Sliding table device for magnetic suspension module and magnetic suspension module comprising sliding table device

Abstract

The utility model relates to a magnetic suspension module and a sliding table device (20) thereof. The magnetic levitation module further comprises a base arrangement (10) comprising a coil (15) and a guide rail (14) extending in a first direction. The slipway device (20) comprises: a mounting assembly (40) comprising: a platform (42); and a sliding member (44) for slidably engaging with the guide rail (14) in the first direction; and a magnet assembly (55) comprising: a magnet (55) configured for being positioned spaced apart in a second direction (T) relative to the coil (15) so as to be able to couple with the coil; and a connection member (60) secured together with the magnet, the connection member being connected to the platform of the mounting assembly and being adjustable in the second direction relative to the platform, the second direction being perpendicular to the first direction.

Description

Technical Field

[0001] The present application relates to the field of magnetic levitation technology, and more particularly to a slide device for a magnetic levitation module and a magnetic levitation module including the slide device. In this field, a magnetic levitation module is also referred to as a linear motor module. Background Art

[0002] At present, magnetic levitation-related technologies, which include coils and magnets and utilize the magnetic field generated when the coils are energized to drive the magnets and components connected to the magnets to move, have been widely used in various technical fields. For example, the magnetic levitation modules (or modules) used in the fields of precision equipment (3C), semiconductors, lithium batteries, photovoltaics, etc. mainly include a fixed base device and a movable slide device. In this structure, the base device and the slide device respectively provide the above-mentioned coils and magnets. When energized, the coils of the base device generate a magnetic field, and the magnets of the slide device are attracted by the magnetic field, causing the entire slide device to move relative to the base device, thereby achieving the purpose of moving the moving part of the slide device installed relative to the stationary part of the base device installed in the application equipment using the magnetic levitation module.

[0003] In this type of magnetic levitation module, the size of the distance between the coil and the magnet (also known as the "gap" or "air gap") directly affects the performance of the magnetic levitation module, and thus affects the above-mentioned movement. However, since the coil and the magnet are located on the base device and the slide device, respectively, this distance is usually formed by assembling both the base device and the slide device (specifically, the guide rails and sliding components that are slidably engaged). Therefore, the size of the final distance is substantially affected by various factors, such as the accuracy or error of the assembly operation, the manufacturing accuracy or processing error of the parts involved in the assembly and other related parts, and the experience and proficiency of the technicians performing the assembly and manufacturing or processing operations. The superposition of multiple errors results in poor controllability of this distance, making it difficult to obtain a precise distance size corresponding to the desired magnetic levitation performance, and even more difficult to provide adjustability and reproducibility of the distance size. Utility Model Content

[0004] The purpose of the utility model is to provide an improved slide device, which provides adjustability of the distance between the magnet of the slide device and the coil of the base device of the magnetic suspension module through the adjustability between the internal components of the slide device.

[0005] The present application provides a slide device for a magnetic levitation module, the magnetic levitation module also including a base device, the base device including a coil and a guide rail extending in a first direction, the slide device including: a mounting assembly, which includes: a platform; and a sliding component connected to the platform and configured to slidably engage with the guide rail in the first direction; and a magnet assembly, which includes: a magnet configured to be positioned spaced apart in a second direction relative to the coil so as to be able to couple with the coil; and a connecting component connected to the magnet, wherein the connecting component is adjustably connected to the platform of the mounting assembly so as to be adjustable relative to the platform in the second direction, the second direction being perpendicular to the first direction.

[0006] In one embodiment, the connecting member includes a base portion connected to the magnet and an end portion extending from the base portion, the end portion being adjustably connected to the platform.

[0007] In one embodiment, the magnet and the base portion are connected together by one or more of a fastener connection, a clip connection, a riveted connection, and a form-fit connection. In one embodiment, the base portion and the end portion are integrally formed; or the base portion and the end portion are separate components connected together by one or more of the following: a fastener connection, a clip connection, a riveted connection, a welding connection, and a form-fit connection.

[0008] In one embodiment, the connection member includes two end portions extending from opposite ends of the base portion in the first direction, and the two end portions are connected to opposite ends of the platform in the first direction.

[0009] In one embodiment, the opposite ends of the platform in the first direction comprise recesses for receiving and connecting corresponding end portions, respectively.

[0010] In one embodiment, the end portion includes a through hole penetrating in the first direction, and the through hole is a long hole elongated in the second direction.

[0011] The slide device further includes a fastener extending through the through hole into a threaded hole formed on the platform to connect the end portion to the platform.

[0012] In one embodiment, the magnet of the magnet assembly is a single piece and has at least one of the following features: a T-shaped cross-section perpendicular to the first direction; and a corner portion extending beyond the platform in the first direction. In one embodiment, the magnet of the magnet assembly includes a plurality of magnetic blocks and a frame supporting the plurality of magnetic blocks, and has at least one of the following features: each magnetic block is in a hexahedral form; each magnetic block is arranged side by side with each magnetic block parallel or inclined relative to a plane defined by the first and second directions; and the frame is a hexahedral frame made of stainless steel.

[0013] In one embodiment, the guide rail of the base device includes a pair of rail shoulders extending along the first direction and spaced apart in a third direction perpendicular to the first and second directions. Accordingly, the sliding component includes a pair of sliding components respectively slidably engaged with a corresponding one of the rail shoulders.

[0014] In one embodiment, the sliding component is a single piece, or comprises a plurality of sliding blocks arranged at intervals.

[0015] The present application also provides a magnetic levitation module, comprising: the above-mentioned slide device for the magnetic levitation module; and the base device, wherein the sliding component of the slide device is slidably engaged with the guide rail of the base device, and, in the second direction, the magnet is separated from the coil by a distance.

[0016] The slide device including a magnet of the present application and the base device including a coil together constitute a magnetic levitation module, and the slide device and the base device respectively include a sliding part and a guide rail that are slidably engaged with each other to achieve assembly and sliding engagement of the slide device to the base device. The slide device is constructed into two parts that are adjustably connected to each other - a magnet assembly including a magnet and a connecting part connected together, and a mounting assembly including a platform and a sliding part connected together, wherein the connecting part of the magnet assembly is adjustably connected to the platform of the mounting assembly, so that the magnet of the magnet assembly including the connecting part is adjustable relative to the mounting assembly (and thus relative to the coil of the base device connected to the mounting assembly) in the spacing direction of the spacing between the magnet and the coil. In this way, the size of the spacing between the coil and the magnet no longer depends on the assembly of the slide device (specifically its sliding component) to the base device (specifically its guide rail), nor does it depend on the processing and manufacturing accuracy of any parts. Instead, the spacing can be adjusted by splitting (or loosening) the connection between the connecting component of the magnet assembly and the platform of the mounting assembly, adjusting or moving the connecting component relative to the platform in the above-mentioned spacing direction, and then reconnecting (or locking) the connecting component of the magnet assembly and the platform of the mounting assembly, thereby achieving the adjustability, controllability and reproducibility of the spacing. The slide device of the present application can achieve and easily achieve the precise spacing size corresponding to the desired magnetic levitation performance while simplifying the steps and difficulty associated with the above-mentioned assembly and component manufacturing and saving the related costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and other features and advantages of the present application will be fully disclosed in the detailed description given below with reference to the accompanying drawings. It should be noted that the accompanying drawings only show some exemplary embodiments, not all embodiments. The accompanying drawings are only used to help understand the details of the improvements of the present application and are not intended to show all the details of the magnetic levitation module. Therefore, the details shown in the accompanying drawings do not necessarily exist in all embodiments, and features not shown in the accompanying drawings may exist in certain embodiments. In addition, the present application is only intended to fully describe and disclose the content, details or features related to the improved aspects of the present application. Therefore, details or structures illustrated in the drawings but not mentioned or described in detail in this description do not mean that they should be interpreted or identified as prior art.

[0018] Figure 1 It is an assembly stereogram of a magnetic levitation module including a base device and a slide device.

[0019] Figure 2 yes Figure 1 side view.

[0020] Figure 3 It is a three-dimensional diagram of the slide device.

[0021] Figure 4is a schematic diagram of the magnet assembly of the slide device.

[0022] Figure 5 This is a partial exploded view of the magnetic levitation module.

[0023] Figure 6 This is a partially exploded view of the magnetic levitation module from another angle. DETAILED DESCRIPTION

[0024] The slide device for a magnetic levitation module (or module) and the magnetic levitation module including the slide device described herein may be applicable to any variety of possible fields, including, but not limited to, precision electronics (3C) devices such as mobile phones and computers, semiconductors, lithium batteries, photovoltaics, etc. A "magnetic levitation module" is also referred to as a "linear motor module."

[0025] Generally speaking, the magnetic levitation module including the slide device of the present application also includes a base device. The base device includes a coil and a guide rail, and correspondingly, the slide device includes a magnet configured to couple with the coil and a sliding component configured to engage with the guide rail. When the coil is energized, it causes the entire slide device including the magnet to move relative to the base device including the coil, specifically to slide along the extension direction of the guide rail of the base device. When the magnetic levitation module is applied to any application device within the technical field such as the one mentioned above, the slide device and the base device are respectively installed or connected to the moving part and the stationary part of the application device, so that the moving part of the application device connected to the slide device moves relative to the stationary part of the application device connected to the base device. The basic principle of the new slide device of the present application is to set the magnet inside the slide device to be adjustably relative to the sliding component inside the slide device (and therefore relative to the base device assembled with the sliding component, more specifically relative to its coil), so that the distance (or called "air gap") between the magnet of the slide device and the coil of the base device is adjustable, easy to adjust, and adjusted in a manner independent of the assembly of the slide device and the base device, so as to obtain the desired magnetic levitation performance of the magnetic levitation module.

[0026] The details of the magnetic levitation module of the present application are described in detail below with reference to the accompanying drawings.

[0027] Figure 1 Schematic diagram of the assembly of a magnetic levitation module including a stationary base device 10 and a slide device 20 slidable relative to the base device 10; Figure 2 for Figure 1 Side view of Figure 3 is a perspective view of the slide device 20; Figure 4 is a schematic diagram of a magnet assembly 50 of the slide device 20; Figure 5 and 6 This is a partial exploded view of the magnetic levitation module viewed from different angles.

[0028] The base device 10 may include a base 12, a guide rail 14 extending in a longitudinal direction L, and a coil 15 attached to the base 12. The extending direction of the guide rail 14, i.e., the longitudinal direction L, is the sliding direction of the slide device 20 relative to the base device 10.

[0029] In the illustrated exemplary, but non-limiting, embodiment, the guide rail 14 may be a pair of rail shoulders 14a integrally formed with the base 12. The pair of rail shoulders 14a extend in the longitudinal direction L and are arranged side by side and spaced apart by a predetermined interval in a transverse direction A perpendicular or orthogonal to the longitudinal direction L. The coil 15 of the base assembly 10 is disposed between the pair of rail shoulders 14 in the transverse direction A and may include a plurality of coils 15 arranged in the longitudinal direction L. Various details of the base assembly 10 (specifically, its base 12, guide rail 14 or rail shoulders 14a, and coil 15) are not essential to the present application and will not be described in detail herein. The illustrations of the base assembly 10 in the drawings are merely exemplary and non-exclusive, and do not limit the details of the base assembly 10. For example, the guide rail 14 and base 12 may be separate components, or the entire base assembly 10 may be an integrally formed component having the illustrated cross-sectional profile.

[0030] As described above, the slide device 20 of the present application may include a mounting assembly 40 for assembling or fitting the entire slide device 20 to the base device 10 to achieve a mechanical connection between the two, and a magnet assembly 50 for achieving a magnetic coupling between the slide device 20 and the base device 10. The magnet assembly 50 is adjustably connected to the mounting assembly 40.

[0031] In the illustrated exemplary, but non-limiting, embodiment, the mounting assembly 40 may include a platform 42 and a sliding member 44 that slidably engages the guide rail 14 of the base assembly 10. In the illustration, the sliding members 44 are a pair of sliding members 44 that are slidably engaged with a pair of rail shoulders 14a, respectively (and are thus spaced apart in the transverse direction A). The mounting assembly 40 may also include a pair of side panels 46 located outboard of the pair of sliding members 44 in the transverse direction A. The pair of side panels 46 and the pair of sliding members 44 are each secured or fastened to the platform 42 in a manner known in the art, including, but not limited to, bolting, welding, riveting, form-fitting connections, and the like. Alternatively, the mounting assembly 40 may be formed as a single, integral component.

[0032] As described above, base 12 of base assembly 10 and platform 42 (of mounting assembly 40) of slide assembly 20 are components for interfacing the magnetic levitation module of the present application with the stationary and moving components of an application device utilizing the magnetic levitation module, respectively. As an example, the accompanying drawings schematically illustrate various mounting holes on platform 42 for implementing these interfacing functions. The arrangement of these mounting holes is merely illustrative and not restrictive.

[0033] The platform 42 may have a flat plate structure as shown, or may have any other structural form according to the interface requirements of the application equipment. A pair of sliding members 44 respectively define a slide groove 45 ( Figure 3 and 5 ), the present application does not limit the details of the outer profile of the rail shoulder 14a and the corresponding inner profile of the slide 45 (for example, the shape and size of the cross section perpendicular to the longitudinal direction L). Each sliding member 44 can be in the form of a single component and have the same extension length in the longitudinal direction L as the platform 42; or alternatively, as Figure 6 As can be seen in FIG. 4 , each sliding member 44 may include a plurality of sliders (or sliding segments) 44 a. The side plates 46 may be simple plate-like portions, or any other suitable structures.

[0034] The magnet assembly 50 of the slide device 20 of the present application includes a magnet 55 for coupling with the coil 15 and a connecting component 60 connected to the magnet 55. The connecting component 60 is adjustably connected to (the platform 42 of) the mounting assembly 40. On the one hand, this "adjustable connection" connects the entire magnet assembly 50 including the magnet 55 and the connecting part 60 to the mounting assembly 40, so that the slide device 20 including the magnet assembly 50 and the mounting assembly 40 slides as a whole relative to the base device 10; on the other hand, the connecting part 60 is configured to be adjustably connected to the platform 42 in the spacing direction T of the spacing between the coil 15 and the magnet 55 (i.e., the direction in which the coil 15 and the magnet 55 are spaced apart, illustrated as a third or spacing direction perpendicular to the longitudinal direction L and the transverse direction A), so that: in the spacing direction T, the magnet 55 connected to the connecting part 60 is adjustable relative to the platform 42 of the mounting assembly 40, relative to the base device 10 engaged with the mounting assembly 40, and relative to the coil 15 of the base device 10, thereby achieving adjustable spacing between the magnet 55 and the coil 15.

[0035] In the non-limiting embodiment shown, the magnet 55 may be in the form of a single piece having a generally T-shaped shape viewed along the longitudinal direction L, with a (e.g., flat) base 52 and a protrusion 54 extending from the base 52 toward the coil 15 of the base device 10. Along the spacing direction T, the surface 51 ( Figure 5 ) can have non-rectangular irregular shapes. Figure 3 and 4 As can be clearly seen in FIG, the irregular shape of the surface 51 is manifested in that one corner 53 thereof extends in the longitudinal direction L beyond the substantially regular rectangular platform 42 .

[0036] However, it should be understood that the figure only shows one possible configuration of the magnet 55. Any other magnet configuration based on the magnetic levitation performance requirements is possible. For example, in some possible embodiments, the magnet 55 may include a plurality of single magnetic blocks and a frame (such as a stainless steel frame) that supports these single magnetic blocks together to form a magnet as a whole. The single magnetic block can have any possible structure, such as a hexahedron, and the arrangement or stacking of multiple single magnetic blocks can be designed as needed. As an example, each single magnetic block can be parallel or inclined relative to the plane defined by the spacing direction T and the longitudinal direction L, and the single magnetic blocks are juxtaposed in the transverse direction A. The arrangement of each single magnetic block can be changed to obtain an ideal or desired sliding speed or speed change of the slide device relative to the base device.

[0037] As an example, the connection between the magnet 55 and the connecting component 60 is achieved by a fastener (not shown in the figure). Figure 4-6 Schematically shows a plurality of magnet holes 57 on the magnet 55 used for the fastener connection and a corresponding number and arrangement of a plurality of connection holes 67 on the connection component 60. The present application does not limit the number and arrangement of the fasteners.

[0038] In the illustrated exemplary embodiment, the connecting member 60 includes a base portion 62 providing the above-mentioned connecting hole 67 and end portions 64 extending from opposite ends of the base portion 62 in the longitudinal direction L, wherein the end portions 64 are adjustably connected to the platform 42 of the mounting assembly 40.

[0039] The base portion 62 and the end portion 64 can be a generally U-shaped, integral structure. Alternatively, as in the illustrated embodiment, each end portion 64 and the base portion 62 can be separate components connected together by fasteners 65, such as bolts. The drawings illustrate fasteners 65, which extend through end holes 71 of the end portion 64 in the spacing direction T and corresponding threaded holes 73 extending into the base portion 62. The fasteners 65 extend through the end holes 71 and into the corresponding holes 73 to connect the end portion 64 to the base portion 62. Of course, the connection between the base portion 62 and the end portion 64 is not limited to fasteners; any mechanical connection method may be used.

[0040] In the illustrated example, the platform 42 is formed with notches 48 at opposite ends in the longitudinal direction L. The dimensions of the notches 48 are designed to receive corresponding end portions 64. Preferably, the end portions 64 do not protrude from the platform 42 in the longitudinal direction L. However, the present application is not limited to this structure, and the platform 42 may not include the notches 48.

[0041] In the illustrated example, the connection between each end portion 64 of the connecting component 60 and the platform 42 of the mounting assembly 40 is also achieved by fasteners. Each end portion 64 is formed with a through hole 77 extending in the longitudinal direction L. Correspondingly, the platform 42 is formed with a threaded hole 79 extending from the recess 48 into the platform 42 in the longitudinal direction L. Each fastener 75 extends through the through hole 77 on the end portion 64 into the corresponding threaded hole 79 of the platform 42, thereby achieving the connection and fixation of the end portion 64 (the entire connecting component 60, or the entire magnet assembly 50 including the connecting component 60 and the magnet 55) to the platform 42 (or to the mounting assembly 40).

[0042] As is clear from the accompanying drawings, each through-hole 77 is formed as an elongated hole that is elongated in the spacing direction T, that is, the dimension of each through-hole 77 in the spacing direction T is greater than the dimension in the transverse direction A. This allows (by loosening the fasteners 75) the connecting member 60 (and thus the entire magnet assembly 50) to be movable in the spacing direction T relative to the platform 42, and thus relative to the mounting assembly 40, and relative to the base device 10 (the coil 15) that is slidably engaged with the mounting assembly 40, ultimately achieving adjustment of the spacing between the magnet 55 and the coil 15. This improves the convenience and ease of adjusting this spacing and achieves stepless adjustment of the spacing, making it easier to obtain or achieve a desired or ideal spacing size, thereby achieving optimal magnetic levitation performance.

[0043] Particularly advantageously, this adjustment can be performed after the entire slide device 20 has been installed or assembled to the base device 10. In other words, the adjustment of this spacing is independent of the assembly or fitting of the slide device 20 to the base device 10 and is not affected by any installation errors. Of course, the adjustment of this spacing is also independent of the machining accuracy / error of any parts directly or indirectly related to this assembly. Therefore, the structure of the present application reduces or eliminates the costs associated with the above-mentioned assembly and manufacturing. The structure of the present application can achieve stepless adjustment of this spacing simply by loosening the fastener 75, performing the above-mentioned adjustment, and then re-locking the fastener 75. The adjustment of the spacing is very simple and easy to implement.

[0044] Although the figures show that each end portion 64 is connected to the platform 42 by three fasteners 75, the present application is not limited to the number and arrangement of the fasteners 75. In fact, the end portion 64 of the connecting member 60 can be connected to the platform 42 by any other mechanical connection method other than fastener connection, as long as it can be adjusted in the spacing direction T relative to the platform 42.

[0045] Furthermore, the connecting member 60 is not limited to the U-shaped structure shown in the figure, as long as it can be adjustably connected to the platform 42 in the spacing direction T. For example, the base portion 62 of the connecting member 60 does not have to be a flat plate as shown, and can be any form of frame structure.

[0046] The slide device 20 of the present application and the magnetic levitation module including the slide device 20 are described in detail above with reference to the accompanying drawings. The slide device of the present application includes an adjustmentally connected mounting assembly and a magnet assembly, wherein the mounting assembly includes a sliding component and a platform connected together, the magnet assembly includes a magnet and a mounting component connected together, and the mounting component of the magnet assembly is adjustably connected to the platform of the mounting assembly. The advantage of this structure is that the spacing between the magnet of the magnet assembly of the slide device and the coil of the base device is achieved by adjusting the connecting component (of the magnet assembly) and the platform (of the mounting assembly) inside the slide device, and no longer depends on the installation or assembly between the slide device and the base device, and no longer depends on the manufacturing and processing of any parts. The flexibility, steplessness and convenience of the adjustment operation of this spacing make it easy to achieve the desired / ideal spacing size corresponding to the desired / ideal magnetic levitation performance.

[0047] Unless otherwise specified, the terms "connect," "fasten," "fix," "attach," etc., used in the above description, have the same meaning and are understood to mean mechanically fastening two components together so that movement of one component causes synchronous movement of the other component. In this application, the method for achieving this "connection" is illustrated as a bolt connection, but those skilled in the art will understand that any mechanical connection method known in the art may be used alone or in combination to achieve "connection."

[0048] The above description is made with reference to the specific embodiments shown in the accompanying drawings and some possible variations. However, without departing from the basic principle of the present application of constructing a slide device to be adjustably connected to two parts (including a platform and a mounting assembly for mounting to a guide rail of a base device; and a magnet assembly including a magnet and adjustably connected to the mounting assembly), those skilled in the art may make various modifications to any details shown in the drawings and described above, and these modifications are within the scope of protection of the present application.

Claims

1. A slide device (20) for a magnetic levitation module, the magnetic levitation module further comprising a base device (10), the base device (10) comprising a coil (15) and a guide rail (14) extending in a first direction (L), characterized in that: The slide device (20) comprises: A mounting assembly (40) comprising: a platform (42); and a sliding member (44) coupled to the platform (42) and configured to slidably engage the guide rail (14) in the first direction; and A magnet assembly (50) comprising: a magnet (55) configured to be positioned spaced apart in a second direction (T) relative to the coil (15) so as to be coupled to the coil (15); and a connecting member (60) connected to the magnet (55), wherein the connecting member (60) is adjustably connected to the platform (42) of the mounting assembly (40) so as to be adjustable relative to the platform (42) in the second direction, the second direction being perpendicular to the first direction.

2. The slide device (20) for a magnetic levitation module according to claim 1, characterized in that: The connecting member (60) includes a base portion (62) connected to the magnet (55) and an end portion (64) extending from the base portion (62), wherein the end portion (64) is adjustably connected to the platform (42).

3. The slide device (20) for a magnetic levitation module according to claim 2, characterized in that: The magnet (55) and the base portion (62) are connected together by one or more of fastener connection, snap connection, riveting, and form-fit connection; and / or The base portion (62) and the end portion (64) are integrally formed; or the base portion (62) and the end portion (64) are separate components connected together by one or more of the following: fastener connection, snap connection, riveting, welding, and form-fit connection.

4. The slide device (20) for a magnetic levitation module according to claim 2, characterized in that: The connecting member (60) includes two end portions (64) extending from opposite ends of a base portion (62) in a first direction, and the two end portions (64) are connected to opposite ends of the platform (42) in the first direction.

5. The slide device (20) for a magnetic levitation module according to claim 4, characterized in that: The opposite ends of the platform (42) in the first direction include recesses (48) for receiving and connecting corresponding end portions (64), respectively.

6. The slide device (20) for a magnetic levitation module according to any one of claims 2 to 5, characterized in that: The end portion (64) includes a through hole (77) extending in the first direction, and the through hole (77) is a long hole extending in the second direction. The slide device (20) further includes a fastener (75) extending through the through hole (77) into a threaded hole (79) formed on the platform (42) to connect the end portion (64) to the platform (42).

7. The slide device (20) for a magnetic levitation module according to claim 6, characterized in that: The magnet (55) of the magnet assembly (50) is a single piece and has at least one of the following features: a T-shaped cross section perpendicular to the first direction (L); a corner (53) extending beyond the platform (42) in the first direction (L); or The magnet (55) of the magnet assembly (50) includes a plurality of magnetic blocks and a frame supporting the plurality of magnetic blocks, and has at least one of the following features: each magnetic block is in a hexahedral form; each magnetic block is arranged side by side in a posture in which each magnetic block is parallel to or inclined with respect to a plane defined by a first direction (L) and a second direction (T); The frame is a hexahedral frame made of stainless steel.

8. The slide device (20) for a magnetic levitation module according to claim 7, characterized in that: The guide rail (14) of the base device (10) includes a pair of track shoulders (14a) extending respectively in a first direction (L) and spaced apart in a third direction (A) perpendicular to the first direction (L) and the second direction (T). Accordingly, the sliding component (44) includes a pair of sliding components respectively slidably engaged with a corresponding one of the track shoulders (14a).

9. The slide device (20) for a magnetic levitation module according to claim 8, characterized in that: The sliding member (44) is a single piece, or includes a plurality of sliding blocks (44a) arranged at intervals.

10. A magnetic levitation module, characterized in that: include: A slide device (20) for a magnetic levitation module according to any one of claims 1 to 9; and The base device (10), The sliding component (44) of the slide device (20) is slidably engaged with the guide rail (14) of the base device (10), and in the second direction, the magnet (55) is spaced apart from the coil (15) by a distance.

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