Silicon carbide polishing solution filtering device

Abstract

The utility model discloses a silicon carbide polishing solution filtering device, which relates to the technical field of filtering equipment and comprises an outer shell and a liquid outlet pipe, the liquid outlet pipe is arranged on one side of the outer shell, an upper shell is arranged above the outer shell, and a liquid inlet is arranged on one side of the upper shell. According to the silicon carbide polishing solution filtering device, the filter screen is mounted in the shell, the top end of the filter screen is in bolt connection with the concave plate of the shell through bolts, and the bottom of the filter screen is in clamping connection with the limiting piece in a rotary clamping mode, so that the filter screen can be quickly mounted and dismounted; the filter screens are fixedly connected through bolts, so that the filter screens can be conveniently disassembled and assembled, and the pore diameters of the filter screens are gradually reduced from top to bottom, so that when a solution passes through the filter screens with different pore diameters, the filter screens with different pore diameters can block impurities with different particle sizes, the filtering effect can be improved, and the purity of the polishing solution can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of filtering equipment, in particular to a silicon carbide polishing liquid filtering device. Background Art

[0002] During the production process of silicon carbide, potassium permanganate powder needs to be mixed with ultrapure water in a certain proportion and stirred thoroughly. Before the next step, a filtration process is required to filter out the undissolved particulate matter in the potassium permanganate solution in the reactor to prevent the incompatible substances from scratching the silicon carbide wafer during the silicon carbide polishing process. Therefore, in the next production step, the filtration device can be directly connected to the stirring container, and the potassium permanganate solution is refluxed into the reactor through the filtration device.

[0003] However, most existing filtration devices use a single-layer filter or a simple multi-stage filtration structure. After a period of use, a certain amount of particulate matter will accumulate in the filter, which will reduce the flow rate of the solution, resulting in low filtration efficiency, insufficient precision, and easy clogging. It is difficult to meet the needs of high-purity and high-precision polishing liquid.

[0004] Therefore, we propose a silicon carbide polishing liquid filtering device to solve the above problems. Utility Model Content

[0005] The purpose of the present utility model is to provide a silicon carbide polishing liquid filtering device to solve the problem that most of the filtering devices proposed in the above background technology adopt a single-layer filter screen or a simple multi-stage filtering structure. After a period of use, a certain amount of particulate matter will accumulate in the filter screen, which will reduce the flow rate of the solution, resulting in low filtration efficiency, insufficient precision, and easy clogging, making it difficult to meet the demand for high-purity and high-precision polishing liquid.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solution: a silicon carbide polishing liquid filtering device, comprising a housing and a liquid outlet pipe:

[0007] A liquid outlet pipe is provided on one side of the shell, an upper shell is provided above the shell, a liquid inlet is provided on one side of the upper shell, and a locking piece is passed through the connection between the upper shell and the shell, and six groups of locking pieces are provided;

[0008] The inner wall of the shell is integrally provided with a concave plate, and a filter screen is provided in the middle of the shell. The filter screen is divided into three layers, and the apertures of the three layers of filter screens are arranged to decrease from top to bottom, and each layer of filter screen is fixedly connected by bolts. A convex plate extends from the top of the filter screen, and the lower surface of the convex plate is fitted with the upper end surface of the concave plate, and the convex plate and the concave plate are fastened together by bolts.

[0009] Using the above technical solution, the polishing liquid is injected into the shell through the liquid inlet. Three layers of filters with different apertures are installed inside the shell. The three layers of filters can effectively remove impurities of different particles and effectively improve the purity of the polishing liquid.

[0010] Preferably, a card plate is provided at the bottom of the filter, and four groups of card plates are provided. A limiting member is integrated with the inner bottom of the shell. A positioning groove is provided on the outer surface of the limiting member. A card slot is provided between the limiting member and the shell, and the card plate and the card slot are snap-fitted together.

[0011] By adopting the above technical solution, the bottom of the filter is connected by the engagement connection between the clamping plate and the limiter slot, which allows the filter to be disassembled and installed conveniently and quickly, making the operation simple and easy to use.

[0012] Preferably, the bottom of the housing is bolted to a protective shell, one side of the protective shell is bolted to a reduction motor, the output end of the reduction motor is movably connected to a rotating shaft, and the rotating shaft and the protective shell are connected through a bearing;

[0013] A first bevel gear is fixed on the outer surface of the rotating shaft, a second bevel gear is meshed with the outer surface of the first bevel gear, and a driving tube is fixed on the upper end of the second bevel gear.

[0014] By adopting the above technical solution, the shaft is driven to rotate by the reduction motor, the shaft drives the first bevel gear to rotate, the first bevel gear drives the second bevel gear to rotate, and then the second bevel gear can drive the drive tube to rotate, so that the impurities deposited in the filter can be adsorbed and cleaned by rotation, thereby preventing the filter from being blocked, increasing the flow rate, and improving the filtration efficiency.

[0015] Preferably, a dust collection head is provided on the outer surface of the driving tube, and the dust collection head is fluidly connected to the driving tube, and the dust collection head is evenly arranged in several groups along the outer surface of the driving tube.

[0016] By adopting the above technical solution, multiple groups of dust suction heads are designed on the surface of the driving tube. The top of the dust suction head is close to the inside of the filter, which can absorb impurities in the filter, maintain the filtering effect of the filter, and ensure the stability of the polishing liquid quality.

[0017] Preferably, a support rod is fixed to the outer surface of the driving tube, a brush is fixed to one end of the support rod, and the brush is made of PBT wire material, and the brush is evenly arranged in several groups along the outer surface of the driving tube.

[0018] By adopting the above technical solution, the surface of the brush is close to the inside of the filter, and the rotation of the driving tube can drive the brush to rotate, and the impurities inside the filter can be separated from the filter by the brush, so that the impurities can be quickly removed in conjunction with the vacuum head, thereby increasing the filtering effect and preventing blockage.

[0019] Preferably, a conduit is provided at the top of the upper shell, and the conduit is fastened to the upper shell by bolts, and the conduit is fluidly connected to the drive tube, one side of the conduit is fluidly connected to a drain pipe, and the outer end of the drain pipe is bolted to the pump body.

[0020] By adopting the above technical solution, the conduit is fixedly connected to the upper shell through a flange connector, and is fluidly connected to the sewage pipe connected to the pump body. The negative pressure is increased on the driving pipe through the pump body, and the sucked impurities are sucked from the driving pipe to the sewage pipe and then discharged from the sewage pipe, which can achieve the best filtering effect to improve the quality of the polishing liquid.

[0021] Compared with the prior art, the beneficial effects of the present invention are:

[0022] 1. Install the filter screen inside the shell, and the top of the filter screen is bolted to the concave plate of the shell by bolts, and the bottom of the filter screen is connected to the limiter by rotating the card, so that the filter screen can be quickly installed and removed. The filter screen is divided into three layers, and each layer of the filter screen is fastened with bolts to facilitate the removal and installation of the filter screen. The aperture of the filter screen is set to decrease from top to bottom. When the solution passes through the filter screens with different apertures, the filter screens with different apertures can block impurities of different particle sizes, thereby increasing the filtering effect and improving the purity of the polishing liquid.

[0023] 2. After filtering the solution, backwashing is performed on the inside of the outer shell, and the multiple brushes on the outer surface of the drive tube rotate to increase the cleaning effect of impurities inside the filter. Then, by starting the pump body, the negative pressure causes the vacuum head to absorb the impurities inside the filter. The impurities absorbed by the vacuum head are then discharged through the conduit and finally from the sewage pipe. In order to effectively prevent blockage through the backwashing operation, the service life of the filter is extended, the filtering effect of the solution is increased, and the quality of the polishing liquid is ensured to be stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic diagram of the exterior structure of the utility model;

[0025] Figure 2 This is a schematic diagram of the cross-sectional structure of the main body of the utility model;

[0026] Figure 3 This is a schematic diagram of the cross-sectional structure of the filter screen of the utility model;

[0027] Figure 4 This is a schematic diagram of the connection structure between the filter screen and the limiting member of the utility model;

[0028] Figure 5 This is a schematic diagram of the connection structure between the filter screen and the shell of the utility model.

[0029] In the figure: 1. outer shell; 2. liquid outlet pipe; 3. upper shell; 4. liquid inlet; 5. locking piece; 6. concave plate; 7. filter screen; 8. convex plate; 9. clamping plate; 10. limit piece; 11. positioning groove; 12. clamping groove; 13. protective shell; 14. reduction motor; 15. rotating shaft; 16. first bevel gear; 17. second bevel gear; 18. driving pipe; 19. dust collector head; 20. support rod; 21. brush; 22. conduit; 23. drain pipe; 24. pump body. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0031] In order to solve the problem that a certain amount of particles will accumulate in the filter screen in the prior art, which will reduce the flow rate of the solution, the following solution is disclosed. Please refer to Figure 1-Figure 5 The present invention provides a technical solution: a silicon carbide polishing liquid filtering device, comprising a shell 1 and a liquid outlet pipe 2: a liquid outlet pipe 2 is provided on one side of the shell 1, an upper shell 3 is provided above the shell 1, a liquid inlet 4 is provided on one side of the upper shell 3, and a locking member 5 is passed through the connection between the upper shell 3 and the shell 1, and the locking member 5 is provided in six groups; a conduit 22 is provided at the top of the upper shell 3, and the conduit 22 is fastened to the upper shell 3 by bolts, and the conduit 22 is fluidically connected to the drive pipe 18, and a drain pipe 23 is fluidically connected to one side of the conduit 22, and the outer end of the drain pipe 23 is bolted to a pump body 24. The solution is injected into the shell 1 through the liquid inlet 4, and is filtered through multiple stages inside the shell 1, and the filtered polishing liquid is discharged from the liquid outlet pipe 2. During the filtration process, impurities separated by the filter screen 7 are discharged through the conduit 22 and then discharged from the drain pipe 23, so as to improve the filtration effect and the quality of the polishing liquid.

[0032] The inner wall of the shell 1 is integrally provided with a concave plate 6, and the middle part of the shell 1 is provided with a filter screen 7, and the filter screen 7 is divided into three layers, and the apertures of the three layers of filter screens 7 are arranged to decrease from top to bottom, and each layer of filter screen 7 is fixedly connected by bolts, and a convex plate 8 is extended from the top of the filter screen 7, and the lower surface of the convex plate 8 is fitted with the upper end surface of the concave plate 6, and the convex plate 8 and the concave plate 6 are fastened together by bolts; a clamping plate 9 is provided at the bottom of the filter screen 7, and four groups of clamping plates 9 are provided, and a limit member 10 is integrally provided on the inner bottom of the shell 1, and a positioning groove 11 is provided on the outer surface of the limit member 10, and a clamping groove 12 is provided between the limit member 10 and the shell 1, and the clamping plate 9 is clamped with the clamping groove 12. A filter screen 7 is installed inside the shell 1, and the top of the filter screen 7 is bolted to the concave plate 6 in the shell 1 by bolts, and the bottom of the filter screen 7 is engaged with the limit member 10 by rotating engagement, so that the filter screen 7 can be quickly installed and disassembled, and the filter screen 7 is divided into three layers, each layer of the filter screen 7 is fastened with bolts to facilitate the removal and installation of the filter screen 7, and the aperture of the filter screen 7 is set to decrease from top to bottom, so that when the solution passes through the filter screens 7 with different apertures, the filter screens 7 with different apertures can block impurities of different particle sizes, thereby increasing the filtering effect and improving the purity of the polishing liquid.

[0033] The bottom of the outer shell 1 is bolted to a protective shell 13, and one side of the protective shell 13 is bolted to a reduction motor 14. The output end of the reduction motor 14 is movably connected to a rotating shaft 15, and the rotating shaft 15 is connected to the protective shell 13 through a bearing; a first bevel gear 16 is fixed to the outer surface of the rotating shaft 15, and the outer surface of the first bevel gear 16 is engaged with a second bevel gear 17, and the upper end of the second bevel gear 17 is fixed to a drive tube 18; a dust collector head 19 is provided on the outer surface of the drive tube 18, and the dust collector head 19 is fluidly connected to the drive tube 18, and several groups of dust collector heads 19 are evenly arranged along the outer surface of the drive tube 18; a support rod 20 is fixed to the outer surface of the drive tube 18, and a brush 21 is fixed at one end of the support rod 20, and the brush 21 is made of PBT wire, and several groups of brushes 21 are evenly arranged along the outer surface of the drive tube 18. After the solution is filtered, the interior of the shell 1 is backwashed, and gas is applied to the interior of the shell 1 through the liquid outlet pipe 2, so that the air pressure inside the shell 1 changes, destroying the impurity blockage on the filter 7 and taking it away. Then, by starting the reduction motor 14, the reduction motor 14 drives the rotating shaft 15 to rotate, and the rotating shaft 15 drives the first bevel gear 16 to rotate, and the first bevel gear 16 drives the second bevel gear 17 to rotate, and then the second bevel gear 17 drives the driving pipe 18 to rotate, so that the multiple groups of brushes 21 on the outer surface of the driving pipe 18 can rotate, which can increase the cleaning effect of impurities inside the filter 7. Then, by starting the pump body 24, negative pressure is applied to the driving pipe 18, and the impurities inside the filter 7 are sucked by the dust suction head 19, and the impurities sucked by the dust suction head 19 are finally discharged from the sewage pipe 23, so as to effectively prevent blockage through the backwashing operation, extend the service life of the filter 7, increase the filtering effect of the solution, and ensure the stability of the quality of the polishing liquid.

[0034] Working principle: For this type of silicon carbide polishing liquid filtering device, the solution is injected into the shell 1 through the liquid inlet 4. A filter screen 7 is installed inside the shell 1, and the filter screen 7 is divided into three layers. Each layer of the filter screen 7 is fastened with bolts to facilitate the removal and installation of the filter screen 7. The aperture of the filter screen 7 is set to decrease from top to bottom. When the solution passes through the filter screens 7 with different apertures, the filter screens 7 with different apertures can block impurities of different particle sizes. The filtered polishing liquid is then discharged through the liquid outlet pipe 2. After a period of filtration, many impurities accumulate on the filter screen 7, which is discharged through the liquid outlet pipe 2 to the filter screen 7. Gas is applied inside the shell 1 to cause air pressure changes inside the shell 1, and then the reduction motor 14 drives the driving tube 18 to rotate and drives the multiple groups of brushes 21 on the outer surface of the driving tube 18 to rotate, which can increase the cleaning effect of impurities inside the filter 7. Then, by starting the pump body 24, negative pressure is applied to the driving tube 18, and the impurities inside the filter 7 are sucked out by the dust collector head 19. The impurities sucked out by the dust collector head 19 are then discharged from the drain pipe 23 through the conduit 22, so as to effectively prevent blockage through the backwash operation, extend the service life of the filter 7, increase the filtering effect of the solution, and ensure the stability of the polishing liquid quality.

[0035] Thereby completing a series of tasks, the contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0036] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A silicon carbide polishing liquid filtering device, comprising a housing (1) and a liquid outlet pipe (2), characterized in that: A liquid outlet pipe (2) is provided on one side of the shell (1), an upper shell (3) is provided above the shell (1), a liquid inlet (4) is provided on one side of the upper shell (3), and a locking member (5) is passed through the connection between the upper shell (3) and the shell (1), and six groups of locking members (5) are provided; The inner wall of the shell (1) is integrally provided with a concave plate (6), the middle part of the shell (1) is provided with a filter screen (7), and the filter screen (7) is divided into three layers, and the apertures of the three layers of filter screens (7) are arranged in a decreasing manner from top to bottom, and each layer of filter screen (7) is fixedly connected by bolts, and a convex plate (8) extends from the top of the filter screen (7), and the lower surface of the convex plate (8) is in affixed connection with the upper end surface of the concave plate (6), and the convex plate (8) and the concave plate (6) are fastened together by bolts; the bottom of the filter screen (7) is provided with a clamping plate (9), and the clamping plates (9) are provided in four groups, and the inner bottom of the shell (1) is integrally provided with a limit member (10), the outer surface of the limit member (10) is provided with a positioning groove (11), a clamping groove (12) is provided between the limit member (10) and the shell (1), and the clamping plate (9) is clamped and connected with the clamping groove (12).

2. A silicon carbide polishing liquid filtering device according to claim 1, characterized in that: The bottom of the housing (1) is bolted to a protective shell (13), one side of the protective shell (13) is bolted to a reduction motor (14), an output end of the reduction motor (14) is movably connected to a rotating shaft (15), and the rotating shaft (15) is connected to the protective shell (13) via a bearing; A first bevel gear (16) is fixed to the outer surface of the rotating shaft (15), a second bevel gear (17) is meshed with the outer surface of the first bevel gear (16), and a driving tube (18) is fixed to the upper end of the second bevel gear (17).

3. A silicon carbide polishing liquid filtering device according to claim 2, characterized in that: A dust collecting head (19) is provided on the outer surface of the driving tube (18), and the dust collecting head (19) is in fluid connection with the driving tube (18), and a plurality of groups of dust collecting heads (19) are evenly provided along the outer surface of the driving tube (18).

4. A silicon carbide polishing liquid filtering device according to claim 3, characterized in that: A support rod (20) is fixed to the outer surface of the driving tube (18), and a brush (21) is fixed to one end of the support rod (20). The brush (21) is made of PBT wire material, and the brushes (21) are evenly arranged in a plurality of groups along the outer surface of the driving tube (18).

5. The silicon carbide polishing liquid filtering device according to claim 1, characterized in that: A conduit (22) is provided at the top end of the upper shell (3), and the conduit (22) is fastened to the upper shell (3) by bolts, and the conduit (22) is fluidically connected to the drive tube (18), one side of the conduit (22) is fluidically connected to a drain pipe (23), and the outer end of the drain pipe (23) is bolted to the pump body (24).

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