Manipulator assembly capable of being leveled

Abstract

The utility model discloses a manipulator assembly capable of leveling, which comprises a sheet taking fork, a swing arm part, a turntable, a mandrel and a swing arm part adjusting mechanism, and the turntable is rotatably connected with the mandrel; a first adjusting part is arranged at one end of a lower first swing arm of the swing arm part and is connected with the mandrel, the other end of the lower first swing arm drives an upper second swing arm to swing through a linkage part, and one end, far away from the linkage part, of the upper second swing arm is hinged to the sheet taking fork; one end of the lower second swing arm is rotationally connected with the turntable through a swing arm part adjusting mechanism, and the other end is rotationally connected with the upper second swing arm; a second adjusting part is arranged at one end of the upper first swing arm and is rotationally connected with one end, far away from the core shaft, of the lower first swing arm through a first rotating shaft, and the other end is hinged to the sheet taking fork; the position of the first adjusting part in the vertical direction can be adjusted along the core shaft, the position of the second adjusting part in the vertical direction can be adjusted along the first rotating shaft, and the swing arm part adjusting mechanism can adjust the position of the end, rotationally connected with the rotating disc, of the second swing arm on the lower portion in the vertical direction. Therefore, the wafer carrying manipulator can meet the use requirement of the wafer taking fork through fine adjustment.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a manipulator component capable of leveling. Background Art

[0002] Thin film deposition on wafers in chemical vapor deposition (CVD) equipment requires a wafer handling robot within a load lock chamber to transfer wafers between the reaction chamber and the wafer cassette on the wafer cassette elevator. When thin film deposition is performed on batches of wafers, the load lock chamber must frequently switch between atmospheric pressure and vacuum pressure. This switching process requires evacuation / exhaustion, which is time-consuming and significantly impacts overall production efficiency. To overcome this issue, a wafer buffer structure can be added between the wafer cassette and the wafer handling robot. This wafer buffer structure within the load lock chamber is used to store wafers that have not yet been coated with thin film before being transferred from the cassette to the reaction chamber, or to store wafers that have already been coated with thin film before being transferred from the reaction chamber to the cassette. This wafer buffer structure provides an additional area within the load lock chamber for batch storage of wafers. Wafers to be transferred are cached in the wafer buffer structure and then transferred collectively by the wafer transfer mechanism. This significantly reduces the frequency of opening and closing the load lock chamber, avoids frequent switching between atmospheric pressure and vacuum pressure, and improves production efficiency.

[0003] like Figure 14 As shown, when wafers W are stored in the wafer buffer structure, the gaps between adjacent layers of wafers are relatively narrow. If the wafer fork's levelness deviates significantly, it may scrape the wafers during wafer removal and placement, causing scratches on the wafer surface. This can render uncoated wafers unusable and render coated wafers wasteful. Furthermore, significant levelness deviations can negatively impact the smoothness of the wafer transfer process.

[0004] At the same time, since the wafer retrieval fork will pass through the valve port of the load lock chamber during the wafer transfer process, the position of the valve port is fixed. If the position of the wafer retrieval fork deviates in the vertical direction, it is easy to interfere with the valve port and cause the wafer retrieval fork to collide.

[0005] Traditional wafer handling robots do not have the function of adjusting the wafer fork in the vertical direction. Therefore, after assembly is completed, the position of the wafer fork in the vertical direction cannot be adjusted. The relative position of the wafer fork depends entirely on the previous processing accuracy and assembly accuracy. Once a problem occurs during the processing or assembly process, the wafer handling robot cannot meet the use requirements of the wafer fork through fine-tuning. Summary of the Invention

[0006] The utility model provides a manipulator component capable of leveling, so that a wafer transporting manipulator can meet the use requirements of a wafer fork through fine adjustment.

[0007] In order to achieve the above purpose, the technical solution of the utility model is:

[0008] A leveling manipulator assembly comprises: a slice picking fork, a swing arm, a turntable, a core shaft, and a swing arm adjustment mechanism. The turntable and the core shaft are rotatably connected. Rotating the core shaft can drive the swing arm to move, so that the swing arm drives the slice picking fork to extend or retract.

[0009] The swing arm portion includes a lower first swing arm, an upper second swing arm, a lower second swing arm, an upper first swing arm and a linkage portion;

[0010] One end of the lower first swing arm is provided with a first adjustment portion, the first adjustment portion is connected to the core shaft, the other end of the lower first swing arm is connected to the upper second swing arm via a linkage portion, the lower first swing arm drives the upper second swing arm to swing via the linkage portion, and the end of the upper second swing arm away from the linkage portion is hinged to the slice taking fork;

[0011] One end of the lower second swing arm is rotatably connected to the turntable through a swing arm adjustment mechanism, and the other end of the lower second swing arm is rotatably connected to the upper second swing arm;

[0012] A second adjustment portion is provided at one end of the upper first swing arm, the second adjustment portion is rotatably connected to the end of the lower first swing arm away from the core shaft via a first rotating shaft, and the other end of the upper first swing arm is hinged to the slice taking fork;

[0013] The first adjustment part can adjust its position in the vertical direction along the core shaft, the second adjustment part can adjust its position in the vertical direction along the first rotating shaft, and the swing arm adjustment mechanism can adjust the position in the vertical direction of one end of the lower second swing arm that is rotatably connected to the turntable.

[0014] Furthermore, the swing arm adjustment mechanism includes a support, a hollow adjustment member, a hollow tensioning shaft, a locking bolt and a tensioning block;

[0015] The support is fixed on the top of the turntable, the support is provided with a threaded hole, and the hollow adjustment piece is provided with an external thread corresponding to the threaded hole;

[0016] The hollow adjusting member is screwed to vertically displace the hollow adjusting member relative to the support;

[0017] The hollow tensioning shaft is sleeved with a bearing fixed to the lower second swing arm, one end of the hollow tensioning shaft is detachably connected to the hollow adjustment member, and the other end of the hollow tensioning shaft is provided with a tensioning portion, and the tensioning portion is provided with a plurality of tensioning strips evenly distributed around the circumference, and the tensioning strips can be inserted into the connecting sleeve provided on the turntable;

[0018] The locking bolt passes through the center holes of the hollow adjustment piece and the hollow tensioning shaft and is threadedly connected to the tensioning block;

[0019] By screwing the locking bolt, the locking bolt can drive the tensioning block to vertically displace relative to the tensioning portion, so as to expand or close the plurality of tensioning strips, thereby achieving locking or unlocking of the tensioning strips and the connecting sleeve.

[0020] Furthermore, the invention further comprises a first tightening bolt, the first adjusting portion is a first open ring, the core shaft is located in the center hole of the first open ring, two free ends of the first open ring are respectively provided with a threaded hole and a countersunk hole, and the first tightening bolt passes through the countersunk hole and is threadedly connected to the threaded hole;

[0021] Tightening the first tightening bolt can bring the two free ends closer to each other, causing the first open annular shape to shrink and hold the core shaft tightly;

[0022] Furthermore, the invention further comprises a second tightening bolt, the second adjustment portion is a second open ring, the first rotating shaft is located in the center hole of the second open ring, and two free ends of the second open ring are respectively provided with a threaded hole and a countersunk hole, and the second tightening bolt passes through the countersunk hole and is threadedly connected to the threaded hole;

[0023] Tightening the second tightening bolt can bring the two free ends closer to each other, causing the second open annular shape to shrink and tightly embrace the first rotating shaft.

[0024] Furthermore, it further comprises a spring, one end of the spring being connected to the tensioning portion, and the other end of the spring being connected to the tensioning block;

[0025] When the locking bolt is loosened, the spring can release its elastic force, so that the tension block is separated from the tension strip.

[0026] Furthermore, a deformation groove is provided on the second open ring.

[0027] Furthermore, the tensioning block is in the shape of a truncated cone, the axial section of the truncated cone is an isosceles trapezoid, the angle range of the lower base angle of the isosceles trapezoid is 75-83 degrees, and the side of the tensioning strip close to the tensioning block is provided with a conical surface that cooperates with the side of the truncated cone.

[0028] Furthermore, the linkage part includes a driving gear, a driven gear, a gear upper cover and a gear lower cover;

[0029] One end of the lower second swing arm away from the swing arm adjustment mechanism is rotatably connected to the upper second swing arm via a second rotating shaft;

[0030] The gear upper cover is rotatably connected to the first rotating shaft and the second rotating shaft through two bearings respectively, and the gear lower cover is connected to the gear upper cover by bolts. The gear lower cover and the gear upper cover enclose a cavity for accommodating the driving gear and the driven gear;

[0031] The driving gear is fixed on one end of the lower first swing arm away from the core shaft, and the driven gear is fixed on one end of the upper second swing arm away from the slice taking fork, and the driven gear is meshed with the driving gear.

[0032] Beneficial effects:

[0033] The utility model provides a robot assembly capable of leveling, wherein the lower first swing arm adjusts its position in the vertical direction through the first adjustment part, the upper first swing arm adjusts its position in the vertical direction through the second adjustment part, and the lower second swing arm adjusts its position in the vertical direction through the swing arm adjustment mechanism, thereby achieving horizontal adjustment and height adjustment of the wafer fork by adjusting the heights of the three points, thereby enabling the wafer handling robot to meet the use requirements of the wafer fork through fine adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0035] Figure 1 This is a structural diagram of a leveling manipulator assembly disclosed in the present utility model;

[0036] Figure 2 This is a top view of a leveling manipulator assembly disclosed in the present utility model;

[0037] Figure 3 for Figure 2 BB cross-sectional view;

[0038] Figure 4 for Figure 2 CC cross-sectional view;

[0039] Figure 5 This is a schematic diagram of the extension of a leveling manipulator assembly disclosed in the present utility model;

[0040] Figure 6 This is a schematic diagram of the contraction of a leveling manipulator assembly disclosed in the present utility model;

[0041] Figure 7This is a structural schematic diagram of a lower first swing arm of a leveling manipulator assembly disclosed in the present utility model;

[0042] Figure 8 This is a structural schematic diagram of an upper first swing arm of a leveling manipulator assembly disclosed in the present utility model;

[0043] Figure 9 This is a top view of the upper first swing arm of a leveling manipulator assembly disclosed in the present utility model;

[0044] Figure 10 This is a structural schematic diagram of a hollow tensioning shaft of a leveling manipulator assembly disclosed in the present utility model;

[0045] Figure 11 This is a structural schematic diagram of a tensioning block of a hollow tensioning shaft of a leveling manipulator assembly disclosed in the utility model;

[0046] Figure 12 This is a structural diagram of a leveling robot assembly disclosed in the present invention installed on a wafer handling robot;

[0047] Figure 13 This is a cross-sectional schematic diagram of a leveling robot assembly disclosed in the present utility model being installed on a wafer handling robot;

[0048] Figure 14 This is a schematic diagram of the positions of wafers and wafer retrieval forks stored in the wafer buffer structure disclosed in the present invention;

[0049] Figure 15 This is a schematic structural diagram of the wafer cache structure disclosed in the present utility model;

[0050] Figure 16 This is a schematic cross-sectional view of the wafer cache structure disclosed in the present utility model.

[0051] In the picture:

[0052] 1. Take a slice fork;

[0053] 2. Swing arm portion; 201. Lower first swing arm; 202. Upper second swing arm; 203. Lower second swing arm; 204. Upper first swing arm; 205. Driving gear; 206. Driven gear; 207. First rotating shaft; 208. Second rotating shaft; 209. Gear upper cover; 210. Gear lower cover; 211. First open ring; 212. Second open ring; 213. Deformation groove;

[0054] 3. Turntable; 301. Connecting sleeve;

[0055] 4. Swing arm adjustment mechanism; 401. Support; 402. Hollow adjustment member; 403. Hollow tensioning shaft; 404. Locking bolt; 405. Tensioning block; 406. Tensioning unit; 407. Tensioning strip; 408. Spring; 409. Step surface; 410. Milling plane; 411. Internally threaded pipe;

[0056] 5. Mandrel;

[0057] 6. Intermediate shaft;

[0058] 7. Base axis;

[0059] 8. Base flange;

[0060] F01, mounting bracket; F02, drive motor; F03, cache box lifting screw; F04, cache box Z-axis slide rail; F05, cache box Z-axis slider; F06, connecting shaft clamping block; F07, cache box screw nut; F08, cache box screw nut seat; G, wafer cache box; H, connecting shaft; W, wafer. DETAILED DESCRIPTION

[0061] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0062] This embodiment provides a manipulator assembly capable of leveling, such as Figure 1 and Figure 2 As shown, it includes: a slice fork 1, a swing arm 2, a turntable 3, a core shaft 5 and a swing arm adjustment mechanism 4. The turntable 3 and the core shaft 5 are rotatably connected. The turntable 3 and the core shaft 5 are coaxially arranged. Rotating the core shaft 5 can drive the swing arm 2 to move, so that the swing arm 2 drives the slice fork 1 to extend (as shown in FIG. Figure 5 as shown) or shrink (as shown) Figure 6 shown);

[0063] like Figure 5 and Figure 6 As shown, the swing arm portion 2 includes a lower first swing arm 201, an upper second swing arm 202, a lower second swing arm 203, an upper first swing arm 204 and a linkage portion, wherein the upper second swing arm 202 and the upper first swing arm 204 are located above the lower first swing arm 201 and the lower second swing arm 203;

[0064] One end of the lower first swing arm 201 is provided with a first adjustment portion, which is connected to the core shaft 5. The other end of the lower first swing arm 201 is connected to the upper second swing arm 202 via a linkage portion. The lower first swing arm 201 drives the upper second swing arm 202 to swing via the linkage portion. The end of the upper second swing arm 202 away from the linkage portion is hinged to the slice taking fork 1;

[0065] One end of the lower second swing arm 203 is rotatably connected to the turntable 3 through the swing arm adjustment mechanism 4. Figure 3 As shown, the other end of the lower second swing arm 203 is rotatably connected to the upper second swing arm 202 through a second rotating shaft 208 and a bearing sleeved on the second rotating shaft 208, and the second rotating shaft 208 is fixed on the upper second swing arm 202;

[0066] The upper first swing arm 204 has a second adjustment portion at one end. Figure 3 As shown, the second adjustment portion is rotatably connected to the end of the lower first swing arm 201 away from the core shaft 5 via a first rotating shaft 207 and a bearing sleeved on the first rotating shaft 207. The first rotating shaft 207 is fixed to the upper first swing arm 204. The other end of the upper first swing arm 204 is hinged to the slice taking fork 1.

[0067] The first adjustment part can adjust its position in the vertical direction along the core shaft 5, the second adjustment part can adjust its position in the vertical direction along the first rotating shaft 207, and the swing arm adjustment mechanism 4 can adjust the position in the vertical direction of one end of the lower second swing arm 203 that is rotatably connected to the turntable 3.

[0068] This embodiment provides a leveling robot assembly, in which the lower first swing arm 201 adjusts its position in the vertical direction through the first adjustment part, the upper first swing arm 204 adjusts its position in the vertical direction through the second adjustment part, and the lower second swing arm 203 adjusts its position in the vertical direction through the swing arm adjustment mechanism 4, thereby achieving horizontal adjustment and height adjustment of the wafer fork 1 by adjusting the height of the three points, thereby enabling the wafer handling robot to meet the use requirements of the wafer fork through fine-tuning.

[0069] The schematic diagram of a leveling robot assembly provided in this embodiment being installed on a wafer handling robot is as follows: Figure 12 and Figure 13 As shown, the wafer handling robot adopts a multi-axis magnetic fluid sealed transmission device for transmission. The multi-axis magnetic fluid sealed transmission device is a finished component, which is easy to install and has a simple structure, which is beneficial to the overall structural layout of the robot. The multi-axis magnetic fluid sealed transmission device uses magnetic fluid to achieve sealing, which has better sealing performance during operation and longer service life. It is suitable for vacuum environments.

[0070] The multi-axis magnetic fluid sealing transmission device includes a core shaft 5, an intermediate shaft 6 and a base shaft 7 which are coaxially arranged from the inside to the outside. The core shaft 5 and the intermediate shaft 6 are rotatably connected via a bearing. The intermediate shaft 6 and the base shaft 7 are rotatably connected via a bearing. The base shaft 7 is fixed to a base flange 8 via bolts. The base flange 8 is fixed to the body of the load lock chamber via bolts. One end of the intermediate shaft 6 is fixedly connected to the turntable 3, and the other end is transmission-connected to the first motor. The first motor rotates by driving the intermediate shaft 6 to rotate the turntable 3, thereby driving the slice fork 1 to rotate. One end of the core shaft 5 is connected to the lower first swing arm 201, and the other end is transmission-connected to the second motor. The second motor rotates by driving the core shaft 5 to swing the lower first swing arm 201, thereby causing the swing arm part 2 to move.

[0071] In a specific embodiment, Figure 3 As shown, the linkage portion includes a driving gear 205, a driven gear 206, a gear upper cover 209 and a gear lower cover 210. In this embodiment, the driving gear 205 and the driven gear 206 are both shift gears, and the transmission process is smoother and more accurate, without causing the swing arm portion 2 to vibrate during transmission due to meshing clearance problems.

[0072] The gear upper cover 209 is rotatably connected to the first rotating shaft 207 and the second rotating shaft 208 via two bearings respectively. The gear lower cover 210 is connected to the gear upper cover 209 via bolts. The gear lower cover 210 and the gear upper cover 209 form a cavity to accommodate the driving gear 205 and the driven gear 206.

[0073] The driving gear 205 is fixed to the end of the lower first swing arm 201 away from the core shaft 5, and the driven gear 206 is fixed to the end of the upper second swing arm 202 away from the slice taking fork 1, and the driven gear 206 is meshed with the driving gear 205;

[0074] The gear lower cover 210 and the gear upper cover 209 can prevent the driving gear 205 and the driven gear 206 from being exposed, thereby playing a protective role. At the same time, the gear lower cover 210 and the gear upper cover 209 can ensure that the center distance between the first rotating shaft 207 and the second rotating shaft 208 remains unchanged, so that the driving gear 205 and the driven gear are always engaged, ensuring the normal operation of the swing arm part 2;

[0075] When the slice fork 1 needs to be extended or retracted, the core shaft 5 rotates, driving the lower first swing arm 201 to swing, and the upper second swing arm 202 is driven to swing by the driven gear 206 meshing with the driving gear 205, and the upper first swing arm 204 and the lower second swing arm 203 follow the lower first swing arm 201 and the upper second swing arm 202 to move. Figure 5 and Figure 6As shown, the swing is converted into a telescopic movement of the slice taking fork 1, and the upper first swing arm 204 and the lower second swing arm 203 also play a role in ensuring that the slice taking fork 1 can move stably.

[0076] In a specific embodiment, Figure 4 As shown, the swing arm adjustment mechanism 4 includes a support 401, a hollow adjustment member 402, a hollow tensioning shaft 403, a locking bolt 404 and a tensioning block 405;

[0077] The support 401 is fixed to the top of the turntable 3 by bolts. The support 401 is provided with a threaded hole, and the hollow adjustment member 402 is provided with an external thread corresponding to the threaded hole;

[0078] By screwing the hollow adjusting member 402 , the hollow adjusting member 402 can be vertically displaced relative to the support 401 ;

[0079] The hollow tensioning shaft 403 is sleeved with a bearing fixed to the lower second swing arm 203. One end of the hollow tensioning shaft 403 is detachably connected to the hollow adjustment piece 402 through a thread. After the bearing fixed to the lower second swing arm 203 is sleeved on the hollow tensioning shaft 403, the hollow tensioning shaft 403 and the hollow adjustment piece 402 are tightened and fixed for easy installation. Figure 10 As shown, a tensioning portion 406 is provided at the other end of the hollow tensioning shaft 403. The tensioning portion 406 has a stepped surface 409. The stepped surface 409 can limit the bearing mounted on the hollow tensioning shaft 403. The tensioning portion 406 is provided with a plurality of tensioning strips 407 evenly distributed around the circumference. The tensioning strips 407 can be inserted into the connecting sleeve 301 provided on the turntable 3. In actual application, a milled surface 410 is machined on the outer side of the tensioning strips 407 to facilitate the installer to tighten the hollow tensioning shaft 403 with a wrench.

[0080] In this embodiment, the thread between the hollow tensioning shaft 403 and the hollow adjusting member 402 is a reverse thread with a rotation direction opposite to that of the thread between the support 401 and the hollow adjusting member 402, so as to prevent the hollow tensioning shaft 403 and the hollow adjusting member 402 from separating from each other when the hollow adjusting member 402 is screwed.

[0081] The locking bolt 404 passes through the center holes of the hollow adjustment member 402 and the hollow tensioning shaft 403 and is threadedly connected to the tensioning block 405;

[0082] In this embodiment, if Figure 11As shown, the tensioning block 405 is in the shape of a truncated cone, the axial cross-section of which is an isosceles trapezoid. The angle range of the lower base angle of the isosceles trapezoid is 75-83 degrees. The truncated cone within this angle range can more smoothly expand the tensioning strip 407. The tensioning strip 407 is made of elastic metal material. The side of the tensioning strip 407 close to the tensioning block 405 is provided with a conical surface that cooperates with the side of the truncated cone.

[0083] In practical applications, the internal threaded tube 411 is also included. The internal threaded tube 411 is integrally formed with the tensioning block 405, extending the contact length between the tensioning block 805 and the locking bolt 804. By providing the internal threaded tube 411 on the tensioning block 805, the reliability of the connection between the locking bolt 404 and the tensioning block 405 is improved.

[0084] By screwing the locking bolt 404, the locking bolt 404 can drive the tensioning block 405 to vertically displace relative to the tensioning part 406. When the tensioning block 405 moves toward the tensioning part 406, the multiple tensioning strips 407 are squeezed by the tensioning part 406 and gradually stretched open, so that the tensioning strips 407 and the connecting sleeve 301 are locked. When the tensioning block 405 moves in the direction away from the tensioning part 406, the multiple tensioning strips 407 are not squeezed by the tensioning part 406 and gradually return to their original position and close, so that the tensioning strips 407 and the connecting sleeve 301 are unlocked.

[0085] In a specific embodiment, a first tightening bolt is further included. The first adjustment portion is a first open ring 211. The core shaft 5 is located in the center hole of the first open ring 211. A threaded hole and a countersunk hole are respectively provided on the two free ends of the first open ring 211. The first tightening bolt passes through the countersunk hole and is threadedly connected to the threaded hole.

[0086] In this embodiment, Figure 7 The left free end of the first open ring 211 is provided with a countersunk hole, which accommodates the head of the first tightening bolt. The first tightening bolt is inserted through the countersunk hole on the left free end and exits from the threaded hole on the right free end. Tightening the first tightening bolt can bring the two free ends closer together, causing the first open ring 211 to deform and shrink to tightly embrace the core shaft 5.

[0087] In a specific embodiment, a second tightening bolt is further included. The second adjustment portion is a second open ring 212. The first rotating shaft 207 is located in the center hole of the second open ring 212. A threaded hole and a countersunk hole are respectively provided on the two free ends of the second open ring 212. The second tightening bolt passes through the countersunk hole and is threadedly connected to the threaded hole.

[0088] In this embodiment, Figure 8The second open ring 212 is shown with a countersunk hole on the right free end, which accommodates the head of the second tightening bolt. The second tightening bolt is inserted through the countersunk hole on the right free end and exits from the threaded hole on the left free end. Tightening the second tightening bolt can bring the two free ends closer together, causing the second open ring 212 to deform and contract to tightly embrace the first rotating shaft 207.

[0089] In this embodiment, since the second open ring 212 is relatively thick and not easily deformed, the second open ring 212 is provided with the following Figure 9 The deformation groove 213 shown makes the second open ring 212 more easily deformed, and the pulling force required to bring the two free ends of the second open ring 212 closer to each other is smaller.

[0090] When fine-tuning is required, the locking bolt 404 can be loosened so that the tensioning block 405 no longer stretches the tensioning strip 407. At this time, the tensioning strip 407 no longer locks the connecting sleeve 301, and the two are separated from each other. The vertical displacement of the hollow tensioning shaft 403 is no longer constrained by the connecting sleeve 301. At this time, the hollow adjusting piece 402 is screwed, and the hollow adjusting piece 402 drives the hollow tensioning shaft 403 to move vertically, thereby driving the lower second swing arm 203 to move vertically relative to the turntable 3. After adjusting the rear position, the locking bolt 404 is tightened, and the tensioning block 405 stretches the tensioning strip 407, and the tensioning strip 407 is close to the connecting sleeve 301, so that the connecting sleeve 301 and the hollow tensioning shaft 403 are locked;

[0091] Loosen the first tightening bolt to separate the two free ends of the first open ring 211 from each other. The first open ring 211 no longer holds the core shaft 5 tightly. At this time, the position of the lower first swing arm 201 relative to the core shaft 5 can be adjusted vertically. After the position is adjusted, re-tighten the first tightening bolt to make the first open ring 211 hold the core shaft 5 tightly again.

[0092] Loosen the second tightening bolt to separate the two free ends of the second open ring 212 from each other, and the second open ring 212 no longer holds the first rotating shaft 207. At this time, the position of the upper first swing arm 204 relative to the first rotating shaft 207 can be adjusted vertically. After adjusting the position, re-tighten the second tightening bolt to make the second open ring 212 hold the first rotating shaft 207 again.

[0093] In a specific embodiment, Figure 4 As shown, a spring 408 is further included, one end of the spring 408 is connected to the tensioning portion 406, and the other end of the spring 408 is connected to the tensioning block 405;

[0094] By loosening the locking bolt 404, the spring 408 can release its elastic force, separating the tension block 405 from the tension bar 407, thereby preventing the tension block 405 and the tension bar 407 from being stuck together due to friction, making it impossible to separate the connecting sleeve 301 and the hollow tension shaft 403.

[0095] The following introduces a wafer cache structure, such as Figure 15 and Figure 16 As shown, it includes a wafer buffer box G and a wafer buffer box lifting device, and the wafer buffer box G is provided with a plurality of storage positions for storing wafers along the vertical direction (such as Figure 14 As shown, the storage location is a groove on the wafer cache box G), and the wafer cache box lifting device is used to lift the wafer cache box G;

[0096] The wafer cache box lifting device includes a mounting support F01, a drive motor F02, a cache box lifting screw F03, a cache box Z-direction slide rail F04, a cache box Z-direction slider F05, a connecting shaft clamping block F06 and a cache box screw nut seat F08. The mounting support 8401 is fixed on the cavity body of the load lock chamber, and the connecting shaft clamping block F06 is fixed to the cache box screw nut seat F08 by bolts. The connecting shaft clamping block F06 is used to clamp and fix the connecting shaft H fixed on the wafer cache box G on the cache box screw nut seat F08. In this embodiment, the mounting support F01 is provided with an axial hole matching the connecting shaft H, and the connecting shaft H can slide along the axial hole;

[0097] The cache box lifting screw F03 is rotatably arranged on the mounting support F01 through a bearing, and the drive motor F02 is fixed on the mounting support F01. The drive motor F02 can drive the cache box lifting screw F03 to rotate. In this embodiment, the drive motor F02 drives the cache box lifting screw F03 to rotate through a belt transmission. The cache box Z-direction slide rail F04 is arranged on the mounting support F01, and the cache box Z-direction slider F05 is installed on the cache box Z-direction slide rail F04. The cache box screw nut seat F08 is fixedly connected to the cache box Z-direction slider F05. The cache box screw nut seat F08 is provided with a cache box screw nut F07, and the cache box screw nut F07 is installed on the cache box lifting screw F03;

[0098] The wafer buffer box G is lifted and lowered in the vertical direction by the wafer buffer box lifting device, lifting the wafer on the wafer fork 1 or placing the wafer on the storage position, so that the wafer can be placed from the wafer fork 1 to the wafer buffer structure or from the wafer buffer structure to the wafer fork 1;

[0099] When the number of wafers without thin film deposition stored in the wafer buffer box G reaches the number required by the process (in this application, the upper limit of the number of wafers stored in the wafer buffer box G is 15, and the number required by the process is not greater than the upper limit of the storage number), the load lock chamber is closed, the reaction chamber is opened, and the wafer fork 1 is taken to transfer the wafers without thin film deposition to the reaction chamber for thin film deposition;

[0100] When the number of wafers that have completed thin film deposition stored in the wafer buffer box G reaches the number required by the process (in this application, the upper limit of the number of wafers that can be stored in the wafer buffer box G is 15, and the number required by the process is not greater than the upper limit of the storage number), the reaction chamber is closed, the load lock chamber is opened, and the wafer fork 1 transfers the wafers that have completed thin film deposition to the wafer box;

[0101] Before the chemical vapor deposition equipment is officially put into operation, it needs to be leveled by a leveling robot assembly provided in this application to ensure the horizontality of the wafer fork 1, and thereby ensure that the wafer fork 1 does not scratch the wafer in the wafer cache structure during operation.

[0102] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A leveling manipulator assembly, characterized in that: include: A slice taking fork (1), a swing arm (2), a turntable (3), a core shaft (5) and a swing arm adjustment mechanism (4); the turntable (3) and the core shaft (5) are rotatably connected; rotating the core shaft (5) can drive the swing arm (2) to move, so that the swing arm (2) drives the slice taking fork (1) to extend or retract; The swing arm portion (2) comprises a lower first swing arm (201), an upper second swing arm (202), a lower second swing arm (203), an upper first swing arm (204) and a linkage portion; One end of the lower first swing arm (201) is provided with a first adjustment portion, the first adjustment portion is connected to the core shaft (5), the other end of the lower first swing arm (201) is connected to the upper second swing arm (202) via a linkage portion, the lower first swing arm (201) drives the upper second swing arm (202) to swing via the linkage portion, and the end of the upper second swing arm (202) away from the linkage portion is hinged to the slice taking fork (1); One end of the lower second swing arm (203) is rotatably connected to the turntable (3) via a swing arm adjustment mechanism (4), and the other end of the lower second swing arm (203) is rotatably connected to the upper second swing arm (202); A second adjustment portion is provided at one end of the upper first swing arm (204), the second adjustment portion being rotatably connected to the end of the lower first swing arm (201) away from the core shaft (5) via a first rotating shaft (207), and the other end of the upper first swing arm (204) being hinged to the slice taking fork (1); The first adjustment portion can adjust its position in the vertical direction along the core shaft (5), the second adjustment portion can adjust its position in the vertical direction along the first rotating shaft (207), and the swing arm adjustment mechanism (4) can adjust the position in the vertical direction of one end of the lower second swing arm (203) that is rotatably connected to the turntable (3).

2. A leveling manipulator assembly according to claim 1, characterized in that: The swing arm adjustment mechanism (4) comprises a support (401), a hollow adjustment member (402), a hollow tensioning shaft (403), a locking bolt (404) and a tensioning block (405); The support (401) is fixed on the top of the turntable (3), the support (401) is provided with a threaded hole, and the hollow adjustment member (402) is provided with an external thread corresponding to the threaded hole; The hollow adjusting member (402) is screwed to vertically displace the hollow adjusting member (402) relative to the support (401); The hollow tensioning shaft (403) is sleeved with a bearing fixed to the lower second swing arm (203); one end of the hollow tensioning shaft (403) is detachably connected to the hollow adjustment member (402); the other end of the hollow tensioning shaft (403) is provided with a tensioning portion (406); the tensioning portion (406) is provided with a plurality of tensioning strips (407) uniformly distributed around the circumference; the tensioning strips (407) can be inserted into a connecting sleeve (301) provided on the turntable (3); The locking bolt (404) passes through the center holes of the hollow adjusting member (402) and the hollow tensioning shaft (403) and is then threadedly connected to the tensioning block (405); By screwing the locking bolt (404), the locking bolt (404) can drive the tensioning block (405) to vertically displace relative to the tensioning portion (406), so as to expand or close the plurality of tensioning strips (407), thereby achieving locking or unlocking of the tensioning strips (407) and the connecting sleeve (301).

3. A leveling manipulator assembly according to claim 2, characterized in that: It also includes a first tightening bolt, the first adjustment portion is a first open ring (211), the core shaft (5) is located in the center hole of the first open ring (211), and the two free ends of the first open ring (211) are respectively provided with a threaded hole and a countersunk hole, and the first tightening bolt passes through the countersunk hole and is threadedly connected to the threaded hole; Tightening the first tightening bolt can bring the two free ends closer to each other, causing the first open ring (211) to deform and shrink to hold the core shaft (5).

4. The leveling manipulator assembly according to claim 2, characterized in that: It also includes a second tightening bolt, the second adjustment portion is a second open ring (212), the first rotating shaft (207) is located in the center hole of the second open ring (212), and the two free ends of the second open ring (212) are respectively provided with a threaded hole and a countersunk hole, and the second tightening bolt passes through the countersunk hole and is threadedly connected to the threaded hole; Tightening the second tightening bolt can bring the two free ends closer to each other, causing the second open ring (212) to deform and shrink to hold the first rotating shaft (207).

5. The leveling manipulator assembly according to claim 2, characterized in that: It also includes a spring (408), one end of the spring (408) is connected to the tensioning portion (406), and the other end of the spring (408) is connected to the tensioning block (405); By loosening the locking bolt (404), the spring (408) can release its elastic force, so that the tensioning block (405) is separated from the tensioning strip (407).

6. The leveling manipulator assembly according to claim 4, characterized in that: The second open ring (212) is provided with a deformation groove (213).

7. The leveling manipulator assembly according to claim 2, characterized in that: The tensioning block (405) is in the shape of a truncated cone, the axial section of the truncated cone is an isosceles trapezoid, the angle range of the lower base angle of the isosceles trapezoid is 75-83 degrees, and the tensioning strip (407) is provided with a conical surface that matches the side surface of the truncated cone on the side close to the tensioning block (405).

8. The leveling manipulator assembly according to claim 1, characterized in that: The linkage part includes a driving gear (205), a driven gear (206), a gear upper cover (209) and a gear lower cover (210); One end of the lower second swing arm (203) away from the swing arm adjustment mechanism (4) is rotatably connected to the upper second swing arm (202) via a second rotating shaft (208); The gear upper cover (209) is rotatably connected to the first rotating shaft (207) and the second rotating shaft (208) respectively through two bearings, and the gear lower cover (210) is connected to the gear upper cover (209) through bolts. The gear lower cover (210) and the gear upper cover (209) enclose a cavity for accommodating the driving gear (205) and the driven gear (206); The driving gear (205) is fixed to one end of the lower first swing arm (201) away from the core shaft (5), and the driven gear (206) is fixed to one end of the upper second swing arm (202) away from the slice taking fork (1), and the driven gear (206) is meshed with the driving gear (205).

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