Welding auxiliary tool

Abstract

The utility model belongs to the technical field of welding, and discloses an auxiliary welding tool which comprises a bottom plate, a pressing plate and a fixing assembly, a positioning area is arranged on one face of the bottom plate, when a concave face disc and a flange ring are welded, a gas distribution disc to be welded is horizontally placed on the face where the positioning area is located, a plane disc is attached to the surface of the positioning area, and the pressing plate is placed on the concave face disc. When the plane disc and the flange ring are welded, the gas distribution disc to be welded is placed in the protruding area, the flange ring is arranged on the periphery of the protruding area in a sleeving mode, the concave face disc is attached to the protruding area, and the plane disc and the flange ring are fixed through the fixing assembly. Under the action of the welding auxiliary tool, not only can the deformation quantity of the concave surface disc and the plane disc be reduced, but also the welding strength of the concave surface disc, the plane disc and the flange ring can be ensured, so that the double-layer bonding pad is stably welded with the flange ring, and the use effect and the use quality of the finished gas distribution disc are ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of welding, in particular to a welding auxiliary tool. Background Art

[0002] Semiconductor processing requires the use of a plasma etching process, which requires the use of plasma gas. To ensure that the plasma gas is evenly distributed on the chip, the plasma gas is passed through a gas distribution plate into a vacuum chamber. To improve the uniformity of gas ejection, existing gas distribution plates mostly use double-layer pads, which are welded to a flange ring to form a gas distribution plate. However, when welding the double-layer pad to the flange ring, it will deform due to uneven force. This will cause the gas distribution plate to have large deformation after welding and insufficient welding strength at the weld. This affects the uniformity of plasma gas ejection and ultimately the processing quality of the semiconductor.

[0003] Therefore, a welding auxiliary tool is urgently needed to solve the above technical problems. Utility Model Content

[0004] The purpose of the utility model is to provide a welding auxiliary tool, which can reduce the deformation amount generated when the double-layer welding plate is welded to the flange ring, so that the quality of the gas distribution plate after processing and forming is guaranteed.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] A welding auxiliary tool is used to assist a welder in welding a gas distribution plate to be welded into a finished gas distribution plate. The gas distribution plate to be welded is a flange ring and a double-layer welding plate assembled with each other. The double-layer welding plate includes a concave plate and a flat plate connected to each other. The concave plate is welded to the inner wall of the flange ring, and the flat plate is welded flush with the end face of the flange ring. The welding auxiliary tool includes:

[0007] The bottom plate and the pressure plate are provided with a positioning area on one side of the bottom plate and a protruding area on the other side. When welding the concave disk, the flat disk is in contact with the surface of the positioning area, and the pressure plate is placed on the concave disk. When welding the flat disk, the flange ring is sleeved on the outer periphery of the protruding area, and the concave disk is in contact with the protruding area.

[0008] The fixing assembly is used to fix the gas distribution plate to be welded to the base plate.

[0009] As an optimal technical solution for the welding auxiliary tooling, the fixing assembly includes a first fixing member and a second fixing member, the first fixing member is used to fix the double-layer welding pad and the base plate, and the second fixing member is used to fix the flange ring and the base plate.

[0010] As an optimal technical solution for welding auxiliary tooling, the positioning area is provided with multiple through holes, and the pressure plate is provided with multiple positioning holes. The through holes and the positioning holes correspond one-to-one to the through holes on the double-layer pad, and the first fixing part penetrates and connects the positioning holes, the through holes and the through holes.

[0011] As a preferred technical solution of the welding auxiliary tooling, the first fixing piece is threadedly connected to the through hole.

[0012] As an optimal technical solution for the welding auxiliary tooling, the second fixing member includes a base and a crimping member, the base is fixed to the base plate, and the crimping member is crimped to the end face of the flange ring to fix the flange ring on the base plate.

[0013] As a preferred technical solution for the welding auxiliary tooling, the second fixing member is a quick clamp.

[0014] As an optimal technical solution for welding auxiliary tooling, an avoidance groove is provided on the outer periphery of the positioning area, and a welding piece is provided on the outer periphery of the plane disk. After the gas distribution disk to be welded is placed flat on the bottom plate, the welding piece is placed in the avoidance groove.

[0015] As an optimal technical solution for the welding auxiliary tooling, the positioning area is provided with a central groove.

[0016] As a preferred technical solution for the welding auxiliary tooling, the protruding area is a column having the same shape as the flange ring opening, and the height of the protruding area is not less than the depth of the flange ring.

[0017] As an optimal technical solution for the welding auxiliary tooling, the base plate and the pressure plate are both made of stainless steel.

[0018] The beneficial effects of the utility model are:

[0019] The welding auxiliary tooling provided by the present invention includes a base plate, a pressure plate and a fixing assembly. The fixing assembly is used to fix the gas distribution plate to be welded to the base plate so as to position the gas distribution plate to be welded. One side of the base plate is provided with a positioning area. When welding the concave plate and the flange ring, the gas distribution plate to be welded is placed flat on the side where the positioning area is located. The flat plate fits the surface of the positioning area. The pressure plate is placed on the concave plate, which can shape the concave plate. When the concave plate and the flange ring are welded, no significant deformation will occur. The fixing assembly fixes the gas distribution plate to be welded to the base plate. When the concave plate and the flange ring are welded, no relative movement will occur. This can ensure the flatness of the concave plate welding and the welding strength of the concave plate, thereby improving the concave plate and the flange ring. The welding quality of the flange ring; when welding the flat plate and the flange ring, the gas distribution plate to be welded is placed in the protruding area, the flange ring is placed on the outer periphery of the protruding area, and the concave plate is fitted with the protruding area, so that when welding the flat plate, the concave plate is basically in a fitted state with the flat plate, avoiding deformation problems caused by the concave structure of the concave plate during welding of the flat plate, ensuring the flatness of the flat plate in the finished gas distribution plate, and the setting of the fixed component can avoid relative movement between the flat plate and the flange ring when welding the flat plate, so as to ensure the welding quality of the flat plate welding point. Under the action of the welding auxiliary tooling, while reducing the deformation of the concave plate and the flat plate, it can also ensure the welding strength of the concave plate and the flat plate and the flange ring, so that the double-layer welding plate is firmly welded to the flange ring to form a finished gas distribution plate, ensuring the use effect and quality of the finished gas distribution plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the assembly of the welding auxiliary tooling provided by the utility model and the gas distribution plate to be welded;

[0021] Figure 2 This is a schematic cross-sectional view of the assembly of the welding auxiliary tooling provided by the present invention and the gas distribution plate to be welded;

[0022] Figure 3 It is a structural schematic diagram of the bottom plate of the welding auxiliary tooling provided by the utility model.

[0023] In the picture:

[0024] 100, gas distribution plate to be welded; 101, flange ring; 102, double-layer welding plate; 1021, concave plate; 1022, flat plate;

[0025] 1. Welding auxiliary tooling; 11. Base plate; 111. Positioning area; 1111. Through hole; 1112. Center groove; 112. Protruding area; 113. Avoidance groove; 12. Press plate; 121. Positioning hole. DETAILED DESCRIPTION

[0026] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0027] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0028] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0029] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0030] like Figures 1 to 3As shown in , this embodiment provides a welding auxiliary tool 1 for assisting a welder in welding a gas distribution plate 100 to be welded into a finished gas distribution plate. The gas distribution plate 100 to be welded is a gas distribution plate that has been assembled with a flange ring 101 and a double-layer welding pad 102, but the welding process has not yet been completed. The finished gas distribution plate is a gas distribution plate that has been welded on the basis of the gas distribution plate 100 to be welded. The double-layer welding pad 102 includes a concave disk 1021 and a flat disk 1022 that are connected. When welding the gas distribution plate 100 to be welded, the concave disk 1021 is welded to the inner wall of the flange ring 101, and the flat disk 1022 is welded flush with the end surface of the flange ring 101 to form the finished gas distribution plate.

[0031] To facilitate welding the double-layer welding pad 102 and the flange ring 101, the welding auxiliary tooling 1 in this embodiment includes a base plate 11, a pressure plate 12 and a fixing assembly, which is used to fix the gas distribution plate 100 to be welded to the base plate 11 to position the gas distribution plate 100 to be welded. The bottom plate 11 is provided with a positioning area 111 on one side. When welding the concave disk 1021 and the flange ring 101, the gas distribution disk 100 to be welded is placed flat on the side where the positioning area 111 is located, and the flat disk 1022 is fitted with the surface of the positioning area 111 to ensure the overall flatness of the flat disk 1022. The pressure plate 12 is placed on the concave disk 1021, specifically in the groove of the concave disk 1021, so that the concave disk 1021 can be shaped. When the concave disk 1021 and the flange ring 101 are welded, no large deformation will occur. At the same time, the fixing assembly fixes the gas distribution disk 100 to be welded to the bottom plate 11, and no relative movement will occur when the concave disk 1021 and the flange ring 101 are welded. In this way, the flatness of the concave disk 1021 welding can be guaranteed, and the welding strength of the concave disk 1021 can be guaranteed, thereby improving the welding quality of the concave disk 1021 and the flange ring 101.

[0032] A protruding area 112 is provided on the other side of the bottom plate 11. When welding the flat plate 1022 and the flange ring 101, it is necessary to disassemble the fixing assembly, remove the gas distribution plate 100 to be welded from the bottom plate 11, turn the bottom plate 11 over so that the protruding area 112 faces upward, and place the gas distribution plate 100 to be welded on the protruding area 112. Specifically, the flange ring 101 is placed on the outer periphery of the protruding area 112, and the concave plate 1021 is fitted with the protruding area 112. The setting of the protruding area 112 can achieve that when welding the flat plate 1022, the concave plate 1021 is 21 is substantially in contact with the flat plate 1022, preventing deformation of the flat plate 1022 due to the concave structure of the concave plate 1021 during welding, thereby ensuring the flatness of the flat plate 1022 in the finished gas distribution plate. The fixing assembly is used to fix the gas distribution plate 100 to be welded to the side of the base plate 11 having the protruding area 112, thereby preventing relative movement between the flat plate 1022 and the flange ring 101 during welding, thereby ensuring the quality of the weld at the flat plate 1022. This ensures both the flatness of the weld at the flat plate 1022 and the strength of the weld at the flat plate 1022. Under the action of the welding auxiliary tooling 1, the deformation of the concave disk 1021 and the flat disk 1022 can be reduced while ensuring the welding strength of the concave disk 1021 and the flat disk 1022 and the flange ring 101, so that the double-layer welding disk 102 is firmly welded to the flange ring 101 to form a finished gas distribution disk, thereby ensuring the use effect and quality of the finished gas distribution disk.

[0033] Specifically, the fixing assembly includes a first fixing member and a second fixing member, wherein the first fixing member is used to fix the double-layer welding pad 102 and the base plate 11 to each other, and the second fixing member is used to fix the flange ring 101 and the base plate 11 to each other. Fixing the flange ring 101 and the double-layer welding pad 102 on the base plate 11 can avoid relative movement between the two when welding them, so as to ensure the welding quality of the double-layer welding pad 102 and the flange ring 101, and thereby ensure the quality of the finished gas distribution plate.

[0034] For example, regarding the connection between the double-layer pad 102 and the base plate 11, in this embodiment, a plurality of through holes 1111 are provided on the positioning area 111, and a plurality of positioning holes 121 are provided on the pressure plate 12, wherein the positioning holes 121 and the through holes 1111 are arranged in a one-to-one correspondence with the through holes on the double-layer pad 102. The first fixing member penetrates and connects the positioning holes 121, the through holes, and the through holes 1111 to fix the pressure plate 12, the double-layer pad 102, and the base plate 11. In this case, the first fixing member can be a bolt or a latch. Of course, the first fixing member can also be a plurality of protruding columns corresponding to the through holes of the double-layer pad 102 provided on the positioning area 111. When the gas distribution plate 100 to be welded is placed on the base plate 11, the protruding columns are correspondingly inserted into the through holes on the double-layer pad 102 to fix the double-layer pad 102 to the base plate 11. Regarding the form of the first fixing member, no specific limitation is made here.

[0035] Preferably, the first fixing member can be a bolt with an internal thread provided in the through hole 1111. After the first fixing member passes through the positioning hole 121 and the through hole on the double-layer pad 102, it can be threadedly connected to the internal thread and locked in the through hole 1111. The threaded connection method facilitates the installation or removal of the first fixing member by the worker, so as to quickly connect or remove the double-layer pad 102 from the base plate 11, thereby improving the operator's convenience.

[0036] Regarding the fixation of the base plate 11 to the flange ring 101, in this embodiment, the second fixing member includes a base and a crimping member. The base and base plate 11 can be fixed by a snap fastener or a bolt fastening device, without limitation. The crimping member can be crimped onto the end face of the flange ring 101, thereby fixing the flange ring 101 to the base plate 11. The second fixing member can be a manual toggle clamp. The manual toggle clamp is designed based on the mechanical principle of the double rocker mechanism in a planar four-bar linkage. Its basic structure consists of four components: a connecting rod, a frame, and two connecting rods. When the two hinge points of the connecting rod and the connecting rod, and the hinge point of one of the connecting rods and the frame are in a straight line, the mechanism is in a dead center position. At this time, no matter how much reaction force is applied to the clamped workpiece, the pressure head cannot be loosened. Manual toggle clamps can be broadly categorized into vertical manual toggle clamps, horizontal manual toggle clamps, push-pull manual toggle clamps, latch manual toggle clamps, extrusion manual toggle clamps, cam manual toggle clamps, and multi-functional modular manual toggle clamps. Manual toggle clamps are commonly used components in the field of fixing and are not the focus of this utility model.

[0037] The second fixing part can also be formed by combining two clamping plates and a locking bolt. Specifically, one clamping plate is attached to the bottom surface of the base plate 11, and the other clamping plate is attached to the end surface of the flange ring 101. Internal threaded mounting holes are provided on both clamping plates. The locking bolt is passed through the two mounting holes and locked in the two mounting holes to fix the flange ring 101 to the base plate 11.

[0038] In order to improve the convenience of welding the double-layer welding pad 102 and the flange ring 101 and improve the welding efficiency of the staff, a plurality of welding pieces are arranged at intervals on the outer periphery of the flat plate 1022. In order to ensure that the gas distribution plate 100 to be welded can be placed flat on the side of the positioning area 111 on the base plate 11, in this embodiment, a circle of avoidance grooves 113 is arranged on the outer periphery of the positioning area 111. When the staff places the gas distribution plate 100 to be welded on the base plate 11, the welding pieces can be accommodated in the avoidance grooves 113 to facilitate the assembly of the base plate 11 and the gas distribution plate 100 to be welded.

[0039] In this embodiment, a central groove 1112 is provided in the positioning area 111. The provision of central groove 1112 reduces the weight of the base plate 11, making it lightweight. Furthermore, when the pressing plate 12 presses the concave disc 1021 against the positioning area 111, it prevents the concave disc 1021 from bulging upward and deforming. The provision of central groove 1112 further reduces the deformation of the concave disc 1021 during welding, thereby further improving the welding quality of the concave disc 1021. The depth of central groove 1112 can range from 3 cm to 5 cm, or from 5 cm to 8 cm, without specific limitation.

[0040] Preferably, the protruding area 112 can be machined into a cylindrical shape that matches the opening shape of the flange ring 101, so as to facilitate quick assembly of the base plate 11 and the gas distribution plate 100 to be welded. Since the flange ring 101 is mostly a cylindrical structure, the protruding area 112 can be configured as a cylinder. If the opening shape of the flange ring 101 is square, the protruding area 112 can be configured as a cube. The height of the protruding area 112 should be no less than the depth of the flange ring 101, so that when workers weld the flat plate 1022, the protruding area 112 can help the concave plate 1021 and the flat plate 1022 to fit more smoothly, further improving the welding quality of the flat plate 1022.

[0041] Preferably, in order to ensure the service life of the welding auxiliary tooling 1, in this embodiment, the base plate 11 and the pressure plate 12 are both made of stainless steel.

[0042] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A welding auxiliary tool, used for assisting a welder to weld a gas distribution plate (100) to be welded into a finished gas distribution plate, wherein the gas distribution plate (100) to be welded is a flange ring (101) and a double-layer welding pad (102) assembled with each other, wherein the double-layer welding pad (102) includes a concave disk (1021) and a flat disk (1022) connected to each other, wherein the concave disk (1021) is welded to the inner wall of the flange ring (101), and the flat disk (1022) is welded flush with the end face of the flange ring (101), characterized in that: The welding auxiliary tooling comprises: A bottom plate (11) and a pressure plate (12), wherein one side of the bottom plate (11) is provided with a positioning area (111), and the other side is provided with a protruding area (112); when welding the concave disk (1021), the flat disk (1022) is in contact with the surface of the positioning area (111), and the pressure plate (12) is placed on the concave disk (1021); when welding the flat disk (1022), the flange ring (101) is sleeved on the outer periphery of the protruding area (112), and the concave disk (1021) is in contact with the protruding area (112); A fixing assembly is used for fixing the gas distribution plate (100) to be welded to the base plate (11).

2. The welding auxiliary tooling according to claim 1, characterized in that: The fixing assembly comprises a first fixing member and a second fixing member, the first fixing member being used to fix the double-layer pad (102) and the bottom plate (11), and the second fixing member being used to fix the flange ring (101) and the bottom plate (11).

3. The welding auxiliary tooling according to claim 2, characterized in that: The positioning area (111) is provided with a plurality of through holes (1111), the pressure plate (12) is provided with a plurality of positioning holes (121), the through holes (1111) and the positioning holes (121) both correspond one-to-one to the through holes on the double-layer pad (102), and the first fixing member penetrates and connects the positioning holes (121), the through holes and the through holes (1111).

4. The welding auxiliary tooling according to claim 3, characterized in that: The first fixing member is threadedly connected to the through hole (1111).

5. The welding auxiliary tooling according to claim 2, characterized in that: The second fixing member comprises a base and a crimping member, the base is fixed to the base plate (11), and the crimping member is crimped to the end face of the flange ring (101) to fix the flange ring (101) on the base plate (11).

6. The welding auxiliary tool according to claim 5, characterized in that: The second fixing member is a quick clamp.

7. The welding auxiliary tool according to claim 1, characterized in that: The positioning area (111) is provided with an avoidance groove (113) on the outer periphery, and the outer periphery of the plane disk (1022) is provided with a welding piece. After the gas distribution disk (100) to be welded is placed flat on the bottom plate (11), the welding piece is placed in the avoidance groove (113).

8. The welding auxiliary tool according to claim 1, characterized in that: The positioning area (111) is provided with a central groove (1112).

9. The welding auxiliary tool according to any one of claims 1 to 8, characterized in that: The protruding area (112) is a column having the same shape as the opening of the flange ring (101), and the height of the protruding area (112) is not less than the depth of the flange ring (101).

10. The welding auxiliary tool according to any one of claims 1 to 8, characterized in that: The bottom plate (11) and the pressing plate (12) are both made of stainless steel.

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