Miniature vacuum pump and miniature vacuumizing device

Abstract

The embodiment of the utility model provides a miniature vacuum pump and a miniature vacuumizing device, the miniature vacuum pump comprises an air collection and exhaust chamber provided with an air inlet nozzle and an exhaust hole, a leather cup assembly, a driving motor and a vacuum breaking assembly, and the vacuum breaking assembly comprises an air inlet hole penetrating through the bottom wall of the air collection and exhaust chamber; the pressing plate is movably sleeved on the section of the output shaft in the collecting and exhausting chamber and correspondingly and movably covers the air inlet hole; the rotating seat is coaxially and fixedly assembled on the output shaft and located on the side, away from the bottom wall, of the pressing plate, and a pivoting frame is arranged on the outer side face of the rotating seat in a protruding mode; the centrifugal swing rod is pivoted on the pivoting frame by virtue of a pivot shaft perpendicular to the output shaft, the gravity center of the centrifugal swing rod is arranged at one end far away from the rotating seat, and one end, close to the rotating seat, of the centrifugal swing rod is bent and extends towards the direction of the pressing plate to form a pressing part for pressing the pressing plate; the reset elastic piece is used for pushing the pressing plate in the direction away from the bottom wall so that the air inlet can be communicated with the inner cavity of the air collecting and exhausting chamber. According to the embodiment, vacuum discharging operation can be achieved without an electromagnetic valve.

Description

Technical Field

[0001] The embodiments of the utility model relate to the technical field of vacuum pumping devices, and in particular to a micro vacuum pump and a micro vacuum pumping device. Background Art

[0002] Existing small household electrical appliances such as small vacuum packaging machines and electric breast pumps all require vacuum devices. Due to different requirements on performance indicators such as power, vacuum degree, service life, noise, volume, and safety, large vacuum pumps and vacuum devices widely used in industry or commerce are not applicable, and micro vacuum devices are needed.

[0003] An existing micro vacuum device is usually composed of a micro vacuum pump, a solenoid valve and a controller. The suction nozzle of the vacuum pump is connected to the corresponding vacuum container through a corresponding suction pipeline. The solenoid valve is usually a three-way valve and is connected to the suction pipeline, wherein the first port and the second port of the solenoid valve are respectively connected to the suction nozzle and the vacuum container and the third port is connected to the outside world. When vacuuming is required, the controller first controls the solenoid valve to connect the first port to the second port and close the third port, and then controls the driving motor of the vacuum pump to drive the collecting and exhausting components to suck away the air in the vacuum container to realize the vacuuming operation; and when vacuuming is required, the controller controls the solenoid valve to connect the second port to the third port to allow external air to enter the vacuum container.

[0004] However, the inventors found in a specific embodiment that the existing micro vacuum device uses a solenoid valve to achieve the vacuum operation of the vacuum container, and the solenoid valve is prone to exhaust vibration during operation, which produces a lot of noise; moreover, the solenoid valve occupies a relatively large volume and costs a relatively large amount, which is not conducive to the miniaturization of the micro vacuum device and the reduction of production costs. Utility Model Content

[0005] The technical problem to be solved by the embodiments of the present utility model is to provide a miniature vacuum pump that can realize vacuum exhaust operation without relying on a solenoid valve.

[0006] A further technical problem to be solved by the embodiments of the present invention is to provide a miniature vacuum pumping device that can achieve vacuum exhaust operation without using a solenoid valve, and can effectively reduce the volume, production cost and working noise.

[0007] In order to solve the above technical problems, the embodiment of the present invention first provides the following technical solutions: a micro vacuum pump, comprising a collecting and exhaust chamber provided with an air inlet nozzle and an exhaust hole, a leather cup assembly assembled in the inner cavity of the collecting and exhaust chamber, and a drive motor with an output shaft passing through the bottom wall of the collecting and exhaust chamber and extending into the inner cavity and being in transmission connection with the leather cup assembly to drive the leather cup assembly to work. The micro vacuum pump also includes a vacuum breaking assembly, which includes:

[0008] an air inlet formed through the bottom wall of the exhaust collecting chamber;

[0009] a pressure plate movably sleeved on the section of the output shaft located within the collecting and exhaust chamber and correspondingly movably covering the air inlet hole; a rotating seat coaxially fixedly assembled on the output shaft and located on a side of the pressure plate facing away from the bottom wall, the outer side surface of the rotating seat being protrudingly provided with a pivot frame;

[0010] The middle section is pivotally mounted on a pivot frame on the outer side of the rotating seat by means of a centrifugal pendulum arm, wherein the pivot is perpendicular to the output shaft, the center of gravity of the centrifugal pendulum arm is set at an end away from the rotating seat, and the end of the centrifugal pendulum arm close to the rotating seat is bent and extended toward the pressure plate to form a pressing portion for pressing the pressure plate; and

[0011] A reset elastic member has one end fixed relative to the exhaust chamber and the other end abutting against a side surface of the pressure plate facing the bottom wall, and is used to push the pressure plate away from the bottom wall so that the air inlet hole is connected to the inner cavity of the exhaust chamber.

[0012] Furthermore, one pivot frame is symmetrically provided on each of the two opposite sides of the rotating seat, and one centrifugal rocker is pivotally provided on each pivot frame.

[0013] Furthermore, a gap is formed between the pressure plate and the bottom surface of the rotating seat in the axial direction of the output shaft, and the end of the pressing portion is inserted into the gap and abuts against the bottom surface of the rotating seat when the output shaft is not rotating.

[0014] Furthermore, a sealing gasket is provided on a side surface of the pressure plate facing the bottom wall at a position facing the air inlet hole.

[0015] Furthermore, the outer wall surface of the bottom wall is also recessed to form a noise reduction groove with one end connected to the outer end opening of the air inlet hole and the other end having a notch on the outer side surface of the exhaust chamber, and the noise reduction groove is filled with sound insulation cotton.

[0016] Furthermore, the pressure plate is provided with a guide hole axially parallel to the output shaft, and a guide rod parallel to the output shaft and correspondingly inserted into the guide hole is provided on the bottom wall.

[0017] Furthermore, a through hole is opened in the middle of the pressure plate, a ball bearing is fixedly assembled in the through hole, and the output shaft passes through the inner ring of the ball bearing and is movably arranged relative to the inner ring in the axial direction.

[0018] Furthermore, a stepped hole is provided in the middle of the bottom wall, and the end of the stepped hole connected to the inner cavity of the exhaust chamber is a small-diameter end, and the end away from the exhaust chamber is a large-diameter end. The output shaft passes through the stepped hole and extends into the inner cavity of the exhaust chamber. A sealing gasket is also assembled in the large-diameter end. One side surface of the sealing gasket abuts against the connecting step surface between the small-diameter end and the large-diameter end, and an abutment ring is provided on the other side surface surrounding the inner hole of the sealing gasket for abutting against the end face of the drive motor.

[0019] Furthermore, the reset elastic member is a helical compression spring correspondingly sleeved on the output shaft, and the middle part of the plate surface on one side of the pressure plate facing the bottom wall correspondingly bulges outward to form a convex ring correspondingly arranged around the through hole, and one end of the helical compression spring is sleeved on the convex ring and the other end passes through the stepped hole and the inner hole of the sealing gasket and is sleeved on the shaft seat correspondingly arranged on the end face of the drive motor for the output shaft to pass through.

[0020] On the other hand, in order to solve the above-mentioned further technical problems, the embodiment of the utility model further provides the following technical solutions: a micro vacuum device, comprising a micro vacuum pump and a controller connected to the drive motor of the micro vacuum pump for controlling the working state of the drive motor, wherein the micro vacuum pump is a vacuum pump as described above.

[0021] After adopting the above technical solution, the embodiment of the present invention has at least the following beneficial effects: the micro vacuum pump of the embodiment of the present invention adds a vacuum breaking component, specifically, an air inlet is set on the bottom wall of the collecting and exhaust chamber, and the air inlet is movably covered by a pressure plate. When the micro vacuum pump needs to perform a vacuum operation and the drive motor is started, since the center of gravity of the centrifugal pendulum arm is set at one end away from the rotating seat, the output shaft of the drive motor rotates to drive the rotating seat to rotate, causing the centrifugal pendulum arm to deflect around the pivot under the action of centrifugal force. At this time, the pressing part of the centrifugal pendulum arm close to one end of the rotating seat immediately pushes the pressure plate, so that the pressure plate overcomes the elasticity of the reset elastic member. When the micro vacuum pump is required to perform vacuum exhaust operation and the driving motor is shut down, the output shaft and the rotating seat of the driving motor stop rotating, the centrifugal force disappears and the pressing part of the centrifugal rocker arm no longer applies pressing force to the pressure plate, and the pressure plate returns to its initial position under the elastic force of the reset elastic member, and the air inlet is opened to connect the inner cavity of the collecting and exhaust chamber with the outside atmosphere, and the outside atmosphere enters the inner cavity of the collecting and exhaust chamber from the air inlet to realize vacuum exhaust operation. Vacuuming and vacuum exhaust can be realized without relying on the solenoid valve, which reduces production costs and working noise. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the disassembled structure of an optional embodiment of the micro vacuum pump of the utility model.

[0023] Figure 2 This is a schematic diagram of the assembly structure of an optional embodiment of the micro vacuum pump of the utility model.

[0024] Figure 3 This is a schematic diagram of the disassembled structure of a vacuum breaking component of an optional embodiment of the micro vacuum pump of the utility model.

[0025] Figure 4 This is a schematic diagram of the assembly structure of the vacuum breaking component of an optional embodiment of the micro vacuum pump of the utility model, excluding the reset elastic member.

[0026] Figure 5 This is a schematic cross-sectional structure diagram of a pressure plate covering the air inlet of an optional embodiment of the micro vacuum pump of the present utility model.

[0027] Figure 6 This is a schematic cross-sectional structure diagram of an optional embodiment of the micro vacuum pump of the present invention, in which the pressure plate opens the air inlet.

[0028] Figure 7 This is a schematic diagram of the disassembled structure of an optional embodiment of the micro vacuum pump of the utility model after being inverted.

[0029] Figure 8This is a module principle diagram of an optional embodiment of the micro vacuum device of the utility model. DETAILED DESCRIPTION

[0030] The present application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the following exemplary embodiments and descriptions are only used to explain the present invention and are not intended to limit the present invention. Moreover, the embodiments and features in the embodiments of the present application may be combined with each other unless there is a conflict.

[0031] like Figures 1-6 As shown, an optional embodiment of the present invention provides a micro vacuum pump A, including a collecting and exhaust chamber 1 provided with an air inlet nozzle 10 and an exhaust hole 12, a leather cup assembly 3 assembled in the inner cavity 1a of the collecting and exhaust chamber 1, and a drive motor 5 with an output shaft 50 passing through the bottom wall of the collecting and exhaust chamber 1 and extending into the inner cavity 1a and being in transmission connection with the leather cup assembly 3 to drive the leather cup assembly 3 to work. The micro vacuum pump also includes a vacuum breaking assembly 7, which includes:

[0032] An air inlet hole 70 formed through the bottom wall 1b of the exhaust chamber 1;

[0033] A pressure plate 72 movably sleeved on the section of the output shaft 50 located in the exhaust collecting chamber 1 and correspondingly movably covering the air inlet hole 70;

[0034] A rotating base 74 is coaxially fixedly assembled on the output shaft 50 and located on the side of the pressure plate 72 away from the bottom wall 1b. A pivot bracket 741 is protruding from the outer side surface of the rotating base 74;

[0035] The middle section is pivotally mounted on a centrifugal swing arm 76 on a pivot frame on the outer side of the rotating seat 74 via a pivot 76a. The pivot 76a is perpendicular to the output shaft 50. The center of gravity of the centrifugal swing arm 76 is located at an end away from the rotating seat 74. The end of the centrifugal swing arm 76 close to the rotating seat 74 is bent and extended toward the pressure plate 72 to form a pressing portion 761 for pressing the pressure plate 72.

[0036] The reset elastic member 78 has one end fixed relative to the exhaust chamber 1 and the other end abuts against the side plate surface of the pressure plate 72 facing the bottom wall 1b, and is used to push the pressure plate 72 away from the bottom wall 1b so that the air inlet 70 is connected to the inner cavity 1a of the exhaust chamber 1.

[0037] The micro vacuum pump A of the present invention embodiment is provided with a vacuum breaking component 7. Specifically, an air inlet hole 70 is provided on the bottom wall of the collecting and exhaust chamber 1, and a pressure plate 72 is used to movably cover the air inlet hole 70. When the micro vacuum pump A needs to perform a vacuum operation and starts the driving motor 5, since the center of gravity of the centrifugal pendulum 76 is set at one end away from the rotating seat 74, the output shaft 50 of the driving motor rotates to drive the rotating seat 74 to rotate, causing the centrifugal pendulum 76 to deflect around the pivot 76a under the action of centrifugal force. At this time, the pressing portion 761 of the centrifugal pendulum 76 close to one end of the rotating seat 74 immediately pushes the pressure plate 72, so that the pressure plate 72 overcomes the elastic force of the reset elastic member 78 and covers the air inlet hole 70. , thereby isolating the inner cavity 1a of the collecting and exhaust chamber 1 from the outside atmosphere, realizing normal vacuum operation; and when the micro vacuum pump A needs to perform vacuum operation and shuts down the drive motor 5, the output shaft 50 of the drive motor 5 and the rotating seat 74 stop rotating, the centrifugal force disappears and the pressing part 761 of the centrifugal rocker 76 no longer applies a pressing force to the pressure plate 72, and the pressure plate 72 returns to its initial position under the elastic force of the reset elastic member 78, and the air inlet 70 opens to connect the inner cavity 1a of the collecting and exhaust chamber 1 with the outside atmosphere, and the outside atmosphere enters the inner cavity 1a of the collecting and exhaust chamber 1 from the air inlet 70, realizing vacuum operation, and vacuuming and vacuum exhaust can be realized without relying on the solenoid valve, which reduces production costs and reduces working noise.

[0038] In the specific implementation, it can be understood that when the output shaft 50 of the driving motor 5 rotates at a predetermined angular velocity to drive the centrifugal pendulum 76 to swing and push the pressure plate 72 to cover the air inlet 70, the centrifugal pendulum 76 is in a force balance state. Therefore, whether the micro vacuum pump is in a tilted or inverted state, the output shaft 50 rotates at the predetermined angular velocity to drive the centrifugal pendulum 76 to swing, which will also cause the centrifugal pendulum 76 to swing to the corresponding position and balance. At this time, the centrifugal pendulum 7 also pushes the pressure plate 72 to cover the air inlet 70.

[0039] In another optional implementation of the present invention, Figures 1-6 As shown, a pivoting frame is symmetrically disposed on each of the two opposing sides of the rotating base 74, and a centrifugal rocker 76 is pivotally mounted on each pivoting frame 741. In this embodiment, by symmetrically disposing the centrifugal rockers 76 on the opposing side walls of the rotating base 74, when the rotating base 74 rotates under the drive of the output shaft 50, the centrifugal rockers 76 on both sides can always symmetrically apply a resisting force to the pressure plate 72, thereby stably maintaining the pressure plate 72 in a position covering the air inlet 70 and ensuring the sealing performance of the pressure plate 72 with respect to the air inlet 70.

[0040] In another optional implementation of the present invention, Figure 4As shown, a gap is defined between the pressure plate 72 and the bottom surface of the rotating seat 74 in the axial direction of the output shaft 50. The distal end of the pressing portion 721 is inserted into the gap and abuts against the bottom surface of the rotating seat 74 when the output shaft 50 is not rotating. In this embodiment, when the output shaft 50 is not rotating, the distal end of the pressing portion 761 abuts against the bottom surface of the rotating seat 74 to prevent the heavy top end of the centrifugal pendulum 76 from pressing against the pressure plate 72 and thereby covering the air inlet 70. A counterweight 763 is assembled at the end of the centrifugal pendulum 76 away from the rotating seat 74. By adding the counterweight 763, the center of gravity of the centrifugal pendulum 76 can be effectively adjusted so that the center of gravity is located at the end away from the rotating seat 74.

[0041] In another optional implementation of the present invention, Figures 1-6 As shown, a sealing gasket 721 is provided on one side of the pressure plate 72 facing the bottom wall 1b, directly opposite the air inlet 70. In this embodiment, the provision of the sealing gasket 721 effectively enhances the sealing effect of the pressure plate 72 on the air inlet 70, ensuring the airtightness of the micro-vacuum pump during vacuum operation. Specifically, the bottom surface of the pressure plate 721 is provided with a recess, and the sealing gasket 721 is embedded in the recess.

[0042] In another optional implementation of the present invention, Figure 4-Figure 7 As shown, the outer wall surface of the bottom wall 1b is further recessed to form a noise reduction groove 14, one end of which is connected to the outer end opening of the air inlet hole 70 and the other end of which is notched on the outer side surface of the air collecting and exhaust chamber 1. The noise reduction groove 14 is filled with sound insulation cotton 16. In this embodiment, by providing the noise reduction groove 14 and assembling the sound insulation cotton 16 in the noise reduction groove 14, when the micro vacuum pump performs the vacuum operation, the outside air rapidly enters the air collecting and exhaust chamber 1 through the noise reduction groove 14 and the air inlet hole 70. On the one hand, the sound insulation cotton 16 can effectively reduce the airflow noise during air intake, and on the other hand, it can effectively prevent external foreign matter from entering the air collecting and exhaust chamber 1 along with the outside air.

[0043] In another optional implementation of the present invention, Figures 1-6 As shown, the pressure plate 72 is further provided with a guide hole 723 axially parallel to the output shaft 50. A corresponding guide rod 17 is protruded from the bottom wall 1b, parallel to the output shaft 50 and correspondingly extending through the guide hole 723. In this embodiment, the pressure plate 72 is slidably mounted on the guide rod 17 via the guide hole 723. The guide hole 723 slides up and down on the guide rod 17, effectively guiding the vertical movement of the pressure plate 72. Specifically, the bottom end of the guide rod 17 is inserted and fixed into a predetermined positioning hole in the bottom wall 1b.

[0044] In another optional implementation of the present invention, Figures 1-6 As shown, a through hole 725 is defined in the center of the pressure plate 72. A ball bearing 727 is fixedly assembled within the through hole 725. The output shaft 50 passes through the inner ring of the ball bearing 727 and is axially movable relative to the inner ring. In this embodiment, the ball bearing 727 is further disposed in the through hole 725 in the center of the pressure plate 72. This ensures the normal rotation of the output shaft 50 within the center of the pressure plate 72, preventing interference between the output shaft 50 and the pressure plate 72, and effectively supports the pressure plate 72.

[0045] In another optional implementation of the present invention, Figure 1-Figure 7 As shown, a stepped hole 18 is provided in the middle of the bottom wall 1b, and the end of the stepped hole 18 connected to the inner cavity 1a of the collecting and exhaust chamber 1 is a small-diameter end, and the end away from the collecting and exhaust chamber 1 is a large-diameter end. The output shaft 50 passes through the stepped hole and extends into the inner cavity 1a of the collecting and exhaust chamber 1. A sealing gasket 19 is also assembled in the large-diameter end. One side surface of the sealing gasket 19 abuts against the connecting step surface between the small-diameter end and the large-diameter end, and an abutment ring 191 is provided on the other side surface surrounding the inner hole of the sealing gasket 19 for abutting against the end face of the drive motor 5. In this embodiment, a stepped hole 18 is provided on the bottom wall 1b, and a sealing gasket 19 is installed using the stepped hole 18. When the output shaft 50 extends into the inner cavity 1a of the exhaust chamber 1 through the stepped hole 18, the sealing of the exhaust chamber 1 is ensured. Moreover, the sealing gasket 19 has an abutment ring 191, which effectively enhances the sealing performance between the sealing gasket 19 and the drive motor 5.

[0046] In another optional implementation of the present invention, Figure 1-Figure 7 As shown, the return elastic member 78 is a helical compression spring correspondingly mounted on the output shaft 50. A convex ring 729 is formed on the central portion of the side surface of the pressure plate 72 facing the bottom wall 1b, surrounding the through hole 725. One end of the helical compression spring 78 is mounted on the convex ring 729, while the other end passes through the stepped hole 18 and the inner hole of the sealing gasket 19 and is mounted on the shaft seat 52 provided on the end surface of the drive motor 5 for the output shaft 50. In this embodiment, the return elastic member 78 is a helical compression spring mounted on the output shaft 50. This structure is simple. Furthermore, the ends of the helical compression spring 78 abut the pressure plate 72 and the shaft seat 52 of the drive motor 5, respectively, facilitating the helical compression spring 78's application of an elastic thrust to the pressure plate 72. Furthermore, the provision of the convex ring 729 effectively positions the end of the helical compression spring 78.

[0047] On the other hand, Figure 8As shown, another embodiment of the present invention provides a micro-vacuum device, comprising a micro-vacuum pump A and a controller B connected to a drive motor 5 of the vacuum pump A for controlling the operating state of the drive motor 5. The micro-vacuum pump is the micro-vacuum pump of the aforementioned embodiment. In this embodiment, the micro-vacuum device employs the aforementioned micro-vacuum pump A, effectively reducing its size, production costs, and operating noise.

[0048] In addition, the exhaust chamber includes a cylinder body with a plurality of cylinder chambers that are connected up and down and isolated from each other, a bottom shell and a valve plate that are respectively sealed and connected to the bottom and top of the cylinder body, and a top cover that is sealed and connected to the top of the valve plate. The air inlet nozzle and the air inlet hole are both arranged on the bottom shell, and the sealing mechanism is assembled in the bottom shell. The output shaft of the drive motor extends into the interior of the bottom shell from the bottom surface of the bottom shell, the exhaust nozzle is arranged on the top cover, and the valve plate is provided with air flow holes and an umbrella for movably covering the air outlet end of the air flow hole. The leather cup assembly includes a swing frame with multiple piston columns and multiple leather cups connected as one. The multiple piston columns and the multiple leather cups respectively extend into the cylinder chamber from the bottom and top of each cylinder chamber and are connected to each other in the cylinder chamber. The bottom end of the swing frame is provided with an eccentric shaft, the bottom end of the eccentric shaft is fixed on the rotating seat 74, and the central axis of the eccentric shaft and the output shaft 50 are obliquely intersected; multiple parts located outside the cylinder chamber are clamped and fixed by the valve plate and the cylinder body.

[0049] The embodiments of the present invention are described above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present invention, ordinary technicians in this field can also make many forms without departing from the scope of protection of the purpose of the present invention and the claims, which all fall within the scope of protection of the present invention.

Claims

1. A micro vacuum pump, comprising a collecting and exhaust chamber provided with an air inlet nozzle and an exhaust hole, a leather cup assembly assembled in the inner cavity of the collecting and exhaust chamber, and a drive motor with an output shaft passing through the bottom wall of the collecting and exhaust chamber and extending into the inner cavity and being in transmission connection with the leather cup assembly to drive the leather cup assembly to work, characterized in that: The micro vacuum pump further includes a vacuum breaking component, which includes: an air inlet formed through the bottom wall of the exhaust collecting chamber; A pressure plate movably sleeved on the section of the output shaft located in the collecting and exhausting chamber and correspondingly movably covering the air inlet hole; a rotating seat coaxially fixedly assembled on the output shaft and located on a side of the pressure plate away from the bottom wall, wherein a pivoting frame is protruding from an outer side surface of the rotating seat; The middle section is pivotally mounted on a pivot frame on the outer side of the rotating seat by means of a centrifugal pendulum arm, wherein the pivot is perpendicular to the output shaft, the center of gravity of the centrifugal pendulum arm is set at an end away from the rotating seat, and the end of the centrifugal pendulum arm close to the rotating seat is bent and extended toward the pressure plate to form a pressing portion for pressing the pressure plate; and A reset elastic member has one end fixed relative to the exhaust chamber and the other end abutting against a side surface of the pressure plate facing the bottom wall, and is used to push the pressure plate away from the bottom wall so that the air inlet hole is connected to the inner cavity of the exhaust chamber.

2. The micro vacuum pump according to claim 1, wherein Two opposite sides of the rotating seat are symmetrically provided with a pivot frame, and each pivot frame is pivotally provided with a centrifugal swing rod.

3. The micro vacuum pump according to claim 1 or 2, wherein: A gap is formed between the pressure plate and the bottom surface of the rotating seat in the axial direction of the output shaft. The distal end of the pressing portion is inserted into the gap and abuts against the bottom surface of the rotating seat when the output shaft is not rotating.

4. The micro vacuum pump according to claim 1, wherein A sealing gasket is provided at a position of a plate surface of one side of the pressure plate facing the bottom wall and facing the air inlet hole.

5. The micro vacuum pump according to claim 1, wherein The outer wall surface of the bottom wall is also recessed to form a noise reduction groove with one end connected to the outer end opening of the air inlet and the other end having a notch on the outer side surface of the exhaust chamber, and the noise reduction groove is filled with sound insulation cotton.

6. The micro vacuum pump according to claim 1, wherein: The pressure plate is further provided with a guide hole axially parallel to the output shaft, and the bottom wall is provided with a corresponding protrusion provided with a guide rod parallel to the output shaft and correspondingly inserted into the guide hole.

7. The micro vacuum pump according to claim 1 or 6, characterized in that: A through hole is opened in the middle of the pressure plate, a ball bearing is fixedly assembled in the through hole, and the output shaft passes through the inner ring of the ball bearing and is movably arranged relative to the inner ring in the axial direction.

8. The micro vacuum pump according to claim 7, wherein: A stepped hole is provided in the middle of the bottom wall, and the end of the stepped hole connected to the inner cavity of the exhaust chamber is a small-diameter end, and the end away from the exhaust chamber is a large-diameter end. The output shaft passes through the stepped hole and extends into the inner cavity of the exhaust chamber. A sealing gasket is also assembled in the large-diameter end. One side surface of the sealing gasket abuts against the connecting step surface between the small-diameter end and the large-diameter end, and an abutment ring is provided on the other side surface surrounding the inner hole of the sealing gasket for abutting against the end face of the drive motor.

9. The micro vacuum pump according to claim 8, wherein The reset elastic member is a helical compression spring correspondingly sleeved on the output shaft, and the middle part of the plate surface of one side of the pressure plate facing the bottom wall correspondingly bulges outward to form a convex ring correspondingly arranged around the through hole, one end of the helical compression spring is sleeved on the convex ring and the other end passes through the stepped hole and the inner hole of the sealing gasket and is sleeved on the shaft seat correspondingly arranged on the end face of the drive motor for the output shaft to pass through.

10. A micro vacuum device comprising a micro vacuum pump and a controller connected to a drive motor of the micro vacuum pump for controlling the working state of the drive motor, characterized in that: The micro vacuum pump is the micro vacuum pump according to any one of claims 1 to 9.

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