Device for detecting impurity concentration in ultrapure ammonia

Abstract

The utility model discloses a detection device for impurity concentration in ultrapure ammonia, which comprises a first detection unit, a second detection unit and a third detection unit which are connected with a fourth communication valve in parallel. The output end of the fourth communication valve is fixedly connected with the input end of a detector, and the input ends of the first detection unit, the second detection unit, the third detection unit and the detector are respectively connected with a carrier gas supply end. The first detection unit, the second detection unit and the third detection unit are connected in parallel to synchronously perform impurity separation on sample gas, and all impurities are conveyed into the detector through the fourth communication valve to be detected and analyzed, so that compared with a traditional detection device, the detection process is optimized; the test period for detecting the impurities in the ultrapure ammonia can be effectively shortened, and the test efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of ultrapure ammonia detection, in particular to a device for detecting impurity concentration in ultrapure ammonia. Background Art

[0002] Ultrapure ammonia is a crucial raw material used in the semiconductor and optoelectronics fields. Before use, it must be tested for impurity concentrations to ensure it meets industry standards. Ultrapure ammonia testing is typically performed using a chromatograph. Traditional testing devices require multiple purification steps to separate the individual impurities within the sample gas, followed by analysis of their concentrations. This results in a lengthy analysis cycle and significant time-consuming testing. To address this issue, we propose a device for detecting impurity concentrations in ultrapure ammonia. Utility Model Content

[0003] The purpose of the present invention is to provide a device for detecting the impurity concentration in ultrapure ammonia, so as to solve the problems raised in the above background technology.

[0004] To achieve the above objectives, the present invention provides the following technical solution: a device for detecting the impurity concentration in ultra-pure ammonia, comprising a first detection unit, a second detection unit, and a third detection unit, wherein the first detection unit, the second detection unit, and the third detection unit are connected in parallel to a fourth connecting valve, the output end of the fourth connecting valve is fixedly connected to the input end of the detector, and the input ends of the first detection unit, the second detection unit, the third detection unit, and the detector are respectively connected to a carrier gas supply end.

[0005] Preferably, the first detection unit includes a first connecting valve, and connecting ends of the first connecting valve are respectively connected to the first chromatographic column and the second chromatographic column.

[0006] Preferably, the second detection unit includes a second connecting valve, the connecting end of the second connecting valve is connected to the connecting end of the first connecting valve, and the connecting ends of the second connecting valve are fixedly connected to the third chromatographic column and the fourth chromatographic column respectively.

[0007] Preferably, the third detection unit includes a third connecting valve, the connecting end of the third connecting valve is connected to the connecting end of the second connecting valve, and the connecting ends of the third connecting valve are fixedly connected to the fifth chromatographic column and the sixth chromatographic column respectively.

[0008] Compared with the prior art, the beneficial effects of the present invention are: a device for detecting the impurity concentration in ultra-pure ammonia is provided with three groups of detection units, the first detection unit is used to separate hydrogen, oxygen, nitrogen, methane, and carbon monoxide impurities in the sample gas, the second detection unit is used to separate carbon dioxide compounds and carbon three compounds in the sample gas, and the third detection unit is used to separate carbon dioxide. The first detection unit, the second detection unit, and the third detection unit are connected in parallel to synchronously separate the impurities in the sample gas, and each impurity is transmitted to the detector for detection and analysis through the fourth connecting valve. Compared with the traditional detection device, the detection process is optimized, the test cycle for detecting impurities in ultra-pure ammonia can be effectively shortened, and the test efficiency is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a structural diagram of the present utility model.

[0010] Figure 2 This is an enlarged structural diagram of the second detection unit of the present utility model.

[0011] In the figure: 1, first connecting valve, 2, first chromatographic column, 3, second chromatographic column, 4, second connecting valve, 5, third chromatographic column, 6, fourth chromatographic column, 7, third connecting valve, 8, fifth chromatographic column, 9, sixth chromatographic column, 10, fourth connecting valve, 11, detector, 12, carrier gas supply end. DETAILED DESCRIPTION

[0012] The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present invention.

[0013] See also Figure 1 and Figure 2 The utility model provides a technical solution: a device for detecting the impurity concentration in ultra-pure ammonia, mainly consisting of a first detection unit, a second detection unit, a third detection unit and a detector 11. Sample gas is introduced into the first detection unit, the second detection unit and the third detection unit, and hydrogen, oxygen, nitrogen, methane, carbon monoxide, carbon dioxide compounds, carbon dioxide compounds and carbon dioxide in the sample gas are separated by the first detection unit, the second detection unit and the third detection unit respectively. The separated impurities are detected by the detector 11, thereby obtaining concentration analysis data of the impurities in the ultra-pure ammonia.

[0014] The first detection unit includes a first connecting valve 1, a first chromatographic column 2 and a second chromatographic column 3. One connecting end of the first connecting valve 1 is connected to the gas inlet end of the sample gas. The sample gas to be detected is introduced into the first connecting valve 1 through an external pipeline, and the two connecting ends in the first connecting valve 1 are connected to the first chromatographic column 2 and the second chromatographic column 3. The order of connection is that the sample gas passes through the first chromatographic column 2 and enters the second chromatographic column 3 after being processed by the first chromatographic column 2. The first chromatographic column 2 is a GDX-502 chromatographic column. When the sample gas passes through the first chromatographic column 2, the ammonia in the gas is backflushed out. The sample gas after removing the ammonia enters the second chromatographic column 3. The second chromatographic column 3 is a 5A chromatographic column. The second chromatographic column 3 is used to separate the hydrogen, oxygen, nitrogen, methane and carbon monoxide impurities in the sample gas.

[0015] The second detection unit includes a second connecting valve 4, a third chromatographic column 5 and a fourth chromatographic column 6. One connecting end of the second connecting valve 4 is connected to a connecting end of the first connecting valve 1. When the sample gas enters the first connecting valve 1, it enters the second connecting valve 4 at the same time. Similarly, the connecting ends of the second connecting valve 4 are respectively connected to the third chromatographic column 5 and the fourth chromatographic column 6. The order of connection is still that the gas first passes through the third chromatographic column 5, is processed by the third chromatographic column 5, and then enters the fourth chromatographic column 6. The third chromatographic column 5 adopts a special chromatographic column for ammonia. The ammonia in the sample gas is separated and backflushed through the third chromatographic column 5. The fourth chromatographic column 6 adopts a GDX-502 chromatographic column. The fourth chromatographic column 6 is used to separate and process the carbon dicompound and carbon tricompound in the sample gas.

[0016] The third detection unit includes a third connecting valve 7, a fifth chromatographic column 8 and a sixth chromatographic column 9. One connecting end of the third connecting valve 7 is connected to a connecting end of the second connecting valve 4 for introducing the sample gas. The connecting ends of the third connecting valve 4 are respectively connected to the fifth chromatographic column 8 and the sixth chromatographic column 9. The fifth chromatographic column 8 and the sixth chromatographic column 9 are respectively GDX-502 chromatographic columns. The fifth chromatographic column 8 is used to backflush and filter ammonia in the sample gas. The sixth chromatographic column 9 is used to filter out carbon dioxide impurities in the sample gas after the ammonia is removed. The second chromatographic column 3, the fourth chromatographic column 6 and the sixth chromatographic column 9 are respectively connected to the detector 11 through the fourth connecting valve 10. Various impurities filtered out by the second chromatographic column 3, the fourth chromatographic column 6 and the sixth chromatographic column 9 are respectively transmitted to the detector 10 for centralized detection and data analysis of the impurity concentration in the ultra-pure ammonia.

[0017] In the above-described scheme, the first connecting valve 1, the second connecting valve 4 and the third connecting valve 7 are respectively ten-way valves, which are connected in parallel to each other, and the sample gas to be detected is respectively and synchronously introduced into the three groups of detection units. Different impurities are purified and separated by the three groups of detection units, thereby improving the detection speed. The fourth connecting valve 10 is a six-way valve, which is used to integrate the purified impurities and transmit them to the detector 11 for data analysis. The detector 11, the first connecting valve 1, the second connecting valve 4 and the third connecting valve 7 are respectively connected to the carrier gas supply end 12 through connecting pipelines. The carrier gas supply end 12 is used to introduce the carrier gas He required in the detection process into each connecting valve and the detector 11;

[0018] Detector 11 utilizes an enhanced plasma detector (EPD). The plasma cell design is still based on dielectric barrier discharge. However, it now includes a unique plasma controller controlled by a single-chip microcomputer. In addition to a set of electrodes to maintain the plasma discharge, this system also features two additional electrodes: one for stabilizing and focusing the plasma, and the other for injecting electrons to improve ionization efficiency. Increasing the number of seed electrons through the electron injection electrodes improves overall ionization efficiency, or the so-called reaction rate.

[0019] A purge sleeve is embedded in the output end of the detector 11 and is used to purge and clean the internal pipelines of the device after use.

[0020] A hydrogen needle valve is fixedly connected to one connecting end of the first connecting valve 1 , the second connecting valve 4 , the third connecting valve 7 and the fourth connecting valve 10 , and a quantitative ring is fixedly connected to one connecting end of the first connecting valve 1 , the second connecting valve 4 and the third connecting valve 7 .

Claims

1. A device for detecting impurity concentration in ultrapure ammonia, characterized by: The invention comprises a first detection unit, a second detection unit and a third detection unit, wherein the first detection unit, the second detection unit and the third detection unit are connected to a fourth connecting valve (10) in a parallel connection mode, the output end of the fourth connecting valve (10) is fixedly connected to the input end of the detector (11), and the input ends of the first detection unit, the second detection unit, the third detection unit and the detector (11) are respectively connected to a carrier gas supply end (12).

2. The device for detecting impurity concentration in ultrapure ammonia according to claim 1, characterized in that: The first detection unit comprises a first connecting valve (1), and the connecting ends of the first connecting valve (1) are respectively connected to a first chromatographic column (2) and a second chromatographic column (3).

3. The device for detecting impurity concentration in ultrapure ammonia according to claim 1, characterized in that: The second detection unit comprises a second connecting valve (4), the connecting end of the second connecting valve (4) is connected to the connecting end of the first connecting valve (1), and the connecting ends of the second connecting valve (4) are respectively fixedly connected to the third chromatographic column (5) and the fourth chromatographic column (6).

4. The device for detecting impurity concentration in ultrapure ammonia according to claim 1, characterized in that: The third detection unit comprises a third connecting valve (7), the connecting end of the third connecting valve (7) is connected to the connecting end of the second connecting valve (4), and the connecting ends of the third connecting valve (7) are respectively fixedly connected to the fifth chromatographic column (8) and the sixth chromatographic column (9).

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