SMIF POD opening and closing device

Abstract

The utility model provides an SMIF POD opening and closing device. The SMIF POD opening and closing device comprises a supporting table, an unlocking mechanism, a handle, a clamping device and a plurality of positioning assemblies. The unlocking mechanism comprises a connecting piece and a clamping piece. The connecting piece comprises a first rotating disc, a second rotating disc and a rotating shaft. The handle is fixed on the second rotating disc; the clamping device is movably connected to the upper end face of the supporting table. The positioning assembly comprises a positioning rod capable of moving up and down relative to the supporting table. When the handle is rotated, the unlocking mechanism can be driven to rotate so as to realize opening and closing of the SMIF POD10; the positioning assembly and the clamping device can be adjusted according to the specification of SMIF POD. According to the utility model, the supporting table and the unlocking mechanism are arranged, so that the SMIF POD can be opened and closed more conveniently and quickly; the accurate position of the base is ensured by arranging the positioning assembly; by arranging the clamping assembly, SMIF POD bases of different specifications can be fixed to the supporting table; the SMIF POD opening and closing device can be used for SMIF POD of different specifications, so that the production cost is reduced; the overall structure is simple and easy to process and manufacture.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor production, in particular to a SMIF POD opening and closing device. Background Art

[0002] From manufacturing to transportation, semiconductor wafers must be kept in a sealed, dust-free environment. This typically involves using a specially designed SMIF POD (Smart Integrated Circuit) (SMIF POD) to seal the wafer basket, keeping the air around the wafers relatively still and preventing dust particles from entering the wafer environment. SMIF PODs are equipped with a locking device. One existing SMIF POD locking device is located at the bottom of the SMIF POD base. To use this device, the operator must use a special key to unlock the bottom lock. This process requires tilting or flipping the SMIF POD, making it cumbersome and posing a significant safety hazard. Utility Model Content

[0003] In order to solve the above technical problems, the utility model provides a SMIF POD opening and closing device, which can be used to open or close SMIF PODs of different specifications and is easy and quick to operate.

[0004] The technical solution adopted in this utility model is:

[0005] A SMIF POD opening and closing device includes a support platform for supporting the base of the SMIF POD, an unlocking mechanism rotatably connected to the support platform for cooperating with the locking device of the SMIF POD, and a handle connected to the unlocking mechanism, the handle extending out of the support platform; when the handle is rotated, the unlocking mechanism can be driven to rotate.

[0006] Furthermore, the unlocking mechanism includes a connector rotatably connected to the support platform and a latch provided at the upper end of the connector and protruding from the support platform, and the latch is configured to be plugged into the lock hole of the locking device.

[0007] Furthermore, the support platform includes a first support member and a second support member that are arranged opposite to each other, and a mounting member connected between the first support member and the second support member, and the connecting member is relatively rotatably connected to the mounting member.

[0008] Furthermore, the connecting member includes a first rotating disk, a second rotating disk and a rotating shaft; a slot is provided on the upper end surface of the mounting member, and the first rotating disk can be placed in the slot relatively rotatably; the upper end of the rotating shaft is connected to the first rotating disk, and the lower end passes through the mounting member and is connected to the second rotating disk; the handle is fixed to the second rotating disk.

[0009] Furthermore, it also includes at least two clamping devices that are movably connected to the upper end surface of the support platform and are arranged opposite to each other. The base can be clamped by relatively moving the two clamping devices.

[0010] Furthermore, a first slide groove is provided on the upper end surface of the support platform at a position corresponding to the clamping device, and the first slide groove extends in the direction toward the unlocking mechanism, and a plurality of positioning holes are provided at intervals in the first slide groove; the lower side of the clamping device can be relatively movably placed in the first slide groove, and the clamping device can be moved and then positioned at different positions by passing bolts through the clamping device and different positioning holes; preferably, the first slide groove is provided on the mounting member.

[0011] Furthermore, it also includes several groups of positioning components movably connected to the support platform, and the positioning components include positioning rods that can move up and down relative to the support platform. When the positioning rods of a group of the positioning components protrude from the support platform, they can be plugged into one of the bases.

[0012] Furthermore, the support platform also includes a fixed plate connected between the first support member and the second support member, and the fixed plate is provided with a limit sleeve for limiting the movement of the positioning rod. The positioning assembly also includes an adjustment rod connected to the positioning rod, and one end of the adjustment rod extends out of the support platform.

[0013] Further, the first support member or the second support member is provided with a second slide groove, a third slide groove and a limit assembly; or the support platform further includes a third support member, the same side of the first support member and the second support member are connected to the third support member, and the third support member is provided with the second slide groove, the third slide groove and the limit assembly;

[0014] The second chute is arranged perpendicular to the third chute;

[0015] The adjusting rod passes through the second sliding slot and is provided with a groove;

[0016] The limiting assembly includes a connected elastic member, a limiting member and a limiting pull rod, and the limiting pull rod extends out of the third sliding groove; when the adjusting rod moves to a set position along the second sliding groove, the limiting member can be inserted into the groove.

[0017] Furthermore, the fixing plate is arranged below the mounting member and above the second rotating disk, and a hole for the rotating shaft to pass through is provided on the fixing plate.

[0018] The advantages and positive effects of the utility model are:

[0019] (1) By setting up a support platform and an unlocking mechanism, the SMIF POD can be opened and closed by rotating the handle, which is more convenient and quick;

[0020] (2) By setting the positioning component, SMIFPOD bases of different specifications can be positioned, ensuring the accurate position of the base and effectively ensuring the operation of the unlocking mechanism.

[0021] (3) By setting up a clamping device, SMIFPOD bases of different specifications can be fixed to the support platform to prevent them from being displaced during the movement of the box cover and causing safety accidents.

[0022] (4) The positions of the positioning component and the clamping device can be adjusted according to SMIF PODs of different specifications, which expands the application range of the SMIF POD opening and closing device and reduces production costs.

[0023] (5) The overall structure of the SMIF POD opening and closing device is simple and easy to process and manufacture. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic diagram of a specific embodiment of the present invention;

[0025] Figure 2 This is a bottom view of a SMIF POD base according to a specific embodiment of the present invention;

[0026] Figure 3 It is a top view of a specific embodiment of the utility model;

[0027] Figure 4 This is a schematic structural diagram of a first support member in a specific embodiment of the present utility model;

[0028] Figure 5 This is a schematic structural diagram of a third support member in a specific embodiment of the present utility model;

[0029] Figure 6 This is a schematic diagram of the use of a limit assembly in a specific embodiment of the utility model.

[0030] In the picture:

[0031] 10. SMIF POD 11. Base 12. Locking device

[0032] 121, keyhole 13, lid

[0033] 20, support platform 21, mounting piece 211, slot

[0034] 212, first slide groove 2121, positioning hole 22, first support member

[0035] 23. Second support member 24. Fixing plate 241. Limiting sleeve

[0036] 25. Third support member 251. Second chute 252. Third chute

[0037] 253, limit assembly 2531, limit member 2532, elastic member

[0038] 2533, limit rod

[0039] 30, unlocking mechanism 31, connecting member 311, first rotating disk

[0040] 312, rotating shaft 313, second rotating disk 32, clamping piece

[0041] 40. Handle

[0042] 50. Clamping device

[0043] 60, positioning assembly 61, positioning rod 62, adjustment rod

[0044] 63. Connecting rod DETAILED DESCRIPTION

[0045] The embodiments of the present invention are described below with reference to the accompanying drawings.

[0046] like Figure 1 、 Figure 2 As shown, the present invention proposes a SMIF POD opening and closing device for opening and closing a SMIF POD 10; wherein the SMIF POD 10 includes a base 11 and a box cover 13, and the base 11 is provided with a locking device 12, which can lock or release the box cover 13 by rotating the locking device 12, and the lock hole 121 of the locking device 12 is provided at the bottom of the base 11; the SMIF POD opening and closing device proposed by the present invention includes a support platform 20, an unlocking mechanism 30 and a handle 40, the support platform 20 is used to support the base 11, the unlocking mechanism 30 is rotatably connected to the support platform 20, and cooperates with the locking device 12 of the SMIF POD 10, the handle 40 is connected to the unlocking mechanism 30, and the handle 40 extends outward from the outside of the support platform 20; when the handle 40 is rotated, the unlocking mechanism 30 can be driven to rotate, and then the locking device 12 can be driven to rotate synchronously to realize the opening and closing of the SMIF POD 10.

[0047] When using this application, the base 11 is placed on the support platform 20, and then the handle 40 on the outside of the support platform 20 is turned to open and close the SMIF POD 10; by designing an unlocking mechanism 30 that cooperates with the locking device 12 of the SMIF POD 10 base 11, the manual opening and closing of the SMIF POD 10 can be achieved conveniently and quickly.

[0048] Preferably, if Figure 1 、 Figure 3 As shown, the unlocking mechanism 30 includes a connecting member 31 rotatably connected to the support platform 20 and a latch 32 disposed at the upper end of the connecting member 31 and protruding from the support platform 20. The latch 32 is configured to be plugged into the lock hole 121 of the locking device 12. When the handle 40 is rotated, the connecting member 31 can rotate relative to the support platform 20, thereby driving the latch 32 plugged into the lock hole 121 to rotate, thereby achieving convenient unlocking.

[0049] There is no limitation on the shapes of the support platform 20 and the connecting member 31 in the present application. As long as the connecting member 31 can rotate relative to the support platform 20, the unlocking function can be achieved.

[0050] In a preferred embodiment, the support platform 20 includes a first support member 22 and a second support member 23 that are oppositely arranged, and a mounting member 21 connected between the first support member 22 and the second support member 23 . The connecting member 31 is relatively rotatably connected to the mounting member 21 .

[0051] Specifically, the mounting member 21 may be configured to be in a plate shape, and the first supporting member 22 and the second supporting member 23 may be configured to be in a plate shape, a block shape, or a column shape.

[0052] Preferably, the connecting member 31 includes a first rotating disk 311, a second rotating disk 313, and a rotating shaft 312. The upper end surface of the mounting member 21 is provided with a slot 211, within which the first rotating disk 311 is rotatably disposed. The upper end of the rotating shaft 312 is connected to the first rotating disk 311, and the lower end passes through the mounting member 21 and connects to the second rotating disk 313. The handle 40 is fixed to the second rotating disk 313. When the handle 40 is pulled, it rotates the first rotating disk 311, effectively rotating the locking device 12 and enabling rapid opening and closing of the SMIF POD 10.

[0053] In this embodiment, the first rotating disk 311, the rotating shaft 312 and the second rotating disk 313 are connected to form an I-shape; the first rotating disk 311, the rotating shaft 312 and the second rotating disk 313 and the handle 40 can be an integrally molded component or a plurality of detachably connected components.

[0054] In other embodiments of the present application, the connecting member 31 includes a first rotating disk 311 and a rotating shaft 312 ; the handle 40 is directly fixed to the rotating shaft 312 .

[0055] In the present application, a latch 32 is disposed on the upper end surface of the first rotating disk 311. There are at least two latches 32, and the positional relationship between the at least two latches 32 corresponds to the positional relationship between the locking holes 121 of the locking device 12. When the base 11 is placed on the support platform 20, the latch 32 can be inserted into the locking hole 121, effectively connecting the locking device 12 and the unlocking mechanism 30, while also preventing relative displacement between the two. When the handle 40 is rotated, the handle 40 drives the first rotating disk 311 to rotate, effectively driving the locking device 12 to rotate, thereby achieving rapid opening and closing of the SMIF POD 10.

[0056] Furthermore, a hole is provided in the slot 211, and the shape of the hole matches the rotating shaft 312; the rotating shaft 312 passes through the hole to connect the first rotating disk 311 and the second rotating disk 313. The shapes of the first rotating disk 311 and the second rotating disk 313 are both larger than the hole, and the shape of the first rotating disk 311 matches the slot 211, so that the first rotating disk 311 will not be offset during the rotation of the rotating shaft 312.

[0057] In a preferred embodiment, a bearing is provided in the hole of the slot 211 , and the rotating shaft 312 is connected to the bearing to reduce friction between the rotating shaft 312 and the support platform 20 when the rotating shaft 312 rotates.

[0058] Further, if Figure 4 As shown, the first support member 22 is constructed in a plate shape, and the first support member 22 is provided with an elongated hole, and the handle 40 passes through the elongated hole. In the initial state, the handle 40 passes through the elongated hole and is located at the first position of the elongated hole. When in use, the handle 40 is rotated to move the handle 40 along the elongated hole to the second position, driving the second rotating disk 313 to rotate, and then the rotating shaft 312 drives the first rotating disk 311 and the clamping member 32 to rotate; preferably, the first position and the second position of the handle 40 are respectively located at the two ends of the elongated hole, and the length of the elongated hole is configured to enable the handle 40 to drive the second rotating disk 313 to rotate at an angle that is the same as the unlocking angle set by the locking device 12, that is, the same as the angle that the locking device 12 needs to rotate when opening and closing; by providing the elongated hole, the rotation direction and angle of the handle 40 can be better limited, and the opening and closing of the locking device 12 can be more accurately coordinated.

[0059] Furthermore, the SMIF POD opening and closing device proposed in the present application also includes at least two clamping devices 50 that are movably connected to the upper end surface of the support platform 20 and are arranged opposite to each other. By relatively moving the two clamping devices 50, the base 11 can be clamped to prevent the base 11 from moving during the opening and closing process; especially when the box cover 13 is lifted during the unlocking process, the base 11 is clamped by the clamping device 50, which can ensure that when the unlocking mechanism 30 fails and fails to perform its unlocking function, the base 11 is prevented from being lifted together with the box cover 13 to cause a safety accident, and it is also beneficial for the operator to discover the fault in time.

[0060] Specifically, such as Figure 3 As shown, a first slide groove 212 is provided on the upper end surface of the support platform 20 at a position corresponding to the clamping device 50. The first slide groove 212 extends in a direction close to the unlocking mechanism 30, and a plurality of positioning holes 2121 are provided therein at intervals; the lower side of the clamping device 50 can be relatively movably provided in the first slide groove 212, and the clamping device 50 can be moved and then positioned at different positions by passing bolts through the clamping device 50 and different positioning holes 2121, so that the clamping device 50 can be selectively fixed at different positions of the first slide groove 212 and clamp the base 11 according to the specifications of different SMIF POD10.

[0061] Specifically, a slider is provided on the lower side of the clamping device 50, and the shape of the slider matches the first slide groove 212; when the clamping device 50 slides along the first slide groove 212, its moving direction is close to or away from the locking mechanism 30, so that the device can be used to clamp SMIF POD10 bases 11 of different specifications; the first slide groove 212 is provided with a plurality of positioning holes 2121, and the clamping device 50 is provided with at least two positioning holes 2121, and bolts are passed through the positioning holes 2121 to fix the clamping device 50 to the first slide groove 212.

[0062] In a preferred embodiment, the first sliding groove 212 is provided on the mounting member 21 .

[0063] In this embodiment, the SMIF POD 10 is square in shape as a whole, and the mounting member 21 is also designed to be square. At the same time, the clamping device 50 is arranged at the four corners of the mounting member 21, and the first slide groove 212 extends along the diagonal direction. The clamping device 50 is designed to be L-shaped, which can clamp two adjacent side surfaces of the base 11 at the same time, and has a good clamping effect.

[0064] In some other embodiments of the present application, the clamping device 50 may also be provided at other positions of the mounting member 21 as long as it can exert its clamping effect, and no limitation is made here.

[0065] Further, if Figure 1 、 Figure 3As shown, the SMIF POD opening and closing device proposed in the present application also includes a plurality of groups of positioning components 60 movably connected to the support platform 20, each group of positioning components 60 includes a positioning rod 61 that can move up and down relative to the support platform 20, and when the positioning rods 61 of a group of positioning components 60 protrude from the support platform 20, they can be plugged into the base 11; specifically, a socket is provided at the bottom of the base 11, and the number of the positioning rods 61 and the positional relationship between them are set according to the number and positional relationship of the sockets; it can be understood that the base 11 of SMIF PODs 10 of different specifications has different sizes, and the settings of their sockets are also different. The setting of the positioning component 60 corresponds to the specifications of the SMIF POD 10, and its function is to make the SMIF The POD10 base 11 can be placed in the correct position on the support platform 20, so that the unlocking mechanism 30 of the support platform 20 is opposite to the locking device 12 at the bottom of the base 11, and the latch 32 can be smoothly inserted into the lock hole 121; on the other hand, since the unlocking mechanism 30 is rotatable relative to the support platform 20, this design can also prevent the base 11 from rotating when placed on the support platform 20.

[0066] During use, when a SMIF POD 10 of a certain specification needs to be opened or closed, the corresponding positioning assembly 60 is lifted so that its positioning rod 61 protrudes from the support platform 20. When the base 11 is placed on the support platform 20, the group of positioning rods 61 can be inserted into the base 11, which means that the base 11 has been placed in the correct position. Otherwise, it means that the position of the base 11 is inaccurate, ensuring that the support platform 20 can effectively perform its unlocking function.

[0067] In this embodiment, the lock hole 121 of the locking device 12 is arranged at the center of the base 11, and the unlocking mechanism 30 is arranged at the center position of the support platform 20; in some other embodiments of the present application, the lock hole 121 and the unlocking mechanism 30 of the locking device 12 are respectively arranged at other positions. No matter where the two are arranged, the lock hole 121 can be aligned with the positioning rod 61 through the positioning component 60.

[0068] Further, if Figure 1 、 Figure 3 and Figure 5 As shown, the positioning assembly 60 further includes an adjustment rod 62; the support platform 20 further includes a fixing plate 24 connected between the first support member 22 and the second support member 23. The fixing plate 24 is provided with a limiting sleeve 241 for limiting the movement of the positioning rod 61. One end of the adjustment rod 62 is connected to the positioning rod 61, and the other end extends outside the support platform 20. In the present application, the adjustment rod 62 is provided in a one-to-one correspondence with the positioning assembly 60. During use, the adjustment rod 62 can be used to move the positioning rod 61 upward to protrude from the support platform 20 or downward to below the upper end surface of the support platform 20.

[0069] Further, if Figure 5 、 Figure 6 As shown, the support platform 20 is also provided with a second slide groove 251, a third slide groove 252 and a limit assembly 253. The second slide groove 251 is perpendicular to the third slide groove 252, and the adjusting rod 62 passes through the second slide groove 251 and is provided with a groove; the limit assembly 253 includes a limit member 2531 and an elastic member 2532. The limit member 2531 extends in a direction close to the second slide groove 251, and the limit pull rod 2533 extends out of the third slide groove 252; when the adjusting rod 62 moves to the set position along the second slide groove 251, the limit member 2531 can be inserted into the groove of the adjusting rod 62. When in use, when the adjusting rod 62 is lifted to the set position of the second slide groove 251, preferably, the set position is the top end of the second slide groove 251, and the positioning rod 61 protrudes from the support platform 20; at the same time, the limiting member 2531 extends into the groove of the adjusting rod 62 under the pressure of the elastic member 2532, thereby limiting the adjusting rod 62; when the positioning rod 61 needs to be dropped, the limiting pull rod 2533 is pulled to move it along the third slide groove 252 in the direction away from the second slide groove 251, driving the limiting member 2531 to disengage from the adjusting rod 62, so that the adjusting rod 62 can return to the other end of the second slide groove 251, and then drive the positioning rod 61 to retract below the upper end surface of the support platform 20.

[0070] In the present application, the second slide groove 251, the third slide groove 252 and the limit assembly 253 can be arranged on the first support member 22 or the second support member 23, or the support platform 20 also includes a third support member 25, and the same side of the first support member 22 and the second support member 23 are connected to the third support member 25, and the second slide groove 251, the third slide groove 252 and the limit assembly 253 are arranged on the third support member 25.

[0071] In a specific embodiment, Figure 5 、 Figure 6 As shown, the second slide groove 251, the third slide groove 252 and the limit assembly 253 are arranged on the third support member 25; the limit assembly 253 includes a box body, an elastic member 2532 is arranged in the box body, and the box body is fitted on the inner side of the third support member 25, and the limit pull rod 2533 is partially located in the box body and fits the two side end surfaces of the box body, and the other part of the limit pull rod 2533 passes through the box body and the third slide groove 252; and the part of the limit pull rod 2533 located in the box body is connected to the elastic member 2532 on one side and connected to the limit member 2531 on the other side, and the other end of the limit member 2531 passes through the side end surface of the box body; the direction of expansion and contraction of the elastic member 2532 is the first direction, and the width of the third slide groove 252 perpendicular to the first direction is smaller than the width of the box body, ensuring that the limit pull rod 2533 will not deviate to the outside of the third support member 25.

[0072] In a specific embodiment, each group of positioning rods 61 is connected by a connecting rod 63 to achieve synchronous movement. The adjustment rod 62 can be connected to the connecting rod 63 or any positioning rod 61 to drive the group of positioning rods 61 to move.

[0073] In a specific embodiment, the support platform 20 in the present application includes a plurality of plate-shaped or strip-shaped components, has a cavity capable of accommodating the rotating shaft 312, the second rotating disk 313 and the fixed plate 24, and also includes a plurality of legs to provide stable support therefor.

[0074] The advantages and positive effects of the utility model are:

[0075] (1) By setting up a support platform and an unlocking mechanism, the SMIF POD can be opened and closed by rotating the handle, which is more convenient and quick;

[0076] (2) By setting the positioning component, SMIF POD bases of different specifications can be positioned, ensuring the accurate position of the base and effectively ensuring the operation of the unlocking mechanism.

[0077] (3) By setting up a clamping device, SMIF POD bases of different specifications can be fixed to the support platform to prevent them from being displaced during the movement of the box cover and causing safety accidents.

[0078] (4) The positions of the positioning component and the clamping device can be adjusted according to SMIF PODs of different specifications, which expands the application range of the SMIF POD opening and closing device and reduces production costs.

[0079] (5) The overall structure of the SMIF POD opening and closing device is simple and easy to process and manufacture.

[0080] The above embodiments of the present invention are described in detail. However, the above contents are only preferred embodiments of the present invention and should not be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A SMIF POD opening and closing device, characterized in that: The invention comprises a support platform for supporting the base of a SMIF POD, an unlocking mechanism rotatably connected to the support platform and used to cooperate with the locking device of the SMIF POD, and a handle connected to the unlocking mechanism, wherein the handle extends outward from the support platform; when the handle is rotated, the unlocking mechanism can be driven to rotate.

2. The SMIF POD opening and closing device according to claim 1, wherein: The unlocking mechanism includes a connecting piece rotatably connected to the support platform and a clamping piece arranged at the upper end of the connecting piece and protruding from the support platform. The clamping piece is configured to be plugged into the lock hole of the locking device.

3. The SMIF POD opening and closing device according to claim 2, wherein: The support platform includes a first support member and a second support member that are oppositely arranged, and a mounting member connected between the first support member and the second support member. The connecting member is relatively rotatably connected to the mounting member.

4. The SMIF POD opening and closing device according to claim 3, wherein: The connecting member includes a first rotating disk, a second rotating disk and a rotating shaft; the upper end surface of the mounting member is provided with a slot, and the first rotating disk can be placed in the slot for relative rotation; the upper end of the rotating shaft is connected to the first rotating disk, and the lower end passes through the mounting member and is connected to the second rotating disk; the handle is fixed to the second rotating disk.

5. The SMIF POD opening and closing device according to claim 4, wherein: It also includes at least two clamping devices that are movably connected to the upper end surface of the support platform and are arranged opposite to each other. The base can be clamped by relatively moving the two clamping devices.

6. The SMIF POD opening and closing device according to claim 5, wherein: A first slide groove is provided on the upper end surface of the support platform at a position corresponding to the clamping device, and the first slide groove extends in the direction toward the unlocking mechanism, and a plurality of positioning holes are provided at intervals in the first slide groove; the lower side of the clamping device can be relatively movably placed in the first slide groove, and the clamping device can be moved and then positioned at different positions by passing bolts through the clamping device and different positioning holes; the first slide groove is provided on the mounting member.

7. The SMIF POD opening and closing device according to any one of claims 4 to 6, characterized in that: It also includes several groups of positioning components movably connected to the support platform, and the positioning components include positioning rods that can move up and down relative to the support platform. The positioning rods of a group of positioning components can be plugged into one of the bases when they protrude from the support platform.

8. The SMIF POD opening and closing device according to claim 7, wherein: The support platform also includes a fixed plate connected between the first support member and the second support member, and the fixed plate is provided with a limit sleeve for limiting the movement of the positioning rod; the positioning assembly also includes an adjustment rod connected to the positioning rod, and one end of the adjustment rod extends out of the support platform.

9. The SMIF POD opening and closing device according to claim 8, wherein: The first support member or the second support member is provided with a second slide groove, a third slide groove and a limit assembly; or the support platform further includes a third support member, the same side of the first support member and the second support member are connected to the third support member, and the third support member is provided with a second slide groove, a third slide groove and a limit assembly; The second chute is arranged perpendicular to the third chute; The adjusting rod passes through the second sliding slot and is provided with a groove; The limiting assembly includes a connected elastic member, a limiting member and a limiting pull rod, and the limiting pull rod extends out of the third sliding groove; when the adjusting rod moves to a set position along the second sliding groove, the limiting member can be inserted into the groove.

10. The SMIF POD opening and closing device according to claim 8 or 9, characterized in that: The fixing plate is arranged below the mounting member and above the second rotating disk, and a hole for the rotating shaft to pass through is provided on the fixing plate.

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