Circulating cooling structure of electronic gas preparation reaction kettle

Abstract

The utility model relates to the technical field of electronic gas preparation, in particular to a circulating cooling structure of an electronic gas preparation reaction kettle, which comprises a cabinet body, a reaction kettle is fixedly connected to the bottom of an inner cavity of the cabinet body, an outer cooling pipe is fixedly connected to the outer wall of the reaction kettle, a water tank is arranged on the right side of the cabinet body, and a water pump is fixedly mounted on the left side of the water tank. A water pumping opening of the water pump is fixedly communicated with a water pumping pipe, the end, away from the water pump, of the water pumping pipe is fixedly communicated with the water tank, a water outlet of the water pump is fixedly communicated with a water outlet pipe, and the end, away from the water pump, of the water outlet pipe is fixedly communicated with the outer cooling pipe; the first motor is provided with a cooling assembly for accelerating cooling of cooling water, under the action of the cooling assembly, the inside and the outside of the reaction kettle are cooled at the same time, cooling is more uniform and rapid, the cooling water is cooled through a semiconductor chilling plate and fan blades, and the cooling effect is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of electronic gas preparation, in particular to a circulating cooling structure of an electronic gas preparation reactor. Background Art

[0002] Electronic gases are specialty gases used in electronics production, playing a vital role in semiconductors, liquid crystal displays, solar cells, optical fiber, and other electronics fields. Different electronic gases possess varying physical and chemical properties to meet the demands of various electronics manufacturing processes. Electronic gases can pose hazards such as asphyxiation, corrosiveness, toxicity, flammability, and explosiveness, and their hazards are classified by detailed hazard levels across different countries, regions, and industrial organizations.

[0003] Many electronic gas preparation reactions are carried out within a specific temperature range. If the temperature is too high, the reaction may run away, resulting in side reactions. High temperatures may also damage equipment such as reactors and pipelines. Therefore, water circulating cooling devices are generally used to cool the reactor. However, water circulating cooling devices can usually only cool the outer wall of the reactor, resulting in slow cooling speed and uneven cooling inside the reactor, which may affect the electronic gas preparation process. In order to increase the cooling speed while ensuring uniform cooling inside the reactor, we propose a circulating cooling structure for the electronic gas preparation reactor. Utility Model Content

[0004] In view of the shortcomings of the existing technology, the utility model provides a circulating cooling structure for an electronic gas preparation reactor, which can increase the cooling speed while ensuring uniform cooling inside the reactor.

[0005] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0006] A circulating cooling structure for an electronic gas preparation reactor comprises a cabinet body, a cabinet door is hingedly connected to the front side of the cabinet body, a reactor is fixedly connected to the bottom of the inner cavity of the cabinet body, an external cooling pipe is fixedly connected to the outer wall of the reactor, a water tank is provided on the right side of the cabinet body, a plurality of support columns are fixedly connected to the bottom of the water tank, a water injection pipe is fixedly connected to the right side of the water tank, a water pump is fixedly installed on the left side of the water tank, a water suction port of the water pump is fixedly connected to a water suction pipe, an end of the water suction pipe away from the water pump is fixedly connected to the water tank, a water outlet of the water pump is fixedly connected to a water outlet pipe, the water outlet pipe is passed into the cabinet body, an end of the water outlet pipe away from the water pump is fixedly connected to the external cooling pipe, a cooling component is installed on the reactor to evenly cool the inside and outside of the reactor, and a cooling component is installed on the first motor to accelerate the cooling of the cooling water.

[0007] Preferably, the cooling assembly includes a connecting pipe, which is fixedly connected to the external cooling pipe. The connecting pipe is passed into the reactor, and the end of the connecting pipe away from the external cooling pipe is fixedly connected to the internal cooling pipe. The end of the internal cooling pipe away from the connecting pipe is fixedly connected to the return pipe, and the return pipe passes out of the reactor and the cabinet. The end of the return pipe away from the internal cooling pipe is fixedly connected to the water tank.

[0008] Preferably, the cooling assembly also includes a second motor, which is fixedly mounted on the top of the reactor, and the output end of the second motor rotates and penetrates into the reactor, and the output end of the second motor is fixedly connected to a drive rod, and a plurality of groups of turntables are fixedly sleeved outside the drive rod, and a plurality of groups of blades are fixedly connected to the outside of the turntable.

[0009] Preferably, the cooling component includes a first motor, which is fixedly mounted on the top of the water tank, and the output end of the first motor rotates and passes through the water inlet tank, the output end of the first motor is fixedly connected to a stirring rod, and a plurality of stirring paddles are fixedly connected to the outside of the stirring rod, and a mounting cover is fixedly connected to the bottom of the inner cavity of the water tank, and the stirring rod rotates and passes through the mounting cover, and the bottom of the stirring rod is fixedly connected to the driving bevel gear, and a rotating rod is rotatably passed through the side wall of the mounting cover, and the left end of the rotating rod is fixedly connected to the driven bevel gear, and the driven bevel gear is meshed with the driving bevel gear, and the right end of the rotating rod rotates and passes through the water outlet tank, and the right end of the rotating rod is fixedly connected to the driving pulley.

[0010] Preferably, the cooling component also includes a mounting cylinder, which is fixedly mounted on the rear support column. A connecting rod is rotatably connected in the mounting cylinder, and a plurality of fan blades are fixedly connected to the outside of the connecting rod. The right end of the connecting rod is rotatably passed through the mounting cylinder, and the right end of the connecting rod is fixedly connected to a driven pulley, and a belt is tensioned between the driven pulley and the driving pulley.

[0011] Preferably, a gas detector is fixedly installed on the side wall of the inner cavity of the cabinet, an air pump is fixedly installed on the rear side of the cabinet, the air suction port of the air suction pump is fixedly connected to the cabinet, and the exhaust port of the air suction pump is fixedly connected to an exhaust pipe.

[0012] Preferably, a plurality of groups of heat dissipation fins are fixedly connected to the bottom of the water tank, and the heat dissipation fins are made of copper.

[0013] Preferably, a plurality of groups of semiconductor refrigeration plates are fixedly mounted on the inner wall of the water tank, and the semiconductor refrigeration plates are electrically connected to an external power supply.

[0014] Preferably, an observation window, a handle and a plurality of ventilation holes are provided on the front side of the cabinet door.

[0015] Preferably, one end of the air outlet pipe away from the air pump is fixedly connected to an exhaust pipe.

[0016] Beneficial effects

[0017] The utility model provides a circulating cooling structure for an electronic gas preparation reactor. Compared with the prior art, it has the following advantages:

[0018] 1. The circulating cooling structure of the electronic gas preparation reactor connects the external cooling pipe and the internal cooling pipe through a connecting pipe to achieve simultaneous cooling of the inside and outside of the reactor, making the cooling more uniform and rapid. The cooling water is cooled by semiconductor refrigeration sheets and fan blades to ensure the cooling effect and achieve circulating cooling.

[0019] 2. The circulating cooling structure of the electronic gas preparation reactor is equipped with an exhaust pump to make the cabinet

[0020] In a negative pressure state, it can prevent electronic gas from leaking out of the cabinet and endangering the health of workers. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0022] Figure 2 This is a schematic diagram of the rear view structure of the main body of the utility model;

[0023] Figure 3 This is a schematic diagram of the cross-sectional structure of the main body of the utility model;

[0024] Figure 4 This is a schematic diagram of the internal structure of the main cabinet of the utility model;

[0025] Figure 5 This is a schematic diagram of the internal structure of the main reactor of the utility model;

[0026] Figure 6 This is a schematic diagram of the connection structure between the main fan blades and the connecting rod of the utility model.

[0027] In the figure: 1. cabinet body; 2. cabinet door; 3. gas detector; 4. first motor; 5. water tank; 6. heat dissipation fin; 7. support column; 8. vacuum pump; 9. air outlet pipe; 10. mounting tube; 11. return pipe; 12. water injection pipe; 13. semiconductor refrigeration plate; 14. driving pulley; 15. driven pulley; 16. reactor; 17. second motor; 18. connecting pipe; 19. external cooling pipe; 20. internal cooling pipe; 21. water pump; 22. water outlet pipe; 23. mounting cover; 24. rotating rod; 25. stirring paddle; 26. stirring rod; 27. water extraction pipe; 28. turntable; 29. ​​blade; 30. fan blade; 31. connecting rod; 32. driven bevel gear; 33. driving bevel gear; 34. driving rod. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0029] See also Figure 1-6 The utility model provides a technical solution: a circulating cooling structure for an electronic gas preparation reactor, comprising a cabinet body 1, a cabinet door 2 hingedly connected to the front side of the cabinet body 1, a reactor 16 fixedly connected to the bottom of the inner cavity of the cabinet body 1, an external cooling pipe 19 fixedly connected to the outer wall of the reactor 16, a water tank 5 is provided on the right side of the cabinet body 1, a plurality of support columns 7 are fixedly connected to the bottom of the water tank 5, a water injection pipe 12 is fixedly connected to the right side of the water tank 5, a water pump 21 is fixedly installed on the left side of the water tank 5, a water suction port of the water pump 21 is fixedly connected to a water suction pipe 27, an end of the water suction pipe 27 away from the water pump 21 is fixedly connected to the water tank 5, a water outlet of the water pump 21 is fixedly connected to a water outlet pipe 22, the water outlet pipe 22 is penetrated into the cabinet body 1, and an end of the water outlet pipe 22 away from the water pump 21 is fixedly connected to the external cooling pipe 19, a cooling component for uniformly cooling the inside and outside of the reactor 16 is installed on the reactor 16, and a cooling component for accelerating the cooling of the cooling water is installed on the first motor 4.

[0030] When the circulating cooling structure of the electronic gas preparation reactor is used, a sufficient amount of cooling water must first be injected into the water tank 5 through the water injection pipe 12, then the electronic gas preparation reaction is carried out in the reactor 16, and the water pump 21 is started. The water pump 21 pumps the cooling water in the water tank 5 into the external cooling pipe 19 to cool the outer wall of the reactor 16. At the same time, the cooling component will cool the inside of the reactor 16, so that the inside and outside of the reactor 16 are evenly cooled and the overall cooling speed is accelerated. After the cooling water absorbs heat, its own temperature rises, and the cooling water temperature is reduced by the cooling component to ensure the cooling effect and realize circulating cooling.

[0031] The cooling assembly includes a connecting pipe 18, which is fixedly connected to an external cooling pipe 19. The connecting pipe 18 passes into the reactor 16. The end of the connecting pipe 18 away from the external cooling pipe 19 is fixedly connected to an internal cooling pipe 20. The end of the internal cooling pipe 20 away from the connecting pipe 18 is fixedly connected to a return pipe 11. The return pipe 11 passes out of the reactor 16 and the cabinet 1. The end of the return pipe 11 away from the internal cooling pipe 20 is fixedly connected to the water tank 5.

[0032] The cooling assembly also includes a second motor 17, which is fixedly mounted on the top of the reactor 16. The output end of the second motor 17 rotates and penetrates into the reactor 16. The output end of the second motor 17 is fixedly connected to a drive rod 34. A plurality of groups of turntables 28 are fixedly sleeved outside the drive rod 34, and a plurality of groups of blades 29 are fixedly connected to the outside of the turntable 28.

[0033] The cooling water in the outer cooling pipe 19 flows into the inner cooling pipe 20 through the connecting pipe 18. At the same time, the second motor 17 is started to drive the driving rod 34 to rotate, thereby rotating the blades 29, accelerating the flow of gas in the reactor 16, cooling the interior of the reactor 16, and achieving uniform cooling inside and outside the reactor 16. The cooling water then flows from the inner cooling pipe 20 into the return pipe 11, and finally flows back to the water tank 5, and the cooling water is recycled.

[0034] The cooling component includes a first motor 4, which is fixedly mounted on the top of the water tank 5, and the output end of the first motor 4 rotates and penetrates the water inlet tank 5. The output end of the first motor 4 is fixedly connected to a stirring rod 26, and a plurality of stirring paddles 25 are fixedly connected to the outside of the stirring rod 26. The bottom of the inner cavity of the water tank 5 is fixedly connected to a mounting cover 23, and the stirring rod 26 rotates and penetrates the mounting cover 23. The bottom of the stirring rod 26 is fixedly connected to a driving bevel gear 33. The side wall of the mounting cover 23 is rotatably penetrated by a rotating rod 24, and the left end of the rotating rod 24 is fixedly connected to a driven bevel gear 32. The driven bevel gear 32 is meshed with the driving bevel gear 33. The right end of the rotating rod 24 rotates and penetrates the water outlet tank 5, and the right end of the rotating rod 24 is fixedly connected to a driving pulley 14.

[0035] The cooling component also includes a mounting tube 10, which is fixedly mounted on the rear side of the rear support column 7. A connecting rod 31 is rotatably connected in the mounting tube 10, and a plurality of groups of fan blades 30 are fixedly connected to the outside of the connecting rod 31. The right end of the connecting rod 31 is rotatably passed through the mounting tube 10, and the right end of the connecting rod 31 is fixedly connected to a driven pulley 15, and a belt is tensioned between the driven pulley 15 and the driving pulley 14.

[0036] A plurality of groups of heat dissipation fins 6 are fixedly connected to the bottom of the water tank 5 , and the heat dissipation fins 6 are made of copper.

[0037] A plurality of semiconductor cooling fins 13 are fixedly mounted on the inner wall of the water tank 5 , and the semiconductor cooling fins 13 are electrically connected to an external power source.

[0038] The cooling water in the water tank 5 is continuously cooled by the semiconductor refrigeration sheet 13, and the first motor 4 is started to drive the stirring rod 26 to rotate, so that the stirring paddle 25 rotates to stir the cooling water, making the cooling more uniform. The rotation of the stirring rod 26 also drives the driving bevel gear 33 to rotate, and the rotating rod 24 is driven to rotate by the driven bevel gear 32, so that the driving pulley 14 rotates, driving the driven pulley 15 to rotate, and the fan blades 30 are rotated by the connecting rod 31. The wind generated by the rotation of the fan blades 30 blows over the surface of the heat dissipation fins 6 and the return pipe 11, which also has a cooling effect.

[0039] A gas detector 3 is fixedly installed on the side wall of the inner cavity of the cabinet 1, and an air pump 8 is fixedly installed on the rear side of the cabinet 1. The air suction port of the air pump 8 is fixedly connected to the cabinet 1, and the exhaust port of the air pump 8 is fixedly connected to the exhaust pipe 9.

[0040] The front side of the cabinet door 2 is provided with an observation window, a handle and a plurality of ventilation holes.

[0041] One end of the air outlet pipe 9 away from the air pump 8 is fixedly connected to an exhaust pipe.

[0042] During the electronic gas preparation reaction process, the cabinet door 2 must always be closed and the vacuum pump 8 must be operated. Under the action of the vacuum pump 8, the cabinet 1 is in a negative pressure state, and the outside air enters the cabinet 1 from the air vents on the cabinet door 2 and is discharged from the exhaust pipe through the outlet pipe 9, which can take away the heat on the outer wall of the reactor 16 and the external cooling pipe 19. If the electronic gas leaks, the gas detector 3 detects the signal and issues an alarm. The leaked gas is discharged through the outlet pipe 9 and will not leak outside the cabinet 1 to endanger the health of the staff.

[0043] Working principle: When the circulating cooling structure of the electronic gas preparation reactor is used, first, sufficient cooling water must be injected into the water tank 5 through the water injection pipe 12, and then the electronic gas preparation reaction is carried out in the reactor 16, and the water pump 21 is started. The water pump 21 draws the cooling water in the water tank 5 into the outer cooling pipe 19 to cool the outer wall of the reactor 16. The cooling water in the outer cooling pipe 19 flows into the inner cooling pipe 20 through the connecting pipe 18. At the same time, the second motor 17 is started to drive the driving rod 34 to rotate, thereby rotating the blades 29, accelerating the gas flow in the reactor 16, cooling the inside of the reactor 16, cooling the inside and outside of the reactor 16 evenly, and accelerating the overall cooling speed. Then the cooling water flows from the inner cooling pipe 20 into the return pipe 11, and finally flows back to the water tank 5. The cooling water absorbs heat, causing its own temperature to rise. The cooling water in the water tank 5 is continuously cooled through the semiconductor refrigeration plate 13, and the first motor 4 is started to drive the stirring rod 26 to rotate. The stirring paddle 25 rotates to stir the cooling water, making the cooling more uniform. The rotation of the stirring rod 26 also drives the active bevel gear 33 to rotate, and the driven bevel gear 32 drives the rotating rod 24 to rotate, so that the active pulley 14 rotates, driving the driven pulley 15 to rotate, and the fan blades 30 are rotated through the connecting rod 31. The wind generated by the rotation of the fan blades 30 blows through the heat dissipation fins 6 and the surface of the return pipe 11, which also plays a cooling role, ensuring the cooling effect and realizing circulating cooling. In this process, the cabinet door 2 must always be closed and the vacuum pump 8 must be operated. Under the action of the vacuum pump 8, the cabinet body 1 is in a negative pressure state. The outside air enters the cabinet body 1 through the air vents on the cabinet door 2 and is discharged from the exhaust pipe through the outlet pipe 9, which can take away the heat on the outer wall of the reactor 16 and the external cooling pipe 19. If electronic gas leaks, the gas detector 3 detects a signal and issues an alarm. The leaked gas is discharged through the outlet pipe 9 and will not leak outside the cabinet body 1 to endanger the health of the staff.

[0044] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0045] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A circulating cooling structure for an electronic gas preparation reactor, comprising a cabinet (1), characterized in that: The cabinet body (1) is hinged with a cabinet door (2) on the front side, the bottom of the inner cavity of the cabinet body (1) is fixedly connected to a reactor (16), the outer wall of the reactor (16) is fixedly connected to an external cooling pipe (19), a water tank (5) is provided on the right side of the cabinet body (1), the bottom of the water tank (5) is fixedly connected to a plurality of support columns (7), the right side of the water tank (5) is fixedly connected to a water injection pipe (12), the left side of the water tank (5) is fixedly installed with a water pump (21), the water outlet of the water pump (21) is fixedly connected to a water pump (19), and the water outlet of the water pump (21) is fixedly connected to a water pump (19). The water pump (27) is fixedly connected to the water tank (5) at one end away from the water pump (21), and the water outlet of the water pump (21) is fixedly connected to the water outlet pipe (22). The water outlet pipe (22) is passed through the cabinet (1), and the water outlet pipe (22) is fixedly connected to the external cooling pipe (19) at one end away from the water pump (21). The reactor (16) is provided with a cooling component for uniformly cooling the inside and outside of the reactor (16), and the first motor (4) is provided with a cooling component for accelerating the cooling of the cooling water.

2. The circulating cooling structure of the electronic gas preparation reactor according to claim 1, characterized in that: The cooling assembly includes a connecting pipe (18), the connecting pipe (18) is fixedly connected to the external cooling pipe (19), the connecting pipe (18) is passed through the reactor (16), the end of the connecting pipe (18) away from the external cooling pipe (19) is fixedly connected to the internal cooling pipe (20), the end of the internal cooling pipe (20) away from the connecting pipe (18) is fixedly connected to the return pipe (11), the return pipe (11) passes through the reactor (16) and the cabinet (1), and the end of the return pipe (11) away from the internal cooling pipe (20) is fixedly connected to the water tank (5).

3. The circulating cooling structure of the electronic gas preparation reactor according to claim 2, characterized in that: The cooling assembly further comprises a second motor (17), the second motor (17) being fixedly mounted on the top of the reactor (16), the output end of the second motor (17) being rotatably inserted into the reactor (16), the output end of the second motor (17) being fixedly connected to a driving rod (34), the driving rod (34) being fixedly sleeved with a plurality of groups of turntables (28), the outer side of the turntable (28) being fixedly connected to a plurality of groups of blades (29).

4. The circulating cooling structure of the electronic gas preparation reactor according to claim 3, characterized in that: The cooling component comprises a first motor (4), the first motor (4) being fixedly mounted on the top of the water tank (5), the output end of the first motor (4) being rotatably passed through the water tank (5), the output end of the first motor (4) being fixedly connected to a stirring rod (26), the outer side of the stirring rod (26) being fixedly connected to a plurality of stirring paddles (25), the bottom of the inner cavity of the water tank (5) being fixedly connected to a mounting cover (23), the stirring rod (26) being rotatably passed through the mounting cover (23), the bottom of the stirring rod (26) being fixedly connected to a driving bevel gear (33), a rotating rod (24) being rotatably passed through the side wall of the mounting cover (23), the left end of the rotating rod (24) being fixedly connected to a driven bevel gear (32), the driven bevel gear (32) being meshed with the driving bevel gear (33), the right end of the rotating rod (24) being rotatably passed through the water tank (5), the right end of the rotating rod (24) being fixedly connected to a driving pulley (14).

5. The circulating cooling structure of the electronic gas preparation reactor according to claim 4, characterized in that: The cooling assembly further comprises a mounting tube (10), wherein the mounting tube (10) is fixedly mounted on the rear support column (7), wherein a connecting rod (31) is rotatably connected in the mounting tube (10), wherein a plurality of fan blades (30) are fixedly connected to the outside of the connecting rod (31), wherein the right end of the connecting rod (31) is rotatably passed through the mounting tube (10), wherein the right end of the connecting rod (31) is fixedly connected to a driven pulley (15), and a belt is tensionedly sleeved between the driven pulley (15) and the driving pulley (14).

6. The circulating cooling structure of the electronic gas preparation reactor according to claim 5, characterized in that: A gas detector (3) is fixedly mounted on the side wall of the inner cavity of the cabinet (1), and an air pump (8) is fixedly mounted on the rear side of the cabinet (1). The air suction port of the air pump (8) is fixedly connected to the cabinet (1), and the exhaust port of the air pump (8) is fixedly connected to an exhaust pipe (9).

7. The circulating cooling structure of the electronic gas preparation reactor according to claim 6, characterized in that: A plurality of groups of heat dissipation fins (6) are fixedly connected to the bottom of the water tank (5), and the heat dissipation fins (6) are made of copper.

8. The circulating cooling structure of the electronic gas preparation reactor according to claim 7, characterized in that: A plurality of groups of semiconductor refrigeration sheets (13) are fixedly mounted on the inner wall of the water tank (5), and the semiconductor refrigeration sheets (13) are electrically connected to an external power supply.

9. The circulating cooling structure of the electronic gas preparation reactor according to claim 8, characterized in that: The front side of the cabinet door (2) is provided with an observation window, a handle and a plurality of ventilation holes.

10. The circulating cooling structure of the electronic gas preparation reactor according to claim 9, characterized in that: One end of the air outlet pipe (9) away from the air pump (8) is fixedly connected to an exhaust pipe.

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