Main shaft lifting device capable of guaranteeing rotation positioning precision in vacuum environment

Abstract

The utility model relates to the technical field of precision mechanical devices, and discloses a spindle lifting device capable of guaranteeing rotation positioning precision in a vacuum environment, which comprises a mounting bottom plate, a driving cylinder and a spindle mechanism are mounted at the bottom of the mounting bottom plate, an adjusting bolt is arranged on the driving cylinder, a floating joint is mounted at the output end of the driving cylinder, and the spindle mechanism is mounted on the floating joint. A lifting hanging plate is arranged at the bottom of the floating connector, a limiting check block is arranged on the outer side of the floating connector, a coupler is arranged at the bottom of the main shaft mechanism, a motor mounting plate is arranged at the bottom of the coupler, a speed reducer is arranged at the bottom of the motor mounting plate, and a servo motor is arranged at the bottom of the speed reducer. The main shaft lifting device capable of guaranteeing the rotation positioning precision in the vacuum environment is suitable for being used in the vacuum environment, can meet the requirement of a special technology for the rotation positioning precision, and meanwhile is compact in structure, easy to install and debug and suitable for various different application scenes.

Description

Technical Field

[0001] The utility model relates to the technical field of precision mechanical devices, in particular to a spindle lifting device that ensures rotation positioning accuracy under a vacuum environment. Background Art

[0002] Vacuum applications, such as semiconductor manufacturing, precision machining, and optical component processing, place extremely high demands on the spindle's rotational positioning accuracy. These processes must be performed in a vacuum environment to prevent contamination from airborne impurities. At the same time, the spindle must be precisely positioned to ensure product accuracy and quality. However, traditional lifting devices often struggle to meet these requirements in a vacuum environment. On the one hand, the vacuum environment poses a greater challenge to the device's sealing and stability; on the other hand, traditional lifting devices often exhibit significant errors during the lifting process, failing to meet the requirements for high-precision rotational positioning.

[0003] At present, although there are some lifting devices on the market that can work in a vacuum environment, they often have shortcomings in terms of rotational positioning accuracy. Some devices use complex mechanical structures and transmission methods, resulting in complex structures, high costs, and difficult maintenance. Other devices use simple lifting mechanisms, but lack precise control systems, resulting in large errors and unstable factors in the lifting process. Therefore, there is an urgent need for a spindle lifting device that can ensure rotational positioning accuracy in a vacuum environment. Utility Model Content

[0004] The purpose of the utility model is to provide a spindle lifting device that ensures the rotation positioning accuracy in a vacuum environment, so as to solve the problems raised in the above background technology.

[0005] In order to solve the above technical problems, the utility model provides the following technical solutions: a spindle lifting device that ensures rotational positioning accuracy under a vacuum environment, comprising a mounting base plate, a driving cylinder and a spindle mechanism are installed at the bottom of the mounting base plate, an adjusting bolt is provided on the driving cylinder, a floating joint is installed at the output end of the driving cylinder, a lifting hanging plate is provided at the bottom of the floating joint, a limiting block is provided on the outside of the floating joint, a coupling is provided at the bottom of the spindle mechanism, a motor mounting plate is provided at the bottom of the coupling, a reducer is provided at the bottom of the motor mounting plate, and a servo motor is provided at the bottom of the reducer.

[0006] Preferably, two driving cylinders are provided, one located on the left and the other on the bottom of the mounting base plate.

[0007] Furthermore, in the spindle lifting device, instead of using one driving cylinder, two are used, and these two cylinders are located on the left and right sides of the bottom of the mounting base, respectively, which can provide a more stable and balanced lifting force, helping to ensure the stability and positioning accuracy of the spindle mechanism during the lifting process.

[0008] Preferably, two of the limit blocks, floating joints and lifting plates are respectively provided at the bottoms of the two driving cylinders.

[0009] Furthermore, since there are two driving cylinders, there are also two of these components, which are located at the bottom of the two driving cylinders respectively. This ensures that each driving cylinder has corresponding limit, connection and lifting support, thereby further improving the stability and reliability of the lifting device.

[0010] Preferably, the motor mounting plate is located inside the two lifting hanging plates.

[0011] Furthermore, the motor mounting plate is designed to be located on the inner side of the two lifting plates, which means that the lifting plates not only provide lifting support, but also support and fix the motor mounting plate. This helps ensure the stability and positioning accuracy of the motor mounting plate and the spindle mechanism, reducer and servo motor on it during the lifting process.

[0012] Preferably, the two lifting hanging plates are connected to the motor mounting plate by bolts.

[0013] Furthermore, the two lifting hanging plates are tightly connected to the motor mounting plate by bolts, which ensures that the connection between them is firm and reliable, thereby avoiding loosening or falling off during the lifting process.

[0014] Preferably, the servo motor is connected to the reducer via bolts.

[0015] Furthermore, the servo motor is tightly connected to the reducer through bolts, which ensures stable and reliable power transmission between them, thereby avoiding slipping or damage during rotation.

[0016] Preferably, a position detection device is provided in the spindle mechanism.

[0017] Furthermore, firstly, a position detection device is provided in the spindle mechanism, which can provide real-time feedback on the position information of the spindle mechanism. When the dual-drive cylinder is extended, the lifting plate is pushed downward through the floating joint, thereby driving the motor mounting plate, the spindle mechanism, the reducer and the servo motor to move downward together to complete the low-position action. When the dual-drive cylinder is retracted, the lifting plate is pulled upward through the floating joint to complete the high-position action. In this process, the adjusting bolt and the limit block cooperate with each other to ensure high-position accuracy. At the same time, the position detection device of the spindle mechanism can feedback high-position or low-position arrival information.

[0018] Compared with the prior art, the beneficial effects achieved by the present invention are:

[0019] When the main shaft mechanism needs to be lowered to a low position, the driving cylinder is started to extend, and the extending action of the driving cylinder pushes the lifting hanging plate downward through the floating joint. The lifting hanging plate serves as a supporting platform, driving the motor mounting plate, the main shaft mechanism, the reducer and the servo motor to move downward together. When the predetermined position is reached, the position detection device in the main shaft mechanism will send a low position in place signal, indicating that the lifting operation is completed. When the main shaft mechanism needs to be raised to a high position, the driving cylinder is started to retract it, and the retraction action of the driving cylinder pulls the lifting hanging plate upward through the floating joint. Similarly, the lifting hanging plate drives the above components to move upward together. During the rising process, the adjusting bolt cooperates with the limit block to ensure that the lifting hanging plate does not exceed the predetermined rising limit. range, when it reaches the predetermined position, the position detection device will send a high-position in-place signal. After the spindle mechanism reaches the required position, the servo motor is started, and the rotational action of the servo motor is decelerated and torque-increased by the reducer, and then transmitted to the coupling and the spindle mechanism. The spindle mechanism rotates synchronously under the drive of the coupling to achieve the required rotational action. The precise control of the drive cylinder and the fine-tuning function of the adjustment bolt can ensure the precise positioning of the spindle mechanism at high and low positions. This precise control is particularly important for vacuum environment applications that require high-precision positioning. The device is suitable for use in vacuum environments and can meet the requirements of special processes for rotational positioning accuracy. At the same time, it has a compact structure, is easy to install and debug, and is suitable for a variety of different application scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic structural diagram of the utility model.

[0021] Among them: 1. Mounting base plate; 2. Driving cylinder; 3. Spindle mechanism; 4. Adjusting bolt; 5. Limit block; 6. Floating joint; 7. Lifting plate; 8. Coupling; 9. Motor mounting plate; 10. Reducer; 11. Servo motor. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0023] The utility model provides the following technical solutions:

[0024] Example 1

[0025] See also Figure 1 A spindle lifting device that ensures rotation positioning accuracy under a vacuum environment includes a mounting base 1, a driving cylinder 2 and a spindle mechanism 3 are installed at the bottom of the mounting base 1, an adjusting bolt 4 is provided on the driving cylinder 2, a floating joint 6 is installed at the output end of the driving cylinder 2, a lifting hanging plate 7 is provided at the bottom of the floating joint 6, a limited stopper 5 is provided on the outside of the floating joint 6, a coupling 8 is provided at the bottom of the spindle mechanism 3, a motor mounting plate 9 is provided at the bottom of the coupling 8, a reducer 10 is provided at the bottom of the motor mounting plate 9, and a servo motor 11 is provided at the bottom of the reducer 10.

[0026] Specifically, two driving cylinders 2 are provided, one located on the left and the other on the bottom of the mounting base plate 1 .

[0027] Specifically, two limit blocks 5 , two floating joints 6 and two lifting plates 7 are provided, each located at the bottom of the two driving cylinders 2 .

[0028] Specifically, the motor mounting plate 9 is located inside the two lifting hanging plates 7 .

[0029] Specifically, the two lifting hanging plates 7 are connected to the motor mounting plate 9 through bolts.

[0030] Specifically, the servo motor 11 is connected to the reducer 10 via bolts.

[0031] Specifically, a position detection device is provided in the spindle mechanism 3 .

[0032] Through the above technical solution, when the spindle mechanism 3 needs to be lowered to the low position, the driving cylinder 2 is started to extend it, and the extending action of the driving cylinder 2 pushes the lifting hanging plate 7 downward through the floating joint 6. The lifting hanging plate 7 serves as a supporting platform, driving the motor mounting plate 9, the spindle mechanism 3, the reducer 10 and the servo motor 11 to move downward together. When the predetermined position is reached, the position detection device in the spindle mechanism 3 will send a low position in place signal, indicating that the lifting operation is completed. When the spindle mechanism 3 needs to be raised to the high position, the driving cylinder 2 is started to retract it. The retraction action of the driving cylinder 2 pulls the lifting hanging plate 7 upward through the floating joint 6. Similarly, the lifting hanging plate 7 drives the above components to move upward together. During the rising process, the adjusting bolt 4 cooperates with the limit block 5 to ensure that the lifting hanging plate 7 does not exceed the predetermined rising range. When the predetermined position is reached, the position detection device will send a high position signal. The in-place signal is received. After the spindle mechanism 3 reaches the required position, the servo motor 11 is started. The rotational action of the servo motor 11 is decelerated and torque-increased by the reducer 10, and then transmitted to the coupling 8 and the spindle mechanism 3. The spindle mechanism 3 rotates synchronously under the drive of the coupling 8 to achieve the required rotational action. The precise control of the driving cylinder 2 and the fine-tuning function of the adjusting bolt 4 can ensure the precise positioning of the spindle mechanism 3 at high and low positions. This precise control is particularly important for vacuum environment applications that require high-precision positioning. The device is suitable for use in a vacuum environment and can meet the requirements of special processes for rotational positioning accuracy. At the same time, it has a compact structure, is easy to install and debug, and is suitable for a variety of different application scenarios. The internal circuit connections of the driving cylinder 2, spindle mechanism 3, coupling 8, reducer 10 and servo motor 11 are all known technologies in this field and will not be elaborated on here.

[0033] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit thereof, and the scope is defined by the appended claims and their equivalents.

Claims

1. A spindle lifting device that ensures rotation positioning accuracy in a vacuum environment, comprising a mounting base (1), characterized in that: A driving cylinder (2) and a main shaft mechanism (3) are installed at the bottom of the mounting base plate (1), an adjusting bolt (4) is provided on the driving cylinder (2), a floating joint (6) is installed at the output end of the driving cylinder (2), a lifting hanging plate (7) is provided at the bottom of the floating joint (6), a limit stopper (5) is provided on the outside of the floating joint (6), a coupling (8) is provided at the bottom of the main shaft mechanism (3), a motor mounting plate (9) is provided at the bottom of the coupling (8), a reducer (10) is provided at the bottom of the motor mounting plate (9), and a servo motor (11) is provided at the bottom of the reducer (10).

2. The spindle lifting device for ensuring rotation positioning accuracy in a vacuum environment according to claim 1, characterized in that: The driving cylinders (2) are provided with two, respectively located on the left and right sides of the bottom of the mounting base plate (1).

3. The spindle lifting device for ensuring rotation positioning accuracy in a vacuum environment according to claim 1, characterized in that: The limit block (5), floating joint (6) and lifting plate (7) are each provided with two of them, each located at the bottom of the two driving cylinders (2).

4. The spindle lifting device for ensuring rotation positioning accuracy in a vacuum environment according to claim 1, characterized in that: The motor mounting plate (9) is located inside the two lifting hanging plates (7).

5. The spindle lifting device for ensuring rotation positioning accuracy in a vacuum environment according to claim 1, characterized in that: The two lifting hanging plates (7) are connected to the motor mounting plate (9) via bolts.

6. The spindle lifting device for ensuring rotation positioning accuracy in a vacuum environment according to claim 1, characterized in that: The servo motor (11) is connected to the reducer (10) via bolts.

7. The spindle lifting device for ensuring rotation positioning accuracy in a vacuum environment according to claim 1, characterized in that: A position detection device is provided in the spindle mechanism (3).

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