Circulating feeding device and plasma cleaning equipment

Abstract

The utility model discloses a circulating feeding device and plasma cleaning equipment, and relates to the technical field of plasma, the circulating feeding device comprises a base, two feeding frames and two supporting plates, the base is provided with two parallel first sliding rails which are arranged at intervals, each feeding frame is arranged on one first sliding rail in a sliding mode, and the two supporting plates are arranged on the two first sliding rails in a sliding mode. The two feeding frames can be close to or far away from each other in the same linear direction, the feeding frames are provided with guide rails, the guide rails extend in the direction perpendicular to the base, each supporting plate is arranged on one guide rail in a sliding mode, and the supporting plates are provided with material boxes used for containing material pieces. According to the technical scheme, due to the fact that the supporting plates on the two feeding frames are arranged in the staggered mode in the vertical direction, interference and collision are avoided, and due to the fact that the two supporting plates on the two feeding frames alternately flow between the feeding position and the material taking position, the feeding efficiency is improved, and the cleaning speed of the cleaning machine is matched.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma, in particular to a circulating feeding device and plasma cleaning equipment. Background Art

[0002] Plasma cleaning equipment operates on the principle that active particles in plasma physically or chemically react with the surface of a material, thereby removing surface contaminants. Plasma is the fourth state of matter, composed of electrons, ions, and free radicals. These active particles interact with the surface of the material under the influence of an electric field, achieving the cleaning effect. During operation, plasma cleaning equipment first generates plasma within a vacuum chamber. Then, the active particles in the plasma interact with the surface of the material, removing surface dirt and oxides through physical bombardment or chemical reaction. Physical bombardment primarily involves ions striking the surface, dislodging contaminants; chemical reactions involve the active particles reacting with contaminants to produce volatile substances, thereby achieving cleaning.

[0003] In related technologies, plasma cleaning equipment is usually equipped with a loading device to transport the workpiece products to be cleaned to the plasma cleaning equipment for cleaning. However, since the cleaning machine has high cleaning efficiency by batch cleaning, the current loading device cannot meet the requirements of efficient loading, and the operating speeds of the two are not matched. Utility Model Content

[0004] The main purpose of the utility model is to propose a circulating feeding device, aiming to provide a circulating feeding device with higher feeding efficiency, thereby solving the problem of mismatch between the running speed of the feeding device and the cleaning machine.

[0005] To achieve the above-mentioned purpose, the utility model proposes a circulating feeding device, which is applied to the feeding of the sheet in the plasma cleaning equipment, and comprises:

[0006] A base, wherein the base is provided with two first slide rails that are parallel and spaced apart;

[0007] Two loading racks, each of which is slidably mounted on one of the first slide rails, and the two loading racks can move closer to or farther from each other in the same straight line, and the loading racks are provided with guide rails extending in a direction perpendicular to the base; and

[0008] Two supporting plates, each of which is slidably arranged on one of the guide rails, are provided with a material box for containing the tablets.

[0009] In one embodiment, the cyclic loading device further comprises a first drive assembly and a second drive assembly, wherein the first drive assembly is drivably connected to the two loading racks and is capable of driving the two loading racks to move relatively closer or farther away;

[0010] The second driving assembly is drivingly connected to the two supporting plates and can drive the supporting plates to slide along the guide rail.

[0011] In one embodiment, the first driving assembly includes two first driving members, each of which includes a first motor, a first screw rod, and a first slider;

[0012] The first motor is arranged on the base, the first screw rod is arranged at the driving end of the first motor and is arranged along the extension direction of the first slide rail, and the first sliding block is screwed to the first screw rod and connected to the loading rack.

[0013] In one embodiment, the second driving assembly includes two second driving members respectively provided on the two loading racks, and the second driving members include a second motor, a second screw rod and a second slider;

[0014] The second motor is arranged on the loading rack, the second screw rod is arranged at the driving end of the second motor and is arranged along the extension direction of the guide rail, and the second slider is screwed to the second screw rod and connected to the supporting plate.

[0015] In one embodiment, a sliding seat is slidably provided on the first slide rail, the sliding seat is provided with a second slide rail, the second slide rail is arranged in a direction perpendicular to the first slide rail, and the loading rack is slidably provided on the second slide rail.

[0016] In one embodiment, the sliding seat is provided with a third driving motor, a driving end of the third driving motor is provided with a third screw rod, and the bottom of the loading rack is slidably provided on the third screw rod.

[0017] In one embodiment, the circulating feeding device is provided with a plurality of material boxes, the plurality of material boxes are arranged at intervals, and the plurality of material boxes are slidably arranged on the supporting plate.

[0018] In one embodiment, the support plate is provided with a spacing adjustment assembly, which includes a cylinder, a third track and a mounting block slidably arranged on the third track, the cylinder is connected to a plurality of the mounting blocks, and each of the mounting blocks is connected to one of the material boxes.

[0019] In one embodiment, the material box is provided with a receiving cavity with openings at both ends, and two side walls of the receiving cavity are provided with a plurality of limiting grooves, and the plurality of limiting grooves are arranged at intervals along the vertical direction.

[0020] The utility model also provides a plasma cleaning device, which includes the above-mentioned circulating feeding device.

[0021] In the technical solution of the present invention, a circulating feeding device and plasma cleaning equipment are proposed, wherein the circulating feeding device includes a base, two feeding racks and two supporting plates, the base is provided with two parallel and spaced first slide rails, the two feeding racks are respectively slidably arranged on the two first slide rails, the feeding rack is provided with a guide rail perpendicular to the base, the supporting plates are slidably arranged on the guide rails, and a material box for holding the sheet is provided on the supporting plate, the extension direction of the first slide rail is the feeding direction, when feeding, one of the feeding racks moves to one end of the cleaning machine and then uses the other automatic The equipment pushes the sheets in the material box into the cleaning machine until all the sheets leave the material box. At this time, the pallet on the loading rack descends along the guide rail until the highest position of the material box on the pallet is lower than the other pallet. The loading rack moves away from the cleaning machine, and the other loading rack full of sheets to be cleaned moves toward one end of the cleaning machine. Since the pallets on the two loading racks are staggered in the vertical direction, no interference or collision will occur. The two pallets on the two loading racks alternate between the loading position and the unloading position, thereby improving the loading efficiency and matching the cleaning rate of the cleaning machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0023] Figure 1 This is a structural diagram of an embodiment of a circulating feeding device provided by the present utility model;

[0024] Figure 2 This is a structural diagram of the circulating feeding device from another angle;

[0025] Figure 3 It is a structural diagram of the base in the circulating feeding device;

[0026] Figure 4 It is a structural diagram of the sliding seat in the circulating feeding device;

[0027] Figure 5 It is a structural diagram of the spacing adjustment component;

[0028] Figure 6 Schematic diagram of the structure of the material box;

[0029] Figure 7 Schematic diagram of the structure of the sheet product.

[0030] Description of Figure Numbers:

[0031] 1000. Circular feeding device; 1. Base; 11. First slide rail; 12. First drive assembly; 121. First motor; 122. First screw rod; 123. First slider; 2. Feeding rack; 21. Guide rail; 22. Second drive assembly; 221. Second motor; 222. Second screw rod; 223. Second slider; 3. Support plate; 4. Material box; 41. Accommodating cavity; 42. Limiting groove; 5. Sliding seat; 51. Second slide rail; 511. Third slider; 52. Third drive assembly; 521. Third motor; 522. Third screw rod; 523. Third slider; 6. Spacing adjustment assembly; 61. Cylinder; 62. Fourth slider; 63. Third rail; 64. Mounting block; 65. Connecting block; 2000. Material sheet.

[0032] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0034] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0035] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0036] The utility model proposes a circulating feeding device, which aims to provide a circulating feeding device with higher feeding efficiency, thereby solving the problem of mismatch between the feeding device and the running speed of the cleaning machine. Figures 1 to 7 The present invention provides a schematic structural diagram of an embodiment of the circulating feeding device.

[0037] Please refer to Figures 1 to 7 The present invention proposes a circulating loading device 1000, which is used for loading the material 2000 in the plasma cleaning equipment, including a base 1, two loading racks 2 and two support plates 3. The base 1 is provided with two parallel and spaced first slide rails 11, each loading rack 2 is slidably arranged on a first slide rail 11, and the two loading racks 2 can approach or move away from each other in the same straight line direction. The loading rack 2 is provided with a guide rail 21, and the guide rail 21 is extended in the direction perpendicular to the base 1. Each support plate 3 is slidably arranged on a guide rail 21, and the support plate is provided with a material box 4 for holding the material 2000.

[0038] In the technical solution of the present invention, a circulating feeding device 1000 and a plasma cleaning device are proposed, wherein the circulating feeding device 1000 includes a base 1, two feeding racks 2 and two support plates 3. The base 1 is provided with two parallel and spaced first slide rails 11, and the two feeding racks 2 are respectively slidably arranged on the two first slide rails 11. The feeding rack 2 is provided with a guide rail 21 perpendicular to the base 1, and the support plate 3 is slidably arranged on the guide rail 21. A material box 4 for holding a sheet 2000 is provided on the support plate 3. The extension direction of the first slide rail 11 is the feeding direction. When feeding, one of the feeding racks 2 moves to one end of the cleaning machine and then uses its Other automated equipment pushes the material sheets 2000 in the material box 4 into the cleaning machine until all the material sheets 2000 leave the material box 4. At this time, the pallet 3 on the loading rack 2 descends along the guide rail 21 until the highest position of the pallet 3 loading box 4 is lower than the other pallet 3. The loading rack 2 moves away from one end of the cleaning machine, and the other loading rack 2 fully loaded with the material sheets 2000 to be cleaned moves toward one end of the cleaning machine. Since the pallets 3 on the two loading racks 2 are staggered in the vertical direction, no interference or collision occurs. The two pallets 3 on the two loading racks 2 alternately flow between the loading position and the unloading position, thereby improving the loading efficiency and matching the cleaning rate of the cleaning machine.

[0039] In the technical solution of the present invention, the loading rack 2 can be driven by a motor, a cylinder 61 or a magnetic drive, and the present invention does not impose any restrictions on this. In one embodiment of the present invention, the base 1 is provided with a first driving assembly 12, including a first motor 121, a first screw rod 122 and a first slider 123. The first screw rod 122 is arranged along the extension direction of the first slide rail 11. The first screw rod 122 is arranged at the driving end of the first motor 121, and the first screw rod 122 is driven to rotate by the first motor 121. The first slider 123 mounted on the first screw rod 122 is screwed to the first screw rod 122. When the first screw rod 122 rotates, the first slider 123 will move along the extension direction of the first screw rod 122. The first slider 123 is connected to the loading rack 2 above, thereby driving the loading rack 2 to slide on the first slide rail 11. Furthermore, the loading rack 2 is provided with a second driving assembly 22, including a second motor 221, a second screw rod 222 and a second slider 223. The second motor 221 drives the second screw rod 222 to rotate and drives the second slider 223 to move vertically, thereby driving the support plate 3 to rise or fall, so that the two support plates 3 are staggered to avoid collision and interference.

[0040] In order to adjust the distance between the two loading racks 2, a third drive assembly 52 is provided on the support plate 3. The third drive assembly 52 includes two third drive members respectively arranged on the two support plates 3. Each third drive member includes a third motor 521, a third screw rod 522 and a third slider 523. The third motor 521 drives the third screw rod 522 to rotate and drives the third slider 523 to move along the extension direction of the third screw rod 522 so that the two loading racks 2 can be closer or farther away, thereby achieving fine-tuning of the distance between the two loading racks 2.

[0041] In the solution of the present invention, each pallet 3 is provided with a plurality of material boxes 4, and the number of material boxes 4 is not limited in this solution. In one embodiment, four material boxes 4 are provided on each pallet 3, and a spacing adjustment component 6 is provided on the pallet 3 to adjust the spacing between each material box 4. The driving principle is that a cylinder 61 installed at the bottom of the pallet 3 pushes the fourth slider 62 inverted on the third track 63 to slide along the third track 63. A plurality of connecting blocks 65 are correspondingly installed on the fourth slider 62, and the connecting blocks 65 clamp the material box 4. Each material box 4 is correspondingly provided with a mounting block 64. By manually adjusting the mounting block 64, the material boxes 4 can be driven to move and adjust their spacing.

[0042] It should be noted that the present invention does not limit the specific shape and structure of the material box 4. In one embodiment of the present invention, the material box 4 has a receiving cavity 41 with two ends open. For details, please refer to Figure 6The two side walls of the accommodating cavity 41 are provided with a plurality of limiting grooves 42. Every two corresponding limiting grooves 42 together form an accommodating layer. The sheet 2000 is inserted into the accommodating layer for accommodating. The two ends of the sheet 2000 are respectively limited in the limiting grooves 42. When unloading, the sheet 2000 is pushed into the cleaning machine from top to bottom in sequence by the pushing device.

[0043] The present invention also proposes a plasma cleaning device, which includes a circulating feeding device 1000. The specific structure of the circulating feeding device 1000 refers to the above embodiment. Since the present plasma cleaning device adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described one by one here.

[0044] The above description is merely an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made using the contents of the present invention specification and drawings under the technical concept of the present invention, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A circulating feeding device, used for feeding sheets in plasma cleaning equipment, characterized in that: include: A base, wherein the base is provided with two first slide rails that are parallel and spaced apart; Two loading racks, each of which is slidably mounted on one of the first slide rails, and the two loading racks can move closer to or farther from each other in the same straight line, and the loading racks are provided with guide rails extending in a direction perpendicular to the base; and Two supporting plates, each of which is slidably arranged on one of the guide rails, are provided with a material box for containing the tablets.

2. The circulating feeding device according to claim 1, characterized in that: The circulating feeding device further comprises a first driving assembly and a second driving assembly, wherein the first driving assembly is drivingly connected to the two feeding racks and can drive the two feeding racks to move relatively closer or farther away; The second driving assembly is drivingly connected to the two supporting plates and can drive the supporting plates to slide along the guide rail.

3. The circulating feeding device according to claim 2, characterized in that: The first driving assembly includes two first driving members, each of which includes a first motor, a first screw rod, and a first slider; The first motor is arranged on the base, the first screw rod is arranged at the driving end of the first motor and is arranged along the extension direction of the first slide rail, and the first sliding block is screwed to the first screw rod and connected to the loading rack.

4. The circulating feeding device according to claim 2, characterized in that: The second driving assembly includes two second driving members respectively provided on the two loading racks, and the second driving members include a second motor, a second screw rod and a second slider; The second motor is arranged on the loading rack, the second screw rod is arranged at the driving end of the second motor and is arranged along the extension direction of the guide rail, and the second slider is screwed to the second screw rod and connected to the supporting plate.

5. The circulating feeding device according to any one of claims 1 to 4, characterized in that: A sliding seat is slidably provided on the first slide rail, the sliding seat is provided with a second slide rail, the second slide rail is arranged in a direction perpendicular to the first slide rail, and the loading rack is slidably provided on the second slide rail.

6. The circulating feeding device according to claim 5, characterized in that: The sliding seat is provided with a third driving motor, a driving end of the third driving motor is provided with a third screw rod, and the bottom of the loading rack is slidably provided on the third screw rod.

7. The circulating feeding device according to any one of claims 1 to 4, characterized in that: The circulating feeding device is provided with a plurality of material boxes, the plurality of material boxes are arranged at intervals, and the plurality of material boxes are slidably arranged on the supporting plate.

8. The circulating feeding device according to claim 7, characterized in that: The support plate is provided with a spacing adjustment component, which includes a cylinder, a third track and a mounting block slidably arranged on the third track. The cylinder is connected to a plurality of the mounting blocks, and each of the mounting blocks is connected to one of the material boxes.

9. The circulating feeding device according to claim 7, characterized in that: The material box is provided with a receiving cavity with openings at both ends, and two side walls of the receiving cavity are provided with a plurality of limiting grooves, and the plurality of limiting grooves are arranged at intervals along the vertical direction.

10. A plasma cleaning device, characterized in that: It comprises the circulating feeding device according to any one of claims 1 to 9.

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