Hydrofluoric acid or hydrochloric acid purification device

Abstract

The utility model discloses a hydrofluoric acid or hydrochloric acid purification device, and belongs to the technical field of acid purification. The hydrofluoric acid or hydrochloric acid purification device comprises a support and further comprises a heating tank arranged on the support, a water inlet pipe and a water outlet pipe are fixedly arranged on the heating tank, an evaporation tank is fixedly arranged in the heating tank, and a liquid inlet pipe and a steam pipe are fixedly arranged on the evaporation tank; the collecting bottle is arranged on the support, the end, away from the evaporating tank, of the steam pipe is communicated with the collecting bottle, and a condensing pipe is fixedly arranged in the collecting bottle; the evaporation tank is arranged in the heating tank, the temperature of an acid solution in the evaporation tank is kept to be lower than the boiling point temperature of the acid solution to be evaporated according to the heat radiation principle, then acid steam is condensed in the collecting bottle, and therefore purification is carried out, the structure is simple, the conversion efficiency is high, cost can be saved, follow-up experiments can be conveniently carried out, and the using effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of acid purification, in particular to a hydrofluoric acid or hydrochloric acid purification device. Background Art

[0002] The application of hydrofluoric acid in the semiconductor industry is primarily reflected in its function as a cleaning and etching agent. Specifically, electronic-grade hydrofluoric acid plays a vital role in the semiconductor manufacturing process, primarily used for wafer surface cleaning, cleaning, and etching during chip processing. Electronic-grade hydrofluoric acid is categorized into EL, UP, UPS, and UPSS grades depending on its intended use, with UPSS being the most advanced. This chemical reagent is widely used in semiconductor manufacturing, accounting for approximately 47.3% of total hydrofluoric acid consumption, demonstrating its importance in the semiconductor industry.

[0003] Furthermore, electronic-grade hydrofluoric acid is extremely corrosive, capable of strongly corroding metals, glass, and silicon-containing objects. It is a weak acid, but exhibits strong acidity at high concentrations. This chemical property makes it highly effective in removing oxides, particularly in applications such as semiconductor trace content testing, which require extremely high-purity hydrofluoric acid. Even commercially available high-purity products require re-distillation to achieve the desired purity and meet testing requirements.

[0004] The application of hydrofluoric acid in the semiconductor industry is not limited to its basic function as a cleaning and etching agent, but also due to its high purity and high efficiency, which makes it play an indispensable role in multiple links of semiconductor manufacturing.

[0005] However, high-purity hydrofluoric acid requires precise repeated evaporation. Existing devices have many problems, low efficiency, and still cannot meet the requirements of trace-level testing and applications.

[0006] Therefore, in order to provide efficient semiconductor trace-level testing, our company has independently designed a more convenient, more efficient and better purified device that can be used not only for hydrofluoric acid, but also for highly purified hydrochloric acid. Utility Model Content

[0007] The utility model aims to solve the problems of complex structure, high price and limited purification rate of acid purification equipment in the prior art, and proposes a hydrofluoric acid or hydrochloric acid purification device.

[0008] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0009] A hydrofluoric acid or hydrochloric acid purification device comprises a bracket, further comprising: a heating tank arranged on the bracket, a water inlet pipe and a water outlet pipe fixedly provided on the heating tank, an evaporation tank fixedly provided in the heating tank, a liquid inlet pipe and a steam pipe fixedly provided on the evaporation tank; a collecting bottle arranged on the bracket, an end of the steam pipe away from the evaporation tank being connected to the collecting bottle, and a condenser fixedly provided in the collecting bottle.

[0010] In order to facilitate the addition of acidic stock solution into the evaporation tank, preferably, a liquid adding tank is provided on the bracket, the end of the liquid inlet pipe away from the evaporation tank is connected to the bottom of the liquid adding tank, and a valve is fixedly provided on the liquid inlet pipe.

[0011] In order to facilitate cleaning of the evaporation tank, preferably, the top of the evaporation tank is fixedly connected to the top of the heating tank, and the top of the evaporation tank is provided with a detachable top cover.

[0012] In order to facilitate the assembly and disassembly of the top cover, a threaded barrel is fixedly provided on the bottom of the top cover, and the threaded barrel is threadedly connected to the inner wall of the evaporation tank.

[0013] Furthermore, a sealing groove is provided on the top of the evaporation tank, a sealing gasket is fixedly provided in the sealing groove, and the top of the sealing gasket abuts against the bottom of the top cover.

[0014] Preferably, a stirring shaft is rotatably provided in the evaporation tank, a stirring blade is fixedly provided on the stirring shaft, and a driving part for driving the stirring shaft to rotate is provided in the heating tank.

[0015] Furthermore, the driving part includes a rotating seat fixedly arranged on the water inlet pipe, a rotating chamber connected to the water inlet pipe is defined in the rotating seat, and a vortex blade is fixedly arranged on one end of the stirring shaft extending into the rotating chamber.

[0016] Preferably, the heating tank, evaporating tank, liquid adding tank and collecting bottle are all made of polytetrafluoroethylene.

[0017] Compared with the prior art, the present invention provides a hydrofluoric acid or hydrochloric acid purification device, which has the following beneficial effects:

[0018] 1. This hydrofluoric acid or hydrochloric acid purification device places an evaporation tank in a heating tank and utilizes the principle of thermal radiation to keep the temperature of the acid solution in the evaporation tank below its boiling point to evaporate, and then condenses the acid vapor in a collecting bottle to purify it. It has a simple structure and high conversion efficiency, which can save costs, facilitate subsequent experiments, and improve the use effect.

[0019] 2. The hydrofluoric acid or hydrochloric acid purification device has a stirring shaft that rotates in the evaporation tank and a stirring blade fixed on the stirring shaft, which can stir and heat the solution in the evaporation tank, thereby preventing local overheating of the liquid and ensuring uniform temperature during the distillation process, thereby improving the purification effect and safety.

[0020] The parts not mentioned in the device are the same as those in the prior art or can be implemented by using the prior art. The utility model arranges the evaporation tank in the heating tank and utilizes the principle of heat radiation to keep the temperature of the acid solution in the evaporation tank below its boiling point to evaporate, and then condenses the acid vapor in the collection bottle to purify it. The utility model has a simple structure and high conversion efficiency, can save costs, facilitate subsequent experiments, and improve the use effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic structural diagram of a hydrofluoric acid or hydrochloric acid purification device proposed in the present invention;

[0022] Figure 2 This is a cross-sectional view of a hydrofluoric acid or hydrochloric acid purification device proposed by the utility model;

[0023] Figure 3 This utility model proposes a hydrofluoric acid or hydrochloric acid purification device Figure 2 Enlarged view of part A;

[0024] Figure 4 The present invention provides a schematic structural diagram of a stirring shaft for a hydrofluoric acid or hydrochloric acid purification device.

[0025] In the figure: 1. bracket; 2. heating tank; 3. evaporation tank; 4. liquid adding tank; 5. collecting bottle; 6. condenser; 7. water inlet pipe; 8. stirring shaft; 801. stirring blade; 802. vortex blade; 9. liquid inlet pipe; 10. water outlet pipe; 11. steam pipe; 12. top cover; 13. sealing gasket; 14. threaded cylinder. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0027] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0028] Example:

[0029] Reference Figures 1-4 , a hydrofluoric acid or hydrochloric acid purification device, comprising a bracket 1, a first support plate, a second support plate and a third support plate are fixedly arranged on the bracket 1, the first support plate, the second support plate and the third support plate are arranged in order from high to low, a liquid adding tank 4 is placed on the top of the first support plate, a heating tank 2 is placed on the top of the second support plate, and a collecting bottle 5 is placed on the top of the third support plate. The liquid adding tank 4 is placed at a high place, and the acidic solution inside it can enter the evaporation tank 3 through the liquid inlet pipe 9 under the action of gravity, thereby improving the use effect and reducing the use of a driving source. It also includes: a heating tank 2 arranged on the bracket 1, a water inlet pipe 7 and a water outlet pipe 10 are fixedly arranged on the heating tank 2. When in use, the evaporation tank 3 placed in the heating tank 2 can be heated by transporting hot water into the heating tank 2 through the water inlet pipe 7, and the hot water in the heating tank 2 will flow out from the water outlet pipe 10, thereby realizing circulating heating. In addition, a water pump is connected to the water inlet pipe 7 to facilitate the extraction of hot water and transport it to the water inlet pipe 7, thereby improving the use effect and heating. The tank 2 utilizes the principle of heat radiation to maintain the temperature of the acidic solution in the evaporation tank 3 below its boiling point, thereby evaporating the acidic solution, and then condensing the acidic vapor to purify the acidic solution. The evaporation tank 3 is fixedly arranged in the heating tank 2, and a liquid inlet pipe 9 and a steam pipe 11 are fixedly arranged on the evaporation tank 3. When in use, the acidic solution is added to the evaporation tank 3 through the liquid inlet pipe 9. Under the heating action of the heating tank 2, the acidic solution generates steam in the evaporation tank 3. The steam then enters the collection bottle 5 through the steam pipe 11. The steam entering the collection bottle 5 is condensed to obtain a purified acidic liquid. A waste pipe with a valve is fixedly arranged on the evaporation tank 3, which can facilitate the recovery of the residual solution in the evaporation tank 3 after use. The collection bottle 5 is arranged on the bracket 1, and the end of the steam pipe 11 away from the evaporation tank 3 is connected to the collection bottle 5. A condenser pipe 6 is fixedly arranged in the collection bottle 5, and a liquid discharge pipe with a valve is fixedly arranged on the collection bottle 5 to facilitate the removal of the liquid accumulated in the collection bottle 5, thereby improving the use effect.

[0030] During use, by arranging the evaporation tank 3 in the heating tank 2, the principle of heat radiation is utilized to maintain the temperature of the acidic solution in the evaporation tank 3 below its boiling point so as to evaporate, and then the acid vapor is condensed in the collecting bottle 5, thereby performing purification. The structure is simple and the conversion efficiency is high, which can save costs, facilitate subsequent experiments, and improve the use effect. By rotatably providing a stirring shaft 8 in the evaporation tank 3 and fixing a stirring blade 801 on the stirring shaft 8, the solution in the evaporation tank 3 can be stirred and heated, thereby preventing local overheating of the liquid and ensuring uniform temperature during the distillation process, thereby improving the purification effect and safety.

[0031] Reference Figure 1 and Figure 2 A liquid adding tank 4 is provided on the bracket 1, and an end of a liquid inlet pipe 9 away from the evaporation tank 3 is connected to the bottom of the liquid adding tank 4, and a valve is fixedly provided on the liquid inlet pipe 9. When in use, by controlling the valve on the liquid inlet pipe 9, the acid solution can be conveniently added to the evaporation tank 3, reducing the danger of manual addition and improving safety in use.

[0032] Reference Figure 2 and Figure 3 The top of the evaporation tank 3 is fixedly connected to the top of the heating tank 2, and a detachable top cover 12 is provided on the top of the evaporation tank 3. When in use, the top cover 12 is provided on the top of the evaporation tank 3, so that the inner wall of the evaporation tank 3 can be easily cleaned before and after use, thereby further improving the purification effect.

[0033] Reference Figure 3 The top cover 12 can be fixed to the evaporation tank 3 by screws or buckles. Here, a threaded barrel 14 is fixedly provided at the bottom of the top cover 12, and the threaded barrel 14 is threadedly connected to the inner wall of the evaporation tank 3. When in use, the threaded barrel 14 can be removed from the evaporation tank 3 or tightened by rotating the top cover 12. The assembly and disassembly is convenient, the fixation is reliable, the evaporation tank 3 is convenient for cleaning, and the use effect is improved.

[0034] Reference Figure 3 A sealing groove is provided on the top of the evaporation tank 3, and a sealing gasket 13 is fixedly arranged in the sealing groove, and the top end surface of the sealing gasket 13 is abutted against the bottom end surface of the top cover 12. When in use, by fixing the sealing gasket 13 on the top of the evaporation tank 3 and abutting the bottom end surface of the top cover 12 against the sealing gasket 13, the sealing effect between the top cover 12 and the evaporation tank 3 can be improved, steam leakage can be reduced, and the use effect can be improved.

[0035] Reference Figure 2 and Figure 4A stirring shaft 8 is rotatably provided in the evaporation tank 3, and a stirring blade 801 is fixedly provided on the stirring shaft 8. In addition, a driving unit for driving the stirring shaft 8 to rotate is provided in the heating tank 2. When in use, by driving the stirring shaft 8 to rotate, the stirring shaft 8 can drive the stirring blade 801 to stir in the evaporation tank 3, so that the solution in the evaporation tank 3 is evenly heated, the possibility of local overheating is reduced, and the use effect is improved.

[0036] Reference Figure 4 The driving part can use a motor or manually drive the stirring shaft 8 to rotate. Here, we design the driving part as follows: a rotating seat is fixedly provided on the water inlet pipe 7, and a rotating chamber connected to the water inlet pipe 7 is opened in the rotating seat. Vortex blades 802 are fixedly provided on one end of the stirring shaft 8 extending into the rotating chamber. The vortex blades 802 are provided with two to ten groups, preferably six groups. When in use, when hot water is introduced into the heating tank 2 through the water inlet pipe 7, the water flows through the vortex blades 802, which can drive the stirring shaft 8 and the stirring blades 801 to rotate, thereby stirring the solution in the evaporation tank 3 and improving the use effect.

[0037] Reference Figure 1 and Figure 2 The materials of the heating tank 2, evaporating tank 3, liquid adding tank 4 and collecting bottle 5 are all polytetrafluoroethylene. Polytetrafluoroethylene not only has excellent chemical inertness, non-stickiness and electrical insulation properties, but also has excellent chemical inertness and can resist the corrosion of most chemicals, including strong acids and strong alkalis, and it is light in weight and highly plastic. Here, we go a step further and select the material of the heating tank 2 and evaporating tank 3 as a material related to polytetrafluoroethylene, called fusible fluoroplastic, which has excellent chemical stability and heat resistance similar to polytetrafluoroethylene, and it has a certain transparent effect. During use, it is convenient to observe the internal conditions of the heating tank 2 and evaporating tank 3, thereby improving the use effect.

[0038] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the present invention can make equivalent replacements or changes based on the technical solution and utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A hydrofluoric acid or hydrochloric acid purification device, comprising a bracket (1), characterized in that: Also includes: A heating tank (2) is arranged on the bracket (1), a water inlet pipe (7) and a water outlet pipe (10) are fixedly arranged on the heating tank (2), an evaporation tank (3) is fixedly arranged inside the heating tank (2), and a liquid inlet pipe (9) and a steam pipe (11) are fixedly arranged on the evaporation tank (3); A collecting bottle (5) is arranged on the bracket (1), one end of the steam pipe (11) away from the evaporation tank (3) is connected to the collecting bottle (5), and a condenser (6) is fixedly arranged in the collecting bottle (5).

2. A hydrofluoric acid or hydrochloric acid purification device according to claim 1, characterized in that, A liquid adding tank (4) is provided on the bracket (1), one end of the liquid inlet pipe (9) away from the evaporation tank (3) is connected to the bottom of the liquid adding tank (4), and a valve is fixedly provided on the liquid inlet pipe (9).

3. A hydrofluoric acid or hydrochloric acid purification device according to claim 1, characterized in that: The top of the evaporation tank (3) is fixedly connected to the inner top of the heating tank (2), and a top cover (12) is provided on the top of the evaporation tank (3) for removal.

4. A hydrofluoric acid or hydrochloric acid purification device according to claim 3, characterized in that: A threaded barrel (14) is fixedly provided at the bottom of the top cover (12), and the threaded barrel (14) is threadedly connected to the inner wall of the evaporation tank (3).

5. A hydrofluoric acid or hydrochloric acid purification device according to claim 4, characterized in that: A sealing groove is provided on the top of the evaporation tank (3), a sealing gasket (13) is fixedly arranged in the sealing groove, and the top of the sealing gasket (13) abuts against the bottom of the top cover (12).

6. A hydrofluoric acid or hydrochloric acid purification device according to claim 1, characterized in that: A stirring shaft (8) is rotatably provided in the evaporation tank (3), a stirring blade (801) is fixedly provided on the stirring shaft (8), and a driving unit for driving the stirring shaft (8) to rotate is provided in the heating tank (2).

7. A hydrofluoric acid or hydrochloric acid purification device according to claim 6, characterized in that: The driving part comprises a rotating seat fixedly arranged on the water inlet pipe (7), a rotating chamber connected to the water inlet pipe (7) is provided in the rotating seat, and a vortex blade (802) is fixedly arranged on one end of the stirring shaft (8) extending into the rotating chamber.

8. A hydrofluoric acid or hydrochloric acid purification device according to claim 1, characterized in that: The heating tank (2), evaporating tank (3), liquid adding tank (4) and collecting bottle (5) are all made of polytetrafluoroethylene.

Images