Protective device of single crystal furnace isolating valve and single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnaces, in particular to a protective device of an isolating valve of a single crystal furnace and the single crystal furnace, which comprises a protective cover and a buffer device, wherein the protective cover is arranged above the isolating valve and the water path system and is used for preventing a crystal bar from falling off in the operation process; a plurality of buffer devices are arranged between the isolating valve and the protective cover, and the buffer devices are used for supporting the protective cover and can absorb impact force when the crystal bar falls off. Potential safety hazards and equipment damage risks can be reduced or eradicated, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a protective device for an isolation valve of a single crystal furnace and the single crystal furnace. Background Art

[0002] Single crystal silicon is an indispensable material in the semiconductor industry. A key step in its production process is ingot growth in a single crystal furnace. To achieve continuous production during the ingot growth process, isolation valves are typically installed within the furnace to control ingot introduction, removal, and feeding. This allows for separation and connection at different stages, improving production efficiency and flexibility.

[0003] Description of prior art:

[0004] In traditional single crystal furnace systems, isolation valves are key components for transferring crystal rods. Isolation valves are frequently used during the process of guiding, finishing, and adding materials to ensure smooth operations at each stage. In order to cope with the high temperature environment in the single crystal furnace (usually up to 1500°C), the isolation valve is designed with a water channel inside and connected to the water system for cooling to prevent deformation or failure of the material caused by high temperature. In addition, it is usually equipped with two external corrugated water pipes for water inlet and outlet, respectively, to further reduce the operating temperature of the isolation valve through an external circulation cooling system.

[0005] Problems:

[0006] Although the above design solves the cooling problem of the isolation valve in high temperature environment to a certain extent, it still has the following major defects:

[0007] 1. Safety Hazard: During the ingot removal process, the ingots in the single crystal furnace are heavy (up to several tons) and highly rigid. Improper handling or equipment failure could cause the ingots to fall near the isolation valve. In this case, the ingot could damage the water pipes attached to the isolation valve or the isolation valve itself, causing a rupture or valve damage, leading to water leaks and a serious threat to the safety of on-site operators.

[0008] 2. Equipment damage risk: Due to the hardness and weight of the ingot, contact or collision with the isolation valve could create a strong impact on the water pipe, causing it to puncture and leak. This damage not only increases repair costs but can also interrupt the production line, disrupting the normal crystal pulling process.

[0009] 3. Impact on production efficiency: When the isolation valve is damaged, production needs to be stopped immediately for repair or replacement, which will directly lead to production interruption, reduce overall production efficiency, and may also extend the entire production cycle. Utility Model Content

[0010] The purpose of the utility model is to provide a protective device for a single crystal furnace isolation valve, which can reduce or eliminate safety hazards and equipment damage risks and improve production efficiency.

[0011] Another object of the present invention is to provide a single crystal furnace that can reduce or eliminate potential safety hazards and equipment damage risks, thereby improving production efficiency.

[0012] The technical solution of the present utility model is achieved as follows:

[0013] A protective device for a single crystal furnace isolation valve, used to protect the isolation valve and the isolation valve's water system, comprising a protective cover and a buffer device;

[0014] The protective cover is provided above the isolation valve and the water system to prevent the crystal rod from falling during operation;

[0015] A plurality of buffer devices are provided between the isolation valve and the protective cover. The buffer devices are used to support the protective cover and absorb impact force when the crystal ingot falls.

[0016] Furthermore, the buffer device includes an elastomer, and the elastomer is arranged between the isolation valve and the protective cover.

[0017] Furthermore, the elastic body is a spring.

[0018] Furthermore, the buffer device also includes a spring guard, a spring sleeve and a positioning bolt;

[0019] The spring guard comprises a telescopic inner cylinder and a telescopic outer cylinder, wherein the telescopic inner cylinder is slidably connected to the telescopic outer cylinder and can be axially extended and retracted, and one end of the spring guard is connected to the isolation valve and the other end is connected to the protective cover;

[0020] The protective cover is provided with a through hole, and the isolation valve is provided with a threaded hole matching the positioning bolt; or the isolation valve is provided with a through hole, and the protective cover is provided with a threaded hole matching the positioning bolt;

[0021] The spring sleeve includes a coaxially arranged thick-diameter portion and a thin-diameter portion, and the spring sleeve is provided with a through-hole along its axial direction. The spring is sleeved on the thin-diameter portion, and the spring sleeve and the spring are both located in the spring shield. The screw of the positioning bolt is sequentially passed through the through-hole and the through-hole and is threadedly connected to the threaded hole. The size of the through-hole is smaller than the size of the nut of the positioning bolt to form a blockage for the nut.

[0022] Furthermore, a through hole is provided on the protective cover, a threaded hole matching the positioning bolt is provided on the isolation valve, and the through hole, the spring sleeve and the threaded hole are coaxially arranged, and the large diameter portion is located above the small diameter portion.

[0023] Furthermore, the protective cover is a circular plate structure.

[0024] Furthermore, the buffer devices are provided in four numbers and are evenly distributed around the central axis of the protective cover.

[0025] Furthermore, an elastic buffer layer is provided on the top of the protective cover.

[0026] A protective device for a single crystal furnace isolation valve, used to protect the isolation valve and the isolation valve's water system, comprising a protective cover and an elastic buffer pad;

[0027] The protective cover is arranged above the isolation valve and the water system to prevent the crystal rod from falling during operation. A plurality of support columns are arranged between the protective cover and the isolation valve, and the elastic buffer pad is arranged on the top surface of the protective cover.

[0028] A single crystal furnace comprises an isolation valve and a protective device for the isolation valve of the single crystal furnace, wherein the protective device for the isolation valve of the single crystal furnace is arranged on the isolation valve.

[0029] Compared with the prior art, the beneficial effects of the present invention are:

[0030] The present application provides a protective device for the isolation valve of a single crystal furnace, which utilizes a protective cover set directly above the isolation valve and a plurality of buffer devices for buffering set between the protective cover and the isolation valve. By installing the protective cover and its buffer device on the upper part of the isolation valve, the deformation and leakage caused by the impact of the falling crystal rod on the isolation valve are reduced, thereby improving the safety of the single crystal furnace and reducing the replacement cost. Therefore, compared with the existing technology, it can effectively reduce or eliminate safety hazards and equipment damage risks and improve production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0032] Figure 1 This is a front view structural diagram of the protective device of the isolation valve of the single crystal furnace in this application;

[0033] Figure 2For this utility model Figure 1 Cross-sectional view at AA in the middle;

[0034] Figure 3 For this utility model Figure 2 A magnified view of the local structure at center A;

[0035] Figure 4 It is a cross-sectional view of the spring sheath of the utility model.

[0036] In the picture:

[0037] 1-Isolation valve; 2-Water system; 3-Protective cover; 4-Buffer device;

[0038] 401-spring; 402-telescopic inner tube; 403-telescopic outer tube; 404-spring sheath;

[0039] 4041-thick diameter portion; 4042-thin diameter portion; 4043-through hole; 405-positioning bolt. DETAILED DESCRIPTION

[0040] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0041] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0042] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0043] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0044] Furthermore, terms such as "horizontal," "vertical," and "overhanging" do not necessarily imply that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0045] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0046] The following embodiments of the present invention are described in detail with reference to the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments may be combined with each other.

[0047] Example 1

[0048] Single crystal furnace isolation valves are typically used to control and isolate the molten silicon from the external gas or atmosphere during the single crystal growth process. This valve plays a vital role in the crystal growth process because it ensures that the molten silicon is isolated from the external environment while in liquid form to prevent contamination. At the same time, it can safely shut down the system after the growth is completed to prevent the leakage of molten silicon or gas leaks that may endanger equipment or operators.

[0049] In the single crystal growth process, polysilicon raw materials are used, which are heated to the melting point (about 1420℃) to make it liquid, and then crystal growth is carried out under a specific atmosphere (such as high-purity nitrogen or argon). In this process, the main functions of the isolation valve include:

[0050] 1. Isolation protection: When the molten silicon is in liquid state, the isolation valve is used to isolate the external air or other gases that may have an adverse effect on crystal growth to ensure the purity and quality of the crystal.

[0051] 2. Safe operation: After the crystal growth is completed, the molten silicon needs to be cooled and the crystal rod removed from the furnace body. At this time, the closing function of the isolation valve can help control the pressure in the furnace body, avoid accidental leakage of molten silicon, and ensure the safety of operators.

[0052] 3. Atmosphere control: Isolation valves can also be used in conjunction with different gases to control the atmosphere during the growth process, which plays an important role in improving crystal quality. For example, by adjusting the type and ratio of gases to optimize the growth environment of the crystal.

[0053] 4. Emergency treatment: In the event of a fault or emergency, the isolation valve can quickly cut off the connection between the molten silicon and the outside world, prevent the accident from expanding, and protect equipment and materials.

[0054] like Figure 1 , this embodiment provides a protection device for a single crystal furnace isolation valve 1, which is used to protect the isolation valve 1 and the water system 2 of the isolation valve 1;

[0055] Specifically, it includes a protective cover 3 and a buffer device 4;

[0056] The protective cover 3 is provided above the isolation valve 1 and the water system 2 to prevent the crystal rod from falling during operation.

[0057] A plurality of buffer devices 4 are provided between the isolation valve 1 and the protective cover 3 . The buffer devices 4 are used to support the protective cover 3 and absorb impact force when the crystal ingot falls.

[0058] The buffer device 4 includes an elastomer, which is an elastic material such as rubber, silicone, sponge, thermoplastic elastomer, metal spring 401, etc.

[0059] In this embodiment, the protective cover 3 may be a plate-like structure, and the elastic body may be a spring 401. The spring 401 may be fixedly disposed between the isolation valve 1 and the protective cover 3, for example, by fixing the top end of the spring 401 to the protective cover 3, and the bottom end of the spring 401 to the isolation valve 1. Alternatively, the elastic body may be an elastic rubber block, with the top surface of the rubber block bonded to the bottom surface of the protective cover 3, and the bottom surface of the rubber block bonded to the top of the isolation valve 1.

[0060] Example 2

[0061] Reference Figures 1-4 , this embodiment provides a protection device for a single crystal furnace isolation valve 1, which is used to protect the isolation valve 1 and the water system 2 of the isolation valve 1;

[0062] Specifically, it includes a protective cover 3 and a buffer device 4;

[0063] The protective cover 3 is provided above the isolation valve 1 and the water system 2 to prevent the crystal rod from falling during operation.

[0064] A plurality of buffer devices 4 are provided between the isolation valve 1 and the protective cover 3 . The buffer devices 4 are used to support the protective cover 3 and absorb impact force when the crystal ingot falls.

[0065] The buffer device 4 includes an elastic body, and the elastic body is a spring 401 .

[0066] The buffer device 4 also includes a spring 401 shield, a spring sheath 404 and a positioning bolt 405;

[0067] Among them, the spring 401 is located in the spring 401 shield. The spring 401 shield can not only limit the spring 401 to prevent the spring 401 from deforming too much in the radial direction during the extrusion process, thereby controlling the deformation amplitude of the spring 401, but the spring 401 shield itself can also be telescopic, and can shrink as the spring 401 is squeezed or stretch as the spring 401 recovers its elasticity.

[0068] Specifically, the spring 401 shield includes a telescopic inner cylinder 402 and a telescopic outer cylinder 403. The telescopic inner cylinder 402 is slidably connected to the telescopic outer cylinder 403 and can be axially extended. One end of the spring 401 shield is fixedly connected to the isolation valve 1, and the other end is fixedly connected to the protective cover 3.

[0069] The protective cover 3 is provided with a through hole, and the isolation valve 1 is provided with a threaded hole matching the positioning bolt 405; or the isolation valve 1 is provided with a through hole, and the protective cover 3 is provided with a threaded hole matching the positioning bolt 405;

[0070] The spring sheath 404 includes a coaxially arranged thick-diameter portion 4041 and a thin-diameter portion 4042, and the spring sheath 404 is provided with a through-hole 4043 along its axial direction. The spring 401 is sleeved on the thin-diameter portion 4042, and the spring sheath 404 and the spring 401 are both located in the spring 401 shield. The screw of the positioning bolt 405 is sequentially passed through the through-hole and the through-hole 4043 and is threadedly connected to the threaded hole. The size of the through-hole is smaller than the size of the nut of the positioning bolt 405 to form a blockage for the nut.

[0071] Preferably, a through hole is provided in the protective cover 3, and a threaded hole matching the positioning bolt 405 is provided in the isolation valve 1. The through hole, spring sheath 404, and threaded hole are coaxially arranged, with the large-diameter portion 4041 positioned above the small-diameter portion 4042. The top of the telescopic outer cylinder 403 is welded to the bottom of the protective cover 3, while the bottom of the telescopic inner cylinder 402 is welded to the top of the isolation valve 1. The protective cover 3 is a circular plate and is positioned directly above the isolation valve 1.

[0072] If the crystal ingot falls, it will first fall on the protective cover 3. Under the action of the gravity of the crystal ingot, the protective cover 3 will be pressed down, and the through hole on the protective cover 3 will move downward relative to the screw of the positioning bolt 405. At the same time, the spring 401 will be squeezed, and the spring 401 shield will tend to shrink. The common buffering effect of multiple buffer devices 4 can buffer and offset the impact force of the falling crystal ingot, preventing the crystal ingot from directly hitting the isolation valve 1 or the water system 2, and playing a good protective role for the isolation valve 1 and its water system 2. Therefore, the protective device can reduce or eliminate the safety hazards of the falling crystal ingot and the risk of equipment damage, thereby improving production efficiency.

[0073] Preferably, four buffer devices 4 are provided and are evenly distributed around the central axis of the protective cover 3 .

[0074] Preferably, an elastic buffer layer may be laid on the top surface of the protective cover 3 to further improve the buffering effect and protect the crystal rod from damage.

[0075] Example 3

[0076] A protective device for a single crystal furnace isolation valve 1, used to protect the isolation valve 1 and the water system 2 of the isolation valve 1, comprising a protective cover 3 and an elastic buffer pad;

[0077] Among them, the protective cover 3 is arranged above the isolation valve 1 and the water system 2 to prevent the crystal rod from falling during operation. Multiple support columns are arranged between the protective cover 3 and the isolation valve 1, and the elastic buffer pad is arranged on the top surface of the protective cover 3.

[0078] When the crystal ingot falls, it will first hit the elastic buffer pad, which cushions the impact of the crystal ingot, protecting the crystal ingot while preventing damage to it, and also plays a good protective role for the isolation valve 1 and its water system 2. Therefore, this protective device can reduce or eliminate the safety hazards of crystal ingot falling and the risk of equipment damage, thereby improving production efficiency.

[0079] Example 4

[0080] This embodiment provides a protective device for a single crystal furnace isolation valve 1, which is used to protect the isolation valve 1 and the water system 2 of the isolation valve 1, and includes a protective cover and an elastic buffer pad;

[0081] The protective cover is arranged above the isolation valve 1 and the water system 2, the bottom of the protective cover is buckled on the top of the isolation valve 1, the isolation valve 1 is located in the inner cavity of the protective cover, and a spring 401 buffer pad is provided on the outer surface of the protective cover to prevent the crystal rod from falling during operation.

[0082] When the crystal ingot falls, it will first hit the elastic buffer pad, which cushions the impact of the crystal ingot, protecting the crystal ingot while preventing damage to it, and also plays a good protective role for the isolation valve 1 and its water system 2. Therefore, this protective device can reduce or eliminate the safety hazards of crystal ingot falling and the risk of equipment damage, thereby improving production efficiency.

[0083] Example 5

[0084] A single crystal furnace comprises an isolation valve 1 and a protective device for the isolation valve 1 of the single crystal furnace, wherein the protective device for the isolation valve 1 of the single crystal furnace is arranged on the isolation valve 1.

[0085] The protective device can reduce or eliminate the safety hazards of crystal rods falling and the risk of equipment damage, thereby improving production efficiency.

[0086] The beneficial effects of the technical solution of the utility model are:

[0087] The present application provides a protective device for a single crystal furnace isolation valve 1, which utilizes a protective cover 3 to be arranged directly above the isolation valve 1, and a plurality of buffer devices 4 for buffering to be arranged between the protective cover 3 and the isolation valve 1. By installing the protective cover 3 and its buffer devices 4 on the upper part of the isolation valve 1, the furnace shutdown caused by deformation and leakage caused by the impact of the falling crystal rod on the isolation valve 1 is reduced; and / or, the protective device utilizes an elastic buffer pad or an elastic buffer layer to buffer and offset the impact force of the falling crystal rod, thereby protecting the isolation valve 1 and its water system 2, improving the safety of the single crystal furnace, and reducing replacement costs. Therefore, compared with the existing technology, it can effectively reduce or eliminate safety hazards and equipment damage risks, and improve production efficiency.

[0088] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

[0089] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A protective device for a single crystal furnace isolation valve (1), used for protecting the isolation valve (1) and the water system (2) of the isolation valve (1), characterized in that: It comprises a protective cover (3) and a buffer device (4); The protective cover (3) is arranged above the isolation valve (1) and the water system (2) to prevent the crystal rod from falling during operation; A plurality of buffer devices (4) are provided between the isolation valve (1) and the protective cover (3), and the buffer devices (4) are used to support the protective cover (3) and can absorb impact force when the crystal rod falls.

2. The protective device of the single crystal furnace isolation valve (1) according to claim 1, characterized in that: The buffer device (4) comprises an elastic body, and the elastic body is arranged between the isolation valve (1) and the protective cover (3).

3. The protective device of the single crystal furnace isolation valve (1) according to claim 2, characterized in that: The elastic body is a spring (401).

4. The protective device for the single crystal furnace isolation valve (1) according to claim 3, characterized in that: The buffer device (4) further comprises a spring (401) shield, a spring sheath (404) and a positioning bolt (405); The spring (401) shield comprises a telescopic inner cylinder (402) and a telescopic outer cylinder (403), wherein the telescopic inner cylinder (402) is slidably connected to the telescopic outer cylinder (403) and is capable of axial expansion and contraction, and one end of the spring (401) shield is connected to the isolation valve (1) and the other end is connected to the protective cover (3); The protective cover (3) is provided with a through hole, and the isolation valve (1) is provided with a threaded hole matching the positioning bolt (405); or, the isolation valve (1) is provided with a through hole, and the protective cover (3) is provided with a threaded hole matching the positioning bolt (405); The spring sheath (404) includes a coaxially arranged thick-diameter portion (4041) and a thin-diameter portion (4042), and the spring sheath (404) is provided with a through hole (4043) along its axial direction. The spring (401) is sleeved on the thin-diameter portion (4042), and the spring sheath (404) and the spring (401) are both located in the spring (401) shield. The screw of the positioning bolt (405) is sequentially passed through the through hole and the through hole (4043) and is threadedly connected to the threaded hole. The size of the through hole is smaller than the size of the nut of the positioning bolt (405) to form a blockage for the nut.

5. The protective device of the single crystal furnace isolation valve (1) according to claim 4, characterized in that: The protective cover (3) is provided with a through hole, and the isolation valve (1) is provided with a threaded hole matching the positioning bolt (405), and the through hole, the spring sleeve (404) and the threaded hole are coaxially arranged, and the large diameter portion (4041) is located above the small diameter portion (4042).

6. The protective device for the isolation valve (1) of a single crystal furnace according to claim 1, characterized in that: The protective cover (3) is in a circular plate structure.

7. The protective device for the isolation valve (1) of a single crystal furnace according to claim 6, characterized in that: The buffer devices (4) are provided in four numbers and are evenly distributed around the central axis of the protective cover (3).

8. The protective device for the isolation valve (1) of a single crystal furnace according to claim 1, characterized in that: An elastic buffer layer is provided on the top of the protective cover (3).

9. A protective device for a single crystal furnace isolation valve (1), used for protecting the isolation valve (1) and the water system (2) of the isolation valve (1), characterized in that: It includes a protective cover (3) and an elastic buffer pad; The protective cover (3) is arranged above the isolation valve (1) and the water system (2) to prevent the crystal rod from falling during operation. A plurality of support columns are arranged between the protective cover (3) and the isolation valve (1), and the elastic buffer pad is arranged on the top surface of the protective cover (3).

10. A single crystal furnace, comprising an isolation valve (1), characterized in that: It also comprises a protective device for the single crystal furnace isolation valve (1) according to any one of claims 1 to 9, wherein the protective device for the single crystal furnace isolation valve (1) is arranged on the isolation valve (1).

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