Detection probe

Abstract

The utility model belongs to the technical field of detection, and particularly relates to a detection probe, which comprises an isolation shell, a trigger rod and a probe, the bottom end of the trigger rod extends to the position below the bottom of the isolation shell. The detector is arranged in the isolation shell; when the trigger rod abuts against an object and moves, the top end of the trigger rod makes contact with a detection port of the detector, and then the detector detects a clamping signal. The form that the trigger rod makes physical contact with the detector is adopted, when the mechanical arm clamps an object, the trigger rod makes contact with the object and then moves, the trigger rod makes contact with the detector, the detector obtains a signal, stable induction can be achieved in liquid medicine, and the defect caused by in-place clamping through laser induction in the prior art is overcome.

Description

Technical Field

[0001] The utility model belongs to the field of detection technology, and particularly relates to a detection probe. Background Art

[0002] Before cleaning the wafer, it needs to be placed in a flower basket, and then the flower basket is clamped by a robotic arm and moved to a liquid medicine tank for cleaning. Since the liquid medicine tank is filled with cleaning liquid, and the liquid medicine has color, the robotic arm in the existing technology uses a laser sensor to sense whether the robotic arm is clamping the flower basket. The laser detection will be interfered by the colored liquid medicine. As the working time increases, the liquid medicine will remain on the surface of the sensor, affecting the detection of the laser sensor, resulting in inaccurate detection.

[0003] Therefore, a detection probe is designed to solve the technical problem in the prior art that laser sensing detection is affected by the liquid medicine, resulting in inaccurate detection. Utility Model Content

[0004] The purpose of this utility model is to provide a detection probe to solve the above technical problems.

[0005] In order to solve the above technical problems, the present invention provides a detection probe, comprising:

[0006] An isolation shell, wherein a trigger rod is slidably connected to the interior of the isolation shell;

[0007] The bottom end of the trigger rod extends below the bottom of the isolation housing; and

[0008] A detector is provided inside the isolation housing; wherein

[0009] When the trigger rod abuts against the object and is displaced, the top end of the trigger rod contacts the detection port of the detector, thereby causing the detector to detect a clamping signal.

[0010] Furthermore, a trigger plate is provided on the outer wall of the top end of the trigger rod;

[0011] The trigger plate is connected to the inner wall of the isolation shell via a rotating shaft; and

[0012] The trigger plate is provided with a contact head; wherein

[0013] The trigger rod abuts against the object and slides in the isolation shell, driving the trigger plate to deflect around the rotation axis, thereby causing the contact head to contact the detection port.

[0014] Furthermore, an arc-shaped guide plate is provided inside the isolation shell;

[0015] The arc-shaped guide plate is located on one side of the top end of the trigger rod; and

[0016] The trigger rod abuts against the object and slides in the isolation shell. The top end of the trigger rod moves and bends along the guide direction of the arc-shaped guide plate, thereby driving the trigger plate to deflect around the rotation axis.

[0017] Furthermore, a spring rod is provided inside the isolation shell; and

[0018] One end of the spring rod is connected to the inner wall of the isolation shell, and the other end is connected to the trigger plate; wherein

[0019] The spring rod is adapted to push the trigger plate and its upper contact head away from the detection port after the clamping arm releases the object, thereby resetting the trigger rod.

[0020] Furthermore, a limiting member is provided inside the isolation shell; wherein

[0021] The limiting member is suitable for limiting the gap between the trigger plate and the detection port after the trigger plate is reset.

[0022] Furthermore, an adjusting bolt is provided on one side of the limiting member;

[0023] The adjusting bolt is suitable for adjusting the position of the limiting member in the isolation shell, thereby adjusting the gap between the trigger plate and the detection port after the trigger plate is reset.

[0024] Furthermore, a bellows is provided at the bottom of the isolation shell;

[0025] The bellows is sleeved on the outside of the bottom end of the trigger rod.

[0026] Furthermore, a wiring hole is provided on the outer wall of the isolation shell;

[0027] The trigger rod is made of flexible material.

[0028] The beneficial effect of the present invention is that the present invention adopts the form of physical contact between the trigger rod and the detector. When the robotic arm clamps the object, the trigger rod displaces after contacting the object, so that the trigger rod contacts the detector, so that the detector receives a signal. The form of physical contact sensing is adopted, and stable sensing can be achieved even in the medicine liquid, which makes up for the shortcomings of the laser sensing clamping in the existing technology.

[0029] Other features and advantages of the present invention will be described in the following description, and in part will become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention are realized and obtained by the structures particularly pointed out in the description and the drawings.

[0030] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0032] Figure 1 This is a schematic diagram of the overall cross-sectional structure of the utility model;

[0033] Figure 2 It is a schematic diagram of the trigger plate and its surrounding components of the present utility model.

[0034] In the picture:

[0035] 1. Isolation housing; 10. Curved guide plate; 11. Spring rod; 12. Cable routing hole;

[0036] 2. Trigger rod; 20. Contact head; 21. Trigger plate; 22. Rotating shaft;

[0037] 3. Detector; 30. Detection port;

[0038] 4. Limiting piece; 40. Adjusting bolt. DETAILED DESCRIPTION

[0039] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0040] Before cleaning the wafer, it needs to be placed in a flower basket, and then the flower basket is clamped by a robotic arm and moved to a liquid medicine tank for cleaning. Since the liquid medicine tank is filled with cleaning liquid, and the liquid medicine has color, the robotic arm in the existing technology uses a laser sensor to sense whether the robotic arm is clamping the flower basket. The laser detection will be interfered with by the colored liquid medicine. As the working time increases, the liquid medicine will affect the detection of the laser sensor, resulting in inaccurate detection.

[0041] To solve the above technical problems, in at least one embodiment, a detection probe is provided, comprising: an isolation shell 1, which is arranged on a clamping arm; a trigger rod 2 is slidably connected to the interior of the isolation shell 1; the bottom end of the trigger rod 2 extends to below the bottom of the isolation shell 1 and is located on one side of the clamping arm; and a detector 3, which is arranged inside the isolation shell 1; a gap is provided between the detection port 30 of the detector 3 and the top end of the trigger rod 2; when the clamping arm clamps an object, it drives the trigger rod 2 to abut against the object and displace, so that the top end of the trigger rod 2 contacts the detection port 30 of the detector 3, thereby causing the detector 3 to detect a clamping signal;

[0042] The trigger rod 2 is in physical contact with the detector 3. When the robotic arm clamps an object, the trigger rod 2 moves after contacting the object, causing the trigger rod 2 to contact the detector 3, so that the detector 3 receives a signal. The physical contact sensing form can achieve stable sensing even in the liquid medicine, making up for the shortcomings of the laser sensing clamping in the existing technology.

[0043] In some embodiments, the isolation shell 1 is fixed on the robotic arm, and the trigger rod 2 passes through the bottom of the isolation shell 1. The trigger rod 2 is divided into two parts, the upper part of the trigger rod 2 is located inside the isolation shell 1, and the lower part of the trigger rod 2 is located outside the isolation shell 1. The material of the trigger rod 2 is a flexible material (such as rubber, etc.). The robotic arm drives the isolation shell 1 to move. When the robotic arm clamps the object, the surface of the object contacts the lower part of the trigger rod 2, causing the trigger rod 2 to deviate, and then the contact head 20 set on the upper part of the trigger rod 2 contacts the detection port 30 on the detector 3, so that the detector detects the clamping signal.

[0044] In some embodiments, when the lower half of the trigger rod 2 contacts the surface of an object, the trigger rod 2 is pushed by the object and deflected, sliding upward in the isolation housing 1, and the upper half of the trigger rod 2 slides upward and bends along the guide direction of the arc-shaped guide plate 10, thereby driving the trigger plate 21 fixed on the outer wall of the upper half of the trigger rod 2 to deflect around the rotating shaft 22, as shown in FIG. Figure 1 It can be seen that the trigger plate 21 deflects toward the detector 3, and the spring rod 11 is compressed, so that the contact head 20 fixed on the trigger plate 21 contacts the detection port 30 on the detector 3, and the detector 3 detects the clamping signal.

[0045] In some embodiments, after the wafer cleaning is completed, the robotic arm drives the flower basket out of the liquid medicine tank and releases the clamp on the flower basket. As the robotic arm relaxes, the lower half of the trigger rod 2 breaks contact with the object, the spring rod 11 rebounds and resets, pushing the trigger plate 21 to reset, so that the contact head 20 is separated from the detection port 30. While the trigger plate 21 deflects and resets, it drives the trigger rod 2 to reset and wait for the next clamping of the robotic arm.

[0046] In some embodiments, when the robotic arm has not yet clamped an object, there is a gap between the contact head 20 and the detection port 30. In this state, the spring rod 11 presses one side of the trigger plate 21 and abuts against the limiter 4, and the gap between the contact head 20 and the detection port 30 is limited by the limiter 4. The operator can adjust the position of the limiter 4 in the isolation shell 1 by operating the adjustment bolt 40 as needed, that is, control the distance that the spring rod 11 pushes the trigger plate 21 to reset, and thereby control the size of the gap between the contact head 20 and the detection port 30.

[0047] In some embodiments, a bellows 5 is provided at the bottom of the isolation housing 1 , outside the lower half of the trigger rod 2 , to protect the trigger rod 2 .

[0048] In some embodiments, a wiring hole is provided on the isolation housing 1 for passing a wire through to connect to the detector 3 .

[0049] To sum up, the trigger rod is in physical contact with the detector. When the robotic arm clamps the object, the trigger rod moves after contacting the object, causing the trigger rod to contact the detector, so that the detector receives a signal. The physical contact sensing form can achieve stable sensing even in the liquid medicine, making up for the shortcomings of the laser sensing clamping in the existing technology.

[0050] In the description of the embodiments of the present invention, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0051] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0052] Based on the above-mentioned ideal embodiment of the present invention, and in accordance with the above description, relevant personnel can make various changes and modifications without departing from the technical scope of the present invention. The technical scope of the present invention is not limited to the content of the specification, but must be determined according to the scope of the claims.

Claims

1. A detection probe, characterized in that: include: an isolation shell, wherein a trigger rod is slidably connected to the interior of the isolation shell; in The bottom end of the trigger rod extends to below the bottom of the isolation housing; as well as A detector is disposed inside the isolation housing; in When the trigger rod abuts against the object and is displaced, the top end of the trigger rod contacts the detection port of the detector, thereby causing the detector to detect a clamping signal.

2. The detection probe according to claim 1, wherein: A trigger plate is provided on the outer wall of the top end of the trigger rod; The trigger plate is connected to the inner wall of the isolation shell via a rotating shaft; and The trigger plate is provided with a contact head; wherein The trigger rod abuts against the object and slides in the isolation shell, driving the trigger plate to deflect around the rotation axis, thereby causing the contact head to contact the detection port.

3. The detection probe according to claim 2, wherein: An arc-shaped guide plate is provided inside the isolation shell; The arc-shaped guide plate is located on one side of the top end of the trigger rod; and The trigger rod abuts against the object and slides in the isolation shell. The top end of the trigger rod moves and bends along the guide direction of the arc-shaped guide plate, thereby driving the trigger plate to deflect around the rotation axis.

4. The detection probe according to claim 3, wherein: A spring rod is provided inside the isolation shell; and One end of the spring rod is connected to the inner wall of the isolation shell, and the other end is connected to the trigger plate; wherein The spring rod is adapted to push the trigger plate and its upper contact head away from the detection port after the clamping arm releases the object, thereby resetting the trigger rod.

5. The detection probe according to claim 4, characterized in that: A limit piece is provided inside the isolation shell; wherein The limiting member is suitable for limiting the gap between the trigger plate and the detection port after the trigger plate is reset.

6. The detection probe according to claim 5, characterized in that: An adjusting bolt is provided on one side of the limiting member; The adjusting bolt is suitable for adjusting the position of the limiting member in the isolation shell, thereby adjusting the gap between the trigger plate and the detection port after the trigger plate is reset.

7. The detection probe according to claim 6, characterized in that: The bottom of the isolation shell is provided with a bellows; The bellows is sleeved on the outside of the bottom end of the trigger rod.

8. The detection probe according to claim 7, wherein: A wiring hole is provided on the outer wall of the isolation shell; The trigger rod is made of flexible material.

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