Optical fiber coupling type acousto-optic device and laser device

By designing a rotary setting adjustment structure and collimator in optical fiber coupled acousto-optical devices, the problem of limited adjustment space after collimator installation is solved, and flexible adjustment of laser beam incident and diffraction light reception angle is achieved, improving the applicability of the device.

CN223259992UActive Publication Date: 2025-08-22FUJIAN CASTECH CRYSTALS
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Patent Information

Application Number
CN202422658426.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-31
Publication Date
2025-08-22
Estimated Expiration
2034-10-31

AI Technical Summary

Technical Problem

The collimator of existing fiber-coupled acousto-optical devices has limited adjustment space after installation and cannot change the position, resulting in low applicability and can only meet one application requirement of positive frequency shift or negative frequency shift.

Method used

A fiber-coupled acousto-optical device is designed, using an adjustment structure and collimator that rotates on the housing. Through external force, the collimator can rotate and adjust the angle, achieving flexible adjustment of the laser beam incident and diffraction light reception angle, taking into account both positive and negative frequency shift applications.

Benefits of technology

It improves the applicability of fiber-coupled acousto-optical devices, can meet the application needs of both positive and negative frequency shifts, and enhances the flexibility and applicability of adjustment.

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Abstract

The utility model discloses an optical fiber coupling type acousto-optic device and a laser device, the optical fiber coupling type acousto-optic device comprises a shell, two adjusting structures and two collimators, the shell is provided with an accommodating cavity, and the two adjusting structures are rotatably arranged on the shell relative to the accommodating cavity; the two collimators are respectively arranged on an adjusting structure, and under the action of external force, the adjusting structure is suitable for rotating relative to the shell and driving the collimators to rotate so as to adjust the angles of the collimators. According to the optical fiber coupling type acousto-optic device with the structure, the angle of the collimator can be adjusted through the adjusting structure, so that the optical fiber coupling type acousto-optic device can meet two application requirements of positive frequency shift and negative frequency shift at the same time, and the applicability of the optical fiber coupling type acousto-optic device can be improved.
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Description

Technical Field

[0001] The utility model relates to the technical field of acousto-optic devices, in particular to an optical fiber coupled acousto-optic device and a laser device. Background Art

[0002] Fiber-coupled acousto-optic devices utilize fiber collimators on both sides of a free-space acousto-optic device for optical coupling, making them convenient for use in fiber-optic systems. They primarily utilize the fundamental principle of acousto-optic interaction. The RF signal output by the driver is applied to the piezoelectric transducer via an impedance matching circuit. The piezoelectric transducer converts the signal into ultrasonic waves that propagate within the acousto-optic medium, forming an equivalent phase grating. When an input laser beam is incident at a certain angle into the acousto-optic medium through the input collimator, the laser beam diffracts. The diffracted first-order diffracted light is then coupled out through the output collimator and then optical fiber.

[0003] In the prior art, since the collimator needs to inject the laser beam into the acousto-optic medium at a certain angle, the collimator needs to have a certain angle when it is installed on both sides of the acousto-optic device bracket. There are currently three ways to install the collimator, which are: the collimator is placed in a glass tube, a vertical hole is opened on the bracket, and the glass tube is fixed horizontally in the vertical hole on the bracket; the collimator is placed in a glass tube, a hole with a certain angle is opened on the bracket, and the glass tube is fixed in the hole with a certain angle on the bracket; after the angle of the collimator is adjusted in the bracket cavity, it is fixed on the support body, and then the support body is placed in the bracket cavity and fixed. These three installation methods have the advantages of simple vertical processing, convenient adjustment of the collimator, and more flexible adjustment of the collimator. However, the above three installation methods all have the disadvantages of limited adjustment space and the position of the collimator cannot be changed after it is installed, and their applicability is low. Utility Model Content

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defect that after the collimator of the existing fiber-coupled acousto-optic device is installed, its adjustment space is limited and its position cannot be changed, and it can only meet one application requirement of positive frequency shift or negative frequency shift, resulting in low applicability.

[0005] To this end, the present invention provides a fiber-coupled acousto-optic device, comprising:

[0006] A housing and at least two adjustment structures, wherein the housing has an accommodating cavity, and the two adjustment structures are rotatably arranged on the housing relative to the accommodating cavity;

[0007] At least two collimators are provided on the adjustment structure respectively. Under the action of external force, the adjustment structure is adapted to rotate relative to the housing and drive the collimators to rotate so as to adjust the angles of the collimators.

[0008] Optionally, in the above-mentioned fiber-coupled acousto-optic device, at least two rotating parts are provided on the shell, and the two rotating parts are provided on the shell relative to the accommodating cavity, and the two adjustment structures are respectively provided in one of the rotating parts.

[0009] Optionally, in the above-mentioned fiber-coupled acousto-optic device, the adjustment structure includes an adjustment member and a mounting member, the adjustment member is rotatably arranged in the rotating part, the mounting member is arranged on the adjustment member, and the collimator is arranged on the mounting member.

[0010] Optionally, in the above-mentioned fiber-coupled acousto-optic device, a mounting portion is provided on the adjusting member, and the mounting member is disposed in the mounting portion.

[0011] Optionally, in the above-mentioned fiber-coupled acousto-optic device, the mounting member has a mounting cavity with openings at both ends, the collimator is suitable for being arranged in the mounting cavity through one of the openings, and the other opening of the mounting cavity is connected to the rotating part.

[0012] Optionally, in the above-mentioned fiber-coupled acousto-optic device, the rotating portion and the accommodating cavity are connected to each other, so as to connect the accommodating cavity and the installation cavity.

[0013] Optionally, in the above-mentioned fiber-coupled acousto-optic device, the housing is further provided with a locking portion connected to the rotating portion;

[0014] It also includes a fastener, which is suitable for passing through the locking portion and abutting against the adjusting member under the action of external force to fix the adjusting member.

[0015] Optionally, the above-mentioned fiber-coupled acousto-optic device further includes a filling piece, and when the collimator is installed in the installation cavity, the filling piece is suitable for being filled into the installation cavity under the action of external force to fill the space in the installation cavity.

[0016] Optionally, the above-mentioned fiber-coupled acousto-optic device further includes an acousto-optic crystal and a radio frequency interface, the acousto-optic crystal is arranged in the accommodating cavity and between the two adjustment structures, the radio frequency interface is arranged on the shell, and part of the radio frequency interface is arranged in the accommodating cavity, and the other part of the radio frequency interface is arranged outside the accommodating cavity.

[0017] A laser device comprises the above-mentioned fiber-coupled acousto-optic device.

[0018] The technical solution provided by the utility model has the following advantages:

[0019] 1. The fiber-coupled acousto-optic device provided by the present invention is configured by rotating two adjustment structures and two collimators, respectively, disposed on the two adjustment structures. The housing has a receiving cavity, and the two adjustment structures are rotatably disposed on the housing relative to the receiving cavity, thereby enabling the two collimators, respectively disposed on the two adjustment structures, to be disposed relative to the receiving cavity. This allows one collimator to emit a laser beam into the receiving cavity, while the other collimator receives diffracted light after diffracting the cavity. Furthermore, because the adjustment structures are rotatably disposed on the housing, the adjustment structures can rotate relative to the housing under the action of an external force, and can drive the collimators disposed on the adjustment structures to rotate synchronously, thereby enabling the angles of the collimators to be adjusted. This allows both the incident angle of the laser beam emitted through the collimator into the receiving cavity and the receiving angle of the diffracted light emitted from the receiving cavity to the other collimator to be adjusted. Furthermore, the fiber-coupled acousto-optic device can simultaneously meet both positive and negative frequency shifting application requirements, thereby improving the applicability of the fiber-coupled acousto-optic device. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0021] Figure 1 A schematic structural diagram of a fiber-coupled acousto-optic device provided in an embodiment of the present utility model;

[0022] Figure 2 A schematic diagram of the internal structure of a fiber-coupled acousto-optic device provided in an embodiment of the present utility model;

[0023] Figure 3 A schematic structural diagram of an adjustment structure provided in an embodiment of the present utility model;

[0024] Description of reference numerals:

[0025] 1-housing; 11-rotating portion; 12-locking portion;

[0026] 2-adjustment structure; 21-adjustment member; 211-installation portion; 22-installation member;

[0027] 3-Collimator; 4-Acousto-optic crystal; 5-RF interface. DETAILED DESCRIPTION

[0028] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0029] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0030] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0031] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0032] Example 1

[0033] This embodiment provides a fiber-coupled acousto-optic device, such as Figures 1 to 3 As shown, it includes a shell 1, two adjustment structures 2 and two collimators 3. The shell 1 has a accommodating cavity, and the two adjustment structures 2 are rotatably arranged on the shell 1 relative to the accommodating cavity; the two collimators 3 are respectively arranged on one adjustment structure 2. Under the action of external force, the adjustment structure 2 is suitable for rotating relative to the shell 1 and driving the collimator 3 to rotate to adjust the angle of the collimator 3.

[0034] The fiber-coupled acousto-optic device of the above structure is provided with two adjusting structures 2 and two collimators 3 respectively provided on the two adjusting structures 2 by rotating them, wherein the housing 1 has a receiving cavity, and the two adjusting structures 2 are rotated on the housing 1 relative to the receiving cavity, so that the two collimators 3 respectively on the two adjusting structures 2 can be arranged relative to the receiving cavity, thereby enabling one collimator 3 to inject the laser beam into the receiving cavity, and the other collimator 3 to receive the diffracted light after the receiving cavity is diffracted. In addition, since the adjusting structure 2 is a rotating The adjusting structure 2 is movably arranged on the shell 1, so that under the action of an external force, the adjusting structure 2 can rotate on the shell 1 relative to the shell 1, and can drive the collimator 3 arranged on the adjusting structure 2 to rotate synchronously, so that the angle of the collimator 3 can be adjusted, so that the incident angle of the laser beam entering the accommodating cavity through the collimator 3 and the receiving angle of the diffracted light emitted from the accommodating cavity to the other collimator 3 can be adjusted, and the fiber-coupled acousto-optic device can take into account both positive frequency shift and negative frequency shift application requirements at the same time, which is conducive to improving the applicability of the fiber-coupled acousto-optic device.

[0035] The fiber-coupled acousto-optic device provided in this embodiment is Figure 1 and Figure 2 As shown, at least two rotating parts 11 are provided on the housing 1 , and the two rotating parts 11 are provided on the housing 1 relative to the accommodating cavity, and the two adjusting structures 2 are respectively provided in one rotating part 11 .

[0036] The fiber-coupled acousto-optic device of the above structure is provided with two rotating parts 11 on the housing 1. The rotating part 11 is a rotating groove in this embodiment. The two rotating parts 11 are specifically provided on the groove body relative to the accommodating cavity. When the adjustment structure 2 is rotatably installed on the housing 1, the two adjustment structures 2 are respectively arranged in one rotating part 11, so that the two adjustment structures 2 can be arranged relative to the accommodating cavity. Under the action of external force, the adjustment structure 2 can rotate relative to the housing 1 in the rotating part 11, thereby driving the collimator 3 to rotate to adjust the angle of the collimator 3.

[0037] The fiber-coupled acousto-optic device provided in this embodiment is Figure 2 and Figure 3 As shown, the adjustment structure 2 includes an adjustment member 21 and a mounting member 22 . The adjustment member 21 is rotatably disposed in the rotating portion 11 , the mounting member 22 is disposed on the adjustment member 21 , and the collimator 3 is disposed on the mounting member 22 .

[0038] The fiber-coupled acousto-optic device of the above structure is provided with an adjustment structure 2 including an adjustment member 21 and a mounting member 22. In this embodiment, the adjustment member 21 and the mounting member 22 are respectively an adjustment block and a glass tube. The adjustment member 21 is rotatably disposed within the rotating portion 11, the mounting member 22 is disposed on the adjustment member 21, and the collimator 3 is disposed on the mounting member 22. Therefore, under the action of an external force, the adjustment member 21 can drive the mounting member 22 to rotate relative to the housing 1 within the rotating portion 11, thereby enabling the mounting member 22 to drive the collimator 3 to rotate synchronously, thereby adjusting the angle of the collimator 3.

[0039] The fiber-coupled acousto-optic device provided in this embodiment is Figure 3 As shown, a mounting portion 211 is provided on the adjusting member 21 , and the mounting member 22 is disposed in the mounting portion 211 .

[0040] The fiber-coupled acousto-optic device of the above structure is provided with a mounting portion 211 on the adjusting member 21. The mounting portion 211 is a mounting hole in this embodiment, and the mounting member 22 is disposed within the mounting portion 211. Thus, the mounting member 22 is disposed on the adjusting member 21. Since the mounting portion 211 is a mounting hole, the mounting portion 211 can be connected to the rotating member 11. Further, when the mounting member 22 is disposed within the mounting portion 211, at least one end of the mounting member 22 can be exposed within the rotating member 11.

[0041] The fiber-coupled acousto-optic device provided in this embodiment is Figure 2 and Figure 3 As shown, the mounting member 22 has a mounting cavity with openings at both ends. The collimator 3 is suitable for being arranged in the mounting cavity through one opening, and the other opening of the mounting cavity is communicated with the rotating part 11 .

[0042] The fiber-coupled acousto-optic device of the above structure has a mounting cavity with openings at both ends by providing the mounting member 22. Therefore, when the collimator 3 is mounted on the mounting member 22, the collimator 3 can be placed in the mounting cavity through one of the openings, and the mounting cavity can also be connected to the rotating part 11 through the other opening. As a result, the collimator 3 installed in the mounting cavity can be indirectly placed on the rotating part 11, so that the collimator 3 can emit a laser beam into the rotating part 11 or receive diffracted light output from the rotating part 11.

[0043] The fiber-coupled acousto-optic device provided in this embodiment is Figure 2 As shown, the rotating portion 11 and the accommodating cavity are connected to connect the accommodating cavity and the installation cavity.

[0044] The fiber-coupled acousto-optic device of the above structure is arranged to be connected between the rotating part 11 and the accommodating cavity, so that the accommodating cavity and the installation cavity can be connected, and the collimator 3 installed in the installation cavity can be indirectly arranged in the accommodating cavity, so that the collimator 3 can emit the laser beam into the accommodating cavity or receive the diffracted light output from the accommodating cavity.

[0045] The fiber-coupled acousto-optic device provided in this embodiment is Figure 2 As shown, the housing 1 is further provided with a locking portion 12 connected to the rotating portion 11 ; and further comprises a fastener adapted to pass through the locking portion 12 under the action of an external force and abut against the adjusting member 21 to fix the adjusting member 21 .

[0046] The fiber-coupled acousto-optic device of the above structure is provided with a locking portion 12 on the housing 1 and a fastener disposed in the locking portion 12. In this embodiment, the locking portion 12 is a locking hole, and the fastener is a fastening screw. The locking portion 12 and the rotating portion 11 are connected to each other, so that when the fastener passes through the locking portion 12 under the action of an external force, the fastener can extend into the rotating portion 11, thereby allowing the fastener to abut against the adjusting member 21 in the rotating portion 11, so that after the adjusting member 21 finishes rotating, the fastener can fix the adjusting member 21 to prevent the adjusting member 21 from continuing to rotate.

[0047] The fiber-coupled acousto-optic device provided in this embodiment is Figures 1 to 3 As shown, a filling piece is also included. When the collimator 3 is installed in the installation cavity, the filling piece is suitable for being filled into the installation cavity under the action of external force to fill the space in the installation cavity.

[0048] The fiber-coupled acousto-optic device of the above structure is filled with a filling member in the mounting cavity. The filling member is glue in this embodiment. After the collimator 3 is installed in the mounting cavity, the filling member can fill the mounting cavity under the action of external force, thereby filling the remaining space in the mounting cavity and fixing the collimator 3 in the mounting cavity to prevent the collimator 3 from changing its angle in the mounting cavity.

[0049] The fiber-coupled acousto-optic device provided in this embodiment is Figure 1 and Figure 2 As shown, it also includes an acousto-optic crystal 4 and a radio frequency interface 5. The acousto-optic crystal 4 is arranged in the accommodating cavity and between the two adjustment structures 2. The radio frequency interface 5 is arranged on the shell 1, and part of the radio frequency interface 5 is arranged in the accommodating cavity, and the other part of the radio frequency interface 5 is arranged outside the accommodating cavity.

[0050] The fiber-coupled acousto-optic device of the above structure is provided with an acousto-optic device in the accommodating cavity and a radio frequency interface 5 provided on the housing 1. When the acousto-optic device is provided in the accommodating cavity, the acousto-optic device is specifically provided between the two adjustment structures 2, so that the collimators 3 on the two adjustment structures 2 can respectively direct the laser beam toward the acousto-optic device and receive the diffracted light after passing through the acousto-optic device. The radio frequency interface 5 is partially provided in the accommodating cavity and the other part is provided outside the accommodating cavity, so that the part outside the accommodating cavity can be electrically connected to an external power supply, and the electrical signal can provide a modulated carrier signal to the accommodating cavity through an impedance matching circuit electrically connected to the part in the accommodating cavity. The impedance matching circuit is specifically provided in the accommodating cavity, and the carrier signal can pass through the piezoelectric transducer on the acousto-optic device electrically connected to the impedance matching circuit, thereby converting the electrical signal into an acoustic signal.

[0051] The fiber-coupled acousto-optic device provided by the utility model is provided with two adjusting structures 2 and two collimators 3 respectively provided on the two adjusting structures 2 by rotating them, wherein the housing 1 has a receiving cavity, and the two adjusting structures 2 are rotated on the housing 1 relative to the receiving cavity, so that the two collimators 3 respectively on the two adjusting structures 2 can be arranged relative to the receiving cavity, thereby enabling one collimator 3 to inject the laser beam into the receiving cavity, and the other collimator 3 to receive the diffracted light after the diffraction of the receiving cavity. In addition, since the adjusting structure 2 is The rotation is arranged on the shell 1, so that under the action of an external force, the adjustment structure 2 can rotate relative to the shell 1 on the shell 1, and can drive the collimator 3 arranged on the adjustment structure 2 to rotate synchronously, so that the angle of the collimator 3 can be adjusted, so that the incident angle of the laser beam entering the accommodating cavity through the collimator 3 and the receiving angle of the diffracted light emitted from the accommodating cavity to the other collimator 3 can be adjusted, and the fiber-coupled acousto-optic device can take into account both positive frequency shift and negative frequency shift application requirements at the same time, which is beneficial to improving the applicability of the fiber-coupled acousto-optic device.

[0052] Example 2

[0053] This embodiment provides a laser device, such as Figures 1 to 3As shown, it includes the above-mentioned fiber-coupled acousto-optic device. The laser device of the above-mentioned structure is provided by setting it including the above-mentioned fiber-coupled acousto-optic device, that is, by rotating the two adjustment structures 2 set on the housing 1 and the two collimators 3 respectively set on the two adjustment structures 2, wherein the housing 1 has a receiving cavity, and the two adjustment structures 2 are rotated relative to the receiving cavity on the housing 1, so that the two collimators 3 respectively on the two adjustment structures 2 can be set relative to the receiving cavity, thereby enabling one collimator 3 to emit the laser beam into the receiving cavity, and the other collimator 3 to receive the diffracted light after being diffracted by the receiving cavity. In addition, due to The adjustment structure 2 is rotatably arranged on the shell 1, so that under the action of an external force, the adjustment structure 2 can rotate on the shell 1 relative to the shell 1, and can drive the collimator 3 arranged on the adjustment structure 2 to rotate synchronously, thereby enabling the angle of the collimator 3 to be adjusted, so that the incident angle of the laser beam entering the accommodating cavity through one collimator 3 and the receiving angle of the diffracted light emitted from the accommodating cavity to the other collimator 3 can be adjusted, and the fiber-coupled acousto-optic device can simultaneously take into account both positive frequency shift and negative frequency shift application requirements, which is beneficial to improving the applicability of the fiber-coupled acousto-optic device.

[0054] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A fiber-coupled acousto-optic device, characterized in that: include: A housing (1) and at least two adjustment structures (2), wherein the housing (1) has a receiving cavity, and the two adjustment structures (2) are rotatably arranged on the housing (1) relative to the receiving cavity; At least two collimators (3) are provided, respectively, on one of the adjustment structures (2); under the action of an external force, the adjustment structure (2) is adapted to rotate relative to the housing (1) and drive the collimators (3) to rotate, so as to adjust the angle of the collimators (3).

2. The fiber-coupled acousto-optic device according to claim 1, wherein: At least two rotating parts (11) are provided on the shell (1), and the two rotating parts (11) are provided on the shell (1) relative to the accommodating cavity, and the two adjusting structures (2) are respectively arranged in one of the rotating parts (11).

3. The fiber-coupled acousto-optic device according to claim 2, wherein: The adjustment structure (2) comprises an adjustment member (21) and a mounting member (22); the adjustment member (21) is rotatably arranged in the rotating portion (11); the mounting member (22) is arranged on the adjustment member (21); and the collimator (3) is arranged on the mounting member (22).

4. The fiber-coupled acousto-optic device according to claim 3, wherein: The adjusting member (21) is provided with a mounting portion (211), and the mounting member (22) is arranged in the mounting portion (211).

5. The fiber-coupled acousto-optic device according to claim 4, wherein: The mounting member (22) has a mounting cavity with openings at both ends, the collimator (3) is suitable for being arranged in the mounting cavity through one of the openings, and the other opening of the mounting cavity is in communication with the rotating portion (11).

6. The fiber-coupled acousto-optic device according to claim 5, wherein: The rotating portion (11) is connected to the accommodating cavity to connect the accommodating cavity and the installation cavity.

7. The fiber-coupled acousto-optic device according to claim 6, wherein: The housing (1) is further provided with a locking portion (12) which is in communication with the rotating portion (11); It also includes a fastener, which is suitable for passing through the locking portion (12) and abutting against the adjusting member (21) under the action of external force to fix the adjusting member (21).

8. The fiber-coupled acousto-optic device according to claim 7, wherein: It also includes a filling piece, which is suitable for being filled into the installation cavity under the action of an external force to fill the space in the installation cavity when the collimator (3) is installed in the installation cavity.

9. The fiber-coupled acousto-optic device according to any one of claims 1 to 8, wherein: The device further comprises an acousto-optic crystal (4) and a radio frequency interface (5), wherein the acousto-optic crystal (4) is arranged in the accommodating cavity and between the two regulating structures (2), and the radio frequency interface (5) is arranged on the housing (1), with part of the radio frequency interface (5) being arranged in the accommodating cavity and the other part of the radio frequency interface (5) being arranged outside the accommodating cavity.

10. A laser device, characterized in that: The fiber-coupled acousto-optic device comprises the fiber-coupled acousto-optic device according to any one of claims 1 to 9.