Probe card correction equipment

Abstract

The utility model relates to correction equipment, in particular to probe card correction equipment. The probe card correction equipment comprises a supporting base, a supporting table, a rotating table, a probe card and detection probes, the supporting table is installed on the supporting base, the rotating table is arranged on the supporting table in a rotating mode, the probe card is placed on the rotating table, and the multiple detection probes are fixedly connected to the probe card. A detection probe on a probe card is irradiated through an electron microscope, so that image information of the detection probe is transmitted to a display instrument in real time, a first connecting rod and a correction rod are rotated to bend and turn over the probe card, and the rotation angle of the first connecting rod is limited through the guiding effect of a first guide frame; therefore, the probe on the probe card can be accurately repaired.

Description

Technical Field

[0001] The utility model relates to a correction device, in particular to a probe card correction device. Background Art

[0002] A probe card is a tool used to transmit test signals to individual chips on a wafer during the wafer testing phase. It contains a series of tiny metal probes that can contact the test points on the wafer, allowing the test equipment to read the performance data of the chip.

[0003] After being used many times, the probe card may be subjected to external forces during use, such as improper operation, collision, etc., which may cause deformation of the probe or the probe card as a whole, affecting the alignment accuracy. The probe will be worn due to repeated contact with the wafer surface. This wear will also cause the probe length to change, thereby affecting the contact stability. Therefore, the card needle needs to be corrected before use. When correcting the probes on the probe card, most of the time, manual correction is done with a microscope, which makes it difficult for the probes on the probe card to maintain a consistent angle and horizontal height even after correction, affecting subsequent chip testing.

[0004] Therefore, it is necessary to design a probe card correction device that can accurately correct the probe. Utility Model Content

[0005] In order to overcome the disadvantage that the probes on the probe card are difficult to maintain a consistent angle and horizontal height even after correction by manual operation with a microscope, thus affecting subsequent chip testing, the utility model provides a probe card correction device that can accurately correct the probes.

[0006] The technical solution of the present utility model is: a probe card correction device, including a supporting base, a supporting platform, a rotating platform, a probe card and a detection probe, the supporting base is installed with a supporting platform, the supporting platform is rotatably arranged with a rotating platform, a probe card is placed on the rotating platform, a plurality of detection probes are fixedly connected to the probe card, and also includes a first connecting rod, a guide rod, a second connecting rod, a correction rod, a first guide frame, a first elastic member, a positioning frame, a display, a support frame and an electron microscope, a first connecting rod is rotatably arranged on one side of the supporting platform, a first guide frame is fixed on one side of the supporting platform, a guide rod is fixed in the first guide frame, the first connecting rod slides in the first guide frame, a first elastic member is connected between the first guide frame and the first connecting rod, a second connecting rod is slidably arranged on the first connecting rod, a correction rod is fixed on the side of the second connecting rod close to the center of the probe card, a positioning frame is installed on the supporting base, a display is installed on the positioning frame, a support frame is installed between both sides of the supporting platform, an electron microscope is installed on the support frame, and the electron microscope is signal-connected to the display.

[0007] Furthermore, a fork is provided at one end of the correction rod close to the probe card.

[0008] Furthermore, it also includes a worm wheel, a worm, a support rod and a knob. The worm wheel is installed at the lower part of the rotating table, the support rod passes through the support table, the worm is installed on the support rod, the worm and the worm wheel cooperate for transmission, and the knob is installed at one end of the support rod located outside the rotating table.

[0009] Furthermore, it also includes a limiting frame, a clamping rod and a second elastic member. The first connecting rod is fixedly connected to the limiting frame on the side away from the support platform. The clamping rod is slidably arranged on the limiting frame. A plurality of clamping slots are opened on one side of the second connecting rod. The clamping rod slides and engages with the clamping slots on the second connecting rod. A second elastic member is connected between the clamping rod and the first connecting rod.

[0010] Furthermore, it also includes a fill light, and the fill light is installed at the bottom of the electron microscope.

[0011] Furthermore, it also includes a second guide frame and a cleaning block. The second guide frames are installed on both sides of the display, and the cleaning block is slidably arranged between the two second guide frames.

[0012] The beneficial effects are: 1. The detection probes on the probe card are irradiated by an electron microscope, so that the image information of the detection probes is transmitted to the display in real time, the first connecting rod is rotated, and the correction rod bends and flips the probe card. The rotation angle of the first connecting rod is limited by the guiding effect of the first guide frame, thereby realizing precise repair of the probes on the probe card.

[0013] 2. By pulling the second connecting rod, the distance between the correction rod and the first connecting rod changes until the correction rod can clamp the detection probe on the probe card, so that the device can correct probe cards of different sizes. Then release the clamping rod, and the second elastic member returns to its original state, driving the clamping rod to reset and engage with the card slot. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model.

[0015] Figure 2 It is a schematic diagram of the three-dimensional structure of the support platform, probe card and positioning frame of the utility model.

[0016] Figure 3 It is a schematic diagram of the three-dimensional cross-section of the positioning frame and the detection probe of the utility model.

[0017] Figure 4 The utility model is a schematic diagram of a three-dimensional cross-sectional structure of the guide rod, the correction rod and the guide frame.

[0018] Figure 5 It is a schematic diagram of the three-dimensional cross-sectional structure of the worm wheel, worm and knob of the utility model.

[0019] Figure 6 It is a three-dimensional sectional schematic diagram of the worm wheel, worm and support rod of the utility model.

[0020] Figure 7 It is a schematic three-dimensional cross-sectional structure diagram of the limit frame, the clamping rod and the guide rod of the utility model.

[0021] Figure 8 This is a schematic diagram of the three-dimensional cross-sectional structure of the display instrument, guide frame and cleaning block of the utility model.

[0022] In the accompanying drawings: 1-support base, 2-support table, 3-probe card, 301-detection probe, 302-rotating table, 4-first connecting rod, 5-guide rod, 6-second connecting rod, 7-correction rod, 8-first guide frame, 9-first elastic member, 10-positioning frame, 11-display, 12-support frame, 13-electron microscope, 14-worm gear, 15-worm, 16-support rod, 17-knob, 18-limiting frame, 19-card rod, 20-second elastic member, 21-card slot, 22-fill light, 23-second guide frame, 24-cleaning block. DETAILED DESCRIPTION

[0023] The embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0024] Example 1: A probe card correction device, see Figures 1-4As shown, it includes a supporting base 1, a supporting platform 2, a rotating platform 302, a probe card 3 and a detection probe 301. The supporting base 1 is installed with a supporting platform 2 by means of bolt connection. The rotating platform 302 is rotatably provided on the supporting platform 2. The probe card 3 is placed on the rotating platform 302. A plurality of detection probes 301 are fixedly connected to the probe card 3 by welding. A first connecting rod 4 is rotatably provided on the right side of the supporting platform 2. A first guide frame 8 is fixedly connected to the right side of the supporting platform 2 by welding. A guide rod 5 is fixedly connected to the first guide frame 8 by welding. The first connecting rod 4 slides in the first guide frame 8. A first elastic member 9 is connected between the first guide frame 8 and the first connecting rod 4. A second connecting rod 4 is slidably provided on the first connecting rod 4. The connecting rod 6 and the second connecting rod 6 are fixedly connected with a correction rod 7 on one side close to the center of the probe card 3 by welding. A fork is provided at one end of the correction rod 7 close to the probe card 3, and the detection probe 301 is clamped by the fork of the correction rod 7. A positioning frame 10 is installed on the support base 1 by bolt connection, and a display 11 is installed on the positioning frame 10 by bolt connection. A support frame 12 is installed between the two sides of the support platform 2, and an electron microscope 13 is installed on the support frame 12. A fill light 23 is installed at the bottom of the electron microscope 13. When the lighting conditions are insufficient, the probe card 3 is supplemented with light by the fill light 23, so that the detection probe 301 of the probe card 3 is conveniently corrected. The electron microscope 13 is connected to the display 11 signal.

[0025] When the probe card 3 needs to be corrected, the probe card 3 is placed on the rotating table 302, and then the electron microscope 13 is started. The electron microscope 13 irradiates the detection probe 301 on the probe card 3, so that the image information of the detection probe 301 is transmitted to the display 11 in real time, and then the correction rod 7 is pushed toward the side of the detection probe 301. The correction rod 7 clamps the deformed detection probe 301, and then the first connecting rod 4 is rotated. The first connecting rod 4 drives the correction rod 7 to rotate. The first connecting rod 4 moves downward to squeeze the first elastic member 9 to deform, so that the correction rod 7 bends and flips the detection probe 301. The rotation angle of the first connecting rod 4 is adjusted according to the display data of the detection probe 301 on the display 11, thereby completing the correction of the detection probe 301. After loosening the first connecting rod 4, the first elastic member 9 returns to its original state and drives the first connecting rod 4 to rotate upward and reset. Through the guiding effect of the first guide frame 8, the rotation angle of the first connecting rod 4 is limited, thereby realizing precise repair of the probe on the probe card 3.

[0026] Example 2: Based on Example 1, refer to Figure 5 and Figure 6As shown, it also includes a worm gear 14, a worm 15, a support rod 16 and a knob 17. The worm gear 14 is installed on the lower part of the rotating table 302 by a key connection. The support rod 16 passes through the support table 2, and the worm 15 is installed on the support rod 16. The worm 15 cooperates with the worm gear 14 for transmission, and a knob 17 is installed on one end of the support rod 16 located outside the rotating table 302.

[0027] When the probe card 3 is calibrated, the knob 17 is rotated, which drives the worm 15 to rotate, the worm 15 drives the worm gear 14 to rotate, and the worm gear 14 drives the rotating stage 302 and the probe card 3 to rotate, thereby facilitating adjustment of the calibration position of the probe card 3.

[0028] See Figure 4 and Figure 7 As shown, it also includes a limiting frame 18, a clamping rod 19 and a second elastic member 20. The right side of the first connecting rod 4 is fixed to the limiting frame 18 by welding. The clamping rod 19 is slidably provided on the limiting frame 18. A plurality of clamping grooves 21 are opened on one side of the second connecting rod 6. The clamping rod 19 slides and clamps with the clamping groove 21 on the second connecting rod 6. A second elastic member 20 is connected between the clamping rod 19 and the first connecting rod 4.

[0029] When it is necessary to correct the probe cards 3 of different signals, first pull the card rod 19 outward to disengage the card rod 19 from the card slot 21. The card rod 19 squeezes the second elastic member 20 to cause deformation. Then pull the second connecting rod 6. The second connecting rod 6 drives the correction rod 7 to adjust the position, so that the distance between the correction rod 7 and the first connecting rod 4 changes, until the correction rod 7 can clamp the detection probe 301 on the probe card 3, so that the device can correct probe cards 3 of different sizes. Then release the card rod 19, and the second elastic member 20 returns to its original state, driving the card rod 19 to reset and engage with the card slot 21, thereby limiting the second connecting rod 6.

[0030] See Figure 1 and Figure 8 As shown, the display device 11 further includes a second guide frame 24 and a cleaning block 25 . The second guide frames 24 are installed on both sides of the display device 11 , and the cleaning block 25 is slidably arranged between the two second guide frames 24 .

[0031] The display 11 is wiped by sliding the cleaning block 25 up and down, so that the display 11 can clearly display the image information of the detection probe 301 .

[0032] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A probe card correction device, comprising a support base (1), a support table (2), a rotating table (302), a probe card (3) and a detection probe (301), wherein the support base (1) is mounted with the support table (2), the rotating table (302) is rotatably arranged on the support table (2), the probe card (3) is placed on the rotating table (302), and a plurality of detection probes (301) are fixedly connected to the probe card (3), characterized in that: The device further comprises a first connecting rod (4), a guide rod (5), a second connecting rod (6), a correction rod (7), a first guide frame (8), a first elastic member (9), a positioning frame (10), a display (11), a support frame (12) and an electron microscope (13); the first connecting rod (4) is rotatably provided on one side of the support platform (2); the first guide frame (8) is fixedly connected to one side of the support platform (2); the guide rod (5) is fixedly connected inside the first guide frame (8); the first connecting rod (4) slides inside the first guide frame (8); the first guide frame (8) A first elastic member (9) is connected to the first connecting rod (4), a second connecting rod (6) is slidably provided on the first connecting rod (4), a correction rod (7) is fixedly connected to one side of the second connecting rod (6) close to the center of the probe card (3), a positioning frame (10) is installed on the support base (1), a display (11) is installed on the positioning frame (10), a support frame (12) is installed between the two sides of the support platform (2), an electron microscope (13) is installed on the support frame (12), and the electron microscope (13) is connected to the display (11) by signal.

2. The probe card correction device according to claim 1, wherein: A fork is provided at one end of the correction rod (7) close to the probe card (3).

3. The probe card correction device according to claim 2, wherein: The invention also includes a worm wheel (14), a worm (15), a support rod (16) and a knob (17). The worm wheel (14) is installed at the lower part of the rotating platform (302). The support rod (16) passes through the supporting platform (2). The worm (15) is installed on the support rod (16). The worm (15) cooperates with the worm wheel (14) for transmission. The knob (17) is installed at one end of the support rod (16) located outside the rotating platform (302).

4. The probe card correction device according to claim 3, wherein: The invention also includes a limiting frame (18), a clamping rod (19) and a second elastic member (20); the limiting frame (18) is fixedly connected to the side of the first connecting rod (4) away from the support platform (2); the clamping rod (19) is slidably provided on the limiting frame (18); a plurality of clamping grooves (21) are provided on one side of the second connecting rod (6); the clamping rod (19) is slidably clamped to the clamping grooves (21) on the second connecting rod (6); and the second elastic member (20) is connected between the clamping rod (19) and the first connecting rod (4).

5. The probe card correction device according to claim 4, wherein: The invention also comprises a supplementary light (23), and the supplementary light (23) is installed at the lower part of the electron microscope (13).

6. The probe card correction device according to claim 5, characterized in that: The device further comprises a second guide frame (24) and a cleaning block (25). The second guide frames (24) are installed on both sides of the display instrument (11), and the cleaning block (25) is slidably arranged between the two second guide frames (24).

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