Liquefied gas liquid sampling device

Abstract

The utility model discloses a liquefied gas liquid sampling device which comprises a liquefied gas source tank, a purge gas source tank, a sampling container, a cooling device, a metering device and a plurality of pipelines, the liquefied gas source tank is used for providing liquefied gas to be sampled; the purge gas source tank is used for providing purge gas for purge; the sampling container is used for collecting liquefied gas samples; the cooling device is used for keeping the liquefied gas in the sampling container in a liquid state for quantitative sampling, and keeping low temperature after quantitative sampling, so that the liquefied gas sample is slowly volatilized; and the metering device is used for quantitatively sampling the dosage of the liquefied gas in the sampling container. The device is low in cost, simple and easy to operate, capable of solving the problem that the liquefied gas cannot be directly analyzed at present, high in safety and capable of greatly improving the analysis efficiency and quality.

Description

Technical Field

[0001] The utility model specifically relates to a liquefied gas liquid sampling device. Background Art

[0002] Specialty electronic gases primarily include pure gases, high-purity gases, and gases for semiconductor materials. They are widely used in processes such as epitaxy, doping, and etching. Plasma etching technology using hydrogen bromide as a specialty electronic gas enables highly selective polysilicon gate etching in advanced chip manufacturing processes, making it one of the core gases in advanced chip manufacturing.

[0003] With the continuous advancement of semiconductor and microelectronics technologies, the purity requirements for electronic specialty gases are increasing. Their quality is primarily determined by purity and clarity. Metal ions are a key indicator of certain electronic specialty gases. Current mainstream sampling and testing methods typically use gaseous sampling for analysis. This method can easily distort the results, resulting in significant discrepancies between the analytical results and the actual situation. Utility Model Content

[0004] In order to solve the above technical problems, the utility model proposes a liquefied gas liquid sampling device.

[0005] In order to achieve the above object, the technical solution of the utility model is as follows:

[0006] The utility model discloses a liquefied gas liquid sampling device, comprising: a liquefied gas source tank, a purge gas source tank, a sampling container, a cooling device, a metering device and a plurality of pipelines;

[0007] The liquefied gas source tank is used to provide the liquefied gas to be sampled;

[0008] The purge gas source tank is used to provide purge gas for purge;

[0009] The sampling container is used to collect liquefied gas samples;

[0010] The cooling device is used to maintain the liquefied gas in the sampling container in a liquid state for quantitative sampling, and after quantitative sampling, maintain a low temperature to allow the liquefied gas sample to evaporate slowly;

[0011] The metering device is used for quantitatively sampling the liquefied gas in the liquid state in the sampling container.

[0012] On the basis of the above technical solution, the following improvements can be made:

[0013] As a preferred solution, the gas outlet of the liquefied gas storage tank is connected to the inlet of the sampling container through the feed pipeline, the main pipeline, and the sampling inlet pipeline in sequence;

[0014] The gas outlet of the purge gas source tank is connected to the inlet of the sampling container through the purge pipeline, the main pipeline, and the sampling inlet pipeline in sequence;

[0015] The outlet of the sampling container is connected to the tail gas emission device through the sampling outlet pipeline and the tail gas emission pipeline in sequence.

[0016] As a preferred solution, stop valves are installed on the feed pipeline, purge pipeline, sampling inlet pipeline, sampling outlet pipeline, and tail gas emission pipeline.

[0017] As a preferred solution, check valves are further installed on the purge pipeline and the tail gas discharge pipeline.

[0018] As a preferred solution, the end of the sampling inlet pipeline that is connected to the feed pipeline and the purge pipeline is the first end of the sampling inlet pipeline;

[0019] One end of the sampling outlet pipeline connected to the tail gas emission pipeline is the second end of the sampling outlet pipeline;

[0020] The first end of the sampling inlet pipeline is communicated with the second end of the sampling outlet pipeline through an intermediate pipeline, and a stop valve is installed on the intermediate pipeline.

[0021] As a preferred solution, the cooling device includes: a cooling container filled with coolant, and the sampling container is placed in the cooling container.

[0022] As a preferred solution, a temperature sensor is installed in the coolant to detect the real-time temperature of the coolant.

[0023] As a preferred solution, the metering device is a metering weighing meter, and the cooling device and the sampling container are placed on the metering weighing meter.

[0024] The utility model discloses a liquefied gas liquid sampling device, which is low in cost, simple and easy to operate, can solve the problem that the current liquefied gas cannot be directly analyzed, has strong safety, and greatly improves the analysis efficiency and quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 This is a schematic structural diagram of a liquefied gas liquid sampling device provided in an embodiment of the present utility model.

[0027] Among them: 1-liquefied gas source tank, 2-sampling container, 3-cooling device, 4-metering device, 51-feeding pipeline, 52-main pipeline, 53-purge pipeline, 54-sampling inlet pipeline, 55-sampling outlet pipeline, 56-exhaust gas emission pipeline, 57-intermediate pipeline, 61-first stop valve, 62-second stop valve, 63-third stop valve, 64-fourth stop valve, 65-fifth stop valve, 66-sixth stop valve, 71-first check valve, 72-second check valve. DETAILED DESCRIPTION

[0028] The preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0030] At the same time, expressions such as “first” and “second” are only used to distinguish multiple configurations, rather than to limit the order between configurations or other features.

[0031] In addition, the expression “including” an element is an “open” expression, which simply means that corresponding components exist and should not be interpreted as excluding additional components.

[0032] In order to achieve the purpose of the present invention, in some embodiments of the liquefied gas liquid sampling device, the liquefied gas liquid sampling device includes: a liquefied gas source tank 1, a purge gas source tank, a sampling container 2, a cooling device 3, a metering device 4 and several pipelines.

[0033] The liquefied gas source tank 1 is used to provide the liquefied gas to be sampled;

[0034] The purge gas source tank (not shown in the figure) is used to provide purge gas (such as ultrapure nitrogen) for purge;

[0035] The sampling container 2 is used to collect liquefied gas samples;

[0036] The cooling device 3 is used to maintain the liquefied gas in the sampling container 2 in a liquid state for quantitative sampling, and after quantitative sampling, maintain a low temperature to allow the liquefied gas sample to evaporate slowly;

[0037] The metering device 4 is used to perform quantitative sampling of the liquid liquefied gas in the sampling container 2 .

[0038] The sampling container 2 is first pre-cooled by the cooling device 3. The liquefied gas is maintained in liquid form at low temperature and quantitatively sampled from the sampling container 2 through the metering device 4. Then, the low temperature (close to the boiling point of the liquefied gas) is maintained to allow the sample liquefied gas to evaporate slowly. The substance to be tested in the sample is retained in the sampling container 2, thereby avoiding the problem of inaccurate gas analysis and solving the disadvantage that the existing technology cannot accurately analyze the liquid phase results in the liquefied gas.

[0039] The utility model collects liquid samples of electronic special gases, and retains metal ions in a sampling container 2 after slow volatilization for testing, thereby ensuring that the results are true and reliable.

[0040] In order to further optimize the implementation effect of the present invention, in other embodiments, the remaining characteristic technologies are the same, except that the gas outlet of the liquefied gas storage tank is connected to the inlet of the sampling container 2 through the feed pipeline 51, the main pipeline 52, and the sampling inlet pipeline 54 in sequence;

[0041] The gas outlet of the purge gas source tank is connected to the inlet of the sampling container 2 through the purge pipeline 53, the main pipeline 52, and the sampling inlet pipeline 54 in sequence;

[0042] The outlet of the sampling container 2 is connected to the exhaust gas emission device through the sampling outlet pipeline 55 and the exhaust gas emission pipeline 56 in sequence.

[0043] Furthermore, stop valves are installed on the feed pipeline 51, the purge pipeline 53, the sampling inlet pipeline 54, the sampling outlet pipeline 55, and the exhaust gas emission pipeline 56, which are the first stop valve 61, the second stop valve 62, the third stop valve 63, the fourth stop valve 64 and the fifth stop valve 65 respectively.

[0044] Furthermore, check valves are installed on the purge line 53 and the tail gas discharge line 56 , namely a first check valve 71 and a second check valve 72 .

[0045] Further, the end of the sampling inlet pipeline 54 that is connected to the feed pipeline 51 and the purge pipeline 53 is the first end of the sampling inlet pipeline 54;

[0046] One end of the sampling outlet pipeline 55 that is in communication with the tail gas emission pipeline 56 is the second end of the sampling outlet pipeline 55;

[0047] The first end of the sampling inlet pipeline 54 is connected to the second end of the sampling outlet pipeline 55 through the intermediate pipeline 57 , and a sixth shut-off valve 66 is installed on the intermediate pipeline 57 .

[0048] All the above components and valves are made of PFA material and connected.

[0049] The purge process can be as follows:

[0050] The ultrapure nitrogen is discharged through the purge line 53 equipped with the first check valve 71 and the second stop valve 62, the main line 52, the intermediate line 57 equipped with the sixth stop valve 66, and the tail gas discharge line 56 equipped with the fifth stop valve 65 and the second check valve 72 for tail gas discharge treatment.

[0051] The ultrapure nitrogen gas is purged into the sampling container 2 through the purge pipeline 53 equipped with the first check valve 71 and the second stop valve 62, the main pipeline 52, and the sampling inlet pipeline 54 equipped with the third stop valve 63, and then passes through the sampling outlet pipeline 55 equipped with the fourth stop valve 64, the exhaust pipeline 56 equipped with the fifth stop valve 65 and the second check valve 72 for exhaust gas discharge treatment.

[0052] The sampling process can be as follows:

[0053] The liquefied gas enters the sampling container 2 through the feed pipeline 51 equipped with a first shut-off valve 61, the main pipeline 52, and the sampling inlet pipeline 54 equipped with a third shut-off valve 63. After sampling is completed, the liquefied gas slowly evaporates and exhaust gas is discharged through the sampling outlet pipeline 55 equipped with a fourth shut-off valve 64, and the exhaust gas exhaust pipeline 56 equipped with a fifth shut-off valve 65 and a second check valve 72.

[0054] After sampling is completed, the residual liquid and gas are removed by purging with nitrogen.

[0055] In order to further optimize the implementation effect of the present invention, in some other embodiments, the remaining characteristic technologies are the same, except that the cooling device 3 includes: a cooling container filled with coolant, and the sampling container 2 is placed in the cooling container.

[0056] Furthermore, a temperature sensor is installed in the coolant to detect the real-time temperature of the coolant.

[0057] Furthermore, the measuring device 4 is a measuring scale (such as a balance), and the cooling device 3 and the sampling container 2 are placed on the measuring scale.

[0058] The metering device 4 can also monitor the coolant in the cooling device 3 and replenish the coolant in time when the coolant is lower than a threshold.

[0059] In order to further optimize the implementation effect of the present invention, in some other embodiments, the remaining characteristic technologies are the same, except that the liquefied gas storage tank is inverted.

[0060] The utility model discloses a liquefied gas liquid sampling device, which is low in cost, simple and easy to operate, can solve the problem that the current liquefied gas cannot be directly analyzed, has strong safety, and greatly improves the analysis efficiency and quality.

[0061] The utility model can be applied to the field of gas analysis technology, especially electronic special gases, and is suitable for sampling under the condition of maintaining the gas in a low-temperature liquid state to ensure that the detection results are true and accurate.

[0062] In the description of the present invention, it should be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inside", "front", "center", "two ends", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0063] In the present invention, unless otherwise clearly stipulated and limited, the terms "install", "set", "connect", "fix", "screw" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, ordinary technicians in this field can understand the specific meanings of the above terms in the present invention according to the specific circumstances.

[0064] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions only illustrate the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements shall fall within the scope of the present invention to be protected. The scope of protection claimed by the present invention is defined by the attached claims and their equivalents.

[0065] The control method of the present invention is to manually start and stop the switch. The wiring diagram of the power element and the provision of power supply are common knowledge in the field. Moreover, the present invention is mainly used to protect mechanical devices. Therefore, the control method and wiring arrangement are not explained in detail in the present invention.

Claims

1. A liquefied gas liquid sampling device, characterized in that: include: Liquefied gas source tanks, purge gas source tanks, sampling containers, cooling devices, metering devices and several pipelines; The liquefied gas source tank is used to provide liquefied gas to be sampled; The purge gas source tank is used to provide purge gas for purge; The sampling container is used to collect liquefied gas samples; The cooling device is used to maintain the liquefied gas in the sampling container in a liquid state for quantitative sampling, and after quantitative sampling, maintain a low temperature to allow the liquefied gas sample to evaporate slowly; The metering device is used for performing quantitative sampling of the liquid liquefied gas in the sampling container.

2. The liquefied gas liquid sampling device according to claim 1, characterized in that: The gas outlet of the liquefied gas storage tank is connected to the inlet of the sampling container through the feed pipeline, the main pipeline, and the sampling inlet pipeline in sequence; The gas outlet of the purge gas source tank is connected to the inlet of the sampling container through the purge pipeline, the main pipeline, and the sampling inlet pipeline in sequence; The outlet of the sampling container is connected to the tail gas emission device through the sampling outlet pipeline and the tail gas emission pipeline in sequence.

3. The liquefied gas liquid sampling device according to claim 2, characterized in that: Stop valves are installed on the feed pipeline, purge pipeline, sampling inlet pipeline, sampling outlet pipeline and tail gas emission pipeline.

4. The liquefied gas liquid sampling device according to claim 3, characterized in that: Check valves are also installed on the purge pipeline and the tail gas discharge pipeline.

5. The liquefied gas liquid sampling device according to claim 4, characterized in that: The end of the sampling inlet pipeline that is connected to the feed pipeline and the purge pipeline is the first end of the sampling inlet pipeline; The end of the sampling outlet pipeline that is connected to the tail gas emission pipeline is the second end of the sampling outlet pipeline; The first end of the sampling inlet pipeline is communicated with the second end of the sampling outlet pipeline through an intermediate pipeline, and a stop valve is installed on the intermediate pipeline.

6. The liquefied gas liquid sampling device according to any one of claims 1 to 5, characterized in that: The cooling device comprises a cooling container filled with cooling liquid, and the sampling container is placed in the cooling container.

7. The liquefied gas liquid sampling device according to claim 6, characterized in that: A temperature sensor is installed in the coolant to detect the real-time temperature of the coolant.

8. The liquefied gas liquid sampling device according to any one of claims 1 to 5, characterized in that: The metering device is a metering weighing meter, and the cooling device and the sampling container are placed on the metering weighing meter.

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