Wafer alignment final assembly table

Abstract

The utility model discloses a wafer alignment final assembly table which comprises a platform jig disc. A height adjusting assembly used for adjusting the height of the positioning platform and a horizontal detection device used for detecting the horizontal height of the platform jig disc are connected to the lower portion of the positioning platform; the platform jig disc is arranged above the positioning platform through a transverse displacement assembly and a longitudinal displacement assembly, the transverse displacement assembly is connected with the longitudinal displacement assembly in a sliding mode, and a corner assembly used for controlling the platform jig disc to rotate is further connected to the lower portion of the platform jig disc. According to the utility model, the horizontal height and levelness of the platform jig plate are detected before imprinting, so that the platform jig plate is kept in a horizontal state during imprinting, and the imprinting precision of wafers is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer processing, and in particular relates to a wafer alignment assembly platform. Background Art

[0002] Nanoimprinting technology is a technology that uses mechanical transfer to accurately transfer the micro-nano structure on a template to the material to be processed. It uses thermoplastic polymers or silicon-based materials as templates to prepare the required micron or nanometer-level structure on its surface. The material to be prepared and the template are then placed under high temperature for hot pressing to replicate the material to be prepared, thereby obtaining a nanomaterial with a specific shape and structure.

[0003] The positioning mechanism of the nanoimprint equipment is very important, which determines the quality and accuracy of the imprint. For example, application number 202122205516.8 discloses a wafer positioning device and a nanoimprint equipment. The equipment discloses a wafer positioning platform, a wafer adsorption device, a rotation drive device, an optical fiber sensor and a main control device to solve the current problem that each wafer with different position angles cannot be quickly positioned and adjusted during the nanoimprint process. Since nanoimprint technology has high requirements for precision, the equipment will be affected by vibration and error during application, and the horizontality of the wafer positioning platform will deviate, which may cause offset during imprinting, thereby affecting the imprinting quality. Therefore, it is necessary to develop a device that can detect the horizontality of the wafer placement platform. Utility Model Content

[0004] In order to solve the above technical problems, the utility model provides a wafer alignment assembly platform, which detects the horizontal height and levelness of the platform fixture plate before imprinting, so that the platform fixture plate remains horizontal during imprinting, thereby improving the imprinting accuracy of the wafer.

[0005] Specifically, the utility model discloses a wafer alignment assembly platform, which is characterized by comprising:

[0006] Platform fixture tray;

[0007] A positioning platform, wherein a height adjustment component for adjusting the height of the positioning platform and a level detection device for detecting the level of the platform fixture plate are connected below the positioning platform;

[0008] The platform fixture plate is arranged above the positioning platform through a lateral displacement component and a longitudinal displacement component. The lateral displacement component is slidably connected to the longitudinal displacement component, and a corner component for controlling the rotation of the platform fixture plate is also connected below the platform fixture plate.

[0009] Furthermore, the height adjustment component is provided with at least three groups, each including a motor mounting frame, a height adjustment motor and a pressure sensor. The height adjustment motor is installed on one side of the motor mounting frame, one end of the pressure sensor is installed on one side of the height adjustment motor, and the other end is abutted against the lower surface of the positioning platform.

[0010] Furthermore, the lateral displacement assembly includes a lateral guide rail, a movable frame, a lateral displacement ceramic motor and a lateral displacement ceramic transmission bar. The lateral guide rail is arranged on the upper surface of the positioning platform, the movable frame is arranged above the positioning platform and is slidingly connected to the lateral guide rail. Both sides of the positioning platform are provided with lateral sliding grooves that allow the lateral displacement ceramic transmission bar to move. The lateral displacement ceramic motor is installed on both sides of the positioning platform and matches the position of the lateral displacement ceramic transmission bar.

[0011] Furthermore, the longitudinal displacement assembly includes a center plate, a longitudinal guide rail, and symmetrically arranged longitudinal displacement ceramic motors and longitudinal displacement ceramic transmission bars. The center plate is slidingly connected to the longitudinal sliding groove of the movable frame through the longitudinal guide rail. The longitudinal displacement ceramic transmission bar is installed on the inner wall of the movable frame. The longitudinal displacement ceramic motor is installed on the upper surface of the center plate and matches the position of the longitudinal displacement ceramic transmission bar.

[0012] Furthermore, the horizontal detection device includes a height grating scale, a height grating scale reading head and at least three groups of laser displacement sensors. The height grating scale is arranged at the moving end of the height adjustment motor. The height grating scale reading head is arranged on the height adjustment motor and matches the position of the height grating scale. The laser displacement sensor is installed on the lower surface of the center plate.

[0013] Furthermore, the corner assembly includes a ball bearing ring, a corner ceramic motor and a circular ceramic strip. A groove for fixing the ball bearing ring is provided in the center of the center plate. The outer ring of the ball bearing ring is transitionally matched with the inner diameter of the groove. The corner ceramic motor is fixed to the inner ring of the ball bearing ring through a connecting plate. The circular ceramic strip is installed on the lower surface of the platform fixture plate, and the platform fixture plate is connected to the inner ring of the ball bearing ring.

[0014] Furthermore, the wafer alignment assembly station also includes a lateral detection device, which includes a lateral grating scale and a lateral grating scale reading head. The lateral grating scale is arranged on the outer wall of the movable frame, and the lateral grating scale reading head is arranged on the positioning platform and matches the position of the lateral grating scale, and is used to detect the lateral displacement of the platform fixture plate.

[0015] Furthermore, the wafer alignment assembly platform also includes a longitudinal detection device, which includes a longitudinal grating scale and a longitudinal grating scale reading head. The longitudinal grating scale is arranged on the upper surface of the center plate, and the longitudinal grating scale reading head is arranged on the upper surface of the movable frame and matches the position of the longitudinal grating scale, and is used to detect the longitudinal displacement of the platform fixture plate.

[0016] Furthermore, the wafer alignment assembly platform also includes an angle detection device, which includes an angle grating and an angle grating reading head. The angle grating is arranged on the side wall of the platform fixture disk, and the angle grating reading head is arranged above the center plate and matches the position of the angle grating for detecting the rotation angle of the platform fixture disk.

[0017] Furthermore, the wafer alignment assembly platform also includes a lifting component, which includes a lifting motor, a lifting bracket and a lifting sleeve. The lifting motor is installed on the lower surface of the center plate through a fixed plate, the lifting bracket is arranged at the movable end of the lifting motor, and the lifting sleeve is arranged on the upper surface of the lifting bracket and passes through the platform fixture plate.

[0018] The beneficial effects of the present invention are:

[0019] The height adjustment component and level detection device before imprinting detect and adjust the level height and levelness of the platform fixture plate, so that the platform fixture plate remains horizontal during imprinting, thereby improving the imprinting accuracy of the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art.

[0021] Figure 1 This is a schematic diagram of the wafer alignment assembly station;

[0022] Figure 2 This is a schematic diagram of the interior of the wafer alignment assembly station;

[0023] Figure 3 This is a bottom view of the wafer alignment assembly station;

[0024] Figure 4 It is a schematic diagram of the lateral displacement component and the longitudinal displacement component;

[0025] Figure 5 This is a schematic diagram of the lateral displacement component and the longitudinal displacement component from another angle;

[0026] Figure 6 It is a partial enlarged view of the lateral detection device;

[0027] Figure 7 It is a partial enlarged view of the longitudinal detection device;

[0028] Figure 8 It is a partial enlarged view of the corner detection device;

[0029] Figure 9 This is a partial enlarged view of the level detection device;

[0030] Figure 10 This is a schematic diagram of the platform fixture tray installation;

[0031] Figure 11 This is a cross-sectional view of the platform fixture plate installation;

[0032] Figure 12 This is a schematic diagram of the jacking component installation.

[0033] The numbers involved in the drawings are as follows: positioning platform 1, platform fixture plate 11, lateral sliding groove 12, height adjustment component 2, motor mounting frame 21, height adjustment motor 22, pressure sensor 23, level detection device 3, height grating ruler 31, height grating ruler reading head 32, laser displacement sensor 33, lateral displacement component 4, moving frame 41, longitudinal sliding groove 411, lateral guide rail 42, lateral displacement ceramic motor 43, lateral displacement ceramic transmission bar 44, lateral limit plate 45, lateral limit sensor 46, longitudinal displacement component 5, center plate 51, groove 511, longitudinal guide Rail 52, longitudinal displacement ceramic motor 53, longitudinal displacement ceramic transmission bar 54, longitudinal limit plate 55, longitudinal limit sensor 56, corner assembly 6, ball shaft ring 61, corner ceramic motor 62, connecting plate 63, circular ceramic strip 64, transverse detection device 7, transverse grating scale 71, transverse grating scale reading head 72, longitudinal detection device 8, longitudinal grating scale 81, longitudinal grating scale reading head 82, corner detection device 9, angle grating scale 91, angle grating scale reading head 92, lifting assembly 10, lifting motor 101, fixing plate 102, lifting bracket 103, lifting sleeve 104. DETAILED DESCRIPTION

[0034] The present invention will be further described in detail below with reference to the accompanying drawings.

[0035] like Figure 1-12 As shown, the utility model discloses a wafer alignment assembly platform, including a platform fixture plate 11;

[0036] A positioning platform 1, connected below the positioning platform 1 are a height adjustment component 2 for adjusting the height of the positioning platform 1, and a level detection device 3 for detecting the level of the platform fixture plate 11;

[0037] The platform fixture disk 11 is arranged above the positioning platform 1 through the lateral displacement component 4 and the longitudinal displacement component 5. The lateral displacement component 4 is slidingly connected to the longitudinal displacement component 5, and a corner component 6 for controlling the rotation of the platform fixture disk 11 is also connected below the platform fixture disk 11.

[0038] Before imprinting, the utility model detects and adjusts the horizontal height and horizontality of the platform fixture plate 11 through the height adjustment component 2 and the horizontal detection device 3, so that the platform fixture plate 11 remains in a horizontal state during imprinting, and then provides alignment coordinate information through an external camera. With the assistance of the lateral displacement component 4, the longitudinal displacement component 5, and the corner component 6, the lateral, longitudinal and corner alignment are completed, and the lateral detection device 7, the longitudinal detection device 8 and the corner detection device 9 detect the displacement of the platform fixture plate 11, thereby further improving the imprinting accuracy of the wafer.

[0039] In some embodiments of the present invention, the height adjustment assembly 2 is provided with at least three groups, each including a motor mounting bracket 21, a height adjustment motor 22, and a pressure sensor 23. The height adjustment motor 22 is mounted on one side of the motor mounting bracket 21. One end of the pressure sensor 23 is mounted on one side of the height adjustment motor 22, and the other end abuts against the lower surface of the positioning platform 1. When the height adjustment motor 22 is in operation, the pressure sensor 23 moves upward, thereby providing an upward force to the positioning platform 1, so that the positioning platform 1 remains horizontal. The value of each pressure sensor 23 is used to determine the force between the positioning platform 1 and each height adjustment motor 22, thereby understanding the position state of the positioning platform 1 before adjustment.

[0040] In some embodiments of the present invention, the lateral displacement assembly 4 includes a lateral guide rail 42, a movable frame 41, a lateral displacement ceramic motor 43, and a lateral displacement ceramic transmission bar 44. The lateral guide rail 42 is disposed on the upper surface of the positioning platform 1. The movable frame 41 is disposed above the positioning platform 1 and is slidably connected to the lateral guide rail 42. The positioning platform 1 is provided with lateral sliding grooves 12 on both sides to allow the lateral displacement ceramic transmission bar 44 to move. The lateral displacement ceramic motor 43 is mounted on both sides of the positioning platform 1 and matches the position of the lateral displacement ceramic transmission bar 44. The lateral displacement ceramic motor 43 moves laterally under the action of the lateral displacement ceramic transmission bar 44, causing the movable frame 41 to move laterally along the lateral guide rail 42, thereby driving the longitudinal displacement assembly 5 to move laterally. In addition, a transverse limit plate 45 is provided on one side of the movable frame 41, and a transverse limit sensor 46 is provided on the upper surface of the positioning platform 1. The height of the transverse limit plate 45 and the transverse limit sensor 46 are matched. In order to ensure the normal operation of the equipment, when the transverse limit sensor 46 senses the transverse limit plate 45, the transverse displacement component 4 stops moving in the direction of movement.

[0041] In some embodiments of the present invention, the longitudinal displacement assembly 5 includes a center plate 51, a longitudinal guide rail 52, and a symmetrically arranged longitudinal displacement ceramic motor 53 and a longitudinal displacement ceramic transmission bar 54. The center plate 51 is slidably connected to the longitudinal sliding groove 411 of the moving frame 41 via the longitudinal guide rail 52. The longitudinal displacement ceramic transmission bar 54 is mounted on the inner wall of the moving frame 41. The longitudinal displacement ceramic motor 53 is mounted on the upper surface of the center plate 51 and matches the position of the longitudinal displacement ceramic transmission bar 54. During the lateral displacement of the moving frame 41, the longitudinal guide rail 52 and the longitudinal sliding groove 411 drive the center plate 51 to move lateral. In addition, the longitudinal displacement ceramic motor 53 is driven by the longitudinal displacement ceramic transmission bar 54 to move longitudinally, causing the center plate 51 to move longitudinally along the longitudinal guide rail 52. In addition, a longitudinal limit plate 55 is provided on the upper surface of the center plate 51, and a longitudinal limit sensor 56 is provided on the upper surface of the movable frame 41. The height of the longitudinal limit plate 55 matches that of the longitudinal limit sensor 56. In order to ensure the normal operation of the equipment, when the longitudinal limit sensor 56 senses the longitudinal limit plate 55, the longitudinal displacement component 5 stops moving in the direction of movement.

[0042] In some embodiments of the present invention, the level detection device 3 includes a height scale 31, a height scale reading head 32, and at least three sets of laser displacement sensors 33. The height scale 31 is located at the movable end of the height adjustment motor 22. The height scale reading head 32 is located on the height adjustment motor 22 and matches the position of the height scale 31. The laser displacement sensor 33 is mounted on the lower surface of the center plate 51. The laser displacement sensor 33 is used to detect the horizontal height of the platform fixture plate 11 and feed back deviation data to the height adjustment motor 22. The height adjustment motor 22 operates to keep the platform fixture plate 11 in a horizontal state, while the height scale reading head 32 detects the displacement of the platform fixture plate 11 when it rises or falls, ensuring the operating accuracy of the height adjustment motor 22.

[0043] In this embodiment, there are three groups of laser displacement sensors 33 and height adjustment motors 22 , which are evenly distributed, thereby further improving the height and levelness of the platform fixture plate 11 .

[0044] In some embodiments of the present invention, the corner assembly 6 includes a ball bearing ring 61, a corner ceramic motor 62, and a circular ceramic strip 64. The center of the center plate 51 is provided with a groove 511 for fixing the ball bearing ring 61. The outer ring of the ball bearing ring 61 transitions with the inner diameter of the groove 511. The corner ceramic motor 62 is fixed to the inner ring of the ball bearing ring 61 via a connecting plate 63. The circular ceramic strip 64 is installed on the lower surface of the platform fixture plate 11, and the platform fixture plate 11 is connected to the inner ring of the ball bearing ring 61. The outer ring of the ball bearing ring 61 cooperates with the groove 511. Under the action of the corner ceramic motor 62 and the circular ceramic strip 64, the inner ring of the ball bearing ring 61 rotates, thereby driving the platform fixture plate 11 to rotate.

[0045] Some embodiments of the present invention further include a transverse detection device 7, which includes a transverse grating scale 71 and a transverse grating scale reading head 72. The transverse grating scale 71 is disposed on the outer wall of the movable frame 41, and the transverse grating scale reading head 72 is disposed on the positioning platform 1 and matches the position of the transverse grating scale 71. The transverse grating scale reading head 72 is used to detect the lateral displacement of the platform fixture plate 11. The transverse grating scale reading head 72 detects the lateral displacement of the platform fixture plate 11, thereby improving the lateral displacement accuracy of the platform fixture plate 11.

[0046] Some embodiments of the present invention further include a longitudinal detection device 8, which includes a longitudinal grating scale 81 and a longitudinal grating scale reading head 82. The longitudinal grating scale 81 is disposed on the upper surface of the center plate 51, and the longitudinal grating scale reading head 82 is disposed on the upper surface of the movable frame 41 and matches the position of the longitudinal grating scale 81. The longitudinal grating scale reading head 82 is used to detect the longitudinal displacement of the platform fixture plate 11. The longitudinal grating scale reading head 82 detects the longitudinal displacement of the platform fixture plate 11, thereby improving the longitudinal displacement accuracy of the platform fixture plate 11.

[0047] Some embodiments of the present invention further include a rotation angle detection device 9, which includes an angle scale 91 and an angle scale reading head 92. The angle scale 91 is disposed on the side wall of the platform fixture plate 11, and the angle scale reading head 92 is disposed above the center plate 51 and aligned with the position of the angle scale 91. The angle scale reading head 92 is used to detect the rotation angle of the platform fixture plate 11. The angle scale reading head 92 detects the rotation angle of the platform fixture plate 11, thereby improving the rotation angle accuracy of the platform fixture plate 11.

[0048] In the above embodiment, the position adjustment of the platform fixture plate 11 is all fine-tuning, and each of the above-mentioned reading heads records the real-time displacement and feeds it back to the corresponding motor for later adjustment and maintenance.

[0049] In some embodiments of the present invention, the alignment assembly table further includes a jacking assembly 10, which includes a jacking motor 101, a jacking bracket 103, and a jacking sleeve 104. The jacking motor 101 is mounted on the lower surface of the center plate 51 through a fixed plate 102. The jacking bracket 103 is provided at the movable end of the jacking motor 101. The jacking sleeve 104 is provided on the upper surface of the jacking bracket 103 and passes through the platform fixture plate 11. There are several jacking sleeves 104, and the center position has a through hole for gas circulation. When the jacking motor 101 works, it controls the jacking bracket 103 and the jacking sleeve 104 to move upward, thereby lifting the product on the platform fixture plate 11.

[0050] The working mode of the utility model is as follows:

[0051] The product is placed on the alignment platform fixture tray 11, and the platform fixture tray 11 is opened and adsorbs and fixes the product; the height adjustment component 2 rises to a fixed height, and the laser displacement sensor 33 monitors the horizontal height and horizontality of the platform fixture tray 11, and transmits the feedback information to the height adjustment motor 22, and cooperates with the horizontal detection device 3 to complete the horizontal height adjustment; then the lateral displacement component 4, the longitudinal displacement component 5 and the corner component 6 refer to the data provided by the external camera and cooperate with the corresponding detection device to complete the lateral, longitudinal and angular positioning; after the positioning is completed, the jacking sleeve 104 of the jacking component 10 is vacuumed to adsorb the product, and after the platform fixture tray 11 cuts off the vacuum to complete the breaking action, the jacking sleeve 104 moves upward to lift the product, making it convenient for the next workstation to transplant the product.

[0052] For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention.

Claims

1. A wafer alignment assembly station, characterized in that: include: Platform fixture plate (11); A positioning platform (1), wherein a height adjustment component (2) for adjusting the height of the positioning platform (1) and a level detection device (3) for detecting the level of the platform fixture plate (11) are connected below the positioning platform (1); The platform fixture disk (11) is arranged above the positioning platform (1) via a lateral displacement component (4) and a longitudinal displacement component (5); the lateral displacement component (4) is slidably connected to the longitudinal displacement component (5); and a corner component (6) for controlling the rotation of the platform fixture disk (11) is further connected below the platform fixture disk (11).

2. The wafer alignment assembly station according to claim 1, characterized in that: The height adjustment assembly (2) is provided with at least three groups, each group including a motor mounting frame (21), a height adjustment motor (22) and a pressure sensor (23); the height adjustment motor (22) is mounted on one side of the motor mounting frame (21); one end of the pressure sensor (23) is mounted on one side of the height adjustment motor (22), and the other end abuts against the lower surface of the positioning platform (1).

3. The wafer alignment assembly station according to claim 2, characterized in that: The lateral displacement assembly (4) comprises a lateral guide rail (42), a moving frame (41), a lateral displacement ceramic motor (43) and a lateral displacement ceramic transmission bar (44); the lateral guide rail (42) is arranged on the upper surface of the positioning platform (1); the moving frame (41) is arranged above the positioning platform (1) and is slidably connected to the lateral guide rail (42); lateral sliding grooves (12) are provided on both sides of the positioning platform (1) for allowing the lateral displacement ceramic transmission bar (44) to move; the lateral displacement ceramic motor (43) is installed on both sides of the positioning platform (1) and matches the position of the lateral displacement ceramic transmission bar (44).

4. The wafer alignment assembly station according to claim 3, characterized in that: The longitudinal displacement assembly (5) comprises a center plate (51), a longitudinal guide rail (52), and a symmetrically arranged longitudinal displacement ceramic motor (53) and a longitudinal displacement ceramic transmission bar (54); the center plate (51) is slidably connected to the longitudinal sliding groove (411) of the moving frame (41) through the longitudinal guide rail (52); the longitudinal displacement ceramic transmission bar (54) is mounted on the inner wall of the moving frame (41); the longitudinal displacement ceramic motor (53) is mounted on the upper surface of the center plate (51) and matches the position of the longitudinal displacement ceramic transmission bar (54).

5. The wafer alignment assembly station according to claim 4, characterized in that: The level detection device (3) comprises a height grating ruler (31), a height grating ruler reading head (32) and at least three groups of laser displacement sensors (33); the height grating ruler (31) is arranged at the moving end of the height adjustment motor (22); the height grating ruler reading head (32) is arranged on the height adjustment motor (22) and matches the position of the height grating ruler (31); and the laser displacement sensor (33) is installed on the lower surface of the center plate (51).

6. The wafer alignment assembly station according to claim 5, characterized in that: The corner assembly (6) includes a ball bearing ring (61), a corner ceramic motor (62) and an annular ceramic strip (64); a groove (511) for fixing the ball bearing ring (61) is provided at the center of the center plate (51); the outer ring of the ball bearing ring (61) is transitionally matched with the inner diameter of the groove (511); the corner ceramic motor (62) is fixed to the inner ring of the ball bearing ring (61) through a connecting plate (63); the annular ceramic strip (64) is installed on the lower surface of the platform fixture plate (11); and the platform fixture plate (11) is connected to the inner ring of the ball bearing ring (61).

7. The wafer alignment assembly station according to claim 4, characterized in that: The invention also includes a transverse detection device (7), wherein the transverse detection device (7) includes a transverse grating ruler (71) and a transverse grating ruler reading head (72), wherein the transverse grating ruler (71) is arranged on the outer wall of the movable frame (41), and the transverse grating ruler reading head (72) is arranged on the positioning platform (1) and matches the position of the transverse grating ruler (71) for detecting the transverse displacement of the platform fixture disk (11).

8. The wafer alignment assembly station according to claim 4, characterized in that: The invention also includes a longitudinal detection device (8), wherein the longitudinal detection device (8) includes a longitudinal grating ruler (81) and a longitudinal grating ruler reading head (82), wherein the longitudinal grating ruler (81) is arranged on the upper surface of the center plate (51), and the longitudinal grating ruler reading head (82) is arranged on the upper surface of the moving frame (41) and matches the position of the longitudinal grating ruler (81) for detecting the longitudinal displacement of the platform fixture plate (11).

9. The wafer alignment assembly station according to claim 4, characterized in that: The invention also includes an angle detection device (9), wherein the angle detection device (9) includes an angle grating scale (91) and an angle grating scale reading head (92), wherein the angle grating scale (91) is arranged on the side wall of the platform fixture disk (11), and the angle grating scale reading head (92) is arranged above the center plate (51) and matches the position of the angle grating scale (91) for detecting the rotation angle of the platform fixture disk (11).

10. The wafer alignment assembly station according to claim 4, characterized in that: The invention also includes a jacking assembly (10), wherein the jacking assembly (10) includes a jacking motor (101), a jacking bracket (103) and a jacking sleeve (104), wherein the jacking motor (101) is mounted on the lower surface of the center plate (51) via a fixing plate (102), the jacking bracket (103) is arranged at the movable end of the jacking motor (101), and the jacking sleeve (104) is arranged on the upper surface of the jacking bracket (103) and passes through the platform fixture plate (11).

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