Superhard film coating mechanism

By designing the flattening mechanism and limiting device of the ultra-hard film coating mechanism, the film coating problem caused by uneven surface of the substrate is solved, and the flatness of the substrate and the coating accuracy are improved, to meet the coating needs of different substrates.

CN223249706UActive Publication Date: 2025-08-22HAIKEN NEW ENERGY MATERIALS (ZHEJIANG) CO LTD
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Patent Information

Application Number
CN202421976052.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-15
Publication Date
2025-08-22
Estimated Expiration
2034-08-15

AI Technical Summary

Technical Problem

When the superhard film is coated on the substrate surface, the substrate is prone to be raised during the conveying process, resulting in uneven surfaces, affecting the uniformity of the film coating, and lacking effective pre-smoothing measures.

Method used

An ultra-hard film coating mechanism is designed, including a flattening mechanism and a limiting device. The pre-smoothing of the substrate is achieved through the mating rotation of the upper and lower pressure rollers, and the stability and accuracy of the substrate during the conveying process are ensured by the arrangement of the limiting disc and the rotating rollers. At the same time, the height of the coating head is adjustable to adapt to different substrates.

Benefits of technology

The flatness of the substrate surface is achieved, the uniformity and accuracy of film coating are improved, and the adjustment of coating height is facilitated.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of superhard films, and discloses a superhard film coating mechanism which comprises a coating workbench, and a top frame is fixed at the top end of the coating workbench. When the superhard film coating mechanism is used through the coating mechanism, a coiled material base material on a discharging coil is guided into the top frame through the interior of a groove formed in the left side of the top frame, penetrates through the position between an upper pressing roller and a lower pressing roller in the mounting frame and reaches the bottom end of a coating head for film coating machining, and meanwhile in the film coating machining process, the coiled material base material on the discharging coil is subjected to film coating machining through the upper pressing roller and the lower pressing roller. The speed reduction motor can be controlled to start to drive the lower pressing roller to rotate clockwise, the meshed driving gear can be used for driving the upper pressing roller to rotate anticlockwise while the lower pressing roller rotates, auxiliary flattening and smoothing can be conducted on the upper position and the lower position of a base material before film coating through the upper pressing roller and the lower pressing roller, and the flatness of the base material is kept; the surface of a base material can be uniformly coated with a super-hard film, and the problem that auxiliary smoothing is inconvenient to carry out when the base material film is coated is solved.
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Description

Technical Field

[0001] The utility model relates to the technical field of superhard films, in particular to a superhard film coating mechanism. Background Art

[0002] Superhard material film refers to a film formed on the surface of a substrate by preparing superhard materials through chemical vapor deposition technology. Its hardness far exceeds that of traditional hard materials, and it can maintain its physical and chemical properties under extreme conditions. It is widely used. When coating the substrate with superhard film, a superhard film coating mechanism is required.

[0003] When using an ultra-hard thin film coating mechanism to coat the surface of a substrate with an ultra-hard thin film, when the substrate is transported to the coating mechanism for loading, the surface of the substrate will be uneven when the surface is warped, resulting in uneven coating of the film on the surface of the substrate, thereby affecting the coating quality. There is no pre-smoothing measure before coating the substrate film.

[0004] Now, a new type of superhard thin film coating mechanism is proposed to solve the above-mentioned shortcomings. Utility Model Content

[0005] The purpose of the utility model is to provide a superhard thin film coating mechanism to solve the problem inconvenient to perform auxiliary pre-smoothing when coating a substrate thin film, as mentioned in the background art.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solution: a superhard thin film coating mechanism, comprising a coating workbench, a top frame fixed to the top of the coating workbench, a mounting seat provided inside the top frame, and a flattening mechanism provided on the left side of the top of the coating workbench for assisting in smoothing the substrate before coating;

[0007] The flattening mechanism includes a mounting frame, an upper pressing roller, a driving gear, a lower pressing roller and a reduction motor. The mounting frame is fixed to the left side of the top end of the coating workbench, and the top end inside the mounting frame is movably connected to the upper pressing roller, and the bottom end inside the mounting frame is movably connected to the lower pressing roller. The rear ends of the upper and lower pressing rollers respectively pass through the interior of the rear end of the mounting frame and are fixed with driving gears. The reduction motor is fixed to the front end of the mounting frame.

[0008] Furthermore, the driving gears are meshed with each other, and the output shaft of the reduction motor is fixedly connected to the front end of the lower pressure roller.

[0009] Preferably, mounting frames are respectively installed and fixed on both sides of the top of the coating workbench, and the interior of the mounting frames is movably connected to a roller, and limit plates are symmetrically provided at both ends of the outside of the roller, and a sliding sleeve is fixed to the front end of the limit plate, and threaded holes are respectively opened inside the top and bottom ends of the sliding sleeve, and a rotating rod is rotatably connected inside the threaded hole, and inner grooves are respectively opened inside the top and bottom ends of the roller.

[0010] Furthermore, the roller passes through the interior of the sliding sleeve and the limiting plate respectively, and the limiting plate and the sliding sleeve are slidably connected to the exterior of the roller respectively.

[0011] Furthermore, the threaded holes respectively pass through the interior of the top end and the bottom end of the sliding sleeve, and the rotating rod passes through the interior of the threaded holes.

[0012] Preferably, an inner frame is fixedly installed on the top end of the top frame, and a screw hole is opened inside the bottom end of the inner frame. A driving rod is rotatably connected inside the screw hole. The bottom end of the driving rod passes through the inside of the screw hole and is movably connected to the top end of the mounting seat. Guide rods are fixed on both sides of the top end of the mounting seat.

[0013] Furthermore, the top end of the guide rod passes through the interior of the bottom end of the inner frame.

[0014] Preferably, a liquid dispensing seat is fixed to the bottom end of the mounting seat, and multiple groups of coating heads are fixed at equal intervals at the bottom end of the liquid dispensing seat, a support is fixed to the left side of the coating workbench, and support plates are fixed at both ends of the top of the support, a material unwinding roll is arranged between the support plates, slots are respectively provided inside the bottom ends of both sides of the top frame, and conveying rollers are movably connected inside the slots, a liquid storage tank is fixed to the top end of the top frame, a liquid suction pump is provided on the left side of the top end of the top frame, and a liquid suction pipe is fixed to the input end of the liquid suction pump, the right side of the liquid suction pipe passes through the interior of the left side of the liquid storage tank, the output end of the liquid suction pump is fixed with a liquid outlet pipe, and the bottom end of the top frame passes through the interior of the top end of the top frame and is fixed with a connecting hose, and the right side of the connecting hose is fixedly connected to the left side of the liquid dispensing seat.

[0015] Compared with the prior art, the beneficial effects of the present invention are: the superhard thin film coating mechanism not only facilitates the auxiliary pre-smoothing of the substrate thin film coating, facilitates the guidance and positioning of the substrate when the coating film is transported, but also facilitates the adjustment of the coating height of the coating assembly inside the mechanism;

[0016] (1) By providing a mounting frame, an upper pressure roller, a driving gear, a lower pressure roller and a reduction motor, when the coating mechanism is in use, the coiled material substrate on the unwinding roll is introduced into the interior of the top frame through the interior of the slot on the left side of the top frame and passes between the upper pressure roller and the lower pressure roller inside the mounting frame, and reaches the bottom end of the coating head for coating processing. At the same time, during the coating process, the reduction motor can be controlled to start and drive the lower pressure roller to rotate clockwise. While the lower pressure roller rotates, the meshed driving gear can be used to drive the upper pressure roller to rotate counterclockwise. By providing the upper and lower pressure rollers, auxiliary pre-flattening and smoothing can be performed on the upper and lower positions of the substrate before coating, so as to maintain the flatness of the substrate and facilitate uniform coating of the superhard film on the surface of the substrate;

[0017] (2) By providing a coating workbench, a limiting plate, a mounting frame, a rotating rod, a threaded hole, a sliding sleeve, an inner groove and a rotating roller, when the substrate is transported to the internal coating process of the top frame, after the substrate is introduced onto the rotating roller, limiting plates are respectively provided on both sides of the outer side of the rotating roller. The symmetrically arranged limiting plates can assist in guiding and limiting the two ends of the substrate during transportation, so that the substrate can be kept in the middle position during transportation, thereby reducing the deviation of the coating and improving the accuracy of the substrate coating;

[0018] (3) By setting up an inner frame, a mounting seat, a driving rod, a guide rod and a screw hole, when the substrate is introduced to the top of the coating workbench for coating processing, the film liquid is extracted and transported to the liquid separation seat by controlling the liquid extraction pump to start, and then multiple groups of coating heads at the bottom of the liquid separation seat are coated on the surface of the transported substrate. When the coating head is used, the driving rod can be rotated inside the inner frame. While the driving rod rotates the thread inside the screw hole, it can drive the mounting seat to move up and down, which is convenient for quickly adjusting the coating height of the coating component. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the front cross-sectional structure of the present utility model;

[0020] Figure 2 For this utility model Figure 1 A in the figure shows the enlarged structural diagram;

[0021] Figure 3 This is a schematic diagram of an enlarged partial cross-section of the side view of the outer support frame of the present invention;

[0022] Figure 4 It is a schematic diagram of an enlarged partial cross-section of the side view of the mounting base of the present invention.

[0023] In the figure: 1. Coating workbench; 2. Support; 3. Support plate; 4. Unwinding reel; 5. Conveying roller; 6. Top frame; 7. Mounting frame; 8. Connecting hose; 9. Liquid outlet pipe; 10. Liquid extraction pump; 11. Liquid storage tank; 12. Liquid extraction pipe; 13. Inner frame; 14. Mounting seat; 15. Liquid dispensing seat; 16. Coating head; 17. Limiting plate; 18. Slotting; 19. Mounting frame; 20. Upper pressure roller; 21. Driving gear; 22. Lower pressure roller; 23. Rotating rod; 24. Threaded hole; 25. Sliding sleeve; 26. Inner groove; 27. Driving rod; 28. Guide rod; 29. ​​Screw hole; 30. Reducer motor; 31. Rotating roller. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0025] Example 1: Please refer to Figure 1-4 A superhard thin film coating mechanism includes a coating workbench 1, a top frame 6 is fixed to the top of the coating workbench 1, and a mounting seat 14 is provided inside the top frame 6. A flattening mechanism for assisting in smoothing the substrate before coating is provided on the left side of the top of the coating workbench 1;

[0026] The flattening mechanism includes a mounting frame 7, an upper pressing roller 20, a driving gear 21, a driving gear 21, a lower pressing roller 22 and a reduction motor 30. The mounting frame 7 is fixed to the left side of the top of the coating workbench 1, and the top of the mounting frame 7 is movably connected to the upper pressing roller 20, and the bottom of the mounting frame 7 is movably connected to the lower pressing roller 22. The rear ends of the upper pressing roller 20 and the lower pressing roller 22 respectively pass through the interior of the rear end of the mounting frame 7 and are fixed with the driving gear 21. The front end of the mounting frame 7 is fixed with the reduction motor 30;

[0027] The driving gears 21 are meshed and connected, and the output shaft of the reduction motor 30 is fixedly connected to the front end of the lower pressure roller 22;

[0028] Specifically, if Figure 1 and Figure 2As shown, the coiled substrate on the unwinding roll 4 is introduced into the interior of the top frame 6 through the interior of the slot 18 on the left side of the top frame 6 and passes between the upper pressure roller 20 and the lower pressure roller 22 inside the mounting frame 7 to reach the bottom end of the coating head 16 for coating processing. At the same time, during the coating process, the reduction motor 30 can be controlled to start and drive the lower pressure roller 22 to rotate clockwise. While the lower pressure roller 22 rotates, the meshed drive gear 21 can be used to drive the upper pressure roller 20 to rotate counterclockwise. By setting the upper pressure roller 20 and the lower pressure roller 22, the upper and lower positions of the substrate can be assisted flattened and smoothed before coating to maintain the flatness of the substrate.

[0029] Embodiment 2: Mounting frames 19 are respectively fixed on both sides of the top of the coating workbench 1, and a roller 31 is movably connected inside the mounting frame 19. Limiting plates 17 are symmetrically provided at both ends of the outside of the roller 31, and a sleeve 25 is fixed to the front end of the limiting plate 17. Threaded holes 24 are respectively provided inside the top and bottom ends of the sleeve 25. A rotating rod 23 is rotatably connected inside the threaded hole 24. Inner grooves 26 are respectively provided inside the top and bottom ends of the roller 31. The roller 31 passes through the inside of the sleeve 25 and the limiting plate 17 respectively. The limiting plate 17 and the sleeve 25 are slidably connected to the outside of the roller 31 respectively. The threaded holes 24 pass through the inside of the top and bottom ends of the sleeve 25 respectively, and the rotating rod 23 passes through the inside of the threaded hole 24.

[0030] Specifically, if Figure 1 and Figure 3 As shown, when the substrate is transported to the internal coating processing of the top frame 6, after the substrate is introduced onto the roller 31, limit plates 17 are respectively set on both sides of the outside of the roller 31. The symmetrically arranged limit plates 17 can assist in guiding and limiting the two ends of the substrate during transportation, so that the substrate can be kept in the middle position during transportation, reducing the deviation of the coating and improving the accuracy of the substrate coating. When the limit plates 17 and the sleeve 25 are used for limiting, the rotating rod 23 set can be loosened outward at the top and bottom ends of the sleeve 25 respectively. After unlocking the sleeve 25 and the limit plate 17 on the outside of the roller 31, the sleeve 25 and the limit plate 17 can be slid back and forth on the outside of the roller 31 to adjust the limiting width between the limit plates 17 for adjustment of substrates of different widths.

[0031] Example 3: The inner frame 13 is fixedly mounted on the top of the top frame 6, and a screw hole 29 is opened inside the bottom end of the inner frame 13. The driving rod 27 is rotatably connected inside the screw hole 29. The bottom end of the driving rod 27 passes through the inside of the screw hole 29 and is movably connected to the top end of the mounting seat 14. Guide rods 28 are fixed on both sides of the top end of the mounting seat 14. The top end of the guide rod 28 passes through the inside of the bottom end of the inner frame 13.

[0032] Specifically, if Figure 1 and Figure 4As shown, when the coating head 16 is used for coating, the driving rod 27 can be rotated inside the inner frame 13. While the driving rod 27 rotates the internal thread of the screw hole 29, it can drive the mounting seat 14 to move up and down, thereby quickly adjusting the coating height of the coating assembly.

[0033] A liquid separator 15 is fixed to the bottom end of the mounting seat 14, and a plurality of coating heads 16 are fixed to the bottom end of the liquid separator 15 at equal intervals. A support 2 is fixed to the left side of the coating workbench 1, and support plates 3 are fixed at both ends of the top of the support 2, and a material unwinding roll 4 is arranged between the support plates 3. Slots 18 are respectively provided inside the bottom ends of both sides of the top frame 6, and the interior of the slots 18 is movably connected with a conveying roller 5. A liquid storage tank 11 is fixed to the top of the top frame 6, a liquid pump 10 is provided on the left side of the top end of the top frame 6, and a liquid suction pipe 12 is fixed to the input end of the liquid suction pump 10, and the right side of the liquid suction pipe 12 passes through the interior of the left side of the liquid storage tank 11, and a liquid outlet pipe 9 is fixed to the output end of the liquid suction pump 10, and the bottom end of the top frame 6 passes through the interior of the top end of the top frame 6 and is fixed with a connecting hose 8, and the right side of the connecting hose 8 is fixedly connected to the left side of the liquid separator 15.

[0034] Working principle: When the super-hard film coating mechanism of the present invention is used, the coiled material substrate on the unwinding roll 4 is introduced into the interior of the top frame 6 through the interior of the slot 18 on the left side of the top frame 6 and passes between the upper pressure roller 20 and the lower pressure roller 22 inside the mounting frame 7 to reach the bottom end of the coating head 16 for coating processing. At the same time, during the coating process, the reduction motor 30 can be controlled to start and drive the lower pressure roller 22 to rotate clockwise. When the lower pressure roller 22 rotates, the meshed driving gear 21 can be used to drive the upper pressure roller 20 to rotate counterclockwise. By setting the upper pressure roller 20 and the lower pressure roller 22, the upper and lower positions of the substrate can be assisted in flattening and smoothing before coating to maintain the flatness of the substrate. At the same time, after the substrate is transported and introduced onto the rotating roller 31, it is divided into Limiting plates 17 are provided on both sides of the outside of the rotating roller 31. The symmetrically arranged limiting plates 17 can assist in guiding and limiting the two ends of the substrate during transportation, so that the substrate can be kept in the middle position during transportation, thereby improving the accuracy of the substrate coating. During the coating process, the film liquid is extracted and transported to the liquid separation seat 15 by controlling the liquid pump 10 to start, and then the multiple groups of coating heads 16 at the bottom of the liquid separation seat 15 are coated on the surface of the transported substrate. When the coating is used, the coating head 16 can be used to rotate the driving rod 27 inside the inner frame 13. While the driving rod 27 rotates the internal thread of the screw hole 29, it can drive the mounting seat 14 to move up and down, and the coating height of the coating component can be quickly adjusted.

[0035] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be encompassed within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A superhard thin film coating mechanism, comprising a coating workbench (1), characterized in that: A top frame (6) is fixed to the top of the coating workbench (1), and a mounting seat (14) is provided inside the top frame (6). A flattening mechanism for assisting in smoothing the substrate before coating is provided on the left side of the top of the coating workbench (1); The flattening mechanism comprises a mounting frame (7), an upper pressing roller (20), a driving gear (21), a lower pressing roller (22) and a reduction motor (30); the mounting frame (7) is fixed to the left side of the top of the coating workbench (1); the top of the mounting frame (7) is movably connected to the upper pressing roller (20); the bottom of the mounting frame (7) is movably connected to the lower pressing roller (22); the rear ends of the upper pressing roller (20) and the lower pressing roller (22) respectively pass through the interior of the rear end of the mounting frame (7) and are fixed with the driving gear (21); the front end of the mounting frame (7) is fixedly mounted with the reduction motor (30).

2. The superhard thin film coating mechanism according to claim 1, characterized in that: The two groups of driving gears (21) are meshed and connected, and the output shaft of the reduction motor (30) is fixedly connected to the front end of the lower pressure roller (22).

3. The superhard thin film coating mechanism according to claim 1, characterized in that: Mounting frames (19) are fixedly mounted on both sides of the top of the coating workbench (1), and a roller (31) is movably connected inside the mounting frame (19). Limiting plates (17) are symmetrically arranged at both ends of the outside of the roller (31), and a sliding sleeve (25) is fixed at the front end of the limiting plate (17). Threaded holes (24) are respectively provided inside the top and bottom ends of the sliding sleeve (25), and a rotating rod (23) is rotatably connected inside the threaded hole (24). Inner grooves (26) are respectively provided inside the top and bottom ends of the roller (31).

4. The superhard thin film coating mechanism according to claim 3, characterized in that: The rotating roller (31) passes through the interior of the sliding sleeve (25) and the limiting plate (17) respectively, and the limiting plate (17) and the sliding sleeve (25) are respectively slidably connected to the exterior of the rotating roller (31).

5. The superhard thin film coating mechanism according to claim 3, characterized in that: The threaded holes (24) respectively penetrate the interior of the top end and the bottom end of the sliding sleeve (25), and the rotating rod (23) penetrates the interior of the threaded holes (24).

6. The superhard thin film coating mechanism according to claim 1, characterized in that: The top end of the top frame (6) is fixedly mounted with an inner frame (13), and a screw hole (29) is provided inside the bottom end of the inner frame (13). A driving rod (27) is rotatably connected inside the screw hole (29). The bottom end of the driving rod (27) passes through the inside of the screw hole (29) and is movably connected to the top end of the mounting seat (14). Guide rods (28) are respectively fixed on both sides of the top end of the mounting seat (14).

7. The superhard thin film coating mechanism according to claim 6, characterized in that: The top end of the guide rod (28) passes through the interior of the bottom end of the inner frame (13).

8. The superhard thin film coating mechanism according to claim 1, characterized in that: A liquid separation seat (15) is fixed at the bottom end of the mounting seat (14), and a plurality of coating heads (16) are fixed at equal intervals at the bottom end of the liquid separation seat (15). A support (2) is fixed on the left side of the coating workbench (1), and support plates (3) are fixed at both ends of the top of the support (2). A material unwinding roll (4) is provided between the support plates (3). Slots (18) are respectively provided inside the bottom ends of both sides of the top frame (6), and the inside of the slots (18) is movably connected to a conveying roller (5). The top frame (6) A liquid storage tank (11) is fixed at the top, a liquid extraction pump (10) is provided on the left side of the top of the top frame (6), and a liquid extraction pipe (12) is fixed to the input end of the liquid extraction pump (10), the right side of the liquid extraction pipe (12) passes through the interior of the left side of the liquid storage tank (11), and a liquid outlet pipe (9) is fixed to the output end of the liquid extraction pump (10), and the bottom end of the top frame (6) passes through the interior of the top of the top frame (6) and is fixedly installed with a connecting hose (8), and the right side of the connecting hose (8) is fixedly connected to the left side of the liquid separation seat (15).