Rolling structure for nanoimprint device

Abstract

The utility model discloses a rolling structure for a nanoimprint device, the rolling structure is arranged on a workbench of the nanoimprint device, the rolling structure comprises a support, the top of the support is connected with a first transverse plate, the first transverse plate is provided with a first lifting assembly, and the first lifting assembly is provided with a second lifting assembly. A second transverse plate which can be controlled by the first lifting assembly to ascend and descend is assembled on the first lifting assembly, an air cylinder is arranged on the second transverse plate, the output end of the air cylinder is fixedly connected with a third transverse plate, second sliding rails are arranged on the portions, located on the two sides of the air cylinder, of the second transverse plate, and second sliding blocks which can slide on the second sliding rails are arranged on the second sliding rails. The back face of the third transverse plate is fixedly connected with the second sliding block, roller seats are arranged on the two sides of the third transverse plate, and rollers are arranged on the roller seats. The utility model has the beneficial effects that in the technical scheme, the lead screw (202) is driven to rotate by the driving motor (203), so that the roller moves upwards slowly, the roller can be lifted slowly, the imprint template leaves the surface of the wafer slowly, and the imprint template and patterns on the surface of the wafer are prevented from being damaged.

Description

Technical Field

[0001] The utility model relates to the technical field of nanoimprinting, in particular to a roller pressing structure for a nanoimprinting device. Background Art

[0002] In essence, imprinting is a printing and copying technology, which is a technology for mass-copying templates. Imprinting technology processing technology can be divided into nanoimprinting technology and molding technology according to the size of the graphics. The nanoimprinting technology originally proposed is hot imprinting nanoimprinting technology and room temperature nanoimprinting technology; the existing technology is a nanoimprinting roller device including a workbench, a rolling mechanism is provided on the top of the workbench, and the rolling mechanism includes a bracket, a first horizontal plate is connected to the top of the bracket, a hydraulic rod is fixedly provided on one side of the first horizontal plate, and the output end of the hydraulic rod is fixedly connected to the second horizontal plate, a stroke groove is provided on the side wall of the first horizontal plate, a displacement block is movably connected in the stroke groove, a connecting rod is fixedly connected to the side wall of the displacement block, and the side wall of the connecting rod is fixedly connected to the second horizontal plate, and limit blocks are provided on the corresponding two side walls of the second horizontal plate, and the same two limit blocks are connected to the roller wheel for common rotation. In the above structure, hydraulic lifting is adopted. When the imprinting is completed, the lifting speed is too fast and uncontrollable, which may cause damage to the imprint template and the wafer. Therefore, it is necessary to develop a roller pressing structure for the nanoimprinting device. After searching, no technical solution identical to the present invention was found. Utility Model Content

[0003] The main technical problem solved by the present invention is to provide a roller pressing structure for a nanoimprinting device, so as to solve one or more of the above-mentioned problems in the prior art.

[0004] In order to solve the above technical problems, a technical solution adopted by the utility model is: a roller pressing structure for a nanoimprinting device, the roller pressing structure is arranged on the workbench of the nanoimprinting device, and its innovation lies in: the roller pressing structure includes a bracket, the top of the bracket is connected to a first horizontal plate, the first horizontal plate is provided with a first lifting assembly, the first lifting assembly is equipped with a second horizontal plate that can be controlled to rise and fall by the first lifting assembly, the second horizontal plate is provided with a cylinder, the output end of the cylinder is fixedly connected to a third horizontal plate, second slide rails are provided on both sides of the second horizontal plate, the second slide rails are provided with a second slider that can slide on the second slide rails, the back of the third horizontal plate is fixedly connected to the second slider, roller seats are provided on both sides of the third horizontal plate, and roller wheels are provided on the roller seats.

[0005] In some embodiments, the first lifting assembly includes a base, a freely rotatable screw rod is mounted on the base, a drive motor is provided on the top of the base, the output end of the drive motor is connected to the screw rod, a wire sleeve that can slide on the screw rod is sleeved on the screw rod, and the second cross plate is fixedly installed on the wire sleeve. The first lifting assembly also includes a guide assembly, the guide assembly includes guide plates arranged on both sides of the screw rod, a first guide rail is provided on the guide plate, a first slider is provided on the first guide rail, and the second cross plate is also fixedly connected to the first slider.

[0006] In some embodiments, a reducer is further provided between the output end of the drive motor and the lead screw.

[0007] In some embodiments, a supplementary spacer is provided between the output end of the cylinder and the third transverse plate.

[0008] In some embodiments, the roller surface is made of flexible resin or rubber.

[0009] The beneficial effect of the present invention is as follows: in this technical solution, the original one-stage lifting structure is changed into a two-stage lifting combination, and the cylinder is used to provide downward pressure to the roller, so that the roller and the surface of the wafer have a certain adhesion force, and the pressure of the imprint template can be successfully completed. After the imprint is completed, the lead screw is driven by the drive motor to rotate, so that the roller slowly moves upward. Since the speed of the lead screw is controllable, the roller can be slowly lifted, and then the imprint template slowly leaves the wafer surface, avoiding damage to the imprint template and damage to the pattern on the wafer surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work. Among them:

[0011] Figure 1 It is a structural schematic diagram of a roller pressing structure for a nanoimprinting device of the present invention.

[0012] Figure 2 This is a schematic diagram of the structure of the first lifting component of a roller pressing structure for a nanoimprinting device of the utility model. DETAILED DESCRIPTION

[0013] The following is a clear and complete description of the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0014] like Figure 1 As shown, the embodiment of the utility model includes: a roller pressing structure for a nanoimprinting device, the roller pressing structure is arranged on the workbench of the nanoimprinting device, the roller pressing structure includes a bracket 100, the top of the bracket 100 is connected to a first horizontal plate 101, and the first horizontal plate 101 is provided with a first lifting assembly 200, as shown in FIG. Figure 2 As shown, the first lifting component 200 includes a base 201, which is equipped with a freely rotatable screw rod 202, a driving motor 203 is provided on the top of the base 201, and the output end of the driving motor 203 is connected to the screw rod 202, and the screw rod 202 is provided with a wire sleeve 204 that can slide on the screw rod 202, and the second cross plate 300 is fixedly installed on the wire sleeve 204. The first lifting component 200 also includes a guide assembly, which includes guide plates 205 arranged on both sides of the screw rod 202, a first guide rail 206 is provided on the guide plate 205, and a first slider 207 is provided on the first guide rail 206. The second cross plate 300 is also fixedly connected to the first slider 207. The first lifting component 200 is equipped with a second cross plate 300 that can be controlled to rise and fall by the first lifting component 200, and a cylinder 301 is provided on the second cross plate 300. The output of the cylinder 301 The output end is fixedly connected to a third horizontal plate 302, and second slide rails 305 are provided on both sides of the second horizontal plate 300 at the cylinder 301, and a second slider 306 that can slide on the second slide rail 305 is provided on the second slide rail 305, and the back side of the third horizontal plate 302 is fixedly connected to the second slider 306, and roller seats 303 are provided on both sides of the third horizontal plate 302, and rollers 304 are provided on the roller seats 303. The working principle of the above structure is that when the rolling structure is bonded to the wafer, the cylinder 301 can control the third horizontal plate 302 to press down so that the roller has appropriate pressure on the surface of the wafer. At this time, the bonding of the imprint template and the wafer is completed. After the bonding is completed, the lead screw 202 is driven to rotate by the driving motor 203, so that the second horizontal plate 300 and the third horizontal plate 302 are slightly upward as a whole, so that the imprint template is slowly separated from the wafer surface, and the rolling structure is quickly lifted after it is completely separated.

[0015] A reducer is further provided between the output end of the drive motor 203 and the screw rod 202 . The reducer in this technical solution can make the rotation speed of the screw rod 202 more controllable.

[0016] A supplementary pad 307 is further provided between the output end of the cylinder 301 and the third transverse plate 302. The supplementary pad 307 can expand the contact area between the output shaft of the cylinder 301 and the third transverse plate 302, making the cooperation between the two more stable and reliable.

[0017] The surface material of the roller 304 is flexible resin or rubber. This technical solution can avoid uneven pressure on the imprint template at this position, so that the entire imprint template is more evenly pressurized.

[0018] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A roller pressing structure for a nanoimprinting device, the roller pressing structure being arranged on a workbench of the nanoimprinting device, characterized in that: The rolling structure comprises a bracket (100), the top of the bracket (100) is connected to a first transverse plate (101), a first lifting assembly (200) is provided on the first transverse plate (101), a second transverse plate (300) which can be controlled to rise and fall by the first lifting assembly (200) is assembled on the first lifting assembly (200), a cylinder (301) is provided on the second transverse plate (300), an output end of the cylinder (301) is fixedly connected to a third transverse plate (302), second slide rails (305) are provided on both sides of the cylinder (301) on the second transverse plate (300), a second slider (306) which can slide on the second slide rails (305) is provided on the second slide rails (305), the back side of the third transverse plate (302) is fixedly connected to the second slider (306), roller seats (303) are provided on both sides of the third transverse plate (302), and roller wheels (304) are provided on the roller seats (303).

2. The roller pressing structure for a nanoimprinting device according to claim 1, characterized in that: The first lifting assembly (200) includes a base (201), a freely rotatable screw rod (202) is mounted on the base (201), a driving motor (203) is provided on the top of the base (201), the output end of the driving motor (203) is connected to the screw rod (202), the screw rod (202) is covered with a wire sleeve (204) that can slide on the screw rod (202), the second transverse plate (300) is fixedly mounted on the wire sleeve (204), the first lifting assembly (200) also includes a guide assembly, the guide assembly includes guide plates (205) arranged on both sides of the screw rod (202), a first guide rail (206) is provided on the guide plate (205), a first slider (207) is provided on the first guide rail (206), and the second transverse plate (300) is also fixedly connected to the first slider (207).

3. The roller pressing structure for a nanoimprinting device according to claim 2, wherein: A speed reducer is further provided between the output end of the driving motor (203) and the screw rod (202).

4. The roller pressing structure for a nanoimprinting device according to claim 1, wherein: A supplementary pad (307) is further provided between the output end of the cylinder (301) and the third transverse plate (302).

5. The roller pressing structure for a nanoimprinting device according to claim 1, wherein: The surface material of the roller (304) is flexible resin or rubber.

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