Angle valve structure
By designing the angle valve structure of the cylinder part, valve body, valve core, first seal and second seal, the problems of inconvenient disassembly and poor sealing of traditional angle valves are solved, and the effects of convenient disassembly and good sealing are achieved, and the efficiency and quality of semiconductor production are improved.
Patent Information
- Application Number
- CN202422224966.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-11
- Publication Date
- 2025-08-19
- Estimated Expiration
- 2034-09-11
AI Technical Summary
Traditional angle valves are inconvenient to disassemble and assemble in semiconductor production, poor interchangeability of parts and poor sealing.
An angle valve structure is designed, including a cylinder part, a valve body, a valve core, a first seal and a second seal. Through the connection between the cylinder part and the valve body, the valve core is linked in the first inner cavity to achieve convenient disassembly and assembly and good sealing.
It realizes easy disassembly and assemble the angle valve, good interchangeability of parts and strong sealing, avoids medium leakage, and improves the efficiency and quality of semiconductor production.
Smart Images

Figure CN223242108U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of valves used in the production of semiconductor products, in particular to an angle valve structure. Background Art
[0002] A vacuum valve is a vacuum system component used to change the direction of airflow, adjust the amount of airflow, and cut off or connect pipelines in a vacuum system.
[0003] Angle valve is a type of vacuum valve and is commonly used in the production process of semiconductor products;
[0004] In the production process of semiconductor products, the operating speed and sealing performance of angle valves directly affect the efficiency and quality of semiconductor product production;
[0005] Traditional angle valves have some shortcomings;
[0006] 1. The structure is too complicated. After a period of use, it is inconvenient to disassemble and assemble when maintenance is required, resulting in poor interchangeability of parts;
[0007] 2. The sealing performance is relatively poor, and there is a possibility of medium leakage;
[0008] Therefore, a kind of angle valve structure is needed. Utility Model Content
[0009] In view of the above-mentioned deficiencies existing in the related art, the purpose is to provide an angle valve structure to solve the technical problems of inconvenient disassembly and assembly, poor interchangeability of parts and relatively poor sealing in the related art.
[0010] The technical solution to achieve the purpose is: an angle valve structure, comprising:
[0011] Cylinder department;
[0012] a valve body connected to the cylinder portion, the valve body having a first inner cavity, a first medium flow port, and a second medium flow port, wherein the first inner cavity accommodates a portion of the cylinder portion, and the first inner cavity is in communication with the first medium flow port and the second medium flow port;
[0013] a valve core disposed in the first inner cavity, connected to a portion of the cylinder portion, and linked by the cylinder portion to move closer to or farther from the first medium flow port;
[0014] a first sealing member connected to the valve core, wherein when the valve core is close to the first medium flow port, the first sealing member is in close contact with the first sealing surface on the valve body to form a seal;
[0015] and a second sealing member, which is arranged between the second sealing surface on the valve body and the valve core.
[0016] Further: the cylinder part includes: an outer shell, the bottom of which is plugged into the valve body, the outer shell has a second inner cavity, the side wall of the outer shell has an air vent, and the air vent is connected to the second inner cavity; a piston structure, a part of which is arranged in the second inner cavity, and the other part penetrates into the first inner cavity and is connected to the valve core; two retaining springs are connected to the outer shell at intervals and are arranged in the second inner cavity for limiting the piston structure; an upper cover is connected to the top of the outer shell, and the middle part of the upper cover has a through hole; and an indicator is connected to the piston structure, when the piston structure links the valve core to move away from the first medium flow port, the indicator passes through the through hole and protrudes from the upper cover.
[0017] Further: the piston structure includes: a main shaft, one end of which is arranged in the second inner cavity, and the other end penetrates into the first inner cavity and is connected to the valve core; a piston part, which is connected to one end of the main shaft and is limited by the retaining spring; a locking nut, which is connected to the main shaft and locks the main shaft and the piston part; and a lower cover part, which is connected to the bottom of the outer shell, is limited by the retaining spring, is penetrated by the main shaft, and is slidably connected to the main shaft.
[0018] Furthermore: the piston part includes: a piston connected to one end of the main shaft and limited by the retaining spring; a third sealing member connected to the piston and in contact with the main shaft; and a fourth sealing member connected to the piston and in contact with the inner wall of the outer shell.
[0019] Further: the lower cover part includes: a lower cover, connected to the bottom of the outer shell, limited by the retaining spring, the middle part of which is passed through by the main shaft and is slidably connected to the main shaft; a fifth sealing member, connected to the inner wall of the lower cover, in contact with the main shaft; and a sixth sealing member, connected to the outer wall of the lower cover, in contact with the inner wall of the outer shell.
[0020] Further: the valve core includes:
[0021] a bellows, one end of which is disposed between the cylinder portion and the valve body and contacts the second sealing member, and the other end of which extends toward the first medium flow opening and connects the main shaft and the first sealing member, wherein when the bellows is driven by the cylinder portion, the other end of the bellows approaches or moves away from the first medium flow opening;
[0022] A pressing member connected inside the corrugated sleeve and used to connect the corrugated sleeve and the main shaft;
[0023] and an elastic member, which is arranged between the lower cover and the pressing member, inside the corrugated sleeve, and spaced apart from the corrugated sleeve.
[0024] Further: the corrugated sleeve includes: an upper tube end, which is arranged between the cylinder part and the valve body, contacts the second sealing member, and the upper tube end surrounds the elastic member and is spaced apart from the elastic member; a lower tube end, which is spaced apart from the upper tube end and connected to the first sealing member, and the lower tube end has a stepped groove, and the stepped groove is connected to the main shaft; and an intermediate corrugated tube section, which is connected between the upper tube end and the lower tube end, surrounds the elastic member, and is spaced apart from the elastic member.
[0025] Furthermore: the pressing member includes: a pressing ring connected in the stepped groove to limit the main shaft; and a sleeve body, which is sleeved on the main shaft and contacts the pressing ring.
[0026] Furthermore: the elastic member is a cylindrical spring, which is arranged between the lower cover and the sleeve.
[0027] Furthermore: the first sealing member or the second sealing member is an O-ring.
[0028] The above technical solution has the following beneficial effects: an angle valve structure, compared with the related art, is provided with a cylinder part, a valve body, a valve core, a first sealing member and a second sealing member; the valve core is connected to the cylinder part to form a relative whole, the first sealing member is connected to the valve core, and the second sealing member is connected to the second sealing surface on the valve body, and is connected to the valve body through the cylinder part. The valve core enters the first inner cavity on the valve body and presses the second sealing member, so that disassembly and assembly are relatively convenient, and the interchangeability of parts is relatively good. When the valve core is linked by the cylinder part and approaches the first medium flow port, the first sealing member and the first sealing surface on the valve body form a seal, separating the first medium flow port and the second medium flow port, and realizing medium flow interruption. At the same time, the second sealing member forms a seal between the second sealing surface on the valve body and the valve core, achieving relatively good sealing and relatively convenient disassembly and assembly; thereby overcoming the technical problems of inconvenient disassembly and assembly, poor interchangeability of parts and relatively poor sealing, and achieving the technical effects of relatively convenient disassembly and assembly, relatively good interchangeability of parts and relatively good sealing, and having practicality. BRIEF DESCRIPTION OF THE DRAWINGS
[0029] Figure 1 This is the assembly cross-sectional view;
[0030] Figure 2 It is a partial cross-sectional view of the cylinder portion;
[0031] Figure 3 for Figure 1 Schematic diagram of the structure with part of the cylinder removed;
[0032] Figure 4 It is a schematic diagram of the partial structure of the valve core, the first sealing member, and the main shaft;
[0033] Figure 5 This is a schematic diagram of the assembly structure;
[0034] In the figure: 10. Cylinder part, 11. Outer shell, 11-1. Second inner cavity, 11-2. Vent, 12. Piston structure, 12-1. Main shaft, 12-2. Piston part, 12-21. Piston, 12-22. Third sealing member, 12-23. Fourth sealing member, 12-3. Locking nut, 12-4. Lower cover part, 12-41. Lower cover, 12-42. Fifth sealing member, 12-43. Sixth sealing member, 13. Circlip, 14. Upper cover, 14-1. Through hole, 15. Indicator, 20. Valve body, 21. First inner cavity , 22. First medium flow port, 23. Second medium flow port, 24. First sealing surface, 25. Second sealing surface, 20-1. Square valve housing, 20-2. Cylindrical valve housing, 20-3. First pipe port, 20-4. Second pipe port, 30. Valve core, 31. Bellows sleeve, 31-1. Upper pipe end, 31-2. Lower pipe end, 31-21. Step groove, 31-3. Middle bellows section, 32. Pressing part, 32-1. Pressure ring, 32-2. Sleeve body, 33. Elastic part, 40. First sealing part, 50. Second sealing part. DETAILED DESCRIPTION
[0035] In order to make the content easier to understand, the following is a further detailed description based on specific embodiments and in conjunction with the accompanying drawings;
[0036] An angle valve structure solves the technical problems of inconvenient disassembly and assembly, poor interchangeability of parts, and relatively poor sealing in related technologies. It can be manufactured and used, achieving the positive effects of relatively convenient disassembly and assembly, relatively good interchangeability of parts, and relatively good sealing. The overall idea is as follows:
[0037] Implementation Method
[0038] like Figure 1 、 Figure 5 As shown; an angle valve structure, comprising:
[0039] Cylinder part 10;
[0040] The valve body 20 is connected to the cylinder portion 10. The valve body 20 has a first inner cavity 21, a first medium flow port 22, and a second medium flow port 23. The first inner cavity 21 accommodates a portion of the cylinder portion 10. The first inner cavity 21 is in communication with the first medium flow port 22 and the second medium flow port 23.
[0041] The valve core 30 is disposed in the first inner cavity 21 and is connected to a portion of the cylinder portion 10 . The valve core 30 is linked by the cylinder portion 10 to move closer to or farther from the first medium flow port 22 .
[0042] A first sealing member 40 is connected to the valve core 30. When the valve core 30 is close to the first medium flow port 22, the first sealing member 40 is in close contact with the first sealing surface 24 of the valve body 20 to form a seal.
[0043] and a second sealing member 50 , disposed between the second sealing surface 25 on the valve body 20 and the valve core 30 ;
[0044] Specifically, during implementation, a cylinder portion 10, a valve body 20, a valve core 30, a first sealing member 40 and a second sealing member 50 are provided; the valve core 30 is connected to the cylinder portion 10 to form a relative whole, the first sealing member 40 is connected to the valve core 30, and the second sealing member 50 is connected to the second sealing surface 25 on the valve body 20. The valve core 30 is connected to the valve body 20 through the cylinder portion 10, and enters the first inner cavity 21 on the valve body 20 to press the second sealing member 50. The disassembly and assembly are relatively convenient, and the interchangeability of parts is relatively high. The valve core 30 is preferably connected to the cylinder portion 10 and approaches the first medium flow port 22, the first sealing member 40 forms a seal with the first sealing surface 24 on the valve body 20, thereby isolating the first medium flow port 22 and the second medium flow port 23, thereby realizing medium flow interruption. At the same time, the second sealing member 50 forms a seal between the second sealing surface 25 on the valve body 20 and the valve core 30, so that the medium will not leak from the connection between the cylinder portion 10 and the valve body 20, thereby achieving relatively good sealing and relatively convenient disassembly and assembly.
[0045] Another embodiment:
[0046] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 As shown; during implementation, the cylinder part 10 includes: an outer shell 11, the bottom of which is plugged into the valve body 20, the outer shell 11 having a second inner cavity 11-1, and a vent 11-2 on the side wall of the outer shell 11, the vent 11-2 being connected to the second inner cavity 11-1; a piston structure 12, a portion of which is arranged in the second inner cavity 11-1, and the other portion penetrates the first inner cavity 21 and is connected to the valve core 30; two retaining springs 13, spaced apart and connected to the outer shell 11, and arranged in the second inner cavity 11-1, for limiting the position of the piston structure 12; an upper cover 14, connected to the top of the outer shell 11, the middle portion of the upper cover 14 having a through hole 14-1; and an indicator 15, connected to the piston structure 12, when the piston structure 12 links the valve core 30 to move away from the first medium flow port 22, the indicator 15 penetrates the through hole 14-1 and protrudes from the upper cover 14;
[0047] The outer shell 11 is a square structure, and after being plugged into the valve body 20, it is connected by bolts, which makes installation and disassembly more convenient.
[0048] A second inner cavity 11-1 is provided to facilitate accommodating the piston structure 12 and facilitate gas flow through the vent 11-2 to change the pressure in the second inner cavity 11-1 between the piston portion 12-2 and the lower cover portion 12-4, so that the piston portion 12-2 and the main shaft 12-1 can move up and down along the second inner cavity 11-1;
[0049] The piston structure 12 includes: a main shaft 12-1, one end of which is disposed in the second inner cavity 11-1, and the other end of which penetrates into the first inner cavity 21 and is connected to the valve core 30; a piston portion 12-2, which is connected to one end of the main shaft 12-1 and is limited by the retaining spring 13; a locking nut 12-3, which is connected to the main shaft 12-1 and locks the main shaft 12-1 and the piston portion 12-2; and a lower cover portion 12-4, which is connected to the bottom of the outer shell 11, is limited by the retaining spring 13, penetrates through the main shaft 12-1, and is slidably connected to the main shaft 12-1.
[0050] The main shaft 12-1 is a stepped shaft with a threaded section at one end for threaded connection with the locking nut 12-3 and the other end plugged into the stepped groove 31-21;
[0051] The piston part 12-2 includes: a piston 12-21, which is connected to one end of the main shaft 12-1 and is limited by the retaining spring 13; a third sealing member 12-22, which is connected to the piston 12-21 and contacts the main shaft 12-1; and a fourth sealing member 12-23, which is connected to the piston 12-21 and contacts the inner wall of the outer shell 11; the middle position of the piston 12-21 is sleeved on the main shaft 12-1, and the outer wall and the outer shell 11 are clearance-matched; the third sealing member 12-22 is connected to the piston 12-21 and contacts the inner wall of the outer shell 11; the third sealing member 12-23 ... The sealing member 12-22 or the fourth sealing member 12-23 is an O-ring, which forms a seal so that when the pressure in the second inner cavity 11-1 between the piston portion 12-2 and the lower cover portion 12-4 changes, the piston portion 12-2 can be pushed to move up and down along the second inner cavity 11-1. For example, when gas is introduced through the vent 11-2, the pressure in the second inner cavity 11-1 increases. When the pressure is greater than the atmospheric pressure, the piston portion 12-2 is pushed to move upward (toward the upper cover 14).
[0052] For another example, when suction is drawn from the vent 11 - 2 , the pressure in the second inner cavity 11 - 1 decreases and becomes lower than the atmospheric pressure, the piston 12 - 2 moves downward (toward the lower cover 12 - 4 );
[0053] The locking nut 12-3 is a hexagonal nut, which is threadedly connected to the main shaft 12-1, so that the main shaft 12-1 and the piston part 12-2 are reliably connected to form a relative whole;
[0054] The lower cover portion 12-4 includes: a lower cover 12-41, which is connected to the bottom of the outer shell 11, is limited by the retaining spring 13, and the middle part is penetrated by the main shaft 12-1 and is slidably connected to the main shaft 12-1; a fifth sealing member 12-42 is connected to the inner wall of the lower cover 12-41 and contacts the main shaft 12-1; and a sixth sealing member 12-43 is connected to the outer wall of the lower cover 12-41 and contacts the inner wall of the outer shell 11; the middle part of the lower cover 12-41 is sleeved on the main shaft 12-1, and the outer circle is a stepped structure. The outer circle cooperates with the second inner cavity 11-1, and is convenient for installation and disassembly; the fifth sealing member 12-42 is a rubber sealing ring, such as a C-ring, and the sixth sealing member 12-43 is an O-ring, which forms a seal and is conducive to pressure changes in the second inner cavity 11-1;
[0055] The main shaft 12-1, the piston part 12-2, the locking nut 12-3 and the lower cover part 12-4 are arranged separately, and when assembled with the outer shell 11, the installation and disassembly are relatively convenient. After a period of use, if the parts are damaged, the flexibility of interchangeability is relatively good;
[0056] The retaining spring 13 is a common structure in the prior art, used to limit the piston portion 12-2 and the lower cover portion 12-4, and has good structural reliability;
[0057] The upper cover 14 is a circular plate-shaped structure connected to the top of the outer shell 11, blocking the second inner cavity 11-1. It is relatively beautiful and can be marked with logos, such as brand, company name, etc.
[0058] A through hole 14 - 1 is provided on the upper cover 14 , which is conducive to the indicator 15 passing through the through hole 14 - 1 and protruding from the upper cover 14 when the piston structure 12 links the valve core 30 to open the first medium circulation port 22 , forming an indication that the first medium circulation port 22 has been opened;
[0059] The indicator member 15 is generally T-shaped and is plugged into the main shaft 12 - 1 . When the piston structure 12 is linked to the valve core 30 to open the first medium flow port 22 , the indicator member 15 passes through the through hole 14 - 1 and protrudes from the upper cover 14 , thereby indicating that the first medium flow port 22 is open.
[0060] Another embodiment:
[0061] like Figure 1 、 Figure 3 、 Figure 5As shown; in implementation, the valve body 20 includes: a square valve housing 20-1, the top of which is plugged into the outer housing 11; a cylindrical valve housing 20-2, connected to the bottom of the square valve housing 20-1, and having a first inner cavity 21 between the cylindrical valve housing 20-1; a first pipe opening 20-3, connected to the bottom of the cylindrical valve housing 20-2, having a first medium flow opening 22; and a second pipe opening 20-4, connected to the side wall of the cylindrical valve housing 20-2, having a second medium flow opening 23;
[0062] The square valve housing 20-1, the cylindrical valve housing 20-2, the first pipe opening 20-3 and the second pipe opening 20-4 are integrally formed. After the square valve housing 20-1 is plugged into the outer housing 11, bolts are inserted through the outer housing 11 to connect them, making installation and disassembly more convenient.
[0063] The cylinder 10 links the valve core 30 and the first sealing member 40 up and down to control the opening and closing of the first medium flow port 22 and the second medium flow port 23. The operating speed is relatively stable and the stability is relatively good.
[0064] Another embodiment:
[0065] like Figure 1 、 Figure 3 、 Figure 4 、 Figure 5 As shown; during implementation, the valve core 30 includes: a bellows 31, one end of which is arranged between the cylinder portion 10 and the valve body 20 and contacts the second sealing member 50, and the other end extends toward the first medium circulation port 22, connecting the main shaft 12-1 and the first sealing member 40. When the bellows 31 is linked by the cylinder portion 10, the other end of the bellows 31 approaches or moves away from the first medium circulation port 22; a pressing member 32 connected inside the bellows 31, used to connect the bellows 31 and the main shaft 12-1; and an elastic member 33, arranged between the lower cover portion 12-4 and the pressing member 32, inside the bellows 31, and spaced apart from the bellows 31;
[0066] The bellows 31 includes: an upper tube end 31-1, which is arranged between the cylinder portion 10 and the valve body 20 and contacts the second sealing member 50, and the upper tube end 31-1 surrounds the elastic member 33 and is spaced apart from the elastic member 33; a lower tube end 31-2, which is spaced apart from the upper tube end 31-1 and connected to the first sealing member 40, and has a stepped groove 31-21 on the lower tube end 31-2, and the stepped groove 31-21 is connected to the main shaft 12-1; and an intermediate bellows section 31-3, which is connected between the upper tube end 31-1 and the lower tube end 31-2, surrounds the elastic member 33, and is spaced apart from the elastic member 33. The bellows 31 is provided so that when the cylinder portion 10 links the valve core 30 and the first sealing member 40 to move up and down, the intermediate bellows section 31-3 can be extended and retracted, thereby ensuring the reliability of movement and forming a barrier to prevent medium leakage.
[0067] The pressing member 32 includes: a pressing ring 32-1, which is connected to the stepped groove 31-21 and limits the main shaft 12-1; and a sleeve 32-2, which is sleeved on the main shaft 12-1 and contacts the pressing ring 32-1; the pressing ring 32-1 is provided, pressed into the stepped groove 31-21, and welded to the lower tube end 31-2, which is conducive to limiting the main shaft 12-1; a sleeve 32-2 is provided, which is sleeved on the main shaft 12-1 and has a roughly "T"-shaped structure, which is conducive to forming a positioning with the elastic member 33, and has good structural reliability.
[0068] The elastic member 33 is a cylindrical spring, which is arranged between the lower cover portion 12-4 and the sleeve 32-2. It not only enables the sleeve 32-2 to contact and tightly fit the pressure ring 32-1, but also, when the cylinder portion 10 links the valve core 30 and the first sealing member 40 to move downward and the first sealing member 40 is in tight contact with the first sealing surface 24, the elastic force of the elastic member 33 facilitates the formation of a reliable seal between the first sealing member 40 and the first sealing surface 24, thereby isolating the first medium flow port 22 and the second medium flow port 23, thereby achieving medium flow interruption.
[0069] Another embodiment:
[0070] like Figure 1 、 Figure 3 、 Figure 5 As shown; when implemented, the first sealing member 40 or the second sealing member 50 is an O-ring, which forms a seal with relatively good sealing performance and is relatively easy to disassemble and assemble;
[0071] The working principle is as follows: the valve core 30 is connected to the cylinder part 10 to form a relative whole, the first sealing member 40 is connected to the valve core 30, and the second sealing member 50 is connected at the second sealing surface 25 on the valve body 20. The valve core 30 is connected to the valve body 20 through the cylinder part 10, and the valve core 30 enters the first inner cavity 21 on the valve body 20 to press the second sealing member 50. The disassembly and assembly are relatively convenient, and the interchangeability of parts is relatively good. When the valve core 30 is linked by the cylinder part 10 to approach the first medium flow port 22, the first sealing member 40 and the first sealing surface 24 on the valve body 20 form a seal, separating the first medium flow port 22 and the second medium flow port 23, thereby realizing medium flow interruption. At the same time, the second sealing member 50 forms a seal between the second sealing surface 25 on the valve body 20 and the valve core 30, so that the medium will not leak from the connection between the cylinder part 10 and the valve body 20, thereby achieving relatively good sealing and relatively convenient disassembly and assembly.
[0072] In the description, it should be understood that the terms "upper", "lower", "left", "right", "front", "back", etc. indicating directions or positional relationships are based on the positional relationships shown in the drawings and are only used to facilitate or simplify the description, and do not necessarily indicate specific directions. The operating procedures described in the embodiments are not absolute steps for use and may be adjusted accordingly in actual use.
[0073] Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meanings understood by persons of ordinary skill in the relevant art. The terms "first," "second," and similar words used in the specification and claims do not denote any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms "a" or "an" and similar words do not necessarily indicate a limit on quantity, but rather indicate the presence of at least one, which shall be determined based on the content of the embodiments.
[0074] The above is only a preferred specific implementation method, but the scope of protection is not limited to this. Any technician familiar with this technical field can make equivalent replacements or changes based on the technical solutions and inventive concepts within the disclosed technical scope, which should be covered by the scope of protection.
Claims
1. An angle valve structure, characterized in that: include: Cylinder department; a valve body connected to the cylinder portion, the valve body having a first inner cavity, a first medium flow port, and a second medium flow port, wherein the first inner cavity accommodates a portion of the cylinder portion, and the first inner cavity is in communication with the first medium flow port and the second medium flow port; a valve core disposed in the first inner cavity, connected to a portion of the cylinder portion, and linked by the cylinder portion to move closer to or farther from the first medium flow port; a first sealing member connected to the valve core, wherein when the valve core is close to the first medium flow port, the first sealing member is in close contact with the first sealing surface on the valve body to form a seal; and a second sealing member, which is arranged between the second sealing surface on the valve body and the valve core.
2. The angle valve structure according to claim 1, characterized in that: The cylinder portion comprises: an outer shell, the bottom of which is plugged into the valve body, the outer shell having a second inner cavity, and a vent on the side wall of the outer shell, the vent being in communication with the second inner cavity; a piston structure, a portion of which is disposed in the second inner cavity and another portion of which penetrates into the first inner cavity and is connected to the valve core; Two retaining springs are connected to the outer shell at intervals and are disposed in the second inner cavity to limit the position of the piston structure; An upper cover is connected to the top of the outer shell, and a middle portion of the upper cover has a through hole; and an indicator connected to the piston structure. When the piston structure links the valve core to move away from the first medium flow port, the indicator passes through the through hole and protrudes from the upper cover.
3. The angle valve structure according to claim 2, characterized in that: The piston structure includes: a main shaft, one end of which is arranged in the second inner cavity, and the other end penetrates into the first inner cavity and is connected to the valve core; a piston part, which is connected to one end of the main shaft and is limited by the retaining spring; a locking nut, which is connected to the main shaft and locks the main shaft and the piston part; and a lower cover part, which is connected to the bottom of the outer shell, is limited by the retaining spring, is penetrated by the main shaft, and is slidably connected to the main shaft.
4. The angle valve structure according to claim 3, characterized in that: The piston portion includes: a piston connected to one end of the main shaft and limited by the retaining spring; a third sealing member connected to the piston and in contact with the main shaft; and a fourth sealing member connected to the piston and in contact with the inner wall of the outer shell.
5. The angle valve structure according to claim 4, characterized in that: The lower cover portion includes: a lower cover, which is connected to the bottom of the outer shell, limited by the retaining spring, and the middle part is penetrated by the main shaft and is slidably connected to the main shaft; a fifth sealing member, which is connected to the inner wall of the lower cover and contacts the main shaft; and a sixth sealing member, which is connected to the outer wall of the lower cover and contacts the inner wall of the outer shell.
6. The angle valve structure according to claim 5, characterized in that: The valve core comprises: a bellows, one end of which is disposed between the cylinder portion and the valve body and contacts the second sealing member, and the other end of which extends toward the first medium flow opening and connects the main shaft and the first sealing member, wherein when the bellows is driven by the cylinder portion, the other end of the bellows approaches or moves away from the first medium flow opening; A pressing member connected inside the corrugated sleeve and used to connect the corrugated sleeve and the main shaft; and an elastic member, which is arranged between the lower cover and the pressing member, inside the corrugated sleeve, and spaced apart from the corrugated sleeve.
7. The angle valve structure according to claim 6, characterized in that: The bellows sleeve includes: an upper tube end, which is arranged between the cylinder portion and the valve body, contacts the second sealing member, and surrounds the elastic member and is spaced apart from the elastic member; a lower tube end, which is spaced apart from the upper tube end and connected to the first sealing member, and has a stepped groove on the lower tube end, and the stepped groove is connected to the main shaft; and an intermediate bellows section, which is connected between the upper tube end and the lower tube end, surrounds the elastic member, and is spaced apart from the elastic member.
8. The angle valve structure according to claim 7, characterized in that: The pressing member includes: a pressing ring connected in the stepped groove to limit the main shaft; and a sleeve body sleeved on the main shaft to contact the pressing ring.
9. The angle valve structure according to claim 8, characterized in that: The elastic member is a cylindrical spring and is arranged between the lower cover and the sleeve body.
10. An angle valve structure according to claim 1 or 9, characterized in that: The first sealing member or the second sealing member is an O-ring.