Film coating regulation and control device and evaporation equipment

Abstract

The utility model relates to the technical field of coating, in particular to a coating regulation and control device and evaporation equipment. The coating regulation and control device comprises an inner-layer baffle plate, an outer-layer baffle plate, a first linear displacement mechanism and a second linear displacement mechanism; the first linear displacement mechanism is connected with the outer-layer baffle, the second linear displacement mechanism is connected with the inner-layer baffle, and the outer-layer baffle and the inner-layer baffle are subjected to reciprocating displacement adjustment in the same direction; the inner-layer baffle and the outer-layer baffle are arranged in a relative sliding mode. The first linear displacement mechanism drives the outer-layer baffle to move to adjust the airflow direction, the second linear displacement mechanism drives the inner-layer baffle to move to adjust the airflow quantity, and the uniformity of evaporation particles in a coating area is changed by changing the airflow, so that the requirement for uniformity of evaporation is met; and meanwhile, a series of operations such as cavity opening for vacuum breaking, thickness baffle dismounting for cutting modification, vacuumizing and water vapor removal are not needed, and the influence on the coating efficiency is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to a film coating control device and evaporation equipment. Background Art

[0002] In PVD coating equipment, source materials are evaporated or otherwise formed into source material vapor. This vapor is then deposited on a substrate in a vacuum environment to form a coating. However, because the evaporation source is typically located far from the substrate, the vapor movement can be uneven, resulting in uneven thickness across the coating. For example, in the field of solar cells, PVD coating equipment is widely used. Because each coating layer is relatively thin, the uniformity of the coating thickness is crucial, as it directly impacts the cell's photoelectric conversion efficiency.

[0003] Existing techniques for optimizing film thickness distribution primarily involve adjusting the effective coating area by opening a cavity and modifying the thickness baffle. Modifying the thickness baffle requires opening the cavity, disrupting the vacuum chamber atmosphere. Water vapor and the vacuum level will affect the coating process, significantly increasing the time and cost involved in opening the cavity to break the vacuum, removing and modifying the thickness baffle, evacuating the chamber, and removing moisture, severely impacting coating efficiency. Utility Model Content

[0004] The purpose of the present invention is to provide a coating control device and an evaporation device, which can solve the above technical problems.

[0005] The embodiment of the present utility model is achieved as follows:

[0006] In a first aspect, the present invention provides a coating control device, which includes an inner baffle, an outer baffle, a first linear displacement mechanism, and a second linear displacement mechanism;

[0007] The first linear displacement mechanism is connected to the outer baffle, and the second linear displacement mechanism is connected to the inner baffle. The outer baffle and the inner baffle are adjusted to move back and forth in the same direction.

[0008] The inner baffle and the outer baffle are arranged to slide relative to each other.

[0009] In an optional embodiment, the first linear displacement mechanism and / or the second linear displacement mechanism are each independently a screw mechanism or a telescopic mechanism.

[0010] In an optional embodiment, the outer baffle is a sleeve-type structure, and the outer baffle includes a movable channel for the inner baffle to movably penetrate.

[0011] In an optional embodiment, the outer baffle and the inner baffle are both plate-type structures, and the plate surfaces of the outer baffle and the inner baffle are arranged with a gap or in a sliding fit.

[0012] In an optional embodiment, a coating rate detection device is provided on an end of the outer baffle away from the first linear displacement mechanism.

[0013] In a second aspect, the present invention provides an evaporation device, which includes a main body, an evaporation source, and a coating control device as described in any one of the above;

[0014] The coating control device is arranged between the evaporation source and the sample, and is used to control the shielded area of ​​the vapor;

[0015] The evaporation source is disposed in the inner cavity of the main body;

[0016] The outer baffle and the inner baffle are arranged inside the main body;

[0017] The first linear displacement mechanism and the second linear displacement mechanism are arranged on the inner wall of the main body.

[0018] In an optional embodiment, the distance between the inner baffle and the inner wall of the main body is smaller than the distance between the outer baffle and the inner side wall of the main body;

[0019] The outer baffle is driven by the first linear displacement mechanism to adjust the evaporation area above the evaporation source;

[0020] The inner baffle is driven by the second linear displacement mechanism to adjust a set distance between the inner baffle and the inner wall of the main body.

[0021] In an optional embodiment, a plurality of the coating control devices are arranged side by side in the plane shielding the vapor and perpendicular to the direction of reciprocal movement to form an adjustment unit;

[0022] The plurality of adjustment units are evenly arranged around the inner cavity of the evaporation device, so that a coating area is defined by adjusting the plurality of adjustment units.

[0023] In an optional embodiment, in one of the adjustment units, any two adjacent outer baffles are in relative sliding contact.

[0024] In an optional embodiment, the first linear displacement mechanism is arranged on a side of the outer baffle away from the evaporation source.

[0025] The beneficial effects of the embodiments of the present utility model are:

[0026] The outer baffle is driven to move by the first linear displacement mechanism to adjust the direction of the airflow, and the inner baffle is driven to move by the second linear displacement mechanism to adjust the airflow rate. By changing the airflow, the uniformity of the evaporated particles in the coating area is changed, thereby meeting the uniformity requirement of evaporation. At the same time, there is no need to open the cavity to break the vacuum, disassemble the thickness baffle for cutting and modification, vacuumize, remove water vapor and other operations, thereby reducing the impact on the coating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0028] Figure 1 A schematic structural diagram of a film coating control device provided in an embodiment of the present invention;

[0029] Figure 2 for Figure 1 A top view of

[0030] Figure 3 A schematic structural diagram of an evaporation device provided in an embodiment of the present utility model;

[0031] Figure 4 for Figure 3 Top view of .

[0032] Icons: 1-outer baffle; 2-inner baffle; 3-first screw rod; 4-slider; 5-first drive motor; 6-second screw rod; 7-second drive motor; 8-main body; 9-coating rate detection device; 10-guide rod; 11-coating control device; 12-evaporation source; 13-sample; 14-adjustment unit. DETAILED DESCRIPTION

[0033] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0034] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0035] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0036] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0037] Furthermore, terms such as "horizontal," "vertical," and "overhanging" do not necessarily imply that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0038] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0039] The following embodiments of the present invention are described in detail with reference to the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments may be combined with each other.

[0040] In the first aspect, the utility model provides a coating control device. Figure 1 and Figure 2As shown, it includes an inner baffle 2, an outer baffle 1, a first linear displacement mechanism and a second linear displacement mechanism; the first linear displacement mechanism is connected to the outer baffle 1, and the second linear displacement mechanism is connected to the inner baffle 2, and the outer baffle 1 and the inner baffle 2 are adjusted to move back and forth in the same direction; the inner baffle 2 and the outer baffle 1 are arranged to slide relative to each other.

[0041] In this embodiment, if Figure 3 As shown, the coating control device is arranged between the evaporation source 12 and the sample 13, and is used to control the local area where the vapor is blocked; the first linear displacement mechanism drives the outer baffle 1 to move, so that the source material gas can be changed in the displacement direction of the outer baffle 1. The area toward the sample substrate, thereby changing the evaporation rate of the area corresponding to the outer baffle, and then controlling the thickness of the coating on the sample 13 in the area; the second linear displacement mechanism drives the inner baffle 2 to move, thereby changing the airflow state of the evaporation equipment, and further changing the airflow through the middle evaporated particles, so that the deviation value of the evaporation rate reaches a preset range.

[0042] In this embodiment, the outer baffle and the inner baffle can be set to slide relative to each other, and the outer baffle 1 and the inner baffle 2 slide relative to each other, so as to realize that the coating control device can perform bidirectional displacement adjustment in the moving direction of the first displacement mechanism.

[0043] Specifically, the outer baffle 1 can block the source material gas on the displacement path of the vapor. By moving the outer baffle 1, the shape and area of ​​the sample 13 for vapor deposition can be adjusted; the linear movement of the inner baffle 2 enables the inner baffle 2 to adjust the distance relative to the inner cavity wall of the main body 8, which is suitable for adjusting the airflow direction in the chamber and the airflow velocity near the outer baffle 1.

[0044] In an optional embodiment, the first linear displacement mechanism and / or the second linear displacement mechanism are each independently a screw mechanism or a telescopic mechanism.

[0045] Specifically, in this embodiment, the first linear displacement mechanism includes a first drive motor 5, a first screw rod 3 and a slider 4; the slider 4 is arranged on the outer baffle 1, the first screw rod 3 is threadedly connected to the slider 4, and the motor shaft of the first drive motor 5 is connected to one end of the first screw rod 3.

[0046] In this embodiment, the telescopic mode of the first linear displacement mechanism is a threaded screw mode, that is, the first drive motor 5 is used as the power, and the threaded cooperation of the first screw and the slider 4 is used to drive the outer baffle 1 fixedly connected to the slider 4 to move linearly, thereby changing the shielding area of ​​the outer baffle 1 to the source material gas, thereby achieving the purpose of changing the evaporation rate.

[0047] It can be understood that in this embodiment, the first linear displacement mechanism can be in the form of a threaded screw, but it is not limited to the threaded screw structure. It can also be other linear transmission structures, such as a gear rack structure, a turbine worm structure, etc., as long as it can achieve the movement of the outer baffle 1 through the power device.

[0048] It can also be understood that in this embodiment, the power of the first linear displacement mechanism can be a drive motor, but it is not limited to a drive motor. It can also be other types of power devices, such as hydraulic cylinders, air cylinders, etc. In other words, as long as it can provide linear movement power to the outer baffle 1 through the transmission structure, it will be fine.

[0049] In this embodiment, the first driving motor 5 is disposed outside the evaporation device, and the first screw rod 3 passes through the side wall of the evaporation device and is inserted into the interior of the evaporation device to be threadedly connected to the slider 4 .

[0050] In this embodiment, the second linear displacement mechanism includes a second drive motor 7 and a second screw rod 6 ; the second screw rod 6 is threadedly connected to the inner baffle 2 , and the motor shaft of the second drive motor 7 is connected to one end of the second screw rod 6 .

[0051] In this embodiment, the second linear displacement mechanism is similar to the first linear displacement mechanism, but does not have a slider 4 . Instead, the second linear displacement mechanism is directly threadedly connected to the inner baffle 2 via a second lead screw, thereby driving the inner baffle 2 to move linearly.

[0052] In this embodiment, the second driving motor 7 is arranged outside the evaporation device, and the second screw rod 6 passes through the side wall of the evaporation device and is threadedly connected to the inner baffle 2 inside.

[0053] More specifically, in this embodiment, the outer baffle 1 and the inner baffle 2 are slidingly connected, and the setting of the first screw 3 and the second screw 6 enables the inner baffle 2 and the outer baffle 1 to be positioned on the inner wall of the evaporation equipment, thereby ensuring the stability of the coating control device during use.

[0054] It should be noted that the transmission modes of the second linear displacement mechanism and the first linear displacement mechanism may be the same or different, and may be set according to actual installation space and installation cost.

[0055] It should also be pointed out that the power of the second linear displacement mechanism can be a drive motor, which is not limited to a drive motor, but can also be a power device such as a hydraulic cylinder, a pneumatic cylinder, etc., as long as it can transmit the moving power to the inner baffle 2 through the transmission structure.

[0056] In this embodiment, a guide hole is provided on the slider 4 ; one end of the guide rod 10 is fixed, and the other end is inserted into the guide hole for guiding the movement of the outer baffle 1 .

[0057] Specifically, in this embodiment, one end of the guide rod 10 is fixedly set on the inner wall of the evaporation equipment, and the other end is inserted into the guide hole on the slider 4. When the slider 4 moves following the outer baffle 1, the moving trajectory of the slider 4 is limited by the guide rod 10, thereby achieving the purpose of limiting the moving trajectory of the outer baffle 1, reducing the shaking of the outer baffle 1 when it moves, performing radial limitation of the outer baffle 1, and increasing the accuracy of the outer baffle 1 when performing linear displacement.

[0058] In this embodiment, the guide rod 10 may be matched with a guide hole provided on the guide block, or may be provided as a groove structure.

[0059] In this embodiment, the guide rod 10 is a round rod or a square rod.

[0060] It is understandable that the shape of the guide rod 10 can also be other shapes, such as trapezoidal, triangular, etc., as long as it can cooperate with the guide hole or guide groove to guide the outer baffle 1.

[0061] In an optional embodiment, the number of the guide holes is two, and the two guide holes are respectively arranged on both sides of the first screw rod 3.

[0062] In this embodiment, there are two guide holes, which can play a role in rotational positioning of the movement of the outer baffle 1, thereby preventing it from rotating during the movement and affecting the movement accuracy.

[0063] It can be understood that in this embodiment, the number of guide holes is two, but it is not limited to two. It can also be a larger number, such as three, four, etc., which can be set according to the volume of the outer baffle 1 and the guide block.

[0064] In an optional embodiment, the outer baffle 1 is a sleeve-type structure, and the outer baffle 1 includes a movable channel for the inner baffle 2 to movably penetrate.

[0065] In this embodiment, a sleeve-like structure is formed between the outer baffle 1 and the inner baffle 2, with a rectangular, trapezoidal, or other cross-sectional shape. Specifically, the outer baffle 1 is cylindrical, its inner cavity serving as a movable channel, and the inner baffle 2 is positioned and slidable within the movable channel of the outer baffle 1. This nested arrangement reduces space occupied within the coating chamber, simplifies the structure, and allows for greater precision in the displacement of the outer and inner baffles 1 and 2.

[0066] In an optional embodiment, the outer baffle 1 and the inner baffle 2 are both plate-type structures, and the plate surfaces of the outer baffle 1 and the inner baffle 2 are arranged with a gap or in a sliding fit.

[0067] In this embodiment, the outer baffle 1 and the inner baffle 2 are stacked in the direction of evaporation, either in a fitted manner or with a small gap between them. This allows both linear movement of the outer baffle 1 and the inner baffle 2, and allows them to move relative to each other. In this arrangement, the widths of the outer baffle 1 and the inner baffle 2 can be equal. When several sets of coating control devices are arranged adjacent to each other, the two outer baffles 1 and the two inner baffles 2 in two adjacent sets of coating control devices can slide in contact with each other, thereby reducing or eliminating the gap between any two adjacent sets of coating control devices. This reduces or prevents evaporated particles from the evaporation source from escaping between the inner baffles 1 and 2, or from escaping through the gap between the outer baffles 1 and 1. Evaporated particles can only contact the sample through the airflow channel left above the evaporation source, thereby ensuring uniformity and stability during evaporation and the coating control effect.

[0068] In this embodiment, the relationship between the outer baffle 1 and the inner baffle 2 can be set as a sleeve form or a stacked form as described above, and it can also be set as other deformed structures, such as setting the outer baffle 1 as a groove structure, and the inner baffle 2 is slidably set in the groove on the outer baffle 1, or setting the outer baffle 1 and the inner baffle 2 as L-shaped structures, and the outer baffle 1 and the inner baffle 2 are interlocked to form an overall structure with a rectangular cross-section, etc. In other words, as long as relative linear movement can be achieved between the outer baffle 1 and the inner baffle 2, and they fit together or have only a small gap.

[0069] In an optional embodiment, a coating rate detection device 9 is provided on an end of the outer baffle 1 away from the first linear displacement mechanism.

[0070] In this embodiment, the coating rate detection device 9 is a quartz crystal microbalance. After the coating rate detection device 9 is set on the outer baffle 1, the coating rate can be adjusted more accurately through the feedback of the coating rate detection device 9.

[0071] Specifically, the coating rate detection device 9 is arranged above the outer baffle 1 to facilitate the detection of the evaporation efficiency of the sample 13 passing through the opening position of the evaporation equipment, thereby being used to determine the coating film thickness of the corresponding area.

[0072] In an optional embodiment, a controller may also be provided, which is connected to the coating rate detection device 9, the first linear displacement mechanism and the second linear displacement mechanism by signal, and can control the first linear displacement mechanism and the second linear displacement mechanism to move accordingly according to the coating rate detection signal.

[0073] Specifically, in this embodiment, through the setting of the controller, the coating rate detection device 9, the first drive motor 5 of the first linear displacement mechanism, and the second drive motor 7 of the second linear displacement mechanism are linked to control the first drive motor 5 and the second drive motor 7 to regulate the evaporation rate. The data detected by the coating rate detection device 9 is fed back to the controller, thereby further controlling the first drive motor 5 and the second drive motor 7 to perform precise adjustments to achieve the best control effect.

[0074] In the second aspect, the utility model provides a vapor deposition device, such as Figure 3 As shown, it includes a main body 8, an evaporation source 12 and a coating control device as described in any one of the above items; the coating control device is arranged between the evaporation source 12 and the sample 13, and is used to control the shielded area of ​​the vapor; the evaporation source 12 is arranged in the inner cavity of the main body 8; the outer baffle 1 and the inner baffle 2 are arranged inside the main body 8; the first linear displacement mechanism and the second linear displacement mechanism are arranged on the inner wall of the main body 8.

[0075] In this embodiment, in the evaporation device, the main body 8 combines all the components together to form an integrated evaporation device.

[0076] Among them, the main body 8 is a shell or cylinder structure, and an evaporation source 12 is set at the bottom inside it. The sample 13 moves from the upper part of the main body 8. When passing above the evaporation source 12, the evaporation source 12 evaporates the sample 13. The coating control device 11 in the aforementioned embodiment adjusts the shielding area above the evaporation source 12, thereby achieving the adjustment of the evaporation rate of the sample 13.

[0077] Specifically, in this embodiment, the outer baffle 1 in the coating control device 11 is used to adjust the coating area above the evaporation source 12, and the inner baffle 2 is used to adjust the airflow between the evaporation source 12 and the inner wall of the main body 8, thereby achieving the adjustment of the airflow of the evaporated particles in the middle position.

[0078] In an optional embodiment, the distance between the inner baffle 2 and the inner wall of the main body 8 is smaller than the distance between the end of the outer baffle 1 and the interior of the main body 8; the outer baffle 1 is driven by the first linear displacement mechanism to adjust the evaporation area above the evaporation source; the inner baffle 2 is driven by the second linear displacement mechanism to adjust the set distance between the inner baffle 2 and the inner wall of the main body 8.

[0079] Specifically, in this embodiment, the outer baffle 1 and the inner baffle 2 are provided in order to be able to adjust the inside and outside of the coating area separately and independently. The outer baffle 1 can adjust the size of the coating area, the shielding position and the shielding area in the coating area without affecting the airflow state between the airflow and the cavity wall; the inner baffle 2 is used to adjust the distance between the coating control device and the inner cavity wall of the main body to regulate the flow state of the airflow in the chamber without affecting the area of ​​the coating area, and adjust the uniformity of the evaporated particles in the coating area.

[0080] In an optional embodiment, if Figure 4 As shown, multiple coating control devices are arranged side by side in the plane that blocks the vapor and perpendicular to the direction of reciprocal movement to form an adjustment unit 14; multiple adjustment units 14 are evenly arranged around the inner cavity of the evaporation equipment to define the coating area through the adjustment of several adjustment units 14.

[0081] In this embodiment, in order to achieve a wider range of adjustment of the opening above the evaporation source 12, in this embodiment, a plurality of coating control devices 11 are provided, and the plurality of coating control devices 11 are arranged side by side to form an adjustment unit 14, which can simultaneously adjust the size of the opening in a single direction; when the plurality of adjustment units 14 are evenly arranged around the inner cavity inside the main body 8, multi-directional adjustment of the opening above the evaporation source 12 can be achieved, further increasing the range of adjustment and limiting various coating shapes and coating areas.

[0082] When adjusting the coating area using the adjustment unit 14, the adjustment can be performed by adjusting one or more of the adjustment units 14. It is sufficient to adjust different adjustment units 14 based on the actual area and shape requirements. Simultaneously, based on the results of the coating rate detection device 9, the outer baffle 1 and the inner baffle 2 in the area are adjusted for displacement to adjust the coating thickness of the sample in that area.

[0083] In an optional embodiment, in one of the adjustment units 14 , any two adjacent outer baffles 1 are in relative sliding contact.

[0084] In this embodiment, any two adjacent outer baffles 1 in the same adjustment unit 14 can contact each other and can slide relative to each other, thereby ensuring good independent adjustment capability and preventing evaporated particles from escaping upward from the gap between the two adjacent outer baffles 1, so that the evaporated particles can only contact the sample through the air flow channel left above the evaporation source, thereby ensuring the uniformity and stability of the sample during evaporation and ensuring the coating control effect.

[0085] Specifically, the inner baffles 2 are spaced a certain distance from the coating area. Therefore, a small gap between adjacent inner baffles 2 will not significantly affect the coating effect, but a larger gap may affect the coating effect. Therefore, in this embodiment, the gap between two adjacent inner baffles 2 is less than or equal to 1 mm, which can ensure the coating effect.

[0086] In an optional embodiment, the first linear displacement mechanism is provided on a side of the outer baffle 1 away from the evaporation source.

[0087] In this embodiment, the first linear displacement mechanism is disposed on the side of the outer baffle 1 facing away from the evaporation source 12, that is, on the upper side of the outer baffle 1. This arrangement prevents vapor from acting on the first linear displacement mechanism, thereby affecting the first linear displacement mechanism and thus affecting the accuracy of evaporation area adjustment.

[0088] In this embodiment, the first drive motor 5 of the first linear displacement mechanism and the second drive motor 7 of the second linear displacement mechanism are both disposed outside the main body 8 .

[0089] In this embodiment, the first drive motor 5 and the second drive motor 7 are both arranged outside the main body 8 , which can facilitate heat dissipation and maintenance of the first drive motor 5 and the second drive motor 7 .

[0090] The evaporation equipment provided by the utility model has a method for adjusting the uniformity of the coating in real time according to the shape and size of different samples 13:

[0091] Adjust the shape and area of ​​the coating region according to the shape and size of the sample 13;

[0092] Adjust the coating uniformity.

[0093] The evaporation device provided by the utility model adjusts the shape and area of ​​the coating region according to the shape and size of the sample 13 as follows:

[0094] The size and shape of the sample 13 to be coated are input into the control center, and the control center adjusts the first drive motor 5 to drive the outer baffle 1 to move back and forth, thereby adjusting the shape and area of ​​the coating region.

[0095] The method for adjusting the uniformity of the coating film in the evaporation equipment provided by the utility model is as follows:

[0096] The real-time coating rate detection device 9 is fixed to the position closest to the evaporation area above the outer baffle 1 of the retractable inner and outer nested baffles, and the detected coating rate is fed back to the control center. The control center then controls the positions of the outer baffle 1 and the inner baffle 2 so that the area with a larger coating thickness can be shielded by the outer baffle 1 until the average evaporation rate detected in real time by all coating rate detection devices 9 reaches a preset range. The control center then controls the second drive motor 7 to drive the inner baffle 2 to move inward, and by adjusting the airflow close to the cavity wall, the airflow passing through the evaporated particles in the middle is changed until the deviation value of the evaporation rate detected in real time by all coating rate detection devices 9 reaches a preset range.

[0097] The beneficial effects of the embodiments of the present utility model are:

[0098] The outer baffle 1 is driven to move by the first linear displacement mechanism to adjust the direction of the airflow, and the inner baffle 2 is driven to move by the second linear displacement mechanism to adjust the airflow rate. By changing the airflow, the uniformity of the evaporated particles in the coating area is assisted to be changed, thereby meeting the uniformity requirement of evaporation. At the same time, there is no need to open the cavity to break the vacuum, disassemble the thickness baffle for cutting and modification, vacuumize, remove water vapor and other operations, thereby reducing the impact on the coating efficiency.

[0099] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A coating control device, characterized in that: It includes an inner baffle, an outer baffle, a first linear displacement mechanism and a second linear displacement mechanism; The first linear displacement mechanism is connected to the outer baffle, and the second linear displacement mechanism is connected to the inner baffle. The outer baffle and the inner baffle are adjusted to move back and forth in the same direction. The inner baffle and the outer baffle are arranged to slide relative to each other.

2. The coating control device according to claim 1, characterized in that: The first linear displacement mechanism and / or the second linear displacement mechanism are each independently a screw mechanism or a telescopic mechanism.

3. The coating control device according to claim 1, characterized in that: The outer baffle is a sleeve-type structure, and includes a movable channel for the inner baffle to movably penetrate.

4. The coating control device according to claim 1, characterized in that: The outer baffle and the inner baffle are both plate-type structures, and the plate surfaces of the outer baffle and the inner baffle are arranged with a gap or in a sliding fit.

5. The coating control device according to claim 1, characterized in that: A coating rate detection device is provided on one end of the outer baffle away from the first linear displacement mechanism.

6. A vapor deposition device, characterized in that: It comprises a main body, an evaporation source and the coating control device according to any one of claims 1 to 5; The coating control device is arranged between the evaporation source and the sample, and is used to control the shielded area of ​​the vapor; The evaporation source is disposed in the inner cavity of the main body; The outer baffle and the inner baffle are arranged inside the main body; The first linear displacement mechanism and the second linear displacement mechanism are arranged on the inner wall of the main body.

7. The evaporation equipment according to claim 6, characterized in that The distance between the inner baffle and the inner wall of the main body is smaller than the distance between the outer baffle and the inner side wall of the main body; The outer baffle is driven by the first linear displacement mechanism to adjust the evaporation area above the evaporation source; The inner baffle is driven by the second linear displacement mechanism to adjust a set distance between the inner baffle and the inner wall of the main body.

8. The evaporation equipment according to claim 6, characterized in that A plurality of the coating control devices are arranged side by side in a plane shielding the vapor and perpendicular to the direction of reciprocating movement to form an adjustment unit; The plurality of adjustment units are evenly arranged around the inner cavity of the evaporation device, so that a coating area is defined by adjusting the plurality of adjustment units.

9. The evaporation equipment according to claim 8, characterized in that In one of the adjustment units, any two adjacent outer baffles are in relative sliding contact.

10. The evaporation equipment according to claim 8, characterized in that The first linear displacement mechanism is arranged on a side of the outer baffle away from the evaporation source.

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