Automatic feeding mechanism of semiconductor trimming system

Abstract

The utility model discloses an automatic feeding mechanism of a semiconductor trimming system, which comprises a feeding left-right power module, a feeding left-right anti-error assembly is arranged on one side of the top of the feeding left-right power module, and a feeding up-down anti-error assembly is arranged on one side of the bottom of the feeding left-right power module. A feeding up-down power motor is arranged on one side of the lower portion of the feeding left-right power module, a material stirring assembly is arranged on the top of the feeding up-down anti-error assembly, a material stirring rod is arranged above the material stirring assembly, materials are placed on the top of the material stirring rod, and a material stirring rod in-place sensor is arranged on one side of the material stirring assembly. By means of the feeding left-right anti-misoperation assembly and the feeding up-down anti-misoperation assembly, products can be stopped in time due to material blocking or blocking, the products are prevented from being damaged, the defects that a traditional feeding mode changes along with changes of external air pressure and the feeding frequency is too low are overcome, and the whole feeding mode is smooth and stable.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor cutting and feeding, in particular to an automatic feeding mechanism of a semiconductor cutting system. Background Art

[0002] The automatic feeding mechanism of a semiconductor cutting system is a crucial component of semiconductor processing equipment, used to automatically feed semiconductor wafers into the cutting or processing process. Such a mechanism typically includes a feeding device, sensors, a control system, and other components, enabling automated positioning, conveying, and metered feeding of semiconductor wafers. With the development of the semiconductor industry and the expansion of production scale, more efficient and precise production equipment is required to improve production efficiency and reduce production costs. Automatic feeding mechanisms enable automated handling of semiconductor wafers, meeting the automated production requirements of modern production lines.

[0003] The existing feeding method is to use a cylinder to achieve the up and down and forward and backward movement of the product. This method will change due to changes in external air pressure, and the feeding frequency is too slow. Utility Model Content

[0004] The purpose of the utility model is to solve the shortcomings of the prior art and to propose an automatic feeding mechanism for a semiconductor cutting system.

[0005] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0006] The automatic feeding mechanism of the semiconductor cutting system includes left and right feeding power modules, and a left and right feeding anti-error component is provided on the top side of the left and right feeding power modules, and a top and bottom feeding anti-error component is provided on the bottom side of the left and right feeding power modules, and a feeding top and bottom power motor is provided on the lower side of the left and right feeding power modules, and a material shifting component is provided on the top of the feeding top and bottom anti-error component, a material shifting rod is provided above the material shifting component, and material is placed on the top of the material shifting rod, and a material shifting rod in-position sensor is provided on one side of the material shifting component.

[0007] As a further solution of the present invention: the left and right feeding anti-error components include left and right feeding anti-error cylinder pressure regulating valves, left and right feeding anti-error seats, left and right feeding anti-error sensors, left and right feeding anti-error sensor sheets, left and right feeding power seat sliders, left and right feeding power seats, left and right feeding anti-error cylinders, left and right feeding power seat connecting blocks, left and right feeding power seat connecting shafts, left and right feeding follower seats, left and right feeding follower seat sliders, left and right feeding follower seat guide rails and left and right feeding followers.

[0008] As a further solution of the present invention: the left and right anti-mistake seats for feeding are fixedly connected to one side of the top of the left and right power modules for feeding, the left and right power seat sliders for feeding are slidably connected to the top of the left and right anti-mistake seats for feeding, the left and right power seats for feeding are fixedly connected to the top of the left and right power seat sliders for feeding, and the left and right anti-mistake cylinders for feeding are fixedly connected to the middle of the top of the left and right anti-mistake seats for feeding.

[0009] As a further solution of the present invention: the telescopic end of the left and right anti-error feeding cylinders is connected to one side of the left and right feeding power seats through threads, the left and right feeding power seat connecting blocks are fixedly connected to the bottom of one side of the left and right feeding power seats, and the left and right feeding power seat connecting shafts are fixedly connected to the bottom of the left and right feeding power seat connecting blocks.

[0010] As a further solution of the present invention: the left and right anti-error feeding cylinder pressure regulating valves are fixedly connected to one side of the left and right anti-error feeding cylinders, the left and right anti-error feeding sensor plates are fixedly connected to one side of the left and right feeding power seats, and the left and right anti-error feeding sensors are fixedly connected to one side of the left and right anti-error feeding seats.

[0011] As a further solution of the present invention: the left and right feed follower seat guide rails are fixedly connected to one side of the top of the upper and lower feed power motors, the left and right feed follower seat sliders are slidably connected to the top of the left and right feed follower seat guide rails, the left and right feed follower seat is fixedly connected to the top of the left and right feed follower seat sliders, and the left and right feed followers are fixedly connected to one end of the left and right feed follower seat.

[0012] As a further solution of the present invention: the upper and lower feeding error prevention components include upper and lower feeding error prevention sensors, upper and lower feeding cam seats, upper and lower feeding in-place sensing sheets, upper and lower feeding in-place sensors, upper and lower feeding camshafts and upper and lower feeding shafts, and the upper and lower feeding camshafts are connected to the output shafts of the upper and lower feeding power motors through couplings, the upper and lower feeding cam seats are connected to the circumference of the upper and lower feeding camshafts through bearings, and the upper and lower feeding in-place sensing sheets are fixedly connected to one side of the upper and lower feeding cam seats.

[0013] As a further solution of the present invention: the circumferential outer wall of the upper and lower feeding cam shafts is fixedly connected to a mounting seat through a bearing, the upper and lower feeding in-position sensors are fixedly connected to the outer wall of one side of the mounting seat close to the top and bottom of the upper and lower feeding in-position sensing pieces, the upper and lower feeding anti-mistake sensors are fixedly connected to the top of the upper and lower feeding cam seats, and the upper and lower feeding shafts are fixedly connected to the top of the upper and lower feeding anti-mistake sensors.

[0014] Compared with the prior art, the present invention provides an automatic feeding mechanism for a semiconductor cutting system, which has the following beneficial effects:

[0015] 1. The automatic feeding mechanism of the semiconductor rib cutting system starts the left and right anti-error feeding cylinders to push the left and right feeding power seats to slide on the left and right feeding anti-error feeding seats, and a left and right feeding anti-error feeding cylinder pressure regulating valve is provided above the left and right feeding anti-error feeding seats to ensure that the movement speed of the left and right feeding anti-error feeding cylinders can be adjusted. During this period, the left and right feeding anti-error feeding sensor pieces on one side of the left and right feeding power seats cooperate with the left and right feeding anti-error feeding sensors to ensure that the semiconductor sheet will not deviate from the predetermined position or move abnormally, ensuring that the semiconductor sheet maintains the correct position during the processing, effectively improving the working efficiency and safety of the semiconductor rib cutting system.

[0016] 2. The semiconductor cutting system has an automatic feeding mechanism. The upper and lower power motors drive the upper and lower cam shafts to rotate and drive the upper and lower cam seats to move upward. The upper and lower in-position sensing pieces on one side move vertically, and the upper and lower in-position sensors can sense and limit the upper and lower in-position sensing pieces, ensuring the accuracy of upper and lower feeding. At the same time, the upper and lower anti-error sensors located above the upper and lower cam seats effectively monitor the vertical position of the semiconductor sheet to prevent errors or abnormalities, thereby improving the accuracy of semiconductor sheet processing.

[0017] 3. The automatic feeding mechanism of the semiconductor cutting system can stop the action in time if the product is blocked or stuck through the left and right anti-error components and the upper and lower anti-error components to prevent damage to the product. It overcomes the disadvantages of the traditional feeding method that is affected by changes in external air pressure and the feeding frequency is too slow. The overall feeding method is smooth and stable.

[0018] The parts not involved in the device are the same as those in the prior art or can be implemented by using the prior art. The utility model has a simple structure and is easy to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the top view of the automatic feeding mechanism of the semiconductor cutting system proposed in the present invention;

[0020] Figure 2 This is a schematic diagram of the back structure of the automatic feeding mechanism of the semiconductor cutting system proposed in the present invention;

[0021] Figure 3 This is a structural diagram of the left and right anti-error feeding components in the automatic feeding mechanism of the semiconductor cutting system proposed by the present invention;

[0022] Figure 4 This is a structural schematic diagram of the upper and lower anti-error feeding components in the automatic feeding mechanism of the semiconductor cutting system proposed by the present invention.

[0023] In the figure: 1. Feeding left and right power module; 2. Feeding left and right anti-error assembly; 3. Feeding up and down anti-error assembly; 4. Feeding up and down power motor; 5. Feeding assembly; 6. Feeding rod; 7. Feeding rod in-position sensor; 201. Feeding left and right anti-error cylinder pressure regulating valve; 202. Feeding left and right anti-error seat; 203. Feeding left and right anti-error sensor; 204. Feeding left and right anti-error sensor sheet; 205. Feeding left and right power seat slider; 206. Feeding left and right power seat; 207. Feeding left and right anti-error cylinder; 208. Feeding left and right power seat connecting block; 209. Feeding left and right Power seat connecting shaft; 210, feeding left and right follower seat; 211, feeding left and right follower seat slider; 212, feeding left and right follower seat guide rail; 213, feeding left and right followers; 301, feeding up and down anti-misfeeding sensor; 302, feeding up and down cam seat; 303, feeding up and down in-position sensor plate; 304, feeding up and down in-position sensor; 305, feeding up and down cam shaft; 306, feeding up and down shaft; 501, feeding up and down plates; 502, feed rod fixing seat guide rail; 503, feed rod fixing shaft; 504, feed rod fixing seat; 505, material. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0025] In the description of this patent, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings. They are only for the convenience of describing this patent and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on this patent.

[0026] In the description of this patent, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," "connected," and "set" should be understood in a broad sense. For example, they can refer to fixed connection or set, detachable connection or set, or integral connection or set. Those skilled in the art will understand the specific meanings of the above terms in this patent based on the specific circumstances.

[0027] Automatic feeding mechanism of semiconductor cutting system, such as Figure 1 and Figure 2As shown, it includes a left and right feeding power module 1, a left and right feeding anti-error component 2 is provided on the top side of the left and right feeding power module 1, and a top and bottom feeding anti-error component 3 is provided on the bottom side of the left and right feeding power module 1, a feeding top and bottom power motor 4 is provided on the lower side of the left and right feeding power module 1, and a material shifting component 5 is provided on the top of the top and bottom feeding anti-error component 3, a material shifting rod 6 is provided above the material shifting component 5, and material 505 is placed on the top of the material shifting rod 6, and a material shifting rod in-position sensor 7 is provided on one side of the material shifting component 5.

[0028] The left and right feeding power module 1 is used to control the motor for the left and right movement of the feeding, as well as the corresponding transmission device and control system, so that the semiconductor sheet can maintain the required left and right position during the processing process, and is used to realize the automatic positioning and movement of the semiconductor sheet in the horizontal direction. It is a technical feature module well known to technical personnel in this field and will not be described in detail in this case.

[0029] In order to realize the function of preventing error in feeding left and right, such as Figure 3 As shown, the left and right feeding error prevention assembly 2 includes a left and right feeding error prevention cylinder pressure regulating valve 201, a left and right feeding error prevention seat 202, a left and right feeding error prevention sensor 203, a left and right feeding error prevention sensor sheet 204, a left and right feeding power seat slider 205, a left and right feeding power seat 206, a left and right feeding error prevention cylinder 207, a left and right feeding power seat connecting block 208, a left and right feeding power seat connecting shaft 209, a left and right feeding follower seat 210, a left and right feeding follower seat slider 211, a left and right feeding follower seat guide rail 212 and a left and right feeding follower 213;

[0030] The left and right anti-error seats 202 for feeding are fixedly connected to one side of the top of the left and right power modules 1 for feeding, the left and right power seat sliders 205 for feeding are slidably connected to the top of the left and right anti-error seats 202 for feeding, the left and right power seats 206 for feeding are fixedly connected to the top of the left and right power seat sliders 205 for feeding, the left and right anti-error cylinders 207 for feeding are fixedly connected to the middle of the top of the left and right anti-error seats 202 for feeding, and the telescopic ends of the left and right anti-error cylinders 207 and one side of the left and right power seats 206 are connected to each other through threads, the left and right power seat connecting blocks 208 are fixedly connected to the bottom of one side of the left and right power seats 206, and the left and right power seat connecting shafts 209 are fixedly connected to the bottom of the left and right power seat connecting blocks 208 for feeding;

[0031] The left and right anti-error feeding cylinder pressure regulating valves 201 are fixedly connected to one side of the left and right anti-error feeding cylinders 207, the left and right anti-error feeding sensing sheets 204 are fixedly connected to one side of the left and right power seats 206, the left and right anti-error feeding sensors 203 are fixedly connected to one side of the left and right anti-error feeding seats 202, the left and right follower seat guide rails 212 are fixedly connected to one side of the top of the upper and lower power motors 4 for feeding, the left and right follower seat sliders 211 are slidably connected to the top of the left and right follower seat guide rails 212, the left and right follower seat 210 is fixedly connected to the top of the left and right follower seat sliders 211, and the left and right follower 213 is fixedly connected to one end of the left and right follower seat 210;

[0032] During operation, the left and right feeding anti-error cylinders 207 are started to push the left and right feeding power seats 206 to slide on the left and right feeding anti-error seats 202, and a left and right feeding anti-error cylinder pressure regulating valve 201 is provided above the left and right feeding anti-error seats 202 to ensure that the movement speed of the left and right feeding anti-error cylinders 207 can be adjusted. During this period, the left and right feeding anti-error sensing pieces 204 on one side of the left and right feeding power seats 206 cooperate with the left and right feeding anti-error sensors 203 to ensure that the semiconductor sheet will not deviate from the predetermined position or move abnormally, ensuring that the semiconductor sheet maintains the correct position during the processing, and effectively improving the working efficiency and safety of the semiconductor cutting system.

[0033] In order to realize the anti-error function of upper and lower feeding, such as Figure 4 As shown, the feeding upper and lower error-proofing component 3 includes a feeding upper and lower error-proofing sensor 301, a feeding upper and lower cam seat 302, a feeding upper and lower in-place sensing piece 303, a feeding upper and lower in-place sensing piece 304, a feeding upper and lower cam shaft 305 and a feeding upper and lower shaft 306, and the feeding upper and lower cam shaft 305 is connected to the output shaft of the feeding upper and lower power motor 4 through a coupling, the feeding upper and lower cam seat 302 is sleeved on the circumference of the feeding upper and lower cam shaft 305 through a bearing, the feeding upper and lower in-place sensing piece 303 is fixedly connected to one side of the feeding upper and lower cam seat 302, the circumferential outer wall of the feeding upper and lower cam shaft 305 is fixedly connected to a mounting seat through a bearing, the feeding upper and lower in-place sensing piece 304 is fixedly connected to the outer wall of one side of the mounting seat near the top and bottom of the feeding upper and lower in-place sensing piece 303, the feeding upper and lower error-proofing sensor 301 is fixedly connected to the top of the feeding upper and lower cam seat 302, and the feeding upper and lower shaft 306 is fixedly connected to the top of the feeding upper and lower error-proofing sensor 301.

[0034] The upper and lower feeding power motor 4 drives the upper and lower feeding cam shafts 305 to rotate and drives the upper and lower feeding cam seats 302 to move upward, and the upper and lower feeding in-position sensing pieces 303 on one side thereof make vertical movements, and the upper and lower feeding in-position sensors 304 can sense and limit the upper and lower feeding in-position sensing pieces 303, thereby ensuring the accuracy of the upper and lower feeding. At the same time, the upper and lower feeding anti-error sensors 301 located above the upper and lower feeding cam seats 302 effectively monitor the vertical position of the semiconductor sheet to prevent errors or abnormalities, thereby improving the accuracy of semiconductor sheet processing.

[0035] In order to stably select material 505, Figure 4 As shown, the material shifting assembly 5 includes upper and lower feeding plates 501, a material shifting rod fixed seat guide rail 502, a material shifting rod fixed shaft 503 and a material shifting rod fixed seat 504, and the material shifting rod fixed seat 504 is fixedly connected to one side of the left and right feeding followers 213, the material shifting rod fixed shaft 503 is fixedly connected to the top side of the material shifting rod fixed seat 504, and the upper and lower feeding plates 501 are slidably connected to the bottom of the material shifting rod fixed seat 504 through the material shifting rod fixed seat guide rail 502.

[0036] Therefore, the left and right anti-error feeding components 2 and the upper and lower anti-error feeding components 3 can stop the action in time if the product is blocked or stuck, so as to prevent damage to the product. This overcomes the disadvantages of the traditional feeding method that is affected by changes in external air pressure and the feeding frequency is too slow, and the overall feeding method is smooth and stable.

[0037] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the present invention can make equivalent replacements or changes based on the technical solution and utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An automatic feeding mechanism for a semiconductor cutting system, comprising left and right feeding power modules (1), characterized in that: A left and right feeding error prevention component (2) is provided on the top side of the left and right feeding power module (1), and a top and bottom feeding error prevention component (3) is provided on the bottom side of the left and right feeding power module (1), a top and bottom feeding power motor (4) is provided on the bottom side of the left and right feeding power module (1), and a material shifting component (5) is provided on the top of the top and bottom feeding error prevention component (3), a material shifting rod (6) is provided above the material shifting component (5), and a material (505) is placed on the top of the material shifting rod (6), and a material shifting rod in-position sensor (7) is provided on one side of the material shifting component (5).

2. The automatic feeding mechanism of the semiconductor cutting system according to claim 1, characterized in that: The left and right feeding error prevention assembly (2) comprises a left and right feeding error prevention cylinder pressure regulating valve (201), a left and right feeding error prevention seat (202), a left and right feeding error prevention sensor (203), a left and right feeding error prevention sensor sheet (204), a left and right feeding power seat slider (205), a left and right feeding power seat (206), a left and right feeding error prevention cylinder (207), a left and right feeding power seat connecting block (208), a left and right feeding power seat connecting shaft (209), a left and right feeding follower seat (210), a left and right feeding follower seat slider (211), a left and right feeding follower seat guide rail (212) and a left and right feeding follower (213).

3. The automatic feeding mechanism of the semiconductor cutting system according to claim 2, characterized in that: The left and right anti-error seats (202) for feeding are fixedly connected to one side of the top of the left and right power modules (1); the left and right power seat sliders (205) for feeding are slidably connected to the top of the left and right anti-error seats (202); the left and right power seats (206) for feeding are fixedly connected to the top of the left and right power seat sliders (205); and the left and right anti-error cylinders (207) for feeding are fixedly connected to the middle of the top of the left and right anti-error seats (202).

4. The automatic feeding mechanism of the semiconductor cutting system according to claim 2, characterized in that: The telescopic ends of the left and right feeding error-proof cylinders (207) are connected to one side of the left and right feeding power seats (206) via threads, the left and right feeding power seat connecting blocks (208) are fixedly connected to the bottom of one side of the left and right feeding power seats (206), and the left and right feeding power seat connecting shafts (209) are fixedly connected to the bottom of the left and right feeding power seat connecting blocks (208).

5. The automatic feeding mechanism of the semiconductor cutting system according to claim 2, characterized in that: The left and right feeding error prevention cylinder pressure regulating valves (201) are fixedly connected to one side of the left and right feeding error prevention cylinders (207), the left and right feeding error prevention sensing plates (204) are fixedly connected to one side of the left and right feeding power seats (206), and the left and right feeding error prevention sensors (203) are fixedly connected to one side of the left and right feeding error prevention seats (202).

6. The automatic feeding mechanism of the semiconductor cutting system according to claim 2, characterized in that: The left and right feed follower seat guide rail (212) is fixedly connected to one side of the top of the upper and lower feed power motors (4); the left and right feed follower seat slider (211) is slidably connected to the top of the left and right feed follower seat guide rail (212); the left and right feed follower seat (210) is fixedly connected to the top of the left and right feed follower seat slider (211); and the left and right feed follower (213) is fixedly connected to one end of the left and right feed follower seat (210).

7. The automatic feeding mechanism of the semiconductor cutting system according to claim 1, characterized in that: The feeding upper and lower error-proofing assembly (3) comprises a feeding upper and lower error-proofing sensor (301), a feeding upper and lower cam seat (302), a feeding upper and lower in-position sensing piece (303), a feeding upper and lower in-position sensor (304), a feeding upper and lower cam shaft (305) and a feeding upper and lower shaft (306), wherein the feeding upper and lower cam shaft (305) is connected to the output shaft of the feeding upper and lower power motor (4) through a coupling, the feeding upper and lower cam seat (302) is sleeved on the circumference of the feeding upper and lower cam shaft (305) through a bearing, and the feeding upper and lower in-position sensing piece (303) is fixedly connected to one side of the feeding upper and lower cam seat (302).

8. The automatic feeding mechanism of the semiconductor cutting system according to claim 7, characterized in that: The circumferential outer wall of the feeding upper and lower cam shafts (305) is fixedly connected to a mounting seat via a bearing, the feeding upper and lower in-position sensors (304) are fixedly connected to one side outer wall of the mounting seat near the top and bottom of the feeding upper and lower in-position sensing pieces (303), the feeding upper and lower error prevention sensors (301) are fixedly connected above the feeding upper and lower cam seats (302), and the feeding upper and lower shafts (306) are fixedly connected to the top of the feeding upper and lower error prevention sensors (301).

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