Waste mercury collecting structure of vertical liquid phase epitaxial furnace

Abstract

The utility model belongs to the technical field of vertical liquid phase epitaxial furnaces, and particularly relates to a waste mercury collecting structure of a vertical liquid phase epitaxial furnace, which comprises a mercury storage tank, the upper end of the side wall of the mercury storage tank is detachably and fixedly connected with a cold water plate assembly, the side wall, connected with the cold water plate assembly, of the mercury storage tank is of a cone structure, and an observation port is formed in the top of the mercury storage tank. And an observation window is mounted in the observation opening. According to the utility model, the content of mercury stored in the mercury storage tank can be visually observed, and mercury in the mercury storage tank can be conveniently discharged.

Description

Technical Field

[0001] The utility model belongs to the technical field of vertical liquid phase epitaxial furnaces, and in particular relates to a waste mercury collection structure of a vertical liquid phase epitaxial furnace. Background Art

[0002] A vertical liquid phase epitaxial (LVPE) furnace is a device that uses liquid phase epitaxy (LPE) technology to grow crystals vertically. A specific melt is placed in a high-temperature environment. By controlling temperature and pressure, the components in the melt grow epitaxially on the substrate according to a specific lattice structure, resulting in the desired epitaxial layer. During operation, a VLE furnace generates mercury-containing waste liquid, which must be collected to ensure environmental and personnel safety.

[0003] At present, mercury is generally stored in a cold water tray at the bottom of a vertical liquid phase epitaxial furnace, and waste mercury liquid is stored at the bottom of the cold water tray. With this mercury storage method, on the one hand, it is more troublesome to remove the mercury at the bottom, and on the other hand, it is impossible to visually observe and know the stored mercury content. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a waste mercury collection structure for a vertical liquid phase epitaxial furnace in response to the deficiencies in the prior art. The present invention can visually observe the mercury content in the mercury storage tank and conveniently discharge the mercury inside the mercury storage tank.

[0005] This solution is achieved through the following technical measures: a waste mercury collection structure for a vertical liquid phase epitaxial furnace, including a mercury storage tank, the upper end of the side wall of the mercury storage tank is detachably fixedly connected to the cold water tray assembly, and the side wall connecting the mercury storage tank and the cold water tray assembly is a conical structure, and an observation port is opened on the top of the mercury storage tank, and an observation window is installed in the observation port.

[0006] Preferably, the small end of the cone structure is fixedly connected with a flow guide tube 1.

[0007] Preferably, the top of the mercury storage tank and the side wall opposite to the cone structure thereof are respectively fixedly connected with mercury discharge handles.

[0008] Preferably, the cold water pan assembly includes a cold water pan body, the bottom of the cold water pan body is fixedly connected to a second guide pipe, a KF joint is installed between the opposite ends of the second guide pipe and the first guide pipe, and the second guide pipe, the first guide pipe and the KF joint are detachably fixedly connected by a KF vacuum clamp.

[0009] Preferably, the diameter of the first flow guide tube is larger than the diameter of the second flow guide tube.

[0010] Preferably, a cooling cavity is provided inside the upper half of the side wall of the cold water pan body, and a cooling water inlet and a cooling water outlet communicating with the cooling cavity are fixedly connected to the outside of the side wall of the cold water pan body.

[0011] Preferably, the bottom of the cold water tray body is a cone structure.

[0012] Preferably, the mercury storage tank is placed on a support base, and the four corners of the support base are threadedly connected with anchor bolts.

[0013] Preferably, the lower half of the side wall of the cold water tray body is fixedly connected with a vacuum gauge interface, an air inlet and a reserved inspection port which are in communication with the inner cavity thereof.

[0014] Preferably, a cold water tray upper cover is fixedly connected to the top of the cold water tray main body.

[0015] Beneficial effects of the utility model:

[0016] This utility model is installed at the bottom of the cavity tube of a vertical liquid phase epitaxial furnace. The mercury content inside the mercury storage tank can be visually observed through an observation window. When the mercury content is high, the KF vacuum clamp can be easily removed to disconnect the mercury storage tank from the cold water pan body. The mercury inside the mercury storage tank can then be completely drained by holding the mercury drain handle. Compared to existing technologies, this utility model allows for a higher mercury content, allows for intuitive observation of the mercury content in the mercury storage tank, and facilitates the discharge of mercury from the mercury storage tank, resulting in less residual mercury at the bottom of the mercury storage tank.

[0017] It can be seen that compared with the prior art, the present invention has substantial features and progress. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of a specific embodiment of the present utility model.

[0019] Figure 2 It is a side structural schematic diagram of a specific implementation method of the utility model.

[0020] Figure 3 It is a schematic diagram of the cross-sectional assembly structure of the mercury storage tank and the cold water pan body.

[0021] Figure 4 This is a schematic diagram of the cross-sectional structure of a mercury storage tank when discharging mercury.

[0022] In the figure, 1- mercury storage tank, 2- cold water pan body, 3- support base, 4- observation window, 5- mercury discharge handle, 6- anchor bolt, 7- air inlet, 8- cooling water inlet, 9- cooling water outlet, 10- reserved inspection port, 11- vacuum gauge interface, 12- cold water pan cover, 13- observation port, 14- guide pipe 1, 15- KF connector, 16- KF vacuum clamp, 17- guide pipe 2, 18- cooling chamber. DETAILED DESCRIPTION

[0023] In order to clearly illustrate the technical features of this solution, the solution is described below through specific implementation methods and in conjunction with the accompanying drawings.

[0024] A waste mercury collection structure for a vertical liquid phase epitaxial furnace includes a mercury storage tank 1. The upper end of the side wall of the mercury storage tank 1 is detachably fixedly connected to a cold water pan assembly, and the side wall connecting the mercury storage tank 1 and the cold water pan assembly is a cone structure. The small end of the cone structure is fixedly connected to a guide tube 14, and the top of the mercury storage tank 1 and the side wall opposite to its cone structure are respectively fixedly connected to a mercury discharge handle 5.

[0025] The top of the mercury storage tank 1 is provided with an observation port 13, within which is mounted an observation window 4. The mercury level within the mercury storage tank 1 can be observed through the observation window 4. If the mercury level approaches or reaches a predetermined level (a maximum level mark can be provided on the inner wall of the mercury storage tank 1), the KF vacuum clamp 16 is opened to release the connection between the mercury storage tank 1 and the cold water pan body 2. The mercury discharge handle 5 on the mercury storage tank 1 can then be used to conveniently discharge the mercury within the mercury storage tank 1. The conical structure of the mercury storage tank 1 ensures that all mercury within the mercury storage tank 1 is completely discharged, leaving no residue.

[0026] The cold water pan assembly includes a cold water pan body 2, the top of which is fixedly connected to a cold water pan cover 12. This cover 12 is fixedly connected to the bottom of the vertical liquid phase epitaxy furnace cavity tube. A second flow guide tube 17 is fixedly connected to the bottom of the cold water pan body 2. The diameter of the first flow guide tube 14 is larger than that of the second flow guide tube 17. This smaller-at-top-and-larger-at-bottom structure ensures that liquid mercury does not remain at the KF joint 15. A KF joint 15 is installed between the opposing ends of the second flow guide tube 17 and the first flow guide tube 14. A KF vacuum clamp 16 detachably and securely connects the second flow guide tube 17, the first flow guide tube 14, and the KF joint 15.

[0027] A cooling chamber 18 is defined within the upper half of the sidewall of the cold water tray body 2. A cooling water inlet 8 and a cooling water outlet 9, both communicating with the cooling chamber 18, are fixedly connected to the exterior of the sidewall of the cold water tray body 2. A vacuum gauge port 11, an air inlet 7, and a reserved inspection port 10, all communicating with the interior of the cold water tray body 2, are fixedly connected to the lower half of the sidewall of the cold water tray body 2. The vacuum gauge port 11 is a reserved port for installing a vacuum gauge. Once installed, the pressure within the cold water tray body 2 can be monitored to prevent excessive pressure and determine if there is any blockage. The air inlet 7 is an inlet for hydrogen and nitrogen, which can be used for reaction or to exhaust air. The reserved inspection port 10 is used to clear blockages within the cold water tray body 2 or to clean accumulated powder on the sidewall. The bottom of the cold water tray body 2 has a conical structure, which prevents the accumulation of liquid mercury within the cold water tray body 2. The gaseous mercury condenses into liquid mercury in the cold water pan body 2 , and the liquid mercury flows downward along the inner wall of the cold water pan body 2 and flows into the mercury storage tank 1 through the second guide pipe 17 and the first guide pipe 14 .

[0028] The mercury storage tank 1 is placed on a support base 3 , and the four corners of the support base 3 are threadedly connected with anchor bolts 6 , so that the mercury storage tank 1 can be conveniently adjusted to a desired position through the support base 3 .

[0029] The technical features not described in the present invention can be realized by existing technologies and will not be described in detail here. The present invention is not limited to the above-mentioned specific embodiments. Changes, modifications, additions or substitutions made by ordinary technicians in this field within the scope of the present invention should also fall within the scope of protection of the present invention.

Claims

1. A waste mercury collection structure for a vertical liquid phase epitaxial furnace, characterized by: It includes a mercury storage tank, the upper end of the side wall of the mercury storage tank is detachably fixedly connected to the cold water tray assembly, and the side wall connecting the mercury storage tank and the cold water tray assembly is a cone structure. The top of the mercury storage tank is provided with an observation port, and an observation window is installed in the observation port.

2. The waste mercury collection structure for a vertical liquid phase epitaxial furnace according to claim 1, characterized in that: The small mouth end of the cone structure is fixedly connected with a flow guide tube 1.

3. The waste mercury collection structure for a vertical liquid phase epitaxial furnace according to claim 2, characterized in that: The top of the mercury storage tank and the side wall opposite to the cone structure thereof are respectively fixedly connected with mercury discharge handles.

4. The waste mercury collection structure for a vertical liquid phase epitaxial furnace according to claim 3, characterized in that: The cold water pan assembly includes a cold water pan main body, the bottom of the cold water pan main body is fixedly connected to a second guide pipe, a KF joint is installed between the opposite ends of the second guide pipe and the first guide pipe, and the second guide pipe, the first guide pipe and the KF joint are detachably fixedly connected by a KF vacuum clamp.

5. The waste mercury collection structure for a vertical liquid phase epitaxial furnace according to claim 4, characterized in that: The diameter of the first flow guide tube is greater than the diameter of the second flow guide tube.

6. The waste mercury collection structure for a vertical liquid phase epitaxial furnace according to claim 5, characterized in that: A cooling cavity is provided inside the upper half of the side wall of the cold water pan body, and a cooling water inlet and a cooling water outlet which are in communication with the cooling cavity are fixedly connected to the outside of the side wall of the cold water pan body.

7. The waste mercury collection structure for a vertical liquid phase epitaxial furnace according to claim 6, characterized in that: The bottom of the cold water tray body is a cone structure.

8. The waste mercury collection structure for a vertical liquid phase epitaxial furnace according to claim 7, characterized in that: The mercury storage tank is placed on a support base, and four corners of the support base are threadedly connected with anchor bolts.

9. The waste mercury collection structure for a vertical liquid phase epitaxial furnace according to claim 8, characterized in that: The lower half of the side wall of the cold water pan body is fixedly connected with a vacuum gauge interface, an air inlet and a reserved inspection port which are communicated with the inner cavity of the cold water pan body.

10. The waste mercury collection structure for a vertical liquid phase epitaxial furnace according to claim 9, characterized in that: The top of the cold water pan main body is fixedly connected with a cold water pan upper cover.

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