Substrate holder with rotating mechanism

Abstract

The utility model provides a substrate holder which comprises a base part, a pneumatic cylinder, a rotary actuator, an extension arm, a first clamping assembly and a second clamping assembly. The pneumatic cylinder and the rotary actuator are respectively arranged in the base part. The extension arm is connected with the rotary actuator and extends out of the base part, and the extension arm is provided with a clamping area for bearing the substrate. The first clamping assembly is arranged on the extension arm, connected with the extension arm and driven by the pneumatic cylinder. The first clamping assembly comprises a plurality of first bearings. The second clamping assembly is arranged on the extension arm and comprises a plurality of second bearings. The first clamping assembly and the second clamping assembly are opposite to each other across the clamping area. After the substrate is placed in the clamping area, the pneumatic cylinder drives the first bearing of the first clamping assembly to move to the clamping area so that the substrate can be clamped and positioned between the first bearing and the second bearing. The substrate holder provided by the utility model can rotate at any angle in a motion mode so as to be beneficial to forming a terminal mechanism of a mechanical arm.

Description

Technical Field

[0001] The utility model relates to a substrate clamper, in particular to a substrate clamper with a rotating mechanism. Background Art

[0002] In existing manufacturing plants, robotic arms are often used to assist in operations to improve work efficiency and stability, such as lifting, moving, and placing objects. Especially for wafer fabs or panel factories, robotic arms are indispensable equipment.

[0003] Generally speaking, a robotic arm requires multiple axes to achieve the required degrees of freedom of movement. However, this can easily lead to an increasingly complex overall mechanical structure, increasing the risk of failure and requiring considerable cost and time for repair. Furthermore, due to the structural complexity, the various components of the substrate handling device must coordinate and cooperate with each other during operation, significantly limiting overall work efficiency and leading to a decrease in overall work efficiency. Utility Model Content

[0004] The utility model provides a substrate clamper with a rotating mechanism, which achieves structural positioning of the substrate by a bearing and achieves a motion mode capable of rotating at any angle by a rotating actuator, so as to form a terminal mechanism of a mechanical arm.

[0005] The utility model discloses a substrate clamp with a rotating mechanism, comprising a base, a pneumatic cylinder, a rotary actuator, an extension arm, a first clamping assembly and a second clamping assembly. The pneumatic cylinder and the rotary actuator are respectively arranged in the base. The extension arm is connected to the rotary actuator and extends from the base, and the extension arm has a clamping area to support the substrate. The first clamping assembly is arranged on the extension arm and is linked and driven by the pneumatic cylinder. The first clamping assembly includes a plurality of first bearings. The second clamping assembly is arranged on the extension arm and includes a plurality of second bearings. The first clamping assembly and the second clamping assembly are opposite to each other across the clamping area. When the substrate is placed in the clamping area, the pneumatic cylinder drives the first bearing of the first clamping assembly to move toward the clamping area to clamp the substrate and position it between the first bearing and the second bearing.

[0006] In an embodiment of the present invention, the above-mentioned rotary actuator drives the extension arm to rotate about the rotation axis, and the substrate clamper also includes a connecting component connected between the pneumatic cylinder and the first clamping component. A part of the connecting component is passed through the rotary actuator along the rotation axis, and the pneumatic cylinder drives the first clamping component to move along the rotation axis through the connecting component.

[0007] In an embodiment of the present invention, the above-mentioned connecting assembly includes a connecting member and a push rod, the rotary actuator is located between the connecting member and the first locking assembly, the push rod can be movably passed through the rotary actuator along the rotation axis and connected to the first locking assembly, the connecting member is connected to the pneumatic cylinder, and the connecting member is connected to one end of the push rod away from the first locking assembly.

[0008] In an embodiment of the present invention, the rotary actuator includes a motor and a transmission assembly. The transmission assembly is connected between the motor and a shaft extending from the extension arm into the base. The motor drives the extension arm to rotate about the rotation axis through the transmission assembly.

[0009] In an embodiment of the present invention, the transmission assembly includes a plurality of gears coupled in sequence, wherein the first gear is coupled to the driving gear portion of the motor, and the last gear is coaxially connected to the shaft of the extension arm along the rotation axis.

[0010] In an embodiment of the present invention, the substrate clamper further comprises a connecting assembly connected between the pneumatic cylinder and the first engaging assembly, wherein a portion of the connecting assembly is movably inserted through the last gear along the rotation axis to form a coaxial arrangement.

[0011] In an embodiment of the present invention, the first engaging assembly further comprises a first engaging member standing on the extension arm, and a space is provided between the top of the first engaging member and the extension arm to accommodate the first bearing.

[0012] In an embodiment of the present invention, the second engaging assembly further comprises a plurality of second engaging members respectively standing on the extension arms, and a space exists between the top of each second engaging member and the extension arm to accommodate the second bearing.

[0013] In an embodiment of the present invention, the rotary actuator drives the extension arm to rotate about the rotation axis, the first bearing is symmetrically arranged relative to the rotation axis, and the second shaft is symmetrically arranged relative to the rotation axis.

[0014] In an embodiment of the present invention, the extension arm has a width (X3), the first bearing has a relative distance (X1), the second bearing has a relative distance (X2), and the relative distance (X1) ≤ relative distance (X2) < width (X3).

[0015] Based on the above, the substrate clamper utilizes a pneumatic cylinder and a rotary actuator located at the base, in conjunction with an extension arm and first and second clamping assemblies. The rotary actuator connects to and drives the extension arm to rotate, while the pneumatic cylinder connects to and drives the first clamping assembly. The first and second clamping assemblies each include a first bearing and a second bearing. Consequently, when a substrate is placed in the clamping area of the extension arm, the pneumatic cylinder drives the first clamping assembly toward the clamping area, allowing the substrate to be positioned and clamped by the first and second bearings.

[0016] Thus, through the rotational characteristics of the first and second bearings, the opposite sides of the substrate can be fixed by the bearings and achieve a positioning effect. This can reduce the damage caused by friction when the substrate is guided and deflected. At the same time, using a pneumatic cylinder as a power source can effectively reduce energy consumption, while the rotary actuator further improves the operational (movement) dimension of the substrate clamp. Furthermore, the substrate clamp can be assembled and formed into the terminal mechanism of the robot arm, improving the operational (movement) capability of the robot arm.

[0017] In order to make the above features and advantages of the present invention more clearly understood, embodiments are given below with reference to the accompanying drawings for detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic diagram of a substrate holder according to an embodiment of the present invention;

[0019] Figure 2 yes Figure 1 An enlarged schematic diagram of some components of a substrate holder;

[0020] Figure 3 yes Figure 1 An enlarged schematic diagram of some components of a substrate holder;

[0021] Figure 4 yes Figure 1 A partial cross-sectional view of a substrate holder;

[0022] Figure 5 is a diagram showing the electrical connections of components of the substrate holder;

[0023] Figure 6 and Figure 7 is a top view schematic diagram of a substrate clamper clamping and releasing a substrate;

[0024] Figure 8 is a schematic diagram of the substrate switching between different accommodating boxes;

[0025] Figure 9A and Figure 9B It is a schematic diagram of a rotary actuator driving an extension arm to rotate. DETAILED DESCRIPTION

[0026] Figure 1 FIG. 1 is a schematic diagram of a substrate holder according to an embodiment of the present invention. Figure 2 yes Figure 1 An enlarged schematic diagram of some components of the substrate clamp. Figure 3 yes Figure 1 An enlarged diagram of some components of the substrate holder. The rectangular coordinates XYZ are provided here to facilitate component description. Please also refer to Figures 1 to 3 In this embodiment, the substrate clamper 100 includes a base 110, a pneumatic cylinder 120, a rotary actuator 140, an extension arm 150, a first engaging assembly 160, and a second engaging assembly 170. The pneumatic cylinder 120 and the rotary actuator 140 are respectively disposed within the base 110. The extension arm 150 is connected to the rotary actuator 140 and extends from the base 110. The extension arm 150 has a clamping area 152a for supporting the substrate 200. The first engaging assembly 160 is disposed on the extension arm 150 and is connected to and driven by the pneumatic cylinder 120. The first engaging assembly 160 includes a plurality of first bearings R1 and R2. The second engaging assembly 170 is disposed on the extension arm 150 and includes a plurality of second bearings R3 and R4. The first engaging assembly 160 and the second engaging assembly 170 are opposite to each other across the clamping area 152a. When the substrate 200 is placed in the clamping area 152a, the pneumatic cylinder 120 drives the first bearings R1 and R2 of the first engaging assembly 160 to move toward the clamping area 152a to clamp and position the substrate 200 between the first bearings R1 and R2 and the second bearings R3 and R4.

[0027] like Figure 1 As shown, the substrate holder 100 of this embodiment is suitable for assembling the base 110 onto the robot arm 300 to form the terminal mechanism of the robot arm 300, thereby increasing the operation (movement) capability of the robot arm 300. Furthermore, the rotary actuator 140 can drive the extension arm 150 to rotate about the rotation axis CY. Here, the rotation axis CY is parallel to or coincides with the Y axis of the rectangular coordinates XYZ, and as shown in FIG. Figure 1 In the illustrated state, the clamping area 152a of the extension arm 150 is located on (or parallel to) the XY plane, so as to facilitate carrying the substrate 200. The type of the substrate 200 is not limited here, and it can be a glass substrate or a silicon wafer.

[0028] In this embodiment, the substrate clamp 100 further includes a connecting assembly 130 connected between the pneumatic cylinder 120 and the first engaging assembly 160. A portion of the connecting assembly 130 is passed through the rotary actuator 140 along the rotation axis CY. The pneumatic cylinder 120 drives the first engaging assembly 160 to reciprocate along the rotation axis CY through the connecting assembly 130.

[0029] Figure 4 yes Figure 1 Partial cross-sectional view of the substrate holder. Please also refer to Figures 2 to 4, further, the connecting assembly 130 includes a connecting member 131 and a push rod 132, and the rotary actuator 140 is located between the connecting member 131 and the first engaging assembly 160. The push rod 132 is movably passed through the rotary actuator 140 along the rotation axis CY (or Y axis) and connected to the first engaging assembly 160. One side of the connecting member 131 is connected to the push rod 121 of the pneumatic cylinder 120, and the other side of the connecting member 131 is connected to the end of the push rod 132 away from the first engaging assembly 160. Furthermore, the rotary actuator 140 includes a motor 141 and a transmission assembly 142, and the transmission assembly 142 is connected between the motor 141 and the shaft 151 of the extension arm 150 extending into the base 110 (as shown in FIG. Figure 2 As shown), the motor 141 drives the extension arm 150 to rotate about the rotation axis CY through the transmission assembly 142.

[0030] In this embodiment, if Figure 3 As shown, the motor 141 includes a body 141a and a driving gear portion 141b, and the transmission assembly 142 includes a plurality of gears G1, G2, and G3 coupled in sequence. The first of these gears G1 to G3 (i.e., gear G1) is coupled to the driving gear portion 141b of the motor 141, and the last of these gears G1 to G3 (i.e., gear G3) is coaxially connected to the shaft 151 of the extension arm 150 along the rotation axis CY. Figure 2 and Figure 3 It is obvious from the corresponding relationship of the relevant components that for the connecting component 130, the push rod 132 of the connecting component 130 is movably inserted into the gear G3 along the rotation axis CY and is coaxially configured with each other.

[0031] Figure 5 This is a diagram of the electrical connections of the substrate holder components. Please also refer to Figure 1 、 Figure 2 (or Figure 3 、 Figure 4 Any of) and Figure 5Briefly, the substrate clamper 100 further includes a control module CM and a position sensor 122. The control module CM is electrically connected to the position sensor 122, the pneumatic cylinder 120 (the pneumatic power source), and the motor 141. The position sensor 122 is located near the body of the pneumatic cylinder 120 to sense the movement of the pneumatic cylinder 120 (e.g., the position of the push rod 121). Accordingly, when the substrate 200 is placed in the clamping area 152a of the extension arm 150, the control module CM first drives the first engaging assembly 160 toward the clamping area 152a via the pneumatic cylinder 120 and the connecting assembly 130, positioning and clamping the substrate 200 between the first bearings R1 and R2 and the second bearings R3 and R4. The control module CM then determines via the position sensor 122 whether the pneumatic cylinder 120 (the push rod) is in position. Once this is determined, the control module CM drives the extension arm 150 to rotate about the rotation axis CY via the rotary actuator 140.

[0032] Figure 6 and Figure 7 This is a top view of the substrate clamper clamping and releasing the substrate. Please also refer to Figure 6 、 Figure 7 and compare Figure 1 In this embodiment, the first engaging assembly 160 further includes a first engaging member 161, which stands on the extension arm 150. There is a space between the top of the first engaging member 161 and the extension arm 150 to accommodate the first bearings R1 and R2. The second engaging assembly 170 further includes a plurality of second engaging members 172, which stand on the extension arm 150 respectively. There is a space between the top of each second engaging member 171 and 172 and the extension arm 150 to accommodate the second bearings R3 and R4. Figure 6 、 Figure 7 As shown, the first bearings R1 and R2 are symmetrically arranged relative to the rotation axis CY, and the second bearings R3 and R4 are symmetrically arranged relative to the rotation axis CY. Furthermore, the extension arm 150 has a width (X3), the first bearings R1 and R2 have a relative distance (X1), and the second bearings R3 and R4 have a relative distance (X2), and the relative distance (X1) ≤ relative distance (X2) < width (X3). In a preferred embodiment, the outer diameters of the first bearings R1 and R2 and the second bearings R3 and R4 are 6.5 mm to 20 mm, the relative distance (X2) is 80 mm to 230 mm, the relative distance (X1) is 20 mm to 80 mm, and the width (X3) of the extension arm 150 is 104 mm to 250 mm. Accordingly, the first bearings R1, R2 and the second bearings R3, R4 can clamp the substrate 200 with an average force, and are conducive to positioning the substrate 200 therein. That is, through the configuration of the first bearings R1, R2 and the second bearings R3, R4, the center of the clamped substrate 200 can be limited to the center of the extension arm 150.

[0033] Figure 8 It is a schematic diagram of the substrate switching between different accommodating boxes. Figure 9A and Figure 9B This is a diagram of the rotary actuator driving the extension arm to rotate. Please refer to Figure 8 , shows a schematic diagram of the transfer of substrate 200 between different storage boxes 2 and 3, with rectangular coordinates XYZ as a reference, where storage box 2 can be regarded as a container for horizontal placement of substrate 200, and storage box 3 can be regarded as a container for vertical placement. Simply put, if you want to transfer substrate 200 between storage boxes 2 and 3, the required robot arm must have a rotatable motion dimension along the Y axis. Figure 1 、 Figure 9A and Figure 9B The substrate clamper 100 of this embodiment can obviously achieve the feature of driving the extension arm 150 to rotate about the rotation axis CY by rotating the actuator 140, so it can meet the requirements of Figure 8 conversion needs.

[0034] Furthermore, compared to the prior art, which incorporates a rotation mechanism into the base of the robot arm and then controls the robot arm's terminal for rotation, this design focuses on achieving this requirement with a simple and convenient mechanism. Instead, the substrate holder 100 is assembled and forms the terminal mechanism of the robot arm 300. Conventional robots, which incorporate a rotation mechanism into the base, require a more complex mechanical structure. In contrast, the substrate gripper 100 of this design effectively reduces the number and complexity of mechanical components and mitigates potential risks associated with drive strokes. Furthermore, when rotational gripping is no longer required, the robot arm 300 can be replaced with a substrate gripper without a rotation mechanism. This allows for the convenient replacement of the terminal mechanism as needed, increasing the applicability of the robot arm 300 and facilitating assembly and maintenance.

[0035] In summary, in the above-described embodiment of the present invention, the substrate clamp utilizes a pneumatic cylinder and a rotary actuator disposed at the base, in conjunction with an extension arm and first and second engaging assemblies. The rotary actuator connects to and drives the extension arm to rotate, while the pneumatic cylinder connects to and drives the first engaging assembly. The first and second engaging assemblies each include a first bearing and a second bearing. Consequently, when a substrate is placed in the clamping area of the extension arm, the pneumatic cylinder drives the first engaging assembly toward the clamping area, allowing the substrate to be positioned and clamped by the first and second bearings.

[0036] Thus, the rotational properties of the first and second bearings allow the substrate to be fixed and positioned on opposite sides. This reduces frictional damage to the substrate when it is misaligned. Furthermore, the use of a pneumatic cylinder as a power source effectively reduces energy consumption, while the rotary actuator further enhances the operational (movement) dimensionality of the substrate clamp.

[0037] Furthermore, compared to the prior art which sets a rotation mechanism on the base body of the robot arm, the present invention is to improve the operation (movement) capability of the robot arm by assembling the substrate clamp to form the terminal mechanism of the robot arm. In other words, this move is to focus on how to meet the needs with a simple and convenient mechanism. The robot arm of the prior art has a relatively complex mechanical structure because the rotation mechanism is set on the base body. In contrast, the substrate clamp of the present invention is equivalent to setting a rotatable rotary actuator on the terminal mechanism of the robot arm, which can effectively reduce the number and complexity of mechanical components and reduce the risks that may arise from the driving stroke. Furthermore, once the rotation clamping operation is no longer needed, the robot arm can be replaced with a substrate clamp without a rotation mechanism. Therefore, the appropriate terminal mechanism can be replaced at any time according to the needs to improve the scope of application of the robot arm and the convenience during assembly and maintenance.

[0038] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A substrate holder with a rotating mechanism, suitable for assembly and forming a terminal mechanism of a robotic arm, characterized in that: The substrate holder comprises: base; a pneumatic cylinder disposed in the base; a rotary actuator disposed within the base; an extension arm connected to the rotary actuator and extending from the base, the extension arm having a clamping area, and the substrate is suitable for being supported in the clamping area; A first engaging assembly, disposed on the extension arm and connected to and driven by the pneumatic cylinder, the first engaging assembly comprising a plurality of first bearings; and A second engaging assembly is provided on the extension arm, the second engaging assembly includes a plurality of second bearings, the first engaging assembly and the second engaging assembly are opposite to each other across the clamping area, When the substrate is placed in the clamping area, the pneumatic cylinder drives the first bearings of the first engaging assembly to move toward the clamping area to clamp the substrate and position the substrate between the first bearings and the second bearings.

2. The substrate holder with a rotating mechanism according to claim 1, wherein: The rotary actuator drives the extension arm to rotate about the rotation axis, and the substrate clamper also includes a connecting component connected between the pneumatic cylinder and the first clamping component. A portion of the connecting component is passed through the rotary actuator along the rotation axis, and the pneumatic cylinder drives the first clamping component to move along the rotation axis through the connecting component.

3. The substrate holder with a rotating mechanism according to claim 2, wherein: The connecting assembly includes a connecting member and a push rod. The rotary actuator is located between the connecting member and the first engaging assembly. The push rod is movably inserted through the rotary actuator along the rotating axis and connected to the first engaging assembly. The connecting member is connected to the pneumatic cylinder, and the connecting member is connected to one end of the push rod away from the first engaging assembly.

4. The substrate holder with a rotating mechanism according to claim 1, wherein: The rotary actuator includes a motor and a transmission assembly. The transmission assembly is connected between the motor and a shaft of the extension arm extending into the base. The motor drives the extension arm to rotate about a rotation axis through the transmission assembly.

5. The substrate holder with a rotating mechanism according to claim 4, wherein: The transmission assembly includes a plurality of gears coupled in sequence, wherein a first gear among the plurality of gears is coupled to a driving gear portion of the motor, and a last gear among the plurality of gears is coaxially connected to the shaft of the extension arm along the rotation axis.

6. The substrate holder with a rotating mechanism according to claim 5, wherein: The invention also includes a connecting component connected between the pneumatic cylinder and the first engaging component. A part of the connecting component is movably inserted into the last one of the plurality of gears along the rotation axis to be coaxially arranged.

7. The substrate holder with a rotating mechanism according to claim 1, wherein: The first engaging assembly further includes a first engaging member standing on the extension arm, and a space is formed between the top of the first engaging member and the extension arm to accommodate the plurality of first bearings.

8. The substrate holder with a rotating mechanism according to claim 1, wherein: The second engaging assembly further includes a plurality of second engaging members respectively standing on the extension arms. There is a space between the top of each second engaging member and the extension arm to accommodate the second bearing.

9. The substrate holder with a rotating mechanism according to claim 1, wherein: The rotary actuator drives the extension arm to rotate about a rotation axis. The plurality of first bearings are symmetrically arranged relative to the rotation axis, and the plurality of second bearings are symmetrically arranged relative to the rotation axis.

10. The substrate holder with a rotating mechanism according to claim 9, wherein: The extension arm has a width X3, the plurality of first bearings have a relative distance X1, the plurality of second bearings have a relative distance X2, and the relative distance X1 ≤ relative distance X2 < width X3.

Images