right side of the rectangular box body 1 is called the side outlet pipe 5. The top of the rectangular box body 1 is connected to an exhaust gas discharge pipe 6.

[0028] Furthermore, a water retaining baffle 7 is provided in the middle position of the bottom plate inside the rectangular box 1, and the water retaining baffle 7 divides the internal space of the rectangular box 1 into a water inlet buffer area and a water discharge area. The water inlet pipe is connected to the water inlet buffer area, and the water outlet pipe is connected to the water discharge area. The bottom surface height of the water inlet pipe is lower than the upper edge of the water retaining baffle 7.

[0029] According to different application occasions, the water inlet / outlet direction is changed. This device can be made into 4 modes: top inlet + side outlet, top inlet + bottom outlet, side inlet + bottom outlet, side inlet + side outlet. Figure 6 、 Figure 7 、 Figure 8 and Figure 9 As shown;

[0030] A circular hole is opened on the right side of the top plate, and the exhaust gas discharge pipe 6 is welded. In the upward inlet mode, another circular hole is opened on the left side of the top plate, and the upward inlet pipe 2 is welded. The upward inlet pipe 2 is a straight pipe with its bottom parallel to the bottom plate and its height lower than the upper edge of the water retaining baffle 7. In the side inlet mode, a circular hole is opened on the left plate, and the side inlet pipe 3 is welded. The side inlet pipe 3 is a 90° bend pipe with its bottom also parallel to the bottom plate and its height lower than the upper edge of the water retaining baffle 7. In the downward outlet mode, a circular hole is opened on the right side of the bottom plate, and the downward outlet pipe 4 is welded. In the side outlet mode, a circular hole is opened on the right plate, and the side outlet pipe 5 is welded.

[0031] Depending on the type of wastewater discharged, the rectangular box 1, water inlet pipe, water outlet pipe and exhaust gas discharge pipe 6 are made of hard polyvinyl chloride (PVC), polypropylene (PP) and weldable polytetrafluoroethylene (PTFE), that is, they are made of corrosion-resistant plastic welding.

[0032] A better specific design scheme is: the dimensions of the rectangular box 1 are: 180mm in length, 120mm in width, 120mm in height, and 10mm in thickness. The nominal diameters of the water inlet pipe and the water outlet pipe are both 2 inches, and the nominal diameter of the exhaust gas discharge pipe 6 is 1 inch. The lower edges of the upper inlet pipe 2 and the side inlet pipe 3 are parallel to the upper surface of the bottom plate of the rectangular box 1, and the distance between the two is set to 10mm. The height of the water retaining baffle 7 from the upper surface of the bottom plate is set to 30mm. Wastewater is discharged into the box from the upper inlet pipe 2 or the side inlet pipe 3, and after filling the water inlet buffer zone on the left, it overflows the water retaining baffle 7 and enters the drainage zone on the right, and is then discharged from the side outlet pipe 5 or the lower outlet pipe 4 to the wastewater main system of the plant system. Wastewater will overflow into the drainage area and be discharged only after it fills most of the water inlet buffer zone. The liquid level in the water inlet buffer zone is always higher than 10mm, so the exhaust gas in the wastewater pipe can be effectively blocked in the box and cannot flow back into the equipment from the water inlet pipe, causing damage to the pipe structure and electronic components.

[0033] The internal space of the rectangular box 1 is at least 2 to 3 times larger than the space inside the exhaust gas discharge pipe 6, so that the bottom end of the exhaust gas discharge pipe 6 can be kept at a certain distance from the liquid surface in the box, and the waste liquid will not be sucked in and flow into the factory exhaust main pipe.

[0034] This wastewater discharge water-gas separation box is particularly suitable for the wastewater discharge piping system of manufacturing equipment in the wet etching (CLEAN) and grinding (CMP) process areas, and can also be extended to other process areas, such as the TMAHD (developer waste liquid) discharge system of the photoresist developing equipment in the yellow light area.

[0035] The above are only preferred embodiments of the present invention and do not limit the implementation methods and protection scope of the present invention. Those skilled in the art should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the description and illustrations of the present invention should be included in the protection scope of the present invention.

Claims

1. A water-gas separation box specially used for wastewater discharge from wet etching and grinding equipment in chip factories, characterized by: It comprises a hollow rectangular box body, wherein the top or left side of the rectangular box body is connected to a water inlet pipe, the bottom or right side of the rectangular box body is connected to a water outlet pipe, and the top of the rectangular box body is connected to an exhaust gas discharge pipe.

2. The water-gas separation box specially used for wastewater discharge from wet etching and grinding equipment in chip factories as claimed in claim 1, characterized in that: A water retaining baffle is provided in the middle of the bottom plate of the rectangular box, and the water retaining baffle divides the internal space of the rectangular box into a water inlet buffer area and a water discharge area. The water inlet pipe is connected to the water inlet buffer area, and the water outlet pipe is connected to the water discharge area. The bottom surface height of the water inlet pipe is lower than the upper edge of the water retaining baffle.

3. The water-gas separation box specially used for wastewater discharge from wet etching and grinding equipment in chip factories as claimed in claim 1, characterized in that: The water inlet pipe located at the top of the rectangular box is a straight pipe, and the water inlet pipe located at the left side of the rectangular box is a 90-degree elbow.

4. The water-gas separation box specially used for wastewater discharge from wet etching and grinding equipment in chip factories as claimed in claim 1, characterized in that: The inner space of the rectangular box is at least 2 to 3 times larger than the inner space of the exhaust gas discharge pipe.

5. The water-gas separation box specially used for wastewater discharge from wet etching and grinding equipment in chip factories as claimed in claim 1, characterized in that: The rectangular box, the water inlet pipe, the water outlet pipe and the exhaust gas discharge pipe are made of hard polyvinyl chloride or polypropylene or weldable polytetrafluoroethylene.

Images