Cache mechanism and silicon wafer production equipment

Abstract

The utility model discloses a cache mechanism and silicon wafer production equipment. The buffering mechanism comprises a bearing assembly, a guide assembly and a driving piece, wherein the bearing assembly is used for bearing a graphite boat; the guide assemblies are located at the two ends of the bearing assembly correspondingly, each guide assembly comprises a guide piece and a sliding piece in sliding connection with the guide piece, and the sliding pieces are connected with the bearing assembly; the driving piece is fixedly connected with the bearing assembly so as to drive the bearing assembly to move along the guiding piece. According to the buffer mechanism, the moving states of the two ends of the graphite boat can be kept consistent, so that the butt joint success rate of the buffer mechanism and the AGV trolley is increased, and the graphite boat damage probability is reduced while the graphite boat operation efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of solar silicon wafer production equipment, in particular to a buffer mechanism and silicon wafer production equipment. Background Art

[0002] Graphite boats, used for carrying and transporting silicon wafers, are crucial equipment in the photovoltaic manufacturing industry. To reduce the risk of silicon wafer contamination, they require regular inspection and cleaning. This involves moving the boats from a buffer mechanism to an AGV, which then transports them to the inspection or cleaning locations.

[0003] In the existing technology, the buffer mechanism uses a dual-cylinder drive method to transport the graphite boat, which can easily lead to asynchronous startup, asynchronous positioning, inaccurate positioning, etc. on both sides of the graphite boat, resulting in a high failure rate when docking with the AGV car. On the one hand, it seriously affects the operating efficiency of the graphite boat. On the other hand, when the docking fails, the graphite boat is easily damaged, resulting in an increase in production costs. Utility Model Content

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a buffer mechanism that can keep the movement states of the two ends of the graphite boat consistent, thereby improving the docking success rate of the buffer mechanism and the AGV vehicle, improving the operating efficiency of the graphite boat while reducing the probability of damage to the graphite boat.

[0005] The utility model also provides a silicon wafer production device having the above-mentioned buffer mechanism.

[0006] The cache mechanism according to the first embodiment of the present invention includes:

[0007] A bearing assembly, the bearing assembly being used to bear the graphite boat;

[0008] Guide assemblies, the guide assemblies being located at both ends of the bearing assembly, the guide assemblies comprising guide members and sliding members slidably connected to the guide members, the sliding members being connected to the bearing assembly;

[0009] A driving member is fixedly connected to the bearing assembly to drive the bearing assembly to move along the guide member.

[0010] The cache mechanism according to the embodiment of the present invention has at least the following beneficial effects:

[0011] The cache mechanism of the present application drives the support assembly through a driving mechanism so that both ends of the support assembly can move simultaneously relative to the guide member. Since both ends use guide members for movement guidance, the movement states of the two ends of the graphite boat remain consistent, ensuring the motion accuracy of the operation and improving the synchronization of the cache mechanism, thereby improving the docking success rate between the cache mechanism and the AGV cart, and reducing the probability of damage to the graphite boat while improving the operating efficiency of the graphite boat.

[0012] According to some embodiments of the present invention, the sliding member includes a support plate and a slider, the support plate is fixedly connected to the bearing assembly, the slider is slidably connected to the guide member, and the support plate and the slider are connected by an adjusting member so that the distance between the support plate and the slider is adjustable.

[0013] According to some embodiments of the present invention, the adjusting member is a first bolt, the support plate is provided with a first threaded hole, the first bolt is passed through the first threaded hole and is threadedly connected to the support plate, one end of the first bolt protrudes from the support plate and abuts against the slider, and the protruding length of the first bolt can be adjusted by rotating the first bolt.

[0014] According to some embodiments of the present invention, the driving member includes an output shaft and a gear sleeved on the output shaft, and a rack is provided on the guide member, and the gear is engaged with the rack for transmission.

[0015] According to some embodiments of the present invention, the supporting assembly further includes a supporting member, a mounting member and a first sensor, the two ends of the supporting member are respectively connected to the sliding member, the mounting member is arranged on the top surface of the supporting member, the mounting member is used to abut against the graphite boat, and the first sensor is connected to the mounting member or the supporting member.

[0016] According to some embodiments of the present invention, the first sensor includes a trigger portion and a sensing portion. In an initial state, one end of the trigger portion is protruding from the surface of the mounting member, and the other end is spaced apart from the sensing portion. When the graphite boat is placed on the mounting member, the trigger portion is driven to retract and trigger the sensing portion.

[0017] The trigger portion is further connected to an elastic portion, and when the pressure applied to the trigger portion is released, the elastic portion drives the trigger portion to return to an initial state.

[0018] According to some embodiments of the present invention, the first sensor is provided at both ends of the supporting member.

[0019] According to some embodiments of the present invention, the cache mechanism further includes a limit member, which is connected to the guide member and is located on the moving route of the sliding member; the limit member can abut against the sliding member to define the extreme position of the sliding member.

[0020] According to some embodiments of the present invention, the limiting member includes a second bolt and a main body, the main body is provided with a second threaded hole, the second bolt is passed through the second threaded hole and is threadedly connected to the main body, and the second bolt is provided at one end close to the sliding member to protrude from the main body, and the protruding length of the second bolt can be adjusted by rotating the second bolt.

[0021] According to the second aspect of the present invention, the silicon wafer production equipment includes: the cache mechanism described in any one of the above embodiments and an AGV cart, wherein the AGV cart can be docked with the cache mechanism to carry the graphite boat on the cache mechanism.

[0022] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0024] Figure 1 This is a schematic structural diagram of the cache mechanism of an embodiment of the present utility model (carrying a graphite boat);

[0025] Figure 2 This is a schematic structural diagram of the cache mechanism of an embodiment of the present utility model (without the graphite boat);

[0026] Figure 3 for Figure 2 A magnified schematic diagram of area A in the middle;

[0027] Figure 4 for Figure 3 A magnified schematic diagram of area B in the middle;

[0028] Figure 5 This is a schematic diagram of the connection between the mounting member and the first sensor according to an embodiment of the present utility model;

[0029] Figure 6 This is a schematic diagram of the internal structure of the first sensor according to an embodiment of the present utility model.

[0030] Reference numerals:

[0031] Carrying assembly 100; Carrying member 110;

[0032] Guide assembly 200; guide member 210; rack 211; sliding member 220; support plate 221; slider 222; adjustment member 223;

[0033] Driving member 300; Adapter 310;

[0034] Mounting member 400; first sensor 410; trigger portion 411; sensing portion 412; elastic portion 413;

[0035] Limiting member 500; second bolt 510; main body 520;

[0036] Graphite Boat 600. DETAILED DESCRIPTION

[0037] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0038] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0039] In the description of this utility model, "several" means more than one, "plurality" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of the terms "first" and "second" is solely for the purpose of distinguishing technical features and is not to be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.

[0040] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0041] In the description of the present invention, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the exemplary expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0042] Graphite boats, used for carrying and transporting silicon wafers, are crucial equipment in the photovoltaic manufacturing industry. To reduce the risk of silicon wafer contamination, they require regular inspection and cleaning. This involves moving the boats from a buffer mechanism to an AGV, which then transports them to the inspection or cleaning locations.

[0043] In the existing technology, the buffer mechanism uses a dual-cylinder drive method to transport the graphite boat, which can easily lead to asynchronous startup, asynchronous positioning, inaccurate positioning, etc. on both sides of the graphite boat, resulting in a high failure rate when docking with the AGV car. On the one hand, it seriously affects the operating efficiency of the graphite boat. On the other hand, when the docking fails, the graphite boat is easily damaged, resulting in an increase in production costs.

[0044] To solve the above problems, this application proposes a cache mechanism, such as Figures 1 to 4 As shown, the caching mechanism includes a carrier assembly 100, a guide assembly 200, and a drive member 300. The carrier assembly 100 primarily supports the graphite boat 600. The guide assemblies 200 are located at both ends of the carrier assembly 100 to guide the movement of the two ends of the carrier assembly 100. Each guide assembly 200 includes a guide member 210 and a sliding member 220. The sliding member 220 is slidably connected to the guide member 210 and is also connected to the carrier assembly 100, so that the carrier assembly 100 can move in the second direction relative to the guide member 210.

[0045] In such Figure 1 and Figure 2 In the embodiment shown, the bearing assembly 100 extends along a first direction, and the guide member 210 extends along a second direction, and the second direction intersects with the first direction. Preferably, for example Figure 1 In the illustrated embodiment, the second direction is arranged perpendicular to the first direction.

[0046] In such Figure 4In the illustrated embodiment, the guide member 210 is provided with a guide rail, and the sliding member 220 is provided with a guide groove, so that the cooperation between the guide rail and the guide groove can achieve precise guidance of the sliding member 220. In other embodiments, the guide member 210 can also be provided with a guide groove, and the sliding member 220 is at least partially located in the guide groove and is slidably connected to the groove wall of the guide groove, thereby also achieving movement guidance of the sliding member 220.

[0047] It should be noted that, in the embodiment of the present application, the movement of the carrier assembly 100 is driven by a driving member 300. Specifically, Figure 3 As shown, the driving member 300 is fixedly connected to the carrier assembly 100 and is disposed at one end of the carrier assembly 100, in transmission connection with the corresponding guide member 210. When the driving member 300 is in operation, it can drive the carrier assembly 100 to move in the second direction relative to the guide member 210, thereby transporting the graphite boat 600 to a position for docking with the AGV.

[0048] Based on the above, the cache mechanism of the present application realizes the driving of the supporting component 100 through a driving mechanism, so that both ends of the supporting component 100 can move simultaneously relative to the guide member 210. Since the guide member 210 is used for movement guidance at both ends, the movement state of the two ends of the graphite boat 600 remains consistent, ensuring the motion accuracy of the operation and improving the synchronization of the cache mechanism, thereby improving the docking success rate of the cache mechanism and the AGV cart, and reducing the probability of damage to the graphite boat 600 while improving the operating efficiency of the graphite boat 600.

[0049] In some embodiments, the buffer mechanism can also be fine-tuned in height direction to make the docking accuracy between the buffer mechanism and the AGV higher. Figure 4 As shown, the sliding member 220 includes a support plate 221 and a slider 222. The support plate 221 is fixedly connected to the bearing assembly 100. The slider 222 is provided with a guide groove, and the slider 222 is used to slide with the guide member 210. The support plate 221 and the slider 222 are arranged in sequence from top to bottom, wherein the guide assembly 200 also includes an adjustment member 223, and the support plate 221 and the slider 222 are connected by the adjustment member 223. The adjustment member 223 can adjust the distance between the bottom surface of the support plate 221 and the top surface of the slider 222, thereby adjusting the height position of the bearing assembly 100 to ensure the accuracy of the cache mechanism and the AGV vehicle.

[0050] Furthermore, the adjusting member 223 is a first bolt, and the support plate 221 is provided with a first threaded hole, which penetrates the support plate 221 along the thickness direction of the support plate 221. The first bolt is passed through the first threaded hole and is threadedly connected to the support plate 221. One end of the first bolt protrudes from the support plate 221 and abuts against the slider 222, thereby propping up the support plate 221 to separate the support plate 221 and the slider 222. Since the first bolt is threadedly connected to the support plate 221, when the first bolt is rotated, the first bolt moves relative to the support plate 221, so that the length of the first bolt protruding from the support plate 221 is longer or shorter, thereby adjusting the distance between the support plate 221 and the slider 222. The bolt can achieve stepless adjustment of the spacing, so that the height position of the support plate 221 can be adjusted more accurately. During the assembly process of the cache mechanism, if the fitting tolerance is large due to production errors, or the docking height is not met due to uneven ground where the cache mechanism is set, the docking requirements can be met by adjusting the distance between the support plate 221 and the slider 222, thereby increasing the applicability of the cache mechanism and reducing costs.

[0051] In such Figure 3 and Figure 4 In the illustrated embodiment, the middle portion of the support plate 221 is connected to the carrier assembly 100. Adjustment members 223 are provided on both sides of the support plate 221 along the second direction. These adjustment members 223 provide multi-point support for the support plate 221, providing more stable support and more balanced force on each adjustment member 223, making rotational adjustment easier. Furthermore, in the illustrated embodiment, adjustment members 223 are provided on both sides of the support plate 221 along the second direction, allowing adjustment of the pitch angle of the support member along the second direction. Furthermore, multiple adjustment members 223 are provided on a single side of the support plate 221, arranged sequentially along the first direction. Adjustment of these adjustment members 223 allows adjustment of the pitch angle of the support member along the first direction. In summary, the support member has a high degree of adjustment freedom. The four adjustment members 223 located at different positions on the support member can be used to adjust the horizontality of the support member, thereby ensuring the horizontality of the graphite boat 600 and facilitating its transfer to the AGV.

[0052] In other embodiments, the adjusting member 223 may also be a pad, and the distance between the support plate 221 and the slider 222 may be adjusted by changing the thickness of the pad.

[0053] In some embodiments, the driving member 300 includes an output shaft and a gear sleeved on the output shaft, such as Figure 3As shown, the guide member 210 is provided with a rack 211 extending in the second direction, thereby meshing the drive member 300 and the guide member 210 with the rack 211. It is understood that the meshing transmission of the rack and gear 211 is suitable for scenarios such as graphite boat 600 transmission, which require high loads and high transmission accuracy. Furthermore, the overall structure is relatively compact, and transmission is relatively smooth. In other embodiments, the drive member 300 can also be connected to a synchronous pulley, transmission belt, or other structure for drive.

[0054] In some embodiments, the carrier assembly 100 includes a carrier 110, a mounting member 400, and a first sensor 410. Figure 2 、 Figure 3 and Figure 5 As shown, the support member 110 can be made of a profile, with both ends connected to the sliding member 220, and is used to support the graphite boat 600. The mounting member 400 is provided on the top surface of the support member 110, and the mounting member 400 is used to abut the graphite boat 600. A mounting member 400 is provided at each end of the support member 110, thereby supporting the two ends of the graphite boat 600. The support member 110 supports the graphite boat 600 through the mounting member 400. The first sensor 410 is connected to the mounting member 400 or the support member 110, and the first sensor 410 is used to detect whether the graphite boat 600 is placed on the mounting member 400. If the graphite boat 600 is detected to be in place, the driving member 300 can be controlled to operate to move the graphite boat 600 in the second direction.

[0055] It is understandable that there are many ways to set up the first sensor 410. For example, the first sensor 410 can be a non-contact infrared ranging first sensor 410. When it detects that the distance between the graphite boat 600 and the first sensor 410 is less than the set distance, it sends an instruction to the controller to indicate that the graphite boat 600 has been placed in place, so that the controller can control the operation of the drive member 300.

[0056] Or, in Figure 5 and Figure 6In the illustrated embodiment, the first sensor 410 is a trigger-type first sensor 410. Due to the high temperature of the graphite boat 600, to prevent the first sensor 410 from directly contacting the graphite boat 600, which would shorten its lifespan, in this embodiment of the present application, the first sensor 410 includes a trigger portion 411 and a sensing portion 412. In the initial state, one end of the trigger portion 411 protrudes from the surface of the mounting member 400, while the other end is spaced apart from the sensing portion 412. When the graphite boat 600 is placed on the mounting member 400, the trigger portion 411 is driven to retract and trigger the sensing portion 412. The trigger portion 411 is made of a high-temperature resistant material, such as metal. The trigger portion 411 presses against the sensing portion 412, preventing direct contact between the graphite boat 600 and the sensing portion 412, thereby extending the service life of the first sensor 410.

[0057] Furthermore, the first sensor 410 is further provided with an elastic portion 413, such as Figure 6 As shown, the elastic portion 413 is sleeved over the trigger portion 411, with one end connected to the housing of the first sensor 410 and the other end abutting the sensing portion 412. In the initial state, the elastic portion 413 maintains the trigger portion 411 in a position protruding from the surface of the mounting member 400. When the trigger portion 411 is driven to retract, the elastic portion 413 compresses and deforms. When the pressure on the trigger portion 411 is released, the elastic portion 413 drives the trigger portion 411 back to its initial position protruding from the surface of the mounting member 400.

[0058] Furthermore, mounting members 400 and first sensors 410 are provided at both ends of the support member 110 along the first direction. A single first sensor 410 can detect whether the graphite boat 600 at that end is properly placed. By comparing pressure data between the two first sensors 410, it can also detect whether the graphite boat 600 is placed flat. For example, when the graphite boat 600 is placed on the support assembly 100 at a certain angle to the first direction, one end of the graphite boat 600 can press against the trigger portion 411, while the other end does not. As a result, only one of the first sensors 410 detects that the graphite boat 600 is properly placed. At this time, the operator can be reminded to adjust the graphite boat 600 by issuing an alarm or displaying a warning message. Alternatively, in other cases, when the graphite boat 600 is at a certain angle to the horizontal plane, that is, the two ends of the graphite boat 600 along the first direction are not on the same horizontal plane, after the graphite boat 600 is placed on the supporting assembly 100, the difference in the pressure values detected by the two first sensors 410 will exceed the set range. At this time, the operator needs to be reminded to adjust the graphite boat 600.

[0059] In some embodiments, the buffer mechanism is provided with a soft limit structure. Specifically, the buffer mechanism further includes a second sensor (not shown in the figure), which can be a photoelectric sensor, etc., for detecting the moving position of the carrier 110 and feeding back information such as the moving position and moving distance of the carrier 110 to the controller so that the controller can control the operation and stopping of the driving member 300, thereby cooperating with the driving member 300 to achieve multi-position stopping of the buffer mechanism.

[0060] In some embodiments, the cache mechanism is further provided with a hard limit structure. Figure 4 As shown, the cache mechanism also includes a limiter 500, which is connected to the guide member 210 and located along the movement path of the slider 220. Thus, the limiter 500 can abut against the slider 220, thereby defining the limit position of the slider 220. The hard limiter can cooperate with the soft limiter to provide dual protection for the movement safety of the cache mechanism, preventing damage to the machine caused by overtravel of the cache mechanism.

[0061] Furthermore, the limiting member 500 includes a second bolt 510 and a main body 520. The main body 520 is provided on one side of the guide member 210. The main body 520 is provided with a second threaded hole. The second bolt 510 is passed through the second threaded hole and is threadedly connected to the main body 520. The end of the second bolt 510 close to the sliding member 220 protrudes from the main body 520. The protruding length of the second bolt 510 can be adjusted by rotating the second bolt 510. Based on this structure, the limit position of the sliding member 220 can be fine-tuned. Figure 4 In the illustrated embodiment, the second bolt 510 is arranged at a height corresponding to that of the slider 222 to achieve a more stable abutment.

[0062] In some embodiments, the driving member 300 is directly connected to the supporting member 110. Figure 3 In the embodiment shown, the cache mechanism further includes an adapter 310, which is connected to the carrier 110 by threaded connection or welding to form an integral structure. The driving member 300 can be installed on the adapter 310, and the gear on its output shaft is connected to the rack 211 on the guide member 210. Figure 3 In the illustrated embodiment, the driving member 300 is located at the bottom of the supporting member 110 , and the overall structure is relatively compact.

[0063] A second embodiment of the present application further provides a silicon wafer production device, comprising an AGV and the cache mechanism described in any of the above embodiments. The AGV can dock with the cache mechanism to carry a graphite boat 600 from the cache mechanism, remove the graphite boat 600 from the cache mechanism, and transport it to an inspection point or cleaning point for maintenance. The provision of the cache mechanism greatly improves the maintenance efficiency of the graphite boat 600, thereby improving the production efficiency of the entire silicon wafer production device.

[0064] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various modifications can be made within the scope of knowledge possessed by a person skilled in the art without departing from the spirit of the present invention. In addition, the embodiments of the present invention and the features of the embodiments can be combined with each other unless there is a conflict.

Claims

1. A cache mechanism, characterized in that: include: A bearing assembly, the bearing assembly being used to bear the graphite boat; Guide assemblies, the guide assemblies being located at both ends of the bearing assembly, the guide assemblies comprising guide members and sliding members slidably connected to the guide members, the sliding members being connected to the bearing assembly; a driving member, the driving member being fixedly connected to the bearing assembly to drive the bearing assembly to move along the guide member; Among them, the supporting assembly also includes a supporting member, a mounting member and a first sensor, the two ends of the supporting member are respectively connected to the sliding member, the mounting member is arranged on the top surface of the supporting member, the mounting member is used to abut against the graphite boat, and the first sensor is connected to the mounting member or the supporting member.

2. The cache mechanism according to claim 1, wherein: The sliding member includes a support plate and a slider, the support plate is fixedly connected to the bearing assembly, the slider is slidably connected to the guide member, and the support plate and the slider are connected by an adjusting member so that the distance between the support plate and the slider is adjustable.

3. The cache mechanism according to claim 2, wherein: The adjusting member is a first bolt, and the support plate is provided with a first threaded hole. The first bolt is passed through the first threaded hole and is threadedly connected to the support plate. One end of the first bolt protrudes from the support plate and abuts against the slider. The protruding length of the first bolt can be adjusted by rotating the first bolt.

4. The cache mechanism according to claim 1, wherein: The driving member includes an output shaft and a gear sleeved on the output shaft. A rack is provided on the guide member, and the gear is meshed with the rack for transmission.

5. The cache mechanism according to claim 4, characterized in that: The first sensor includes a trigger portion and a sensing portion. In an initial state, one end of the trigger portion is protruding from the surface of the mounting member, and the other end is spaced apart from the sensing portion. When the graphite boat is placed on the mounting member, the trigger portion is driven to retract and trigger the sensing portion. The trigger portion is further connected to an elastic portion, and when the pressure applied to the trigger portion is released, the elastic portion drives the trigger portion to return to an initial state.

6. The cache mechanism according to claim 4, characterized in that: The first sensors are provided at both ends of the carrier.

7. The cache mechanism according to claim 1, wherein: The cache mechanism further includes a limiting member, which is connected to the guide member and is located on the moving route of the sliding member; the limiting member can abut against the sliding member to define the extreme position of the sliding member.

8. The cache mechanism according to claim 7, characterized in that: The limiting member includes a second bolt and a main body, the main body is provided with a second threaded hole, the second bolt is passed through the second threaded hole and is threadedly connected to the main body, and the second bolt is provided at one end close to the sliding member to protrude from the main body, and the protruding length of the second bolt can be adjusted by rotating the second bolt.

9. Silicon wafer production equipment, characterized in that include: The cache mechanism according to any one of claims 1 to 8; An AGV trolley is capable of docking with the cache mechanism to carry the graphite boat on the cache mechanism.

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