Roller transmission mechanism used in magnetron sputtering vacuum cavity

Abstract

The utility model relates to a roller transmission mechanism used in a magnetron sputtering vacuum cavity. A driving mechanism is arranged on one side of the roller transmission mechanism; the driving mechanism is movably connected with a driving roller transmission device; a transmission belt on the driving roller transmission device is movably connected with one of the driven roller transmission devices; the driven roller transmission devices are movably connected through a transmission belt. One driven roller transmission device is movably connected with the tail driven roller transmission device through a transmission belt; limiting adjustable bearing assemblies are adopted for connection. The adjustable bearing assembly is limited to adjust parallelism; according to the roller transmission mechanism, the function of conveniently adjusting the parallelism is achieved, and the technical problems that the roller transmission mechanism used in an existing magnetron sputtering vacuum cavity is often deviated, and after the deviation occurs, the parallelism of the roller transmission mechanism is difficult to adjust, and the parallelism is inconvenient to adjust are solved.

Description

Technical Field

[0001] The embodiment of the utility model relates to a roller transmission mechanism, in particular to a roller transmission mechanism used in a magnetron sputtering vacuum chamber. Background Art

[0002] The roller transmission mechanism used in the magnetron sputtering vacuum chamber needs to meet specific technical requirements to ensure high-precision and high-stability transmission. The roller transmission mechanism used in the existing magnetron sputtering vacuum chamber often deviates. When deviation occurs, it is difficult to adjust the parallelism of the roller transmission mechanism, and it is inconvenient to adjust the parallelism. Utility Model Content

[0003] The embodiment of the utility model aims to provide a roller transmission mechanism for use in a magnetron sputtering vacuum chamber, which is convenient for adjusting parallelism.

[0004] In order to achieve the above-mentioned purpose, the embodiment of the present utility model designs a roller transmission mechanism for use in a magnetron sputtering vacuum chamber, comprising:

[0005] A driving mechanism is provided on one side of the roller transmission mechanism;

[0006] an active roller transmission device, movably connected to the driving mechanism;

[0007] A passive roller transmission device, wherein a transmission belt on the active roller transmission device is movably connected to one of the passive roller transmission devices; the passive roller transmission device and the passive roller transmission device are both movably connected by a transmission belt;

[0008] A tail passive roller transmission device, wherein one of the passive roller transmission devices is movably connected to the tail passive roller transmission device through a transmission belt;

[0009] A position-adjustable bearing assembly is used to connect the active roller transmission device, the passive roller transmission device and the tail passive roller transmission device; the position-adjustable bearing assembly adjusts the parallelism between the active roller transmission device, the passive roller transmission device and the tail passive roller transmission device.

[0010] Furthermore, in the roller transmission mechanism used in the magnetron sputtering vacuum chamber described in the present invention, a plurality of groups of passive roller transmission devices are provided between the active roller transmission device and the tail passive roller transmission device.

[0011] Furthermore, in the roller transmission mechanism used in the magnetron sputtering vacuum chamber of the present invention, the driving mechanism further includes:

[0012] A motor is fixedly arranged on one side of the driving mechanism;

[0013] A motor fixing frame, on which the housing of the motor is fixed;

[0014] a driving wheel, fixed on the motor shaft of the motor;

[0015] An active synchronous belt is provided on the active wheel with one end thereof connected to the active roller transmission device.

[0016] Furthermore, in the roller transmission mechanism used in the magnetron sputtering vacuum chamber of the present invention, the active roller transmission device further includes:

[0017] a first driving pulley, the other end of the active synchronous belt of the driving mechanism being movably connected to the first driving pulley;

[0018] A driving shaft, wherein the first driving pulley is fixed to one end of the driving shaft;

[0019] a magnetic fluid seal, one end of which is fixed to the other end of the driving shaft;

[0020] a rigid coupling, one end of which is fixed to the other end of the magnetic fluid seal;

[0021] a notched roller, wherein the other end of the rigid coupling is fixed to one end of the notched roller;

[0022] Insulated self-lubricating bearings, the inner rings of which are fixed at both ends of the notched roller;

[0023] A modular adjustable base plate, on which the outer ring of the insulating self-lubricating bearing is fixed;

[0024] a full roller, which is arranged on the other side of the modular adjustable base plate through the insulating self-lubricating bearing;

[0025] A driven pulley, the driven pulley being fixed on the full roller;

[0026] A driven synchronous belt is movably connected between the driven pulley and the first driving pulley.

[0027] Furthermore, in the roller transmission mechanism used in the magnetron sputtering vacuum chamber described in the present invention, the passive roller transmission device is composed of two parallel full rollers movably connected through insulating self-lubricating bearings on a modular adjustable base plate.

[0028] Furthermore, in the roller transmission mechanism used in the magnetron sputtering vacuum chamber of the present invention, a rigid coupling, a magnetic fluid seal and a driven pulley are fixedly connected to one end of each of the two full rollers.

[0029] Furthermore, in the roller transmission mechanism used in the magnetron sputtering vacuum chamber of the present invention, the tail passive roller transmission device and the active roller transmission device are symmetrically arranged along the longitudinal axis.

[0030] Furthermore, in the roller transmission mechanism used in the magnetron sputtering vacuum chamber of the present invention, the position-adjustable bearing assembly further includes:

[0031] A connecting plate is used to connect and fix the active roller transmission device, the passive roller transmission device and the tail passive roller transmission device;

[0032] Adjustment mounting holes: a plurality of adjustment mounting holes are provided on one side of the connecting plate; the installation positions of the active roller transmission device, the passive roller transmission device and the tail passive roller transmission device are adjusted through the adjustment mounting holes;

[0033] Rollers, a plurality of which are fixedly connected to one side of the connecting plate.

[0034] Furthermore, in the roller transmission mechanism used in the magnetron sputtering vacuum chamber of the present invention, a tensioning mechanism is provided below the driven synchronous belt.

[0035] Furthermore, in the roller transmission mechanism used in the magnetron sputtering vacuum chamber of the present invention, the tensioning mechanism further includes:

[0036] Support blocks, fixing the support blocks on the same horizontal plane;

[0037] The tensioning wheel is movably connected to the support block through a bearing; the tensioning wheel presses upward against the driven synchronous belt to perform tensioning.

[0038] Compared with the prior art, the implementation method of the utility model is that a driving mechanism is provided on one side of the roller transmission mechanism; the active roller transmission device is movably connected to the driving mechanism; the transmission belt on the active roller transmission device is movably connected to one of the passive roller transmission devices; the passive roller transmission device and the passive roller transmission device are both movably connected with the transmission belt; one of the passive roller transmission devices and the tail passive roller transmission device are also movably connected with the transmission belt; the active roller transmission device, the passive roller transmission device and the tail passive roller transmission device are all connected by a limit-adjustable bearing assembly; the limit-adjustable bearing assembly adjusts the parallelism between the active roller transmission device, the passive roller transmission device and the tail passive roller transmission device; the function of conveniently adjusting the parallelism is realized, and the problem that the roller transmission mechanism used in the existing magnetron sputtering vacuum chamber often deviates and it is difficult to adjust the parallelism of the roller transmission mechanism after the deviation occurs, and it is inconvenient to adjust the technical problem of parallelism. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model. DETAILED DESCRIPTION

[0040] To make the objectives, technical solutions, and advantages of the present invention more clearly apparent, various embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, those skilled in the art will appreciate that many technical details are provided in various embodiments of the present invention to facilitate a better understanding of the present application. However, even without these technical details and the various variations and modifications based on the following embodiments, the technical solutions claimed in the claims of this application can be achieved.

[0041] The embodiment of the utility model relates to a roller transmission mechanism used in a magnetron sputtering vacuum chamber, such as Figure 1 Shown, including:

[0042] In this embodiment, a driving mechanism 10 is provided on one side of the roller transmission mechanism; the driving mechanism 10 is mainly used to provide power for the transmission mechanism;

[0043] The driving mechanism 10 is movably connected to the active roller transmission device 20; the driving mechanism 10 drives the active roller transmission device 20;

[0044] A transmission belt on the active roller transmission device 20 is movably connected to one of the passive roller transmission devices 30; a transmission belt is movably connected between the passive roller transmission device 30 and the passive roller transmission device 30; multiple passive roller transmission devices 30 are arranged in parallel; the driving mechanism 10 drives the active roller transmission device 20, and then the active roller transmission device 20 drives the multiple passive roller transmission devices 30 to transmit forward;

[0045] One of the passive roller transmission devices 30 is also movably connected to the tail passive roller transmission device 40 via a transmission belt; the passive roller transmission device 30 drives the tail passive roller transmission device 40 to transmit forward;

[0046] A limit-adjustable bearing assembly 50 is used to connect the active roller transmission device 20, the passive roller transmission device 30, and the tail passive roller transmission device 40; the limit-adjustable bearing assembly 50 adjusts the parallelism between the active roller transmission device 20, the passive roller transmission device 30, and the tail passive roller transmission device 40. The limit-adjustable bearing assembly 50 is mainly used to adjust the parallelism of the active roller transmission device 20, the passive roller transmission device 30, and the tail passive roller transmission device 40, realizing the function of conveniently adjusting the parallelism. This solves the technical problem that the roller transmission mechanism used in the existing magnetron sputtering vacuum chamber often deviates, and when deviation occurs, it is difficult to adjust the parallelism of the roller transmission mechanism.

[0047] In order to achieve the above technical effects, the roller transmission mechanism used in the magnetron sputtering vacuum chamber in this embodiment is as follows: Figure 1 As shown, a plurality of groups of passive roller transmission devices 30 are provided between the active roller transmission device 20 and the tail passive roller transmission device 40 .

[0048] In order to achieve the above technical effects, the roller transmission mechanism used in the magnetron sputtering vacuum chamber in this embodiment is as follows: Figure 1 As shown, the driving mechanism 10 further includes:

[0049] A motor 1 is fixedly arranged on one side of the driving mechanism 10 ; the motor 1 is used to provide driving force.

[0050] Fix the housing of the motor 1 on the motor fixing bracket 2; Fix the motor 1 on the motor fixing bracket 2;

[0051] Fix the driving wheel 3 on the motor shaft of the motor 1;

[0052] One end of the active synchronous belt 4 is provided on the active wheel 3 and connected to the active roller transmission device 20. The motor 1 drives the active wheel 3 to rotate, thereby driving the active synchronous belt 4 to run.

[0053] In order to achieve the above technical effects, the roller transmission mechanism used in the magnetron sputtering vacuum chamber in this embodiment is as follows: Figure 1 As shown, the active roller transmission device 20 further includes:

[0054] The other end of the active synchronous belt 4 of the driving mechanism 10 is movably connected to the first active pulley 21;

[0055] The first driving pulley 21 is fixed to one end of the driving shaft 22; the first driving pulley 21 is mounted on the driving shaft 22;

[0056] One end of the magnetic fluid seal 23 is fixed to the other end of the driving shaft 22; the magnetic fluid seal 23 is installed on the other end of the driving shaft 22;

[0057] One end of the rigid coupling 24 is fixed to the other end of the magnetic fluid seal 23; the rigid coupling 24 is fixed to the other end of the magnetic fluid seal 23;

[0058] The other end of the rigid coupling 24 is fixed to one end of the notched roller 25; the notched roller 25 is mounted on the other end of the rigid coupling 24;

[0059] The inner rings of the insulating self-lubricating bearings 26 are fixed at both ends of the notched roller 25; the insulating self-lubricating bearings 26 serve as bearings for the notched roller 25;

[0060] Fix the outer ring of the insulating self-lubricating bearing 26 on the modular adjustable base plate 27;

[0061] A full roller 28 is provided on the other side of the modular adjustable base plate 27 via an insulating self-lubricating bearing 26; the full roller 28 is mounted on the modular adjustable base plate 27;

[0062] A driven pulley 29 is fixed to the full roller 28; the driven pulley 29 is mounted on the full roller 28;

[0063] The driven pulley 29 and the first driving pulley 21 are movably connected to a driven synchronous belt 291. The driven synchronous belt 291 connects the driven pulley 29 and the first driving pulley 21 to form a belt transmission structure.

[0064] In order to achieve the above technical effects, the roller transmission mechanism used in the magnetron sputtering vacuum chamber in this embodiment is as follows: Figure 1 As shown, the passive roller transmission device 30 is composed of two parallel full rollers 28 movably connected through insulating self-lubricating bearings 26 on a modular adjustable base plate 27.

[0065] In order to achieve the above technical effects, the roller transmission mechanism used in the magnetron sputtering vacuum chamber in this embodiment is as follows: Figure 1 As shown, a rigid coupling 24 , a magnetic fluid seal 23 and a driven pulley 29 are fixedly connected to one end of each of the two full rollers 28 .

[0066] In order to achieve the above technical effects, the roller transmission mechanism used in the magnetron sputtering vacuum chamber in this embodiment is as follows: Figure 1 As shown, the tail passive roller transmission device 40 and the active roller transmission device 20 are symmetrically arranged along the longitudinal axis.

[0067] In order to achieve the above technical effects, the roller transmission mechanism used in the magnetron sputtering vacuum chamber in this embodiment is as follows: Figure 1 As shown, the limit adjustable bearing assembly 50 further includes:

[0068] The active roller transmission device 20, the passive roller transmission device 30 and the tail passive roller transmission device 40 are connected and fixed by a connecting plate 51;

[0069] A plurality of adjustment mounting holes 52 are provided on one side of the connecting plate 51; the mounting positions of the active roller transmission device 20, the passive roller transmission device 30 and the tail passive roller transmission device 40 are adjusted by adjusting the mounting holes 52;

[0070] A plurality of rollers 53 are fixedly connected to one side of the connecting plate 51. The connecting plate 51, the adjustment mounting holes 52, and the rollers 53 constitute a position-limited adjustable bearing assembly 50, which is used to adjust the parallelism of the active roller transmission device 20, the passive roller transmission device 30, and the tail passive roller transmission device 40, thereby realizing the function of conveniently adjusting parallelism.

[0071] In order to achieve the above technical effects, the roller transmission mechanism used in the magnetron sputtering vacuum chamber in this embodiment is as follows: Figure 1 As shown, a tensioning mechanism 60 is provided below the driven synchronous belt 291 .

[0072] In order to achieve the above technical effects, the roller transmission mechanism used in the magnetron sputtering vacuum chamber in this embodiment is as follows: Figure 1 As shown, the tensioning mechanism 60 further includes:

[0073] Fix the support block 61 on the same horizontal plane;

[0074] A tensioning wheel 62 is movably connected to the support block 61 via a bearing. The tensioning wheel 62 presses upward against the driven synchronous belt 291 to tension the belt. The support block 61 and the tensioning wheel 62 constitute the structure of the tensioning mechanism 60.

[0075] Those skilled in the art will appreciate that the above-mentioned embodiments are specific examples for implementing the present invention, and in actual applications, various changes may be made thereto in form and detail without departing from the spirit and scope of the present invention.

Claims

1. A roller transmission mechanism used in a magnetron sputtering vacuum chamber, characterized in that: include: A driving mechanism is provided on one side of the roller transmission mechanism; an active roller transmission device, movably connected to the driving mechanism; A passive roller transmission device, wherein a transmission belt on the active roller transmission device is movably connected to one of the passive roller transmission devices; the passive roller transmission device and the passive roller transmission device are both movably connected by a transmission belt; A tail passive roller transmission device, wherein one of the passive roller transmission devices is movably connected to the tail passive roller transmission device through a transmission belt; A position-adjustable bearing assembly is used to connect the active roller transmission device, the passive roller transmission device and the tail passive roller transmission device; the position-adjustable bearing assembly adjusts the parallelism between the active roller transmission device, the passive roller transmission device and the tail passive roller transmission device.

2. The roller transmission mechanism for use in a magnetron sputtering vacuum chamber according to claim 1, characterized in that: A plurality of groups of passive roller transmission devices are arranged between the active roller transmission device and the tail passive roller transmission device.

3. The roller transmission mechanism for use in a magnetron sputtering vacuum chamber according to claim 1, characterized in that: The driving mechanism further comprises: A motor is fixedly arranged on one side of the driving mechanism; A motor fixing frame, on which the housing of the motor is fixed; a driving wheel, fixed on the motor shaft of the motor; An active synchronous belt is provided on the active wheel with one end thereof connected to the active roller transmission device.

4. The roller transmission mechanism for use in a magnetron sputtering vacuum chamber according to claim 1, characterized in that: The active roller transmission device further includes: a first driving pulley, the other end of the active synchronous belt of the driving mechanism being movably connected to the first driving pulley; A driving shaft, wherein the first driving pulley is fixed to one end of the driving shaft; a magnetic fluid seal, one end of which is fixed to the other end of the driving shaft; a rigid coupling, fixing one end of the rigid coupling to the other end of the magnetic fluid seal; a notched roller, wherein the other end of the rigid coupling is fixed to one end of the notched roller; Insulated self-lubricating bearings, the inner rings of which are fixed at both ends of the notched roller; A modular adjustable base plate, on which the outer ring of the insulating self-lubricating bearing is fixed; a full roller, which is arranged on the other side of the modular adjustable base plate through the insulating self-lubricating bearing; A driven pulley, fixed to the full roller; A driven synchronous belt is movably connected between the driven pulley and the first driving pulley.

5. The roller transmission mechanism for use in a magnetron sputtering vacuum chamber according to claim 1, characterized in that: The passive roller transmission device is composed of two parallel full rollers movably connected via insulating self-lubricating bearings on a modular adjustable base plate.

6. The roller transmission mechanism for use in a magnetron sputtering vacuum chamber according to claim 5, characterized in that: A rigid coupling, a magnetic fluid seal and a driven pulley are fixedly connected to one end of each of the two full rollers.

7. The roller transmission mechanism for use in a magnetron sputtering vacuum chamber according to claim 1, characterized in that: The tail passive roller transmission device and the active roller transmission device are symmetrically arranged along the longitudinal axis.

8. The roller transmission mechanism for use in a magnetron sputtering vacuum chamber according to claim 1, characterized in that: The position-adjustable bearing assembly further comprises: A connecting plate is used to connect and fix the active roller transmission device, the passive roller transmission device and the tail passive roller transmission device; Adjustment mounting holes: a plurality of adjustment mounting holes are provided on one side of the connecting plate; the installation positions of the active roller transmission device, the passive roller transmission device and the tail passive roller transmission device are adjusted through the adjustment mounting holes; Rollers, a plurality of which are fixedly connected to one side of the connecting plate.

9. The roller transmission mechanism for use in a magnetron sputtering vacuum chamber according to claim 4, characterized in that: A tensioning mechanism is provided below the driven synchronous belt.

10. The roller transmission mechanism for use in a magnetron sputtering vacuum chamber according to claim 9, characterized in that: The tensioning mechanism further comprises: Support blocks, fixing the support blocks on the same horizontal plane; The tensioning wheel is movably connected to the support block through a bearing; the tensioning wheel presses upward against the driven synchronous belt to perform tensioning.

Images