Miniaturized integrated three-axis MEMS optical fiber acceleration sensor

Abstract

The utility model relates to a miniaturized integrated three-axis MEMS optical fiber acceleration sensor which comprises a shell, a three-axis module fixing seat arranged in the shell, three MEMS optical fiber accelerometers arranged in a mounting cavity in the three-axis module fixing seat, a plug connected with the shell and an optical cable connected with the three MEMS optical fiber accelerometers through the plug. The axes of any two MEMS optical fiber accelerometers are perpendicular to each other. According to the miniaturized integrated three-axis MEMS optical fiber acceleration sensor provided by the invention, the volume is reduced and the integration level is improved in a mode of integrating three MEMS optical fiber accelerometers, and meanwhile, higher detection precision is obtained by using a co-location detection mode.

Description

Technical Field

[0001] The present application relates to the field of sensor technology, and in particular to a miniaturized integrated three-axis MEMS fiber optic acceleration sensor. Background Art

[0002] Currently, fiber optic accelerometers on the market generally have problems such as multi-sensor separation, complex structure, and high cost. The specific structure is to install three fiber optic accelerometers on the same base or directly adopt a deployment scheme of three fiber optic accelerometers in different directions.

[0003] This separate installation structure is large in size and is not suitable for miniaturization and integration. In terms of measurement accuracy, the measurement accuracy of multiple positions is easily affected by different positions, which can easily cause measurement data errors in the back end, leading to problems of insufficient compensation or over-compensation. Summary of the Invention

[0004] To address the problems of large size and insufficient measurement accuracy of existing fiber optic accelerometers, the present application provides a miniaturized integrated three-axis MEMS fiber optic accelerometer, which achieves size reduction and improved integration by integrating three MEMS fiber optic accelerometers, and uses a co-location detection method to obtain higher detection accuracy.

[0005] The above-mentioned purpose of this application is achieved through the following technical solutions:

[0006] The present application provides a miniaturized integrated three-axis MEMS fiber optic acceleration sensor, comprising:

[0007] shell;

[0008] The three-axis module fixing seat is arranged inside the housing;

[0009] Three MEMS fiber optic accelerometers are all installed in the mounting cavity on the three-axis module fixing base, and the axes of any two MEMS fiber optic accelerometers are perpendicular to each other;

[0010] A plug connected to the housing;

[0011] The optical cable is connected to three MEMS fiber optic accelerometers through a plug.

[0012] In a possible implementation of the present application, the housing includes a shell and a cover plate provided on the shell;

[0013] The three-axis module fixing seat is located in a closed space formed by the shell and the cover.

[0014] In a possible implementation of the present application, the shell and the cover are connected by parallel sealing packaging.

[0015] In a possible implementation of the present application, the three-axis module fixing base and the housing are connected by bonding or detachable fixed connection.

[0016] In a possible implementation of the present application, the optical fibers of the three MEMS fiber accelerometers pass through the plug and are connected to the corresponding optical fibers of the optical cable.

[0017] In a possible implementation of the present application, the plug is connected to the housing by a threaded connection.

[0018] In a possible implementation of the present application, the interior of the housing is filled with an inert gas.

[0019] In a possible implementation of the present application, two MEMS fiber optic accelerometers are located on the same plane.

[0020] The beneficial effects of this application are:

[0021] The miniaturized, integrated tri-axis MEMS fiber optic accelerometer provided in this application integrates three MEMS fiber optic accelerometers within a housing, achieving a compact size and high integration. During installation, the housing can be directly fixed to the sensor, while also providing comprehensive protection. Furthermore, by measuring the same location, the three MEMS fiber optic accelerometers can achieve a consistent measurement baseline, resulting in more accurate feedback data. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the appearance and structure of a fiber optic acceleration sensor provided in this application.

[0023] Figure 2 This is a schematic diagram of the internal structure of a fiber optic acceleration sensor provided by this application.

[0024] Figure 3 This is a schematic diagram of the appearance and structure of a MEMS fiber optic accelerometer provided in this application.

[0025] In the figure, 1. outer shell, 2. three-axis module fixing base, 3. MEMS fiber optic accelerometer, 4. plug, 5. optical cable, 11. shell, 12. cover plate. DETAILED DESCRIPTION

[0026] The technical solution in this application is further described in detail below with reference to the accompanying drawings.

[0027] This application discloses a miniaturized integrated three-axis MEMS fiber optic acceleration sensor. Figure 1 and Figure 2In some examples, the miniaturized integrated three-axis MEMS fiber optic acceleration sensor disclosed in the present application includes a housing 1, a three-axis module fixing seat 2, a MEMS fiber optic accelerometer 3, a plug 4 and an optical cable 5.

[0028] In some possible implementations, the housing 1 is composed of a shell 11 and a cover 12. The shell 11 and the cover 12 are connected by parallel welding. The three-axis module holder 2 is located within the enclosed space formed by the shell 11 and the cover 12. One of the functions of the housing 1 is to provide comprehensive protection for the three-axis module holder 2.

[0029] In some possible implementations, the interior of housing 1 is filled with an inert gas. The inert gas serves to stabilize and ensure the optical path is more reliable. This is because the inert gas filling the interior of housing 1 prevents impurities such as dust and moisture from contaminating and damaging the optical components. This not only maintains the cleanliness of the optical components but also prevents oxidation reactions on the optical component surfaces.

[0030] The three-axis module fixing seat 2 is located inside the shell 1. The connection method between the three-axis module fixing seat 2 and the shell 1 is bonding or detachable fixed connection. Bonding refers to directly using glue to fix the three-axis module fixing seat 2 inside the shell 1. Removable fixed connection refers to using bolts to fix the three-axis module fixing seat 2 inside the shell 1.

[0031] There are three mounting cavities on the three-axis module fixing base 2, and three MEMS fiber optic accelerometers 3 (shaped like Figure 3 As shown in FIG, 1 , the three MEMS fiber optic accelerometers 3 are respectively located in an independent mounting cavity, and the three MEMS fiber optic accelerometers 3 can be fixed by bonding.

[0032] The axes of the three MEMS fiber optic accelerometers 3 are perpendicular to each other.

[0033] In some possible implementations, the two MEMS fiber optic accelerometers 3 are located on the same plane.

[0034] The three MEMS fiber optic accelerometers 3 are responsible for acceleration detection in the X-axis, Y-axis, and Z-axis directions, respectively. The specific method is to use the FP cavity for detection. The principle is as follows:

[0035] The FP cavity's acceleration detection principle is primarily based on the principle of inertia. Typically, an inertial mass is connected to a reflector in the FP cavity. When an external acceleration acts on the accelerometer, the inertial mass undergoes a displacement proportional to the acceleration, which in turn changes the length of the FP cavity. This change in cavity length causes a change in the interference pattern within the FP cavity. By detecting this change, the magnitude of the acceleration can be inferred.

[0036] When acceleration causes the mass block to displace, the cavity length of the FP cavity changes. The input acceleration can be obtained by detecting the light intensity information received by the upper and lower photodetectors and performing differential decomposition.

[0037] The reasons why different measurement positions may cause errors are as follows:

[0038] Changes in measurement conditions: Measurement conditions (such as light, temperature, humidity, electromagnetic interference, etc.) may vary in different locations. Changes in these conditions will affect the accuracy of the measurement results.

[0039] Characteristics of the object being measured: The shape, size, material, surface roughness and other characteristics of the object being measured may vary at different locations. These differences in characteristics may also lead to measurement errors.

[0040] Interference in the measurement environment: Various interference factors (such as vibration, noise, and electromagnetic radiation) that may exist in the measurement environment can also affect the accuracy of the measurement results. These interference factors may vary in different locations and may therefore lead to measurement errors.

[0041] It can be seen from the above description that when detecting a position, different detection data may be obtained.

[0042] In addition, simultaneous measurement by three MEMS fiber optic accelerometers 3 also has the following advantages:

[0043] Three-axis simultaneous measurement can measure in the X, Y, and Z directions simultaneously, effectively improving measurement flexibility. Whether it is a simple geometric shape or a complex surface structure, three-axis measurement can fully cover it without the need to frequently change the measurement direction or adjust the measurement equipment.

[0044] Compared with single-axis or dual-axis measurement, three-axis simultaneous measurement can obtain data in more dimensions at one time, reducing the number of measurements and data processing time, thereby improving overall measurement efficiency.

[0045] High precision: The FP cavity is very sensitive to small changes in cavity length, thus enabling high-precision acceleration detection.

[0046] Strong anti-interference ability: Optical accelerometers usually have good anti-electromagnetic interference ability and are suitable for complex environments.

[0047] High integration: With the development of micro-nano technology, the FP cavity can be integrated with other optical components to form a highly integrated optical accelerometer.

[0048] The plug 4 is connected to the housing 1 by bonding or threaded connection.

[0049] The optical cable 5 is connected to the three MEMS fiber optic accelerometers 3 through the plug 4. Specifically, the optical cable 5 and the plug 4 are glued together, and the three optical fibers in the optical cable 5 are connected to the three MEMS fiber optic accelerometers 3 respectively. Alternatively, the optical fibers of the three MEMS fiber optic accelerometers 3 pass through the plug 4 and then connect to the corresponding optical fibers in the optical cable 5.

[0050] The embodiments of this specific implementation method are all preferred embodiments of the present application and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A miniaturized integrated three-axis MEMS fiber optic acceleration sensor, characterized in that: include: Housing (1); A three-axis module fixing seat (2) is provided inside the housing (1); Three MEMS fiber optic accelerometers (3) are all arranged in a mounting cavity on a three-axis module fixing seat (2), and the axes of any two MEMS fiber optic accelerometers (3) are perpendicular to each other; A plug (4) connected to the housing (1); The optical cable (5) is connected to the three MEMS optical fiber accelerometers (3) through the plug (4).

2. The miniaturized integrated three-axis MEMS fiber optic acceleration sensor according to claim 1, characterized in that: The housing (1) comprises a shell (11) and a cover plate (12) provided on the shell (11); The three-axis module fixing seat (2) is located in a closed space formed by the housing (11) and the cover plate (12).

3. The miniaturized integrated three-axis MEMS fiber optic acceleration sensor according to claim 1, characterized in that: The shell (11) and the cover plate (12) are connected in a parallel sealing and packaging manner.

4. The miniaturized integrated three-axis MEMS fiber optic acceleration sensor according to claim 1, characterized in that: The three-axis module fixing seat (2) and the housing (1) are connected by bonding or detachable fixed connection.

5. The miniaturized integrated three-axis MEMS fiber optic acceleration sensor according to claim 1, characterized in that: The optical fibers of the three MEMS optical fiber accelerometers (3) pass through the plug (4) and are connected to the corresponding optical fibers of the optical cable (5).

6. The miniaturized integrated three-axis MEMS fiber optic acceleration sensor according to claim 1, characterized in that: The plug (4) is connected to the housing (1) by threaded connection.

7. The miniaturized integrated three-axis MEMS fiber optic acceleration sensor according to claim 1 or 2, characterized in that: The interior of the housing (1) is filled with inert gas.

8. The miniaturized integrated three-axis MEMS fiber optic acceleration sensor according to claim 1, characterized in that: Two MEMS fiber optic accelerometers (3) are located on the same plane.

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