Feeding device for single crystal furnace and single crystal furnace

Abstract

The utility model discloses a feeding device for a single crystal furnace and the single crystal furnace, and belongs to the technical field of adding doping agents into the single crystal furnace. The feeding device for the single crystal furnace comprises a charging barrel, a guide pipe and a connecting rod, an opening is formed in the first end of the charging barrel, a mounting part is arranged at the second end of the charging barrel, the connecting rod penetrates through the charging barrel and is connected with the mounting part, and the inner wall of the charging barrel and the mounting part jointly define a space for containing materials; according to the feeding device, the doping agent and the silicon material can be added into the single crystal furnace at the same time, the feeding efficiency can be improved, effective adding of the doping agent can be ensured, and the machining cost is reduced.

Description

Technical Field

[0001] The present application belongs to the field of single crystal furnace doping, and specifically relates to a feeding device for a single crystal furnace and a single crystal furnace. Background Art

[0002] For crystalline silicon solar cells, the photoelectric conversion efficiency is related to the resistivity of the silicon wafer. This required resistivity must be achieved during the crystal pulling process. Therefore, the resistivity of the crystalline silicon is often adjusted by doping during the crystal pulling process. This involves injecting dopants using a doping device within the single crystal furnace. However, in related technologies, dopant addition is performed separately from doping, resulting in a time-consuming doping process. Utility Model Content

[0003] The purpose of the embodiments of the present application is to provide a feeding device for a single crystal furnace and a single crystal furnace, which at least solves the problem of the feeding device adding dopants and materials into the single crystal furnace at the same time, thereby improving the feeding efficiency and reducing production costs.

[0004] In a first aspect, an embodiment of the present application provides a charging device for a single crystal furnace, the charging device for a single crystal furnace comprising: a barrel, a conduit, and a connecting rod;

[0005] The first end of the barrel has an opening, the second end of the barrel is provided with a mounting piece, the connecting rod is passed through the barrel, and the connecting rod is connected to the mounting piece, and the inner wall of the barrel and the mounting piece together define a space for accommodating material;

[0006] The guide tube extends along the axial direction of the connecting rod.

[0007] When the above technical solution is adopted, the dopant can be easily added to the barrel through the conduit, and the dopant can be added at the same time when the material is added to the barrel, avoiding the problem of extended working hours and wasted working hours. The material and dopant can be added to the barrel at the same time to avoid wasting working hours, thereby improving the efficiency of adding materials and reducing the cost of crystal pulling. In addition, the dopant is added to the barrel through the conduit. Since the dopant is in the conduit, the amount of dopant input is ensured to match the actual doping amount.

[0008] Optionally, the conduit is connected to the connecting rod.

[0009] With the above technical solution, since the conduit is arranged on the connecting rod, there is no need to modify the existing feeding structure.

[0010] By changing the configuration and adding a component combining the conduit and the connecting rod, it is possible to add materials while adding doping.

[0011] Optionally, the conduit is located inside the barrel, and the conduit has a relative feed end and a discharge end along the axial direction of the connecting rod, the discharge end of the conduit is close to the mounting member, and the feed end of the conduit is away from the mounting member;

[0012] The distance between the discharge end and the mounting member ranges from 10 mm to 200 mm.

[0013] When adopting the above technical solution, ensure that the distance between the discharge end and the mounting part is moderate to avoid accumulation of dopants or silicon materials after flowing out of the discharge end when the distance between the discharge end and the mounting part is less than 10 mm; when the distance between the discharge end and the mounting part is greater than 200 mm, the dopant will volatilize in advance before entering the molten silicon, resulting in poor resistivity uniformity in the silicon rods / silicon wafers.

[0014] Optionally, the distance between the feed end of the conduit and the opening ranges from 10 mm to 180 mm.

[0015] When the above technical solution is adopted, it can avoid the situation where the distance between the conduit and the opening is greater than 180 mm, and the dopant cannot enter the conduit in time when added to the conduit due to the long distance, resulting in premature volatilization of the dopant; in addition, it can avoid the situation where the distance between the conduit and the opening is less than 10 mm, and the dopant takes a long time to move along the conduit to the feed end, affecting the feeding efficiency.

[0016] Optionally, the charging device for the single crystal furnace further includes a doping funnel, which is arranged at the end of the conduit away from the mounting member, and the doping funnel is separable from the end of the conduit away from the mounting member.

[0017] When a dopant is needed to be added to the barrel, the dopant is transferred to the doping funnel. The dopant then flows through the funnel into the conduit and out of the conduit into the barrel, completing the addition of the dopant to the barrel. Furthermore, the doping funnel is detachable from the conduit at the end facing away from the mounting member. This allows the dopant to be separated from the conduit after adding the dopant to the barrel, allowing it to be stored for reuse.

[0018] Optionally, the single crystal furnace charging device further comprises a fixing assembly, and the conduit is fixed to the connecting rod via the fixing assembly so that the conduit is located in the barrel. In the case of adopting the above technical solution, the conduit is fixed to the connecting rod via the fixing assembly, so that the conduit can be located in the barrel, thereby avoiding the problem of the conduit shaking and difficulty in adding doping substances when adding doping substances to the barrel through the conduit.

[0019] Appear.

[0020] Optionally, the fixing assembly includes a plurality of fixing members, which are distributed along the axial direction of the connecting rod, and the first fixed end of each fixing member is fixed to the connecting rod, and the second fixed end of each fixing member is connected to the conduit so that the conduit is located in the barrel.

[0021] When the above technical solution is adopted, the conduit is fixed at multiple positions in the axial direction of the connecting rod, which can further ensure that the conduit is fixed relative to the barrel, avoiding the problem of the conduit shaking when adding doping substances through the conduit.

[0022] Optionally, the second fixing end of the fixing member is provided with a clamping hole, the catheter passes through the clamping hole, and the catheter cooperates with the clamping hole to connect the second fixing end of the fixing member to the catheter.

[0023] When the above technical solution is adopted, when it is necessary to fix the conduit in the barrel, the conduit can be directly inserted into the clamping hole on the fixing member, and the conduit and the clamping hole are interference-fitted, thereby completing the installation of the conduit in the barrel and ensuring that the conduit is relatively fixed in the barrel. In other words, by providing the clamping hole on the fixing member, it is possible to easily fix the conduit in the barrel.

[0024] Optionally, the fixing member includes a fixing portion and a clamping portion, and the clamping portion is movably connected to the fixing portion; the clamping portion clamps the catheter, and the fixing portion is connected to the connecting rod.

[0025] When the above technical solution is adopted, the size of the conduit for the single crystal furnace provided in the embodiment of the present application can be diversified.

[0026] In a second aspect, an embodiment of the present application provides a single crystal furnace, which includes the single crystal furnace feeding device described in any one of the first aspects above.

[0027] In the embodiment of the present application, since the first end of the barrel has an opening and the second end of the barrel is provided with a mounting piece, the second end of the barrel can be sealed by the mounting piece, which is equivalent to the inner wall of the barrel and the mounting piece jointly defining a space for accommodating materials, so that materials can be added to the interior of the barrel through the opening at the first end of the barrel, and the materials are blocked by the mounting piece to prevent material leakage, and a connecting rod can be passed through the barrel, and the connecting rod is connected to the mounting piece, so that the mounting piece can fix the connecting rod to prevent the connecting rod from shaking. Since the conduit extends along the axial direction of the connecting rod and the conduit is connected to the connecting rod, when adding materials to the barrel through the opening, dopants can be added to the barrel through the conduit at the same time, that is, the dopants can be moved

[0028] To one end of the conduit, the dopant is allowed to enter the barrel along the conduit. That is, in the embodiment of the present application, by providing the barrel, the conduit, and the connecting rod, the structure of the feeding device provided by the embodiment of the present application is simple, and the conduit can be used to facilitate the addition of the dopant to the barrel. When adding the material to the barrel, the dopant can be added at the same time, thus avoiding the problem of extended working hours and resulting in wasted working hours. That is, through the feeding device provided by the embodiment of the present application, the material and the dopant can be added to the barrel at the same time, thus avoiding wasted working hours and thus improving efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 One of the schematic diagrams showing a charging device for a single crystal furnace provided in an embodiment of the present application;

[0030] Figure 2 A second schematic diagram showing a charging device for a single crystal furnace provided in an embodiment of the present application;

[0031] Figure 3 One of the schematic diagrams showing a fixing member provided in an embodiment of the present application;

[0032] Figure 4 A second schematic diagram showing a fixing member provided in an embodiment of the present application;

[0033] Figure 5 A third schematic diagram showing a fixing member provided in an embodiment of the present application;

[0034] Figure 6 A schematic diagram showing a doping funnel provided in an embodiment of the present application;

[0035] Figure 7 A fourth schematic diagram showing a fixing member provided in an embodiment of the present application.

[0036] Reference numerals:

[0037] 10: Barrel; 102: Opening; 103: Connecting rod; 20: Conduit; 201: Feed end; 202: Discharge end; 30: Doping funnel; 31: Funnel piece; 32: Connecting pipe; 301: Funnel mouth; 40: Fixing assembly; 41: Fixing piece; 42: Fixing portion; 43: Clamping portion; 411: Snap-fit ​​hole; 431: First sub-clamping piece; 432: Second sub-clamping piece; 4311: First connecting rod; 4312: Second connecting rod; 100: Fastener; 200: Mounting piece. DETAILED DESCRIPTION

[0038] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly refer to one or more of the features. Throughout the description of this application, unless otherwise specified, "plurality" means two or more. Furthermore, "and / or" in the specification and claims refers to at least one of the connected entities, and the character " / " generally indicates an "or" relationship between the connected entities.

[0039] In the description of this application, it is to be understood that the terms "center", "longitudinal", "lateral", "longitudinal" and "lateral" are used interchangeably.

[0040] The directions or positional relationships indicated by terms such as "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial" and "circumferential" are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present application and simplifying the description. They do not indicate or imply that the devices or elements referred to must have a specific direction, be constructed and operate in a specific direction. Therefore, they should not be understood as limiting the present application.

[0041] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0042] The core concept of this application is that, in order to change the conductivity of the crystal, different dopants are usually added during the production process of single crystal silicon to change its electrical properties. Since the temperature inside the furnace is relatively high during the production of the single crystal furnace, in order to prevent the dopant from volatilizing prematurely and causing deviations in the performance of the single crystal silicon during the doping process, the conventional practice is to carry out the feeding and doping separately, resulting in a long feeding process, low efficiency, and high crystal pulling costs. This application improves the efficiency of doping by arranging a conduit on the feeding device to add dopants while feeding; since the dopant is added to the single crystal furnace in the conduit, it can be ensured that the dopant is added to the single crystal silicon before volatilization, thereby improving the resistivity uniformity.

[0043] like Figure 1 and Figure 2 As shown, the charging device for the single crystal furnace includes: a barrel 10, a guide tube 20 and a connecting rod 103.

[0044] The first end of the barrel 10 has an opening 102, and the second end of the barrel 10 is provided with a mounting member 200. The connecting rod 103 passes through the barrel 10, and the connecting rod 103 is connected to the mounting member 200. The inner wall of the barrel 10 and the mounting member 200 jointly define a space for accommodating materials; the conduit 20 extends along the axial direction of the connecting rod 103, and the conduit 20 is connected to the connecting rod 103.

[0045] In the embodiment of the present application, since the first end of the barrel 10 has an opening 102 and the second end of the barrel 10 is provided with a mounting member 200, the second end of the barrel 10 can be blocked by the mounting member 200, which is equivalent to the inner wall of the barrel 10 and the mounting member 200 jointly defining a space for accommodating materials, so that materials can be added to the interior of the barrel 10 through the opening 102 at the first end of the barrel 10, and the materials are installed.

[0046] The mounting member 200 blocks the material from leaking, and the connecting rod 103 can be inserted into the barrel 10. The connecting rod 103 is connected to the mounting member 200, so that the mounting member 200 can fix the connecting rod 103 and prevent it from shaking. Because the conduit 20 extends along the axial direction of the connecting rod 103 and is connected to the connecting rod 103, when adding material to the barrel 10 through the opening 102, the dopant can be added to the barrel 10 simultaneously through the conduit 20. That is, the dopant is moved to one end of the conduit 20, allowing the dopant to enter the barrel 10 along the conduit 20. That is, in the embodiment of the present application, by providing the barrel 10, the conduit 20 and the connecting rod 103, the structure of the feeding device provided in the embodiment of the present application is simple, and the conduit 20 can be used to facilitate the addition of the dopant to the barrel 10, and when adding material to the barrel 10, the dopant can be added at the same time, avoiding the problem of extended working hours and waste of working hours. That is, through the feeding device provided in the embodiment of the present application, material and dopant can be added to the barrel 10 at the same time, avoiding waste of working hours, thereby improving efficiency.

[0047] It should be noted that the barrel 10 can be made of quartz to avoid contamination of the single crystal furnace by the barrel 10. In addition, in the embodiment of the present application, the barrel 10 is used to add silicon material to the single crystal furnace, and the conduit 20 is used to add dopants to the barrel 10 so that the dopants mix with the silicon material.

[0048] In addition, the conduit 20 is connected to the connecting rod 103, so there is no need to change the existing feeding structure. By adding a component that combines the conduit 20 and the connecting rod 103, it is possible to add materials while adding dopants.

[0049] In addition, in some embodiments, the conduit 20 is located inside the barrel 10, and the conduit 20 has a relative feed end 201 and a discharge end 202 along the axial direction of the connecting rod 103, the discharge end 202 of the conduit 20 is close to the mounting member 200, and the feed end 201 of the conduit 20 is away from the mounting member 200; the distance between the discharge end 202 and the mounting member 200 ranges from 10 mm to 200 mm.

[0050] Since the conduit 20 has a feed end 201 and a discharge end 202 relative to each other along the axial direction of the connecting rod 103, and the discharge end 202 is close to the mounting member 200, when it is necessary to add a dopant to the barrel 10, the dopant can enter the conduit 20 through the feed end 201, and the dopant flows out of the conduit 20 and flows into the barrel 10. In addition, the distance between the discharge end 202 and the mounting member 200 ranges from 10 mm to 200 mm, which can ensure that the distance between the discharge end 202 and the mounting member 200 is moderate, and avoid the dopant or silicon material from easily accumulating after flowing out of the discharge end 202 when the distance between the discharge end 202 and the mounting member 200 is less than 10 mm; when the distance between the discharge end 202 and the mounting member 200 is greater than 200 mm, the dopant or silicon material can be prevented from accumulating before entering the molten silicon.

[0051] Premature volatilization prevents precise doping, resulting in poor resistivity uniformity in the silicon rods / wafers. It should be noted that the distance between the discharge end 202 and the mounting member 200 can be any value between 10 mm and 200 mm, for example, 10 mm, 20 mm, 30 mm, 40 mm, 50 mm, 60 mm, 70 mm, 80 mm, 90 mm, 100 mm, 110 mm, 120 mm, 130 mm, 140 mm, 150 mm, 160 mm, 170 mm, 180 mm, 190 mm, or 200 mm. This is not limited in the present embodiment.

[0052] In addition, in some embodiments, the distance between the feed end 201 of the conduit 20 and the opening 102 ranges from 10 mm to 180 mm. When the distance between the conduit and the opening is greater than 180 mm, the dopant cannot enter the conduit in a timely manner due to the long distance when added to the conduit, resulting in premature volatilization of the dopant. When the distance between the conduit and the opening is less than 10 mm, the dopant takes a long time to travel along the conduit to the feed end 201, affecting the feeding efficiency.

[0053] It should be noted that the distance between the feed end 201 of the conduit 20 and the opening 102 can be any value between 10 mm and 180 mm, for example, 10 mm, 20 mm, 30 mm, 40 mm, 50 mm, 60 mm, 70 mm, 80 mm, 90 mm, 100 mm, 110 mm, 120 mm, 130 mm, 140 mm, 150 mm, 160 mm, 170 mm, or 180 mm. This is not limited in the present embodiment.

[0054] In addition, in the embodiment of the present application, the material of the conduit 20 can be formed of quartz.

[0055] In addition, in some embodiments, the charging device for the single crystal furnace further includes a doping funnel 30 , which is disposed at the end of the conduit 20 away from the mounting member 200 , and the doping funnel 30 is separable from the end of the conduit 20 away from the mounting member 200 .

[0056] Because the doping funnel 30 is disposed at the end of the conduit 20 facing away from the mounting member 200, and the doping funnel 30 is detachable from the end of the conduit 20 facing away from the mounting member 200, when it is necessary to add a dopant to the barrel 10, the dopant can be transferred to the doping funnel 30. The dopant then enters the conduit 20 through the doping funnel 30 and flows out of the conduit 20 into the barrel 10, completing the addition of the dopant to the barrel 10. Furthermore, the doping funnel 30 is detachable from the end of the conduit 20 facing away from the mounting member 200. This allows the doping funnel 30 to be separated from the conduit 20 after adding the dopant to the barrel 10, allowing it to be stored for reuse next time. In other words, the provision of the doping funnel 30 facilitates the injection of dopant into the conduit 20 and allows the dopant to enter the barrel 10.

[0057] In addition, in the embodiment of the present application, the doping funnel 30 has a funnel opening 301, and the funnel opening 301 is connected to the material.

[0058] The cylinder 10 is connected to the outside, and doping materials can be added into the doping funnel 30 through the funnel opening 301 .

[0059] Additionally, in some embodiments, Figure 1 and Figure 2 As shown, the charging device for a single crystal furnace may further include a fixing assembly 40 , and the conduit 20 is fixed to the connecting rod 103 via the fixing assembly 40 , so that the conduit 20 is located in the barrel 10 .

[0060] Because the connecting rod 103 is connected to the mounting member 200, the connecting rod 103 is fixed relative to the interior space of the barrel 10 and is not easily shaken. Therefore, the conduit 20 can be fixed to the connecting rod 103 via the fixing assembly 40, so that the conduit 20 can be positioned within the barrel 10. This prevents the conduit 20 from shaking when adding dopants to the barrel 10 through the conduit 20, thereby preventing the conduit 20 from being difficult to add dopants. In other words, by fixing the conduit 20 to the connecting rod 103 via the fixing assembly 40, it is possible to facilitate the addition of dopants to the barrel 10.

[0061] Additionally, in some embodiments, Figure 2 As shown, the fixing assembly 40 may include a plurality of fixing members 41, which are distributed at intervals along the axial direction of the connecting rod 103, and the first fixed end of each fixing member 41 is fixed to the connecting rod 103, and the second fixed end of each fixing member 41 is connected to the conduit 20 to fix the conduit 20 in the barrel 10.

[0062] Since the plurality of fixing members 41 are spaced apart along the axial direction of the connecting rod 103, and the first fixed end of each fixing member 41 is fixed to the connecting rod 103, and the second fixed end of each fixing member 41 is connected to the conduit 20, it is equivalent to that the conduit 20 is fixed at multiple positions in the axial direction of the connecting rod 103, which can further ensure that the conduit 20 is fixed relative to the barrel 10, thereby avoiding the problem of the conduit 20 being easy to shake when adding doping substances through the conduit 20.

[0063] Additionally, in some embodiments, Figure 3 or Figure 4 As shown, the second fixing end of the fixing member 41 is provided with a clamping hole 411 , the catheter 20 passes through the clamping hole 411 , and the catheter 20 and the clamping hole 411 are interference fit, so that the second fixing end of the fixing member 41 is connected to the catheter 20 .

[0064] Since the second fixing end of the fixing member 41 is provided with a snap-fitting hole 411, when the conduit 20 needs to be fixed in the barrel 10, the conduit 20 can be directly passed through the snap-fitting hole 411 on the fixing member 41, and the conduit 20 and the snap-fitting hole 411 are formed to complete the installation of the conduit 20 in the barrel 10 and ensure that the conduit 20 is relatively fixed in the barrel 10. That is, by providing the snap-fitting hole 411 on the fixing member 41, the conduit 20 can be easily fixed in the barrel 10.

[0065] It should be noted that the shape of the clamping hole 411 can match the shape of the fixed catheter.

[0066] In addition, in the embodiment of the present application, the first fixed end of the fixing member 41 can be provided with a fixing hole, and the connecting rod 103 can pass through the fixing hole and be fixedly connected to the hole wall of the fixing hole, so that the first end 201 of the fixing member 41 is fixed to the connecting rod 103.

[0067] Additionally, in some embodiments, Figure 5 As shown, the fixing member 41 includes a fixing portion 42 and a clamping portion 43, the clamping portion 43 is movably connected to the fixing portion 42, the clamping portion 43 clamps the catheter 20, and the fixing portion 42 is connected to the connecting rod 103; the clamping portion 43 includes a first sub-clamping member 431 and a second sub-clamping member 432, one end of the first sub-clamping member 431 is movably connected to the fixing portion 42, one end of the second sub-clamping member 432 is movably connected to the fixing portion 42, the other end of the first sub-clamping member 431 is provided with a fixing hole, the other end of the second sub-clamping member 432 is also provided with a fixing hole, a fastener 100 is passed through the fixing hole, the first sub-clamping member 431 and the second sub-clamping member 432 clamp the catheter 20, and the fastener 100 fixes the other end of the first sub-clamping member 431 and the other end of the second sub-clamping member 432.

[0068] Since one end of the first sub-clamping member 431 is movably connected to the fixed portion 42, and one end of the second sub-clamping member 432 is movably connected to the fixed portion 42, when it is necessary to set a conduit 20 in the barrel 10, the conduit 20 can be located between the first sub-clamping member 431 and the second sub-clamping member 432, and both the first sub-clamping member 431 and the second sub-clamping member 432 can be movable relative to the fixed portion 42, so that conduits 20 of different diameters can be clamped by the first sub-clamping member 431 and the second sub-clamping member 432, so that conduits 20 of various sizes can be directly fixed in the barrel 10, so that the sizes of the conduits 20 for the single crystal furnace provided in the embodiment of the present application can be diversified. In addition, fasteners 100 are passed through the fixing holes on the first sub-clamping member 431 and the second sub-clamping member 432, so that the other end of the first sub-clamping member 431 and the other end of the second sub-clamping member 432 can be fixed by the fasteners 100, ensuring that the first sub-clamping member 431 and the second sub-clamping member 432 clamp the catheter 20 more firmly.

[0069] It should be noted that the fastener 100 may be a bolt. Of course, the fastener 100 may also be of other types, for example, the fastener 100 may be a pin. The specific type of the fastener 100 is not limited in this embodiment of the present application.

[0070] In addition, a fixing hole may be provided on the fixing portion 42 , and the connecting rod 103 passes through the fixing hole, and the connecting rod 103 is fixedly connected to the hole wall of the fixing hole, so that the fixing portion 42 is connected to the connecting rod.

[0071] In addition, in the embodiments of the present application, Figure 7 As shown, the first sub-clamping member 431 can be connected to the fixing portion

[0072] 42 is connected via a first connecting rod 4311, the first sub-clamping member 431 is movably connected to one end of the first connecting rod 4311, and the second sub-clamping member 432 can be connected to the fixing portion 42 via a second connecting rod 4312, and the second sub-clamping member 432 is movably connected to one end of the second connecting rod 4312. This arrangement ensures that a certain distance is maintained between the first sub-clamping member 431 and the second sub-clamping member 432 and the fixing portion 42, thereby facilitating installation of the conduit 20.

[0073] In addition, in some embodiments, the first sub-clamping member 431 is an arc-shaped structure, and the second sub-clamping member 432 is an arc-shaped structure.

[0074] Typically, the conduit 20 is a circular tube. In the embodiment of the present application, by setting the first sub-clamping member 431 and the second sub-clamping member 432 to be both arc-shaped structures, when the conduit 20 is clamped by the first sub-clamping member 431 and the second sub-clamping member 432, the first sub-clamping member 431 and the second sub-clamping member 432 can fit closely with the outer wall of the conduit 20, thereby enabling the first sub-clamping member 431 and the second sub-clamping member 432 to clamp the conduit 20 more stably and firmly, ensuring that the conduit 20 is more firmly fixed in the barrel 10 and preventing the conduit from shaking easily. That is, by setting the first sub-clamping member 431 and the second sub-clamping member 432 to be arc-shaped structures, the first sub-clamping member 431 and the second sub-clamping member 432 can more firmly clamp the conduit 20, thereby ensuring that the conduit 20 is more stable.

[0075] Additionally, in some embodiments, Figure 6 As shown, the doping funnel 30 may include a funnel piece 31 and a connecting tube 32. The funnel piece 31 has a funnel mouth 301. The connecting tube 32 is connected to the funnel piece 31. The connecting tube 32 is embedded in the first end 201 of the catheter 20. The connecting tube 32 and the first end 201 of the catheter 20 are detachable.

[0076] Because the funnel member 31 has a funnel opening 301 and the connecting tube 32 is connected to the funnel member 31, when it is necessary to add dopant to the barrel 10, the connecting tube 32 can be directly embedded in the first end 201 of the conduit 20. Thus, when connected to the first end 201 of the conduit 20, it can be restrained by the first end 201 of the conduit 20, making the connecting tube 32 less likely to shake, thereby avoiding the problem of the funnel member 31 being less likely to shake. Furthermore, dopant can be directly added to the funnel member 31 through the funnel opening 301. The dopant can then flow through the funnel member 31 to the connecting tube 32, then into the conduit 20, and out of the second end 202 of the conduit 20 into the barrel 10. That is, by providing the funnel member 31 and the connecting tube 32, it is possible to facilitate fixing the doping funnel 30 relative to the conduit 20, thereby facilitating the addition of dopant into the barrel 10 through the doping funnel 30.

[0077] In addition, in some embodiments, an external thread is provided on the outer wall of the connecting tube 32, and the first

[0078] An internal thread is provided on the inner wall of the end 201 , and the connecting tube 32 is threadably connected to the first end 201 of the conduit 20 via an external thread and an internal thread.

[0079] Because the outer wall of the connecting tube 32 is provided with an external thread, and the inner wall of the first end 201 of the conduit 20 is provided with an internal thread, when the connecting tube 32 is inserted into the first end 201 of the conduit 20, the external thread and the internal thread can be matched, which is equivalent to fixing the doping funnel 30 to the first end 201 of the conduit 20 via the internal and external threads. This can effectively prevent the doping funnel 30 from shaking or tilting relative to the conduit 20 when adding dopants through the doping funnel 30, making it difficult to add dopants. In other words, by providing external threads on the connecting tube 32 and internal threads on the conduit 20, and by the threaded matching of the connecting tube 32 and the conduit 20, it is possible to facilitate the addition of dopants into the barrel 10 through the doping funnel 30.

[0080] Of course, in the embodiment of the present application, the outer wall of the connecting tube 32 may not be provided with an external thread, and the inner wall of the conduit 20 may not be provided with an internal thread. In this case, the connecting tube 32 can be directly embedded in the conduit 20. This embodiment of the present application is not limited to this.

[0081] Additionally, in some embodiments, Figure 2 As shown, part of the doping funnel 30 extends outward from the barrel 10, and the funnel opening 301 is located outside the barrel 10. With this arrangement, when it is necessary to add a dopant to the barrel 10, the dopant can be added directly to the funnel opening 301. The funnel opening 301 is located outside the barrel 10, which makes it easy to inject the dopant into the funnel opening 301 from outside the barrel 10, thereby facilitating the addition of the dopant to the barrel 10.

[0082] In the embodiment of the present application, since the first end of the barrel 10 has an opening 102 and the second end of the barrel 10 is provided with a mounting member 200, the second end of the barrel 10 can be blocked by the mounting member 200, which is equivalent to the inner wall of the barrel 10 and the mounting member 200 jointly defining a space for accommodating material, so that material can be added to the interior of the barrel 10 through the opening 102 at the first end of the barrel 10, and the material is blocked by the mounting member 200 to prevent material leakage, and the connecting rod 103 can be passed through the barrel 10 and connected to the mounting member 200, so that the mounting member 200 can fix the connecting rod 103 to prevent the connecting rod 103 from shaking. Since the conduit 20 extends along the axial direction of the connecting rod 103 and the conduit 20 is connected to the connecting rod 103, when adding material to the barrel 10 through the opening 102, the dopant can be added to the barrel 10 at the same time through the conduit 20, that is, the dopant is moved to one end of the conduit 20 so that the dopant enters the barrel 10 along the conduit 20. That is, in the embodiment of the present application, by providing the barrel 10, the conduit 20 and the connecting rod 103, the structure of the feeding device provided in the embodiment of the present application is simple, and the conduit 20 can be used to facilitate the addition of the dopant to the barrel 10, and when adding material to the barrel 10, the dopant can be added at the same time, avoiding the problem of extended working hours and waste of working hours. That is, through the feeding device provided in the embodiment of the present application, material and dopant can be added to the barrel 10 at the same time, avoiding waste of working hours, thereby improving efficiency.

[0083] An embodiment of the present application provides a single crystal furnace, which includes the single crystal furnace feeding device in any of the above embodiments.

[0084] The above-mentioned feeding device is set on the cover or side of the single crystal furnace to add dopants or materials into the single crystal furnace, where the materials can be silicon materials, such as silicon blocks, granular silicon, rod-shaped silicon, etc. The dopants can be substances other than silicon materials used to change the properties of silicon single crystals.

[0085] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0086] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and intent of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. A charging device for a single crystal furnace, characterized in that: The feeding device for the single crystal furnace comprises: a barrel, a guide tube and a connecting rod; The first end of the barrel has an opening, the second end of the barrel is provided with a mounting piece, the connecting rod is passed through the barrel, and the connecting rod is connected to the mounting piece, and the inner wall of the barrel and the mounting piece together define a space for accommodating material; The guide tube extends along the axial direction of the connecting rod.

2. The charging device for a single crystal furnace according to claim 1, characterized in that: The guide tube is connected to the connecting rod.

3. The charging device for a single crystal furnace according to claim 1, characterized in that: The conduit is located inside the barrel and has a feed end and a discharge end opposite to each other along the axial direction of the connecting rod, the discharge end of the conduit is close to the mounting member, and the feed end of the conduit is away from the mounting member; The distance between the discharge end and the mounting member ranges from 10 mm to 200 mm.

4. The charging device for a single crystal furnace according to claim 2, characterized in that: The distance between the feed end of the conduit and the opening ranges from 10 mm to 180 mm.

5. The charging device for a single crystal furnace according to claim 1, characterized in that: The charging device for the single crystal furnace further includes a doping funnel, which is arranged at the end of the conduit away from the mounting member, and the doping funnel is separable from the end of the conduit away from the mounting member.

6. The single crystal furnace charging device according to claim 1, characterized in that: The charging device for a single crystal furnace further includes a fixing assembly, and the conduit is fixed to the connecting rod via the fixing assembly so that the conduit is located in the barrel.

7. The charging device for a single crystal furnace according to claim 6, characterized in that: The fixing assembly includes a plurality of fixing members, which are distributed along the axial direction of the connecting rod, and a first fixing end of each fixing member is fixed to the connecting rod, and a second fixing end of each fixing member is connected to the conduit so that the conduit is located in the barrel.

8. The charging device for a single crystal furnace according to claim 7, characterized in that: The second fixing end of the fixing piece is provided with a clamping hole, the catheter passes through the clamping hole, and the catheter cooperates with the clamping hole to connect the second fixing end of the fixing piece with the catheter.

9. The charging device for a single crystal furnace according to claim 7, characterized in that: The fixing member includes a fixing portion and a clamping portion, wherein the clamping portion is movably connected to the fixing portion; the clamping portion clamps the conduit, and the fixing portion is connected to the connecting rod.

10. A single crystal furnace, characterized in that: The single crystal furnace comprises the charging device for a single crystal furnace according to any one of claims 1 to 9.

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