Precise drawing device for LCoS frame

Abstract

The utility model relates to an LCoS frame precise drawing device which comprises a rubber sleeve, an X-axis driving mechanism, a Y-axis driving mechanism, a Z-axis driving mechanism, a bearing table and a rotating assembly fixedly arranged above the Y-axis driving mechanism, the bearing table is connected with the driving end of the rotating assembly, and the rotating assembly is used for driving the bearing table to rotate. The Y-axis driving mechanism drives the rotating assembly to move in the Y-axis direction, the bearing table is movably arranged below the rubber barrel, the rubber barrel is fixedly arranged on the Z-axis driving mechanism, the Z-axis driving mechanism is used for driving the rubber barrel to move in the Z-axis direction, and the Z-axis driving mechanism is connected with the driving end of the X-axis driving mechanism. A grabbing mechanism used for grabbing the base plate to be placed on the material platform is arranged on one side of the bearing table, and a camera is arranged on one side of the rubber barrel. According to the method, drawing precision is guaranteed while non-direct-contact drawing of the frame graph is achieved, pollution and damage to the substrate in the production process can be effectively avoided, and therefore the chip yield is increased.

Description

Technical Field

[0001] The utility model relates to the technical field of LCoS chip manufacturing, in particular to an LCoS frame precision drawing device. Background Art

[0002] During the LCoS chip packaging process, a pattern needs to be drawn on the substrate using frame glue and cured to form a cavity with the upper and lower substrates, namely the liquid crystal box, and then liquid crystal is injected into the liquid crystal box.

[0003] Traditional border graphics are drawn using a screen printing process, which requires pre-drawing a graphic template on a spacer, and then making a hollow design in the area where the border is to be drawn. During drawing, the spacer is placed on the substrate, and the border glue is applied to the substrate through the hollowed-out area, thus outlining the desired border graphic. During this process, the spacer needs to be in direct contact with the substrate, and the surface of the substrate is often covered with a precise oriented film layer. During the contact process, the circuit and film layer are easily contaminated or even damaged, thereby affecting the chip yield. Although existing dispensing devices can reduce direct contact with the substrate to a certain extent, they are mostly used in scenarios such as bonding and pin fixing. Their accuracy is relatively low and they are not suitable for border drawing.

[0004] Therefore, there is an urgent need to provide an LCoS frame precision drawing device to solve the above problems. Utility Model Content

[0005] The purpose of the utility model is to overcome the shortcomings and defects of the existing technology and provide an LCoS frame precision drawing device, which can achieve non-direct contact drawing of frame graphics while ensuring drawing accuracy, effectively avoid contamination and damage to the substrate during the production process, and improve chip yield.

[0006] The purpose of this utility model is achieved through the following technical solutions:

[0007] A device for precisely drawing an LCoS frame comprises a rubber cylinder, an X-axis drive mechanism, a Y-axis drive mechanism, a Z-axis drive mechanism, a carrier platform, and a rotating assembly fixedly mounted above the Y-axis drive mechanism. The carrier platform is connected to the driving end of the rotating assembly, the rotating assembly is used to drive the carrier platform to rotate, the Y-axis drive mechanism drives the rotating assembly to move along the Y-axis direction, the carrier platform is movably arranged below the rubber cylinder, the rubber cylinder is fixed to the Z-axis drive mechanism, the Z-axis drive mechanism is used to drive the rubber cylinder to move along the Z-axis direction, the Z-axis drive mechanism is connected to the driving end of the X-axis drive mechanism, the X-axis drive mechanism is used to drive the Z-axis drive mechanism and the rubber cylinder to move along the X-axis direction, a gripping mechanism for gripping a substrate and placing it on a material platform is provided on one side of the carrier platform, and a camera is provided on one side of the rubber cylinder.

[0008] As an optimal technical solution of the present invention, the device also includes a vacuum pump system. A plurality of suction holes are provided on the supporting platform, and the suction holes are distributed in an array. The suction holes are connected to the vacuum pump system and are used to adsorb and fix the substrate on the supporting platform.

[0009] As a preferred technical solution of the present invention, the grabbing mechanism includes an optical axis guide rail, a transport fork and a lifting drive member for driving the transport fork to perform lifting movements, and the transport fork is slidably connected to the optical axis guide rail.

[0010] As a preferred technical solution of the present invention, a strip-shaped through-slot is further provided on the carrying platform, and the carrying fork can move away from or close to the strip-shaped through-slot.

[0011] As a preferred technical solution of the present invention, the carrying end of the carrying fork is wrapped with a flexible pad, and the flexible pad is in contact with the base plate.

[0012] As a preferred technical solution of the present invention, position sensors are installed on the X-axis drive mechanism, the Y-axis drive mechanism, and the Z-axis drive mechanism.

[0013] As an optimal technical solution of the present invention, the X-axis drive mechanism includes an X-axis linear guide and an X-axis motor, the Y-axis drive mechanism includes a Y-axis linear guide and a Y-axis motor, and the Z-axis drive mechanism includes a Z-axis linear guide and a Z-axis motor.

[0014] As an optimal technical solution of the present invention, the device is also provided with a rubber cylinder fixing seat and a camera fixing seat, the camera fixing seat is located on one side of the rubber cylinder fixing seat, and the rubber cylinder fixing seat and the camera fixing seat are both fixed on the driving end of the Z-axis driving mechanism.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] The utility model fixes the substrate on the carrier table by vacuum adsorption, and sets a high-precision X-axis drive mechanism, Y-axis drive mechanism, and Z-axis drive mechanism to achieve relative movement between the rubber cylinder and the substrate in the X, Y, and Z directions, so as to accurately draw the substrate on the carrier table. The rubber cylinder adopts a needle to dispense glue, and cooperates with a proportional valve to accurately control the amount of glue dispensed, reducing the amount of frame glue used and effectively saving materials. This application ensures drawing accuracy while achieving non-direct contact drawing of frame graphics, and can effectively avoid contamination and damage to the substrate during the production process, thereby improving chip yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural diagram of the present utility model.

[0018] Figure 2 It is a side view of the present utility model.

[0019] The above drawings include the following reference numerals:

[0020] 1. Rubber cylinder, 2. X-axis drive mechanism, 3. Y-axis drive mechanism, 4. Z-axis drive mechanism, 5. Carrying platform, 6. Camera, 7. Rotating assembly, 8. Suction hole, 9. Optical axis guide, 10. Carrying fork, 11. Lifting drive component, 12. Strip slot, 13. X-axis linear guide, 14. X-axis motor, 15. Y-axis linear guide, 16. Y-axis motor, 17. Z-axis linear guide, 18. Z-axis motor, 19. Rubber cylinder fixing seat, 20. Camera fixing seat. DETAILED DESCRIPTION

[0021] The present invention will be described in further detail below with reference to the embodiments and drawings, but the embodiments of the present invention are not limited thereto.

[0022] The specific implementation process of this utility model is as follows:

[0023] Reference Figures 1 to 2 A device for precisely drawing an LCoS frame includes a rubber cylinder 1, an X-axis drive mechanism 2, a Y-axis drive mechanism 3, a Z-axis drive mechanism 4, a carrier 5, and a rotating assembly 7 fixed above the Y-axis drive mechanism 3. The carrier 5 is located above the rotating assembly 7 and is connected to the driving end of the rotating assembly 7. The rotating assembly 7 is used to drive the carrier 5 to rotate. The Y-axis drive mechanism 3 drives the rotating assembly 7 to move along the Y-axis, so that the Y-axis drive mechanism 3 drives the carrier 5 to move directly below the rubber cylinder 1. The carrier 5 is used to support a substrate. The rubber cylinder 1 is fixed to the Z-axis drive mechanism 4. The Z-axis drive mechanism 4 is used to drive the rubber cylinder 1 to move along the Z-axis. The Z-axis drive mechanism 4 is connected to the driving end of the X-axis drive mechanism 2. The X-axis drive mechanism 2 is used to drive the Z-axis drive mechanism 4 and the rubber cylinder 1 to move along the X-axis. The X-axis drive mechanism 2, the Y-axis drive mechanism 3, and the Z-axis drive mechanism 4 achieve relative movement between the rubber cylinder 1 and the substrate in the X, Y, and Z directions, thereby accurately drawing the substrate on the carrier 5. The rotating assembly drives the substrate to rotate around the Z axis, and can adjust the deviation of the substrate direction when the substrate is placed on the carrier 5, so as to realize the alignment of the substrate, avoid the mismatch between the frame line pattern and the substrate direction, and further improve the drawing accuracy of the device. Specifically, the X, Y, and Z axes of this embodiment are as follows: Figure 1As shown, the X-axis drive mechanism 2 includes an X-axis linear guide 13 and an X-axis motor 14, the Y-axis drive mechanism 3 includes a Y-axis linear guide 15 and a Y-axis motor 16, and the Z-axis drive mechanism 4 includes a Z-axis linear guide 17 and a Z-axis motor 18. The X-axis linear guide 13, the Y-axis linear guide 15, and the Z-axis linear guide 17 can be high-precision ground guides. The X-axis motor 14 and the Y-axis motor 16 can be servo motors to ensure drawing accuracy. The Z-axis motor 18 and the rotating assembly 7 can be stepper motors or servo motors.

[0024] One side of the carrier 5 is provided with a gripping mechanism for gripping a substrate and placing it on the carrier 5. The gripping mechanism includes an optical axis guide rail 9, a transport fork 10, and a lifting drive 11 for driving the transport fork 10 to perform lifting motion. The optical axis guide rail 9 is located below the Y-axis drive mechanism 3, and the transport fork 10 is slidably connected to the optical axis guide rail 9 so that the transport fork 10 moves along the Y-axis direction. A bar-shaped through groove 12 is also provided on the carrier 5, and the transport fork 10 can move away from or close to the bar-shaped through groove 12. When the transport fork 10 moves into the bar-shaped through groove 12, the lifting drive 11 descends to put down the substrate, and then exits the bar-shaped through groove 12 to complete the loading of the substrate. The lifting drive 11 can be a solenoid valve cooperating with a cylinder to achieve lifting motion, and the lifting drive 11 is used to lift and put down the substrate when loading and unloading. Specifically, after grasping a substrate, the transport fork 10 moves along the optical axis guide 9 into the strip-shaped through-slot 12. The substrate is then placed on the support platform 5 via the cooperation of the lifting drive 11. After placement, the transport fork 10 returns, away from the strip-shaped through-slot 12, to the loading area. The transport end of the transport fork 10 is wrapped with a flexible pad (not shown) that abuts the substrate to prevent scratches during transport. The flexible pad can be any flexible material and is not limited here.

[0025] The device also features a rubber cartridge holder 19 and a camera holder 20, located on one side of the rubber cartridge holder 19. Both the rubber cartridge holder 19 and the camera holder 20 are fixed to the drive end of the Z-axis drive mechanism 4. The rubber cartridge holder 19 is used to mount the rubber cartridge 1, while the camera holder 20 is used to mount the camera 6. The rubber cartridge holder 19 and the camera holder 20 are fixedly mounted on the Z-axis drive mechanism 4 and are driven by the Z-axis drive mechanism 4 to move along the Z-axis. This application utilizes a rubber cartridge 1 with a needle, controlled by a proportional valve, to directly draw on the substrate, eliminating the need to pre-fabricate the pattern on a barrier before outlining it on the substrate. The proportional valve allows for precise control of the glue output, effectively reducing the amount of frame glue used and saving material. The proportional valve flow rate is set according to the required line width of the pattern, and combined with the movement speeds of the X-axis drive mechanism 2 and the Y-axis drive mechanism 3, precise control of the line width is achieved. A high-definition, high-speed camera 6 is used for alignment of the needle and substrate during marking, and for viewing the marking results. The high-definition high-speed camera 6 can be a high-resolution black and white CCD, which only needs to be able to clearly display the frame line graphics without the need for color.

[0026] This application uses a feeler gauge to calibrate the height of the needle of the rubber cylinder 1. By controlling the Z-axis drive mechanism 4 to slowly descend, feeler gauges of different thicknesses are selected according to the process requirements and placed under the needle. When there is resistance when pulling the feeler gauge, the thickness value of the feeler gauge is read, and the thickness value is the actual gap height between the needle and the reference surface. The needle alignment is specifically to discharge a small amount of glue through the needle and apply it to the substrate. This glue dot is used as the reference point. Read the positions of the X-axis drive mechanism 2 and the Y-axis drive mechanism 3 at this time, then align the camera 6 with the small glue dot on the substrate, and read the positions of the X-axis drive mechanism 2 and the Y-axis drive mechanism 3 again, so as to calculate the relative position between the needle and the camera 6 on the XY plane.

[0027] In an embodiment of the present utility model, the device also includes a vacuum pump system, and a plurality of suction holes 8 are provided on the carrier 5, and the suction holes 8 are connected to the vacuum pump system for adsorbing and fixing the substrate on the carrier 5. The carrier 5 is used to support and fix the substrate, and the substrate is fixed on the carrier 5 by vacuum adsorption, so as to facilitate drawing of the substrate and ensure the accuracy and stability of substrate drawing. By vacuum adsorption, there is no need for direct contact with the substrate, which effectively avoids contamination and damage to the substrate. The suction holes 8 are arranged in an array and are evenly distributed on the entire carrier 5, so that when the vacuum adsorption of the substrate is realized, a uniform adsorption force can be provided to avoid the substrate from being offset or deformed due to uneven force, and it helps to improve the adsorption efficiency, so that the substrate can be firmly adsorbed more quickly. The carrier 5 can be a marble platform, and its shape can be set according to the shape and size of the substrate to reduce the weight of the carrier 5.

[0028] In the embodiment of the present invention, position sensors (not shown) are installed on the X-axis drive mechanism 2, the Y-axis drive mechanism 3, and the Z-axis drive mechanism 4 for accurately calculating the relative position of the rubber cylinder 1 and the substrate during the drawing process.

[0029] The working principle of this utility model is:

[0030] Start the device, the Y-axis drive mechanism 3 drives the carrier 5 to move to the bottom of the rubber cylinder 1, and the lifting drive 11 drives the transport fork 10 to lift the substrate from the loading area. After lifting the substrate, the transport fork 10 moves along the moving direction of the optical axis guide 9 to the strip groove 12 of the carrier 5, and places the taken substrate on the carrier 5. The transport fork 10 makes a return movement and retreats to the loading area along the optical axis guide 9. The X-axis drive mechanism 2 and the Z-axis drive mechanism 4 drive the rubber cylinder 1 to move along the X and Y axis directions, and the Y-axis drive mechanism 3 drives the carrier 5 to move along the Y axis direction, cooperating to drive the rubber cylinder 1 to draw on the substrate. After drawing, the transport fork 10 moves again to the strip groove 12 of the carrier 5 and transports the drawn substrate to the unloading area for unloading. After completion, the device is reset and a new round of border pattern drawing operation begins.

[0031] This device can be used to draw the liquid crystal box border in the LCoS chip packaging and box manufacturing process for products such as VR-LCoS chip products, AR-LCoS chip products, micro-LCoS chip projection products, 3D scanning LCoS chip products, and phase modulation LCoS chip products. This application can efficiently and accurately complete the drawing of the liquid crystal box border.

[0032] The above-described embodiments merely represent implementation methods of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. An LCoS frame precision drawing device, characterized in that: It includes a rubber cylinder, an X-axis driving mechanism, a Y-axis driving mechanism, a Z-axis driving mechanism, a carrying platform and a rotating component fixed above the Y-axis driving mechanism. The carrying platform is connected to the driving end of the rotating component. The rotating component is used to drive the carrying platform to rotate. The Y-axis driving mechanism drives the rotating component to move along the Y-axis direction. The carrying platform is movably arranged below the rubber cylinder. The rubber cylinder is fixed on the Z-axis driving mechanism. The Z-axis driving mechanism is used to drive the rubber cylinder to move along the Z-axis direction. The Z-axis driving mechanism is connected to the driving end of the X-axis driving mechanism. The X-axis driving mechanism is used to drive the Z-axis driving mechanism and the rubber cylinder to move along the X-axis direction. One side of the carrying platform is provided with a grabbing mechanism for grabbing a substrate placed on a material platform, and one side of the rubber cylinder is provided with a camera.

2. The LCoS frame precision drawing device according to claim 1, characterized in that: The device further includes a vacuum pump system. The supporting platform is provided with a plurality of suction holes, which are distributed in an array and connected to the vacuum pump system for adsorbing and fixing the substrate on the supporting platform.

3. The LCoS frame precision drawing device according to claim 1, characterized in that: The grabbing mechanism includes an optical axis guide rail, a transport fork, and a lifting drive member for driving the transport fork to perform lifting movements. The transport fork is slidably connected to the optical axis guide rail.

4. The LCoS frame precision drawing device according to claim 3, characterized in that: The carrying platform is further provided with a strip through slot, and the transport fork can move away from or close to the strip through slot.

5. The LCoS frame precision drawing device according to claim 4, characterized in that: The carrying end of the carrying fork is wrapped with a flexible pad, and the flexible pad is in contact with the base plate.

6. The LCoS frame precision drawing device according to claim 1, characterized in that: Position sensors are installed on the X-axis drive mechanism, the Y-axis drive mechanism, and the Z-axis drive mechanism.

7. The LCoS frame precision drawing device according to claim 6, characterized in that: The X-axis drive mechanism includes an X-axis linear guide and an X-axis motor, the Y-axis drive mechanism includes a Y-axis linear guide and a Y-axis motor, and the Z-axis drive mechanism includes a Z-axis linear guide and a Z-axis motor.

8. The LCoS frame precision drawing device according to claim 1, characterized in that: The device is further provided with a rubber cylinder fixing seat and a camera fixing seat, wherein the camera fixing seat is located on one side of the rubber cylinder fixing seat, and both the rubber cylinder fixing seat and the camera fixing seat are fixed on the driving end of the Z-axis driving mechanism.

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