Vacuumizing device for silicon carbide sintering furnace

Abstract

The utility model discloses a vacuumizing device for a silicon carbide sintering furnace, which comprises a sintering furnace and a filtering vacuum structure, and the filtering vacuum structure is mounted on the sintering furnace. The utility model relates to the technical field of sintering furnaces, a pair of replaceable filtering inner boxes is designed in the structure, and the inner boxes can be conveniently inserted into filtering support blocks shaped like a Chinese character'ri ', so that the inner boxes are convenient to replace and maintain quickly; various filtering media such as filtering carbon, a sterilization net and an adsorption net can be arranged in the filtering inner box, impurities, bacteria and harmful gas in the sintering furnace are effectively removed, and the purity of output air is ensured; through the cooperation of a horizontal adjusting electromagnet and a magnet, the position of a filtering Chinese character'ri '-shaped supporting block can be flexibly adjusted, so that the replaceable filtering inner box directly faces an airflow path, and the filtering efficiency is improved; due to the design of the concentric-square-shaped inflatable air bag, expansion sealing can be achieved between the cross-shaped filtering box and the filtering support blocks shaped like the Chinese character'ri ', gas leakage is effectively prevented, and the filtering effect is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of sintering furnaces, in particular to a vacuum pumping device for a silicon carbide sintering furnace. Background Art

[0002] Sintering technology demonstrates two major development trends: atmosphere-controlled sintering and vacuum-pressure sintering. In the domestic tantalum-niobium alloy production sector, companies generally prefer vacuum-pressure sintering. As a core step in the tantalum-niobium alloy production process, the precision of vacuum sintering directly impacts the alloy's texture and, consequently, the final product quality.

[0003] However, most current vacuum sintering furnaces have deficiencies in their vacuum system design. They often rely directly on vacuum pumps to remove air, lacking effective filtering mechanisms before the air enters the pump. This defect allows dust and other impurities to be easily drawn into the vacuum pump, causing damage to the pump body. While existing technical solutions may already exist for this problem, this application seeks to provide an alternative or replacement technical solution. Utility Model Content

[0004] To achieve the above objectives, the present invention is implemented through the following technical solutions: A vacuum pumping device for a silicon carbide sintering furnace, comprising: a sintering furnace and a filtering vacuum structure, wherein the filtering vacuum structure is installed on the sintering furnace;

[0005] The filtration vacuum structure comprises: a cross-shaped filter box, a filter day-shaped support block, a pair of replaceable filter inner boxes, a pair of round-shaped plug-in inner blocks, a pair of round-shaped plug-in electromagnets, a pair of round-shaped plug-in magnets, a pair of round-shaped inflatable air bags, an inflatable shunt pipe, an inflatable sealing pump, a pair of level adjustment electromagnets, a pair of level adjustment magnets, a plurality of horizontal telescopic slideways, a plurality of horizontal telescopic sliders, and a negative pressure drainage component;

[0006] The cross-shaped filter box is connected to the sintering furnace and the negative pressure drainage assembly, the filter day support block is movably inserted into the inner side of the cross-shaped filter box, and several horizontal telescopic slides are evenly installed on the inner side of the cross-shaped filter box. Several horizontal telescopic sliders are respectively installed on the upper and lower ends of several filter day support blocks, and several horizontal telescopic sliders are respectively movably inserted into the inner sides of several horizontal telescopic slides. A pair of replaceable filter inner boxes are respectively movably inserted into the inner sides of the filter day support block. A pair of round-shaped telescopic sealing grooves are provided on the cross-shaped filter box, and a pair of round-shaped plug-in inner blocks are respectively movably inserted into a pair of round-shaped telescopic sealing grooves. On the inner side of the groove, a pair of the said meandering electromagnets are respectively installed on the inner sides of a pair of said meandering telescopic sealing grooves, a pair of said meandering magnets are respectively installed on a pair of said meandering inner blocks, two pairs of meandering expansion grooves are provided on the said cross-shaped filter box, a pair of said meandering inflatable airbags are respectively installed on the inner sides of the two pairs of said meandering expansion grooves, the said inflation shunt pipe is connected to a pair of said meandering inflatable airbags, the said inflation sealing pump is connected to the said inflation shunt pipe, a pair of said level adjustment electromagnets are respectively installed on the inner ends of the said cross-shaped filter box, a pair of said level adjustment magnets are respectively installed on both sides of the said filter day-type support block, and the said filter day-type support block is provided with a pair of day-type telescopic grooves;

[0007] It should be noted that, in the above, the air in the pyrolysis furnace is drained to the cross-shaped filter box and the inside of the negative pressure drainage component through the negative pressure drainage component, and is filtered through the filter day-type support block inside the cross-shaped filter box and a pair of replaceable filter inner boxes. The filter day-type support block is stably horizontally extended and retracted on the inside of the cross-shaped filter box, and the current on a pair of horizontal adjustment electromagnets is adjusted in one direction, thereby changing the magnetism on the pair of horizontal adjustment electromagnets. The pair of horizontal adjustment electromagnets are respectively magnetically repelled by the pair of horizontal adjustment magnets. Due to the difference in magnetism, the filter day-type support block is inside the cross-shaped filter box. The side is moved stably horizontally, and the replacement filter inner box on it is driven by the filter day support block to be opposite to the inner side of the cross-shaped filter box, and the inflation diverter pipe is inflated by the inflation seal pump, and a pair of round-shaped inflatable airbags are inflated through the inflation diverter pipe. By the expansion of the pair of round-shaped inflatable airbags, the cross-shaped filter box and the filter day support block are expanded and sealed. At the same time, the round-shaped plug-in electromagnets are respectively magnetically repelled by the round-shaped plug-in magnets, and the round-shaped plug-in inner blocks on it are driven by the round-shaped plug-in magnets, so that a pair of round-shaped plug-in inner blocks are inserted into the filter day support block, thereby limiting the filter day support block.

[0008] Preferably, the negative pressure drainage assembly comprises: a pair of air pressure boxes, three valves, a pair of lifting threaded tubes, a pair of lifting bidirectional threaded rods, a lifting drive motor, a lifting gear set, a pair of lifting sealing plates, a plurality of lifting limit shafts and a pair of lifting circular rubber rings;

[0009] The three valves are connected to a pair of the air pressure boxes, and the three valves are connected to the cross-shaped filter box. The pair of lifting threaded tubes are respectively inserted into the pair of the air pressure boxes through bearings. The pair of lifting two-way threaded rods are respectively movably inserted into the inner sides of the pair of lifting threaded tubes. The lifting gear set is installed on the pair of lifting threaded tubes. The driving end of the lifting drive motor is connected to the lifting gear set. A pair of lifting sealing plates are respectively installed on a pair of lifting two-way threaded rods. Several lifting limit shafts are respectively inserted into a pair of lifting sealing plates, and several lifting limit shafts are respectively movably inserted into a pair of the air pressure boxes. A pair of lifting circular rubber rings are respectively installed on a pair of lifting sealing plates.

[0010] It should be noted that, in the above, the operation of the lifting drive motor drives the lifting gear set on the driving end of the lifting drive motor to operate, which drives the lifting gear set to drive a pair of lifting threaded tubes thereon to rotate, and the pair of lifting threaded tubes respectively drive the lifting two-way threaded rods on the inner side thereof, so that the pair of lifting two-way threaded rods are stably lifted and lowered along the inner side of the pair of lifting threaded tubes, and the pair of lifting two-way threaded rods respectively drive the pair of lifting sealing plates thereon to be stably lifted and lowered, thereby quickly connecting the three valves one by one with a pair of air pressure boxes, and through the lifting sealing plates that are lifted one by one, the sintering furnace is exhausted one by one, and the lifting is limited by several lifting limit shafts. At the same time, the lifting and lowering of the lifting sealing plate is sealed by the lifting rubber ring.

[0011] Preferably, a pair of flow sensors are provided on the inner side of the cross-shaped filter box.

[0012] Preferably, filter carbon is respectively provided on the inner sides of a pair of replaceable filter inner boxes.

[0013] Preferably, a sterilization net and an adsorption net are respectively provided on the inner sides of the pair of replaceable filter inner boxes.

[0014] Preferably, a pair of pressure sensors are provided on the inner side of the cross-shaped filter box. Beneficial effects

[0015] The utility model provides a vacuum pumping device for a silicon carbide sintering furnace. It has the following beneficial effects. Compared with the prior art, the vacuum pumping device for a silicon carbide sintering furnace has the following advantages: a pair of replaceable filter inner boxes are designed in the structure, and these inner boxes can be conveniently inserted into the filter day-type support block, which is convenient for quick replacement and maintenance; a variety of filter media such as filter carbon, sterilization net and adsorption net can be set in the filter inner box to effectively remove impurities, bacteria and harmful gases in the sintering furnace and ensure the purity of the output air; the position of the filter day-type support block can be flexibly adjusted by adjusting the electromagnet and the magnet horizontally, so that the replaceable filter inner box is facing the airflow path, thereby improving the filtration efficiency; the design of the round-shaped inflatable airbag enables expansion sealing between the cross-shaped filter box and the filter day-type support block, effectively preventing gas leakage and ensuring the filtration effect; the cooperation of the round-shaped plug-in electromagnet and the magnet, as well as the insertion of the round-shaped plug-in inner block, further enhances the sealing and stability of the structure; the current of the electromagnet can be adjusted horizontally. Directional adjustment can accurately control the horizontal movement of the filter day support block and realize precise positioning of the filter inner box; the setting of flow sensor and pressure sensor can monitor the airflow and pressure changes in the filtration process in real time, provide feedback for the system, and realize intelligent control; the negative pressure drainage component realizes the extraction of gas in the sintering furnace one by one through mechanical structures such as three valves, lifting threaded tubes, and lifting two-way threaded rods, thereby improving the efficiency of gas treatment; the design of lifting sealing plate and lifting circular rubber ring ensures the sealing during the extraction process and prevents gas leakage; the setting of lifting limit shaft ensures the stability of lifting sealing plate during lifting process and improves the reliability of the system; each component in the structure is designed to be detachable or replaceable, which is convenient for daily maintenance and maintenance; with the development of technology and changes in demand, key components such as filter media and electromagnets can be easily upgraded or replaced to meet different filtration needs. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic front and cross-sectional view of a vacuum pumping device for a silicon carbide sintering furnace described in the present invention.

[0017] Figure 2 This is a top sectional schematic diagram of a vacuum pumping device for a silicon carbide sintering furnace described in the present invention.

[0018] Figure 3 for Figure 1 A partial enlarged view of "A".

[0019] In the figure: 1. Sintering furnace; 2. Cross-shaped filter box; 3. Filter day-type support block; 4. Replaceable filter inner box; 5. Ring-shaped plug-in inner block; 6. Ring-shaped plug-in electromagnet; 7. Ring-shaped plug-in magnet; 8. Ring-shaped inflatable airbag; 9. Inflatable sealing pump; 10. Horizontal adjustment electromagnet; 11. Horizontal adjustment magnet; 12. Horizontal telescopic slide; 13. Horizontal telescopic slider; 14. Air pressure box; 15. Three-way valve; 16. Lifting threaded pipe; 17. Lifting two-way threaded rod; 18. Lifting drive motor; 19. Lifting gear set; 20. Lifting sealing plate; 21. Lifting limit shaft; 22. Lifting ring rubber ring. DETAILED DESCRIPTION

[0020] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative work shall fall within the scope of protection of the present invention.

[0021] Through the use of wires by those skilled in the art, all electrical components in this case are connected to their corresponding power supplies, and appropriate controllers and encoders should be selected according to actual conditions to meet control requirements. The specific connection and control sequence should refer to the following working principle, in which the electrical components are electrically connected in sequence. The detailed connection means are well-known technologies in this field. The following mainly introduces the working principle and process, and no longer explains the electrical control. Example

[0022] The present invention will be described in detail below with reference to the accompanying drawings. Figure 1-3As shown, the filtering vacuum structure is installed on the sintering furnace 1; the filtering vacuum structure includes: a cross-shaped filter box 2, a filter day-type support block 3, a pair of replaceable filter inner boxes 4, a pair of round-shaped plug-in inner blocks 5, a pair of round-shaped plug-in electromagnets 6, a pair of round-shaped plug-in magnets 7, a pair of round-shaped inflatable airbags 8, an inflatable shunt pipe, an inflatable sealing pump 9, a pair of horizontal adjustment electromagnets 10, a pair of horizontal adjustment magnets 11, a number of horizontal telescopic slides 12, a number of horizontal telescopic sliders 13 and a negative pressure drainage component; the cross-shaped filter box 2 is connected to the sintering furnace 1 and On the negative pressure drainage assembly, the filter day support block 3 is movably inserted into the inner side of the cross-shaped filter box 2, and several horizontal telescopic slides 12 are evenly installed on the inner side of the cross-shaped filter box 2. Several horizontal telescopic sliders 13 are respectively installed on the upper and lower ends of several filter day support blocks 3, and several horizontal telescopic sliders 13 are respectively movably inserted into the inner sides of several horizontal telescopic slides 12. A pair of replaceable filter inner boxes 4 are respectively movably inserted into the inner sides of the filter day support block 3. The cross-shaped filter box 2 is opened. There is a pair of circular telescopic sealing grooves, a pair of circular plug-in inner blocks 5 are respectively movably plugged into the inner side of a pair of circular telescopic sealing grooves, a pair of circular plug-in electromagnets 6 are respectively installed on the inner side of a pair of circular telescopic sealing grooves, a pair of circular plug-in magnets 7 are respectively installed on a pair of circular plug-in inner blocks 5, two pairs of circular expansion grooves are opened on the cross-shaped filter box 2, a pair of circular inflatable airbags 8 are respectively installed on the inner sides of the two pairs of circular expansion grooves, the inflatable shunt pipe is connected to a pair of circular inflatable airbags 8, and the inflatable sealing pump 9 is connected to the On the inflatable shunt pipe, a pair of level adjustment electromagnets 10 are respectively installed at the inner ends of the cross-shaped filter box 2, and a pair of level adjustment magnets 11 are respectively installed on both sides of the filter day-type support block 3. The filter day-type support block 3 is provided with a pair of day-type telescopic slots; the negative pressure drainage assembly includes: a pair of air pressure boxes 14, three-way valves 15, a pair of lifting threaded tubes 16, a pair of lifting two-way threaded rods 17, a lifting drive motor 18, a lifting gear set 19, a pair of lifting sealing plates 20, a plurality of lifting limit shafts 21 and a pair of lifting circular rubber rings 22;The three-way valve 15 is connected to a pair of the air pressure boxes 14, and the three-way valve 15 is connected to the cross-shaped filter box 2. A pair of lifting threaded tubes 16 are respectively inserted into the pair of the air pressure boxes 14 through bearings. A pair of lifting two-way threaded rods 17 are respectively movably inserted into the inner side of the pair of lifting threaded tubes 16. The lifting gear set 19 is installed on the pair of lifting threaded tubes 16. The driving end of the lifting drive machine 18 is connected to the lifting gear set 19. A pair of lifting sealing plates 20 are respectively installed on the pair of lifting two-way threaded rods 17. On the upper part, several lifting limit shafts 21 are respectively inserted into the pair of lifting sealing plates 20, and several lifting limit shafts 21 are respectively movably inserted into the pair of air pressure boxes 14. A pair of lifting circular rubber rings 22 are respectively installed on the pair of lifting sealing plates 20; a pair of flow sensors are installed inside the cross-shaped filter box 2; filter carbon is installed inside the pair of replaceable filter inner boxes 4; a sterilization net and an adsorption net are installed inside the pair of replaceable filter inner boxes 4; and a pair of pressure sensors are installed inside the cross-shaped filter box 2.

[0023] According to the attached Figure 1-3It is concluded that the air in the pyrolysis furnace is drained to the cross-shaped filter box 2 and the inside of the negative pressure drainage component through the negative pressure drainage component, and filtered through the filter day support block 3 inside the cross-shaped filter box 2 and a pair of replaceable filter inner boxes 4. The filter day support block 3 is stably extended and retracted horizontally on the inside of the cross-shaped filter box 2, and the current on a pair of horizontal adjustment electromagnets 10 is unidirectionally adjusted to change the magnetism on a pair of horizontal adjustment electromagnets 10. The pair of horizontal adjustment electromagnets 10 are respectively adjusted to adjust the magnetic field of the pair of horizontal adjustment electromagnets 10. The magnet 11 performs magnetic repulsion, and the difference in magnetism causes the filter day support block 3 to move stably and horizontally inside the cross-shaped filter box 2. The filter day support block 3 drives the replacement filter inner box thereon to be positioned at the inside of the cross-shaped filter box 2. The inflation seal pump 9 inflates the inflation shunt pipe, and the pair of circular inflatable airbags 8 are inflated through the inflation shunt pipe. The expansion of the pair of circular inflatable airbags 8 expands and seals the cross-shaped filter box 2 and the filter day support block 3. At the same time, the circular inflatable airbags 8 are used to inflate the cross-shaped filter box 2 and the filter day support block 3. The plug-in electromagnet 6 magnetically repels the circular plug-in magnet 7, and drives the circular plug-in inner block 5 thereon through the circular plug-in magnet 7, so that a pair of circular plug-in inner blocks 5 are inserted into the filter day-type support block 3, thereby limiting the filter day-type support block 3; the lifting drive machine 18 is operated to drive the lifting gear set 19 on the driving end of the lifting drive machine 18 to operate, and the lifting gear set 19 drives the pair of lifting threaded tubes 16 thereon to rotate, and the lifting bidirectional threaded rod 1 on the inner side thereof is driven by the pair of lifting threaded tubes 16. 7, so that a pair of lifting bidirectional threaded rods 17 are stably lifted and lowered along the inner sides of a pair of lifting threaded tubes 16 respectively, and the pair of lifting bidirectional threaded rods 17 respectively drive the pair of lifting sealing plates 20 thereon to be stably lifted and lowered, so that the three valves 15 are quickly connected with the pair of air pressure boxes 14 one by one, and the sintering furnace 1 is exhausted one by one through the lifting sealing plates 20 that are lifted one by one, and the lifting is limited by a plurality of lifting limit shafts 21, and the lifting and lowering of the lifting sealing plates 20 is sealed by the lifting circular rubber rings 22.

[0024] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum pumping device for a silicon carbide sintering furnace, comprising: A sintering furnace and a filtering vacuum structure, characterized in that the filtering vacuum structure is installed on the sintering furnace; The filtration vacuum structure comprises: a cross-shaped filter box, a filter day-shaped support block, a pair of replaceable filter inner boxes, a pair of round-shaped plug-in inner blocks, a pair of round-shaped plug-in electromagnets, a pair of round-shaped plug-in magnets, a pair of round-shaped inflatable air bags, an inflatable shunt pipe, an inflatable sealing pump, a pair of level adjustment electromagnets, a pair of level adjustment magnets, a plurality of horizontal telescopic slideways, a plurality of horizontal telescopic sliders, and a negative pressure drainage component; The cross-shaped filter box is connected to the sintering furnace and the negative pressure drainage assembly, the filter day support block is movably inserted into the inner side of the cross-shaped filter box, and several horizontal telescopic slides are evenly installed on the inner side of the cross-shaped filter box. Several horizontal telescopic sliders are respectively installed on the upper and lower ends of several filter day support blocks, and several horizontal telescopic sliders are respectively movably inserted into the inner sides of several horizontal telescopic slides. A pair of replaceable filter inner boxes are respectively movably inserted into the inner sides of the filter day support block. A pair of round-shaped telescopic sealing grooves are provided on the cross-shaped filter box, and a pair of round-shaped plug-in inner blocks are respectively movably inserted into a pair of round-shaped telescopic sealing grooves. On the inner side of the groove, a pair of the said meandering electromagnets are respectively installed on the inner sides of a pair of said meandering telescopic sealing grooves, a pair of said meandering magnets are respectively installed on a pair of said meandering inner blocks, two pairs of meandering expansion grooves are provided on the said cross-shaped filter box, a pair of said meandering inflatable airbags are respectively installed on the inner sides of the two pairs of said meandering expansion grooves, the said inflation diversion pipe is connected to a pair of said meandering inflatable airbags, the said inflation sealing pump is connected to the said inflation diversion pipe, a pair of said horizontal adjustment electromagnets are respectively installed on the inner ends of the said cross-shaped filter box, a pair of said horizontal adjustment magnets are respectively installed on both sides of the said filter day-type support block, and the said filter day-type support block is provided with a pair of day-type telescopic grooves.

2. A vacuum pumping device for a silicon carbide sintering furnace according to claim 1, characterized in that: The negative pressure drainage assembly includes: a pair of air pressure boxes, three valves, a pair of lifting threaded tubes, a pair of lifting two-way threaded rods, a lifting drive motor, a lifting gear set, a pair of lifting sealing plates, a plurality of lifting limit shafts and a pair of lifting circular rubber rings; The three valves are connected to a pair of the air pressure boxes, and the three valves are connected to the cross-shaped filter box, a pair of the lifting threaded tubes are respectively inserted into the pair of the air pressure boxes through bearings, a pair of the lifting bidirectional threaded rods are respectively movably inserted into the inner sides of the pair of lifting threaded tubes, the lifting gear group is installed on the pair of the lifting threaded tubes, the driving end of the lifting drive motor is connected to the lifting gear group, a pair of the lifting sealing plates are respectively installed on a pair of the lifting bidirectional threaded rods, several lifting limit shafts are respectively inserted into a pair of the lifting sealing plates, and several lifting limit shafts are respectively movably inserted into a pair of the air pressure boxes, and a pair of lifting circular rubber rings are respectively installed on a pair of the lifting sealing plates.

3. A vacuum pumping device for a silicon carbide sintering furnace according to claim 2, characterized in that: A pair of flow sensors are arranged on the inner side of the cross-shaped filter box.

4. A vacuum pumping device for a silicon carbide sintering furnace according to claim 3, characterized in that: Filter carbon is respectively provided on the inner sides of a pair of replaceable filter inner boxes.

5. A vacuum pumping device for a silicon carbide sintering furnace according to claim 4, characterized in that: A sterilization net and an adsorption net are respectively provided on the inner sides of a pair of replaceable filter inner boxes.

6. A vacuum pumping device for a silicon carbide sintering furnace according to claim 5, characterized in that: A pair of pressure sensors are provided inside the cross-shaped filter box.

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