Workpiece rotating stand of vacuum magnetron sputtering coating equipment

Abstract

The utility model discloses a workpiece rotating stand of vacuum magnetron sputtering coating equipment, and relates to the technical field of vacuum magnetron sputtering coating. The limiting device comprises a rotating plate, a fixing plate is arranged below the rotating plate, a supporting seat is fixedly connected to the bottom of the fixing plate, a plurality of limiting assemblies are arranged above the rotating plate, parts contained in the limiting assemblies are the same, each limiting assembly comprises a pulling block, and the pulling blocks are arranged on the rotating plate. The back face of the pulling block is fixedly connected with a movable column. According to the utility model, the fixed cylinder is arranged, specifically, the pulling block is pulled, so that the movable column can release the limitation on the limiting column, the movable column can be easily pulled out, then a new suspension assembly is aligned with the fixed cylinder to be inserted, and then under the action of the spring, the movable column can play a role in limiting the suspension assembly again; and not only is a worker convenient to quickly dismount the device, but also a large amount of debugging time consumed during mounting and dismounting can be saved, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum magnetron sputtering coating, in particular to a workpiece rotating rack of vacuum magnetron sputtering coating equipment. Background Art

[0002] The vacuum chamber is first evacuated to a certain high vacuum by a high vacuum system, and then an inert process gas (such as argon) is filled into the sputtering chamber to a constant pressure (such as 5×10-1Pa) through a mass flow controller or a pressure instrument. A DC power supply of a certain power is applied to the magnetron cathode target. Under the action of the high voltage of the positive and negative electrodes, the gas atoms in front of the cathode target and between the anode are ionized in large quantities, generating a glow discharge. The device uses the combined action of magnetic and electric fields to prepare thin films in a low-pressure environment.

[0003] Since the shapes and types of workpieces to be processed are different, the suspension device needs to be replaced. The staff often needs a lot of time to adjust the suspension device, which is not only inconvenient for the staff to quickly disassemble it, but also increases the workload of the staff and reduces production efficiency. Therefore, we proposed a workpiece turntable for vacuum magnetron sputtering coating equipment. Utility Model Content

[0004] The purpose of the utility model is to provide a workpiece rotating rack for vacuum magnetron sputtering coating equipment. By pulling the pulling block, the movable column can release the restriction on the limiting column, so that it can be easily withdrawn, and then a new suspension component is aligned with the fixed tube and inserted. Then, under the action of the spring, the movable column will play a restrictive effect on the suspension component again, solving the problem that the existing staff often need a lot of time to adjust the suspension device, which is not only inconvenient for the staff to quickly disassemble it, but also increases the workload of the staff and reduces production efficiency.

[0005] In order to solve the above technical problems, the present invention is achieved through the following technical solutions:

[0006] The utility model discloses a workpiece rotating frame for vacuum magnetron sputtering coating equipment, comprising a rotating plate, a fixed plate provided below the rotating plate, a support seat fixedly connected to the bottom of the fixed plate, a limiting assembly provided above the rotating plate, a plurality of limiting assemblies, and the parts contained in the plurality of limiting assemblies are identical, the limiting assembly comprising a pulling block, a movable column fixedly connected to the back of the pulling block, a spring sleeved on the outer surface of the movable column, a suspension assembly provided above the limiting assembly, a plurality of suspension assemblies, and the parts contained in the plurality of suspension assemblies are identical, the suspension assembly comprising a limiting column, the outer surface of the limiting column contacts a fixed cylinder, and a rotating hole is provided at the top of the rotating plate. The utility model provides a fixed cylinder, specifically, by pulling the pulling block, the movable column can release the restriction on the limiting column, allowing the movable column to be easily withdrawn, and then a new suspension assembly is aligned with the fixed cylinder and inserted. Subsequently, under the action of the spring, the movable column will resume the restriction effect on the suspension assembly, which not only facilitates the rapid disassembly of the workpiece by the staff, but also saves a lot of debugging time consumed during installation and disassembly, thereby improving production efficiency.

[0007] Furthermore, the bottom of the fixed plate is fixedly connected to a motor, the output end of the top of the motor is fixedly connected to a rotating column through a coupling, the top of the rotating column is fixedly connected to the bottom of the rotating plate, the four corners of the top of the fixed plate are fixedly connected to fixed columns one, the tops of the four fixed columns one are fixedly connected to gears, the front faces of the gears are meshed with small gears, the number of the small gears is several, and the several small gears are arranged in a ring array. The arrangement of several fixed columns one can fix the gears more stably to prevent them from displacement during operation.

[0008] Furthermore, a connecting column is fixedly connected to the top of the small gear, and the outer surface of the connecting column contacts the inner wall of the rotating hole. A limiting ring is fixedly connected to the side of the outer surface of the connecting column close to the rotating plate, and the bottom of the limiting ring contacts the top of the rotating plate. The setting of the limiting ring allows the connecting column to be restricted to the surface of the rotating plate while rotating to prevent it from falling.

[0009] Furthermore, the top of the connecting column is fixedly connected to the bottom of the fixed tube, the front of the fixed tube is fixedly connected to a fixed block, the front of the fixed block is provided with a movable groove, and the top of the fixed tube is provided with a limiting groove. The setting of the fixed tube enables it to limit the limiting column to prevent it from shaking during rotation.

[0010] Furthermore, the inner wall of the movable groove is fixedly connected with a limiting ring 2, the inner wall of the limiting ring 2 contacts the outer surface of the movable column, the outer surface of the movable column is fixedly connected with a fixing ring 1, the back of the fixing ring 1 contacts the limiting ring 1, the outer surface of the limiting ring 1 contacts the inner wall of the movable groove, and the front of the fixing ring 1 is fixedly connected to the back of the spring. The setting of the spring enables the movable column to be quickly reset, thereby improving the overall convenience of the device.

[0011] Furthermore, a limiting hole is provided on the front side of the limiting column, and the inner wall of the limiting hole contacts the outer surface of the movable column. The top of the limiting column is fixedly connected to a fixed column 2, the outer surface of the fixed column 2 is fixedly connected to a fixed ring 2, and the bottom of the fixed ring 2 is fixedly connected to a hook. The number of the hooks is several, and the several hooks are arranged in a circular array. The utility model rotates the rotating plate by setting the hook, specifically by starting the motor. Since the gear under the rotating plate is in a fixed state, when the rotating plate drives the small gear to move, since the small gear is meshed with the gear, the suspension assembly will rotate while the small gear moves, so that the outer surface coating of the workpiece hung on the hook is more uniform, the overall device is more convenient to use, and the quality of the product is improved.

[0012] The utility model has the following beneficial effects:

[0013] 1. The utility model sets a fixed cylinder, specifically, by pulling the pulling block, the movable column can release the restriction on the limiting column, so that it can be easily withdrawn, and then the new suspension component is aligned with the fixed cylinder and inserted. Then, under the action of the spring, the movable column will have a restrictive effect on the suspension component again, which not only makes it convenient for the staff to quickly disassemble it, but also saves a lot of debugging time consumed during installation and disassembly, thereby improving production efficiency.

[0014] 2. The utility model sets a hook, specifically, starts the motor to rotate the rotating plate. Since the gear under the rotating plate is in a fixed state, when the rotating plate drives the small gear to move, the small gear is engaged with the gear, and the suspension assembly rotates while the small gear moves, so that the outer surface coating of the workpiece hung on the hook is more uniform, making the overall use of the device more convenient and improving the quality of the product.

[0015] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0017] Figure 1 This is a schematic diagram of the structure of the rotating plate of the utility model;

[0018] Figure 2 This is a schematic diagram of the structure of the rotating column of the utility model;

[0019] Figure 3 This is a schematic diagram of the fixed block structure of the utility model;

[0020] Figure 4 This is a schematic diagram of the second structure of the restriction ring of the utility model;

[0021] Figure 5 This is a schematic diagram of the restriction column structure of the utility model.

[0022] In the accompanying drawings, the components represented by the reference numerals are as follows:

[0023] 1. Rotating plate; 11. Fixed plate; 111. Support seat; 2. Motor; 21. Rotating column; 22. Fixed column 1; 23. Gear; 231. Small gear; 3. Connecting column; 31. Limiting ring; 32. Fixed cylinder; 33. Fixed block; 4. Limiting assembly; 41. Limiting ring 1; 42. Fixed ring 1; 421. Moving column; 422. Pulling block; 43. Limiting ring 2; 44. Spring; 5. Suspension assembly; 51. Limiting column; 511. Limiting hole; 52. Fixed column 2; 53. Fixed ring 2; 531. Hook. DETAILED DESCRIPTION

[0024] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0025] See also Figure 1-5As shown, the utility model is a workpiece rotating rack for vacuum magnetron sputtering coating equipment, comprising a rotating plate 1, a fixed plate 11 is provided below the rotating plate 1, a support seat 111 is fixedly connected to the bottom of the fixed plate 11, a limiting assembly 4 is provided above the rotating plate 1, the number of limiting assemblies 4 is several, and the parts contained in the several limiting assemblies 4 are the same, the limiting assembly 4 includes a pulling block 422, a moving column 421 is fixedly connected to the back of the pulling block 422, and a spring 44 is provided on the outer surface of the moving column 421, a suspension assembly 5 is provided above the limiting assembly 4, the number of suspension assemblies 5 is several, and the parts contained in the several suspension assemblies 5 are the same. The parts contained are the same. The suspension assembly 5 includes a limiting column 51. The outer surface of the limiting column 51 contacts the fixed cylinder 32. A rotating hole is provided on the top of the rotating plate 1. The utility model sets a fixed cylinder 32, specifically by pulling the pulling block 422, the movable column 421 can release the restriction on the limiting column 51, so that it can be easily pulled out, and then the new suspension assembly 5 is aligned with the fixed cylinder 32 and inserted. Then, under the action of the spring 44, the movable column 421 will re-limit the suspension assembly 5, which is not only convenient for the staff to quickly disassemble it, but also can save a lot of debugging time consumed during installation and disassembly, thereby improving production efficiency.

[0026] The bottom of the fixed plate 11 is fixedly connected to the motor 2, and the output end of the top of the motor 2 is fixedly connected to the rotating column 21 through a coupling. The top of the rotating column 21 is fixedly connected to the bottom of the rotating plate 1, and the four corners of the top of the fixed plate 11 are fixedly connected to the fixed column 1 22. The tops of the four fixed columns 1 22 are fixedly connected to the gears 23. The front of the gear 23 is meshed with a small gear 231. There are several small gears 231, and the several small gears 231 are arranged in a ring array.

[0027] The top of the small gear 231 is fixedly connected to a connecting column 3, the outer surface of the connecting column 3 contacts the inner wall of the rotating hole, the outer surface of the connecting column 3 is fixedly connected to the side close to the rotating plate 1, and the bottom of the limiting ring 31 contacts the top of the rotating plate 1.

[0028] The top of the connecting column 3 is fixedly connected to the bottom of the fixed cylinder 32 , the front of the fixed cylinder 32 is fixedly connected to a fixed block 33 , the front of the fixed block 33 is provided with a moving groove, and the top of the fixed cylinder 32 is provided with a limiting groove.

[0029] The inner wall of the movable groove is fixedly connected with a limiting ring 2 43, the inner wall of the limiting ring 2 43 contacts the outer surface of the movable column 421, the outer surface of the movable column 421 is fixedly connected with a fixing ring 1 42, the back side of the fixing ring 1 42 contacts the limiting ring 1 41, the outer surface of the limiting ring 1 41 contacts the inner wall of the movable groove, and the front side of the fixing ring 1 42 is fixedly connected with the back side of the spring 44.

[0030] A limiting hole 511 is provided on the front of the limiting column 51, and the inner wall of the limiting hole 511 contacts the outer surface of the movable column 421. The top of the limiting column 51 is fixedly connected to a fixed column 2 52, and the outer surface of the fixed column 2 52 is fixedly connected to a fixed ring 2 53, and the bottom of the fixed ring 2 53 is fixedly connected to a hook 531. The number of hooks 531 is several, and the several hooks 531 are arranged in a ring array. The utility model arranges the hooks 531, specifically, by starting the motor 2 to rotate the rotating plate 1. Since the gear 23 under the rotating plate 1 is in a fixed state, when the rotating plate 1 drives the small gear 231 to move, since the small gear 231 is meshed with the gear 23, the suspension component 5 will rotate while the small gear 231 moves, so that the outer surface coating of the workpiece hung on the hook 531 is more uniform, making the overall use of the device more convenient and improving the quality of the product.

[0031] A specific application of this embodiment is: hang the workpiece to be processed on the hook 531, and then start the motor 2 to make the rotating column 21 drive the rotating plate 1 to rotate. At the same time, since the gear 23 is fixed to the fixed plate 11 through the fixed column 12, the several small gears 231 meshing with the gear 23 will rotate when the rotating plate 1 rotates. The rotation of the several small gears 231 will drive the several suspension components 5 to rotate, so that they can rotate while being driven by the rotating plate 1, so that the outer surface coating of the workpiece hung on the hook 531 is more uniform, making the overall use of the device more convenient and improving the quality of the product. When the suspension component 5 needs to be replaced, the pulling block 422 can be pulled to make the movable column 421 drive the fixed ring 1 42 to move. The fixed ring 1 42 will apply pressure to the spring 44 while moving, and then the When the movable column 421 is pulled out from the limiting hole 511, the suspension component 5 can be pulled out of the fixed tube 32 as a whole. Then, the limiting column 51 at the bottom of the suspension component 5 of the required model is aligned with the limiting groove provided on the fixed tube 32. After insertion, the pulling block 422 can be released, so that the movable column 421 rebounds under the action of the spring 44, and the movable column 421 is reinserted into the limiting hole 511, so that the suspension component 5 as a whole is fixed. Since the limiting ring 2 43 and the limiting ring 1 41 are both fixedly connected to the fixed block 33, the movable column 421 can apply pressure to the spring 44 while driving the fixed ring 1 42 to move. At the same time, the limiting ring 1 41 also has a limiting effect on the fixed ring 1 42, which not only makes it convenient for the staff to quickly disassemble it, but also saves a lot of debugging time consumed during installation and disassembly, improves production efficiency, and reduces the workload of the staff.

[0032] Throughout this specification, references to terms such as "one embodiment," "example," or "specific example" indicate that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0033] The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the present invention to the specific embodiments described. Obviously, many modifications and variations are possible based on the contents of this specification. These embodiments are selected and described in detail in this specification to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better understand and utilize the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A workpiece rotating frame for a vacuum magnetron sputtering coating device, comprising a rotating plate (1), a fixed plate (11) being provided below the rotating plate (1), a support seat (111) being fixedly connected to the bottom of the fixed plate (11), a limiting assembly (4) being provided above the rotating plate (1), the number of the limiting assemblies (4) being several, and characterized in that ； The parts contained in the plurality of limiting assemblies (4) are all the same. The limiting assemblies (4) include a pulling block (422). The back of the pulling block (422) is fixedly connected to a moving column (421). The outer surface of the moving column (421) is sleeved with a spring (44). A suspension assembly (5) is provided above the limiting assemblies (4). The number of the suspension assemblies (5) is several. The parts contained in the plurality of suspension assemblies (5) are all the same. The suspension assembly (5) includes a limiting column (51). The outer surface of the limiting column (51) contacts a fixed cylinder (32). A rotating hole is provided on the top of the rotating plate (1).

2. The workpiece rotating rack for vacuum magnetron sputtering coating equipment according to claim 1, characterized in that: The bottom of the fixed plate (11) is fixedly connected to a motor (2), the output end of the top of the motor (2) is fixedly connected to a rotating column (21) via a coupling, the top of the rotating column (21) is fixedly connected to the bottom of the rotating plate (1), and the four corners of the top of the fixed plate (11) are fixedly connected to fixed columns (22).

3. The workpiece rotating rack for vacuum magnetron sputtering coating equipment according to claim 2, characterized in that: The tops of the four fixed columns (22) are fixedly connected with gears (23), and the front faces of the gears (23) are meshedly connected with small gears (231). There are several small gears (231), and the several small gears (231) are arranged in a ring array.

4. The workpiece rotating rack for vacuum magnetron sputtering coating equipment according to claim 3, characterized in that: The top of the small gear (231) is fixedly connected to a connecting column (3), the outer surface of the connecting column (3) contacts the inner wall of the rotating hole, and the outer surface of the connecting column (3) is fixedly connected to a limiting ring (31) on a side close to the rotating plate (1), and the bottom of the limiting ring (31) contacts the top of the rotating plate (1).

5. The workpiece rotating rack for vacuum magnetron sputtering coating equipment according to claim 4, characterized in that: The top of the connecting column (3) is fixedly connected to the bottom of the fixed cylinder (32); the front of the fixed cylinder (32) is fixedly connected to a fixed block (33); the front of the fixed block (33) is provided with a moving groove; and the top of the fixed cylinder (32) is provided with a limiting groove.

6. The workpiece rotating rack for vacuum magnetron sputtering coating equipment according to claim 5, characterized in that: The inner wall of the movable groove is fixedly connected with a limiting ring 2 (43), the inner wall of the limiting ring 2 (43) contacts the outer surface of the movable column (421), the outer surface of the movable column (421) is fixedly connected with a fixing ring 1 (42), the back surface of the fixing ring 1 (42) contacts the limiting ring 1 (41), the outer surface of the limiting ring 1 (41) contacts the inner wall of the movable groove, and the front surface of the fixing ring 1 (42) is fixedly connected with the back surface of the spring (44).

7. The workpiece rotating rack for vacuum magnetron sputtering coating equipment according to claim 6, characterized in that: A limiting hole (511) is provided on the front of the limiting column (51), the inner wall of the limiting hole (511) contacts the outer surface of the movable column (421), the top of the limiting column (51) is fixedly connected to a second fixing column (52), the outer surface of the second fixing column (52) is fixedly connected to a second fixing ring (53), the bottom of the second fixing ring (53) is fixedly connected to a hook (531), the number of the hooks (531) is several, and the several hooks (531) are arranged in a ring array.

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