Sample introduction device

Abstract

The utility model provides a sampling device and relates to the technical field of gas analysis. The sample injection device comprises a sample injection port connected with the acid gas adsorption assembly; the acid gas adsorption assembly is provided with an adsorption channel, and an alkaline substance used for adsorbing acid gas is arranged in the adsorption channel; wherein the adsorption channel is wave-shaped or spiral; and the gas outlet end of the adsorption channel is directly or indirectly connected with a sample inlet of the gas analysis device. Through the arrangement of the acid gas adsorption assembly, acid gas in a sample can be effectively removed, so that the purposes of preventing corrosion and prolonging the service life of equipment are achieved. The acid gas adsorption assembly is provided with the wave-shaped or spiral adsorption channel, a sample flows along the adsorption channel, the contact time and the contact area of the sample and alkaline substances of the acid gas adsorption assembly can be increased, and therefore the adsorption effect is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of gas analysis, in particular to a sampling device. Background Art

[0002] During the polysilicon production process, the content of nitrogen, hydrogen, carbon monoxide and other substances in some mixed gases is often analyzed. However, the mixed gases contain a large amount of acidic gases, such as gaseous trichlorosilane, gaseous silicon tetrachloride, gaseous hydrogen chloride, etc. Acidic gases cause corrosion of detection equipment and shorten the equipment life. Utility Model Content

[0003] In view of the above situation, the utility model provides a sampling device, which aims to solve the technical problem that the mixed gas to be tested contains a large amount of acidic gas, causing the detection equipment to rust and shortening the life of the equipment.

[0004] To achieve the above objectives, the present invention provides the following technical solutions:

[0005] The utility model provides a sample injection device, comprising:

[0006] an inlet connected to the acid gas adsorption component;

[0007] The acid gas adsorption component has an adsorption channel, and the adsorption channel contains alkaline substances for adsorbing acid gases;

[0008] in:

[0009] The adsorption channel is wavy or spiral;

[0010] The gas outlet end of the adsorption channel is directly or indirectly connected to the sample inlet of the gas analysis device.

[0011] In some embodiments of the present invention, activated carbon containing alkaline substances is provided in the adsorption channel.

[0012] In some embodiments of the present invention, a first particulate matter filter assembly connected to the acid gas adsorption assembly is further included.

[0013] In some embodiments of the present invention, the first particulate matter filtering assembly includes a spherical filter.

[0014] In some embodiments of the present invention, a second particulate matter filter assembly connected to the acid gas adsorption assembly is further included.

[0015] In some embodiments of the present invention, the second particulate matter filtering assembly includes a cylindrical filter.

[0016] In some embodiments of the present invention, the sample inlet, the first particulate matter filter assembly, the acid gas adsorption assembly and the second particulate matter filter assembly are connected in sequence.

[0017] In some embodiments of the present invention, a housing is further included; the sampling port, the first particulate filter assembly, the acid gas adsorption assembly and the second particulate filter assembly are integrated in the housing.

[0018] In some embodiments of the present invention, a sampling tube is further included; one end of the sampling tube is connected to the container containing the sample, and the other end is connected to the sampling port.

[0019] In some embodiments of the present invention, the sampling tube is made of corrosion-resistant material.

[0020] The embodiments of the present invention have at least the following advantages or beneficial effects:

[0021] 1. The acid gas adsorption component can effectively remove the acid gas in the sample to prevent corrosion and extend the life of the equipment.

[0022] 2. The acid gas adsorption component has a wavy or spiral adsorption channel. The sample flows along the adsorption channel, which can increase the contact time and contact area between the sample and the alkaline substance of the acid gas adsorption component, thereby ensuring the adsorption effect.

[0023] Other features and advantages of the present invention will be set forth in the following description, and in part will become apparent from the description, or may be understood by practicing the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0025] Figure 1 It is a structural diagram of the sampling device; the arrows in the figure are used to indicate the sample flow path.

[0026] Icon: 2-shell, 3-inlet, 4-spherical filter, 5-corrugated filter, 51-adsorption channel, 6-column filter. DETAILED DESCRIPTION

[0027] In the following, only certain exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various different ways without departing from the spirit or scope of the embodiments of the present invention.

[0028] In the description of the embodiments of the present invention, it should be understood that the terms "inside" and "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present invention.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0030] In the embodiments of the present invention, unless otherwise specified or limited, the terms "installed," "connected," "connected," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; they can refer to direct connection or indirect connection through an intermediate medium; they can refer to internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the embodiments of the present invention based on specific circumstances.

[0031] The embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0032] See also Figure 1 This embodiment provides a gas analysis system, including a sampling device, a gas analysis device (not shown in the figure) and a control device (not shown in the figure); the gas analysis device may include a chromatograph and / or a mass spectrometer; the control device is used to control the working status of the gas analysis device and the sampling device; this application mainly adds a sampling device on the basis of the existing technology.

[0033] The sampling device includes a sampling tube (not shown in the figure) and a gas pretreatment mechanism.

[0034] The sample inlet tube is used to introduce the sample containing acidic gas to the gas pretreatment unit. It is made of corrosion-resistant materials, such as polytetrafluoroethylene (PTFE), to accommodate acidic gas environments. It has a valve that can be opened and closed by the aforementioned control device.

[0035] The gas pretreatment mechanism includes a housing 2, and an inlet 3, a first particulate matter filter component, an acid gas adsorption component and a second particulate matter filter component which are integrated in the housing 2 and connected in sequence.

[0036] The injection port 3 is connected to one end of the injection tube.

[0037] The first particle filter assembly removes particulate impurities carried in the sample by filtering. In a specific implementation scenario, the first particle filter assembly includes a spherical filter 4.

[0038] The acid gas adsorption assembly removes acidic gases from the sample by adsorbing alkaline substances. In a specific implementation scenario, the acid gas adsorption assembly includes a wavy or spiral adsorption channel 51. The sample flows along the adsorption channel 51, which increases the contact time and contact area between the sample and the acid gas adsorption assembly, thereby ensuring the adsorption effect. The acid gas adsorption assembly, for example, includes a corrugated filter 5 having the adsorption channel 51, and the adsorption channel 51 contains activated carbon containing alkaline substances.

[0039] The second particulate filter assembly removes particulate impurities from the sample by filtering. The second particulate filter assembly is connected to the sample inlet of the gas analyzer. In one specific implementation scenario, the second particulate filter assembly includes a cylindrical filter 6 coaxial with the housing 2, the inner side of which is connected to the sample inlet of the gas analyzer. After passing through the acid gas adsorption assembly, the sample can enter the interior of the cylindrical filter 6 from the outside, and then enter the gas analyzer for detection and analysis.

[0040] In combination with the above content, this embodiment has at least the following beneficial effects:

[0041] 1. Through the triple treatment of the first particulate matter filter component, the acid gas adsorption component and the second particulate matter filter component, acid gas and particulate impurities can be effectively removed to achieve the purpose of anti-corrosion and anti-clogging.

[0042] It should be noted that in this embodiment, a filtration (first particulate matter filtration assembly and / or second particulate matter filtration assembly) plus adsorption (acid gas adsorption assembly) approach is preferably used to treat samples containing acidic gases. This not only removes acidic gases to prevent corrosion, but also removes particulate impurities (some components in acidic gases are prone to forming silica particles) to prevent them from entering chromatographic columns and other gas analysis equipment, thereby affecting separation efficiency. In other embodiments, adsorption alone may be used to address the presence of acidic gases in the sample.

[0043] 2. The acidic gas adsorption component has a wave-shaped or spiral adsorption channel 51. The sample flows along the adsorption channel 51, which can increase the contact time and contact area between the sample and the alkaline substance of the acidic gas adsorption component, thereby ensuring the adsorption effect.

[0044] 3. The above-mentioned injection port 3, first particulate filter assembly, acid gas adsorption assembly and second particulate filter assembly are integrated into the same housing 2, which is conducive to the miniaturization of the device. In other embodiments, these components may not be integrated into the housing 2.

[0045] Fourth, one end of the injection tube can be directly connected to the container containing the sample, and the other end can be directly connected to the injection port 3, so that the sample is not easily leaked and inhaled by the human body.

[0046] Finally, it should be noted that the above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art will appreciate that the present invention is susceptible to various modifications and variations. The embodiments and features of the embodiments of this application may be combined arbitrarily without conflict. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A sampling device, characterized in that: include: an inlet connected to the acid gas adsorption component; An acid gas adsorption component has an adsorption channel, wherein the adsorption channel contains an alkaline substance for adsorbing acid gas; in: The adsorption channel is wavy or spiral; The gas outlet end of the adsorption channel is directly or indirectly connected to the sample inlet of the gas analysis device.

2. The sample injection device according to claim 1, characterized in that Activated carbon containing alkaline substances is arranged in the adsorption channel.

3. The sample injection device according to claim 1, characterized in that Also included is a first particulate matter filter assembly connected to the acid gas adsorption assembly.

4. The sample injection device according to claim 3, characterized in that The first particulate matter filtering assembly includes a spherical filter.

5. The sample injection device according to claim 3, characterized in that Also included is a second particulate matter filter assembly connected to the acid gas adsorption assembly.

6. The sample injection device according to claim 5, characterized in that The second particulate matter filtering assembly includes a cylindrical filter.

7. The sample injection device according to claim 5, characterized in that The sample inlet, the first particulate matter filter assembly, the acid gas adsorption assembly and the second particulate matter filter assembly are connected in sequence.

8. The sample injection device according to claim 5, characterized in that It also includes a shell; the sample inlet, the first particulate filter assembly, the acid gas adsorption assembly and the second particulate filter assembly are integrated in the shell.

9. The sample injection device according to any one of claims 1 to 8, characterized in that: It also includes a sampling tube; one end of the sampling tube is connected to the container containing the sample, and the other end is connected to the sampling port.

10. The sample injection device according to claim 9, characterized in that: The sample injection tube is made of corrosion-resistant material.

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