Heating equipment

Abstract

The utility model discloses heating equipment which comprises a bulb, a water-cooling lampshade and a lamp holder, and the water-cooling lampshade is detachably connected with the lamp holder. The lamp holder comprises a holder plate, wiring copper bars are arranged on the holder plate, the wiring copper bars comprise a null line copper bar and at least one live wire copper bar, a socket matched with a plug of the bulb is further arranged on the holder plate, and the socket is electrically connected with the null line copper bar and the live wire copper bar; when the plug is inserted into the socket, the bulb is located in the water-cooling lampshade. The modular design concept is effectively applied, the installation and replacement efficiency of the equipment is remarkably improved, and the problem that existing heating equipment is inconvenient to disassemble, assemble and maintain is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a heating device. Background Art

[0002] In the wafer chemical vapor deposition process, the high temperature environment inside the reaction chamber is a key factor for the success of the process. This high temperature environment is generated by a heating device at the bottom of the reaction chamber. Its working principle is to generate and maintain the required temperature through the heat generated by the built-in bulb of the heating device.

[0003] In existing heating systems, the copper busbar and the socket for the bulb are tightly integrated with the water-cooled lampshade. When the water-cooled lampshade needs to be repaired or replaced, all associated wiring connections must be removed to ensure effective separation of the water-cooled lampshade from the copper busbar and socket.

[0004] This integrated design increases the complexity of maintenance operations. When there is a problem with the water-cooling lampshade, it is difficult to repair it quickly and it takes a long time to repair. This will have a certain impact on the overall production progress and production efficiency of wafer processing. Summary of the Invention

[0005] The utility model provides a heating device to overcome the problem that the existing heating device is inconvenient to disassemble and repair.

[0006] In order to achieve the above purpose, the technical solution of the utility model is:

[0007] A heating device, comprising: a light bulb, a water-cooled lampshade and a lamp holder, wherein the water-cooled lampshade and the lamp holder are detachably connected;

[0008] The lamp holder includes a base plate, on which a copper busbar is provided, wherein the copper busbar includes a neutral busbar and at least one live busbar, and the base plate is further provided with a socket adapted to the plug of the bulb, wherein the socket is electrically connected to the neutral busbar and the live busbar;

[0009] When the plug is inserted into the socket, the light bulb is located in the water-cooled lampshade.

[0010] Furthermore, the socket and the wiring copper bus are respectively located on both sides of the base plate, and the base plate is provided with a wire hole, and the socket is connected to the wiring copper bus via an electric wire passing through the wire hole.

[0011] Furthermore, the plurality of sockets are arranged in a circular array on the base plate.

[0012] Furthermore, the neutral copper busbar is annular and is arranged in the middle of the base plate, and a plurality of live copper busbars are evenly distributed around the neutral copper busbar.

[0013] Furthermore, the lamp holder further comprises an outer cover detachably connected to the base plate, and the outer cover is arranged on a side of the base plate away from the water-cooled lampshade.

[0014] Furthermore, the outer cover includes a main body and an inspection window cover, the main body is provided with a connector plug connected to the wiring copper bus, and the inspection window cover is detachably connected to the base plate.

[0015] Furthermore, it also includes a water pipe. A through hole is provided in the middle of the lamp holder. One end of the water pipe is connected to the water-cooled lampshade, and the other end of the water pipe passes through the through hole and is connected to an external cold water source.

[0016] Furthermore, the socket is a ceramic socket.

[0017] Beneficial effects:

[0018] The utility model provides a heating device which effectively utilizes the modular design concept by integrating the wiring copper busbar and the socket into the base plate of the lamp holder and making the water-cooled lampshade and the lamp holder detachable, thereby significantly improving the installation and replacement efficiency of the equipment. When the user encounters a water-cooled lampshade failure, the user can quickly separate the water-cooled lampshade from the wiring copper busbar and the socket, thereby reducing the complexity of the maintenance operation and shortening the maintenance time. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0020] Figure 1 This is a structural diagram of a heating device disclosed in the utility model;

[0021] Figure 2 This is a front view of a heating device disclosed in the utility model;

[0022] Figure 3 This is a top view of a heating device disclosed in the present utility model;

[0023] Figure 4 This is a schematic structural diagram of a water-cooled lampshade of a heating device disclosed in the utility model;

[0024] Figure 5 This is a schematic structural diagram of a lamp holder for a heating device disclosed in the utility model;

[0025] Figure 6 for Figure 2 BB cross-sectional view;

[0026] Figure 7 for Figure 2 CC cross-sectional view.

[0027] In the picture:

[0028] 1. Light bulb; 101. Plug;

[0029] 2. Water-cooled lampshade;

[0030] 3. Seat plate; 301. Wire hole;

[0031] 4. Neutral copper busbar;

[0032] 5. Live copper busbar

[0033] 6. Socket;

[0034] 7. Outer cover; 701. Main body; 702. Inspection window cover;

[0035] 8. Connector plug;

[0036] 9. Water pipes;

[0037] A. Through hole. DETAILED DESCRIPTION

[0038] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0039] Example 1

[0040] This embodiment provides a heating device, such as Figures 1 to 5 As shown, it includes: a light bulb 1, a water-cooled lampshade 2 and a lamp holder, wherein the water-cooled lampshade 2 and the lamp holder are detachably connected by bolts;

[0041] The lamp holder includes a base plate 3, which is made of insulating material. A copper busbar is provided on the base plate 3, and the copper busbar includes a neutral busbar 4 and a live busbar 5. The base plate 3 is also provided with a socket 6 that is compatible with the plug 101 of the bulb 1. In this embodiment, the copper busbar and the socket 6 are mounted on the base plate 3 by bolts, and the socket 6 is connected to the neutral busbar 4 and the live busbar 5 by wires.

[0042] When the plug 101 is inserted into the socket 6, the bulb 1 is located in the water-cooled lampshade 2. The water-cooled lampshade 2 prevents the bulb 1 from overheating and causing burns to people who touch the lampshade. At the same time, the water-cooled lampshade 2 can prevent high temperatures from damaging the area around the bulb 2 and the cables of the bulb 2 itself.

[0043] The heating device provided in this embodiment effectively utilizes a modular design concept by integrating the copper busbar and the socket 6 on the base plate 3 of the lamp holder and providing a detachable connection between the water-cooled lampshade 2 and the lamp holder. This significantly improves the efficiency of device installation and replacement. When a user encounters a malfunction in the water-cooled lampshade 2, they can quickly separate the water-cooled lampshade 2 from the copper busbar and the socket 6, reducing the complexity of maintenance operations and shortening maintenance time.

[0044] When a fault occurs, the faulty water-cooling lampshade 2 can be completely disassembled and directly replaced with a normally usable water-cooling lampshade 2, thereby reducing the downtime of the heating equipment and ensuring the overall production progress and production efficiency of the wafer processing;

[0045] like Figure 1 As shown, one end of the water-cooled lampshade 2 away from the base plate 3 is open, and the bulb 1 is placed inside the water-cooled lampshade 2 through the opening and inserted into the socket 6. When the water-cooled lampshade 2 needs to be separated from the lamp holder, it can be separated after taking out the bulb 1 through the opening.

[0046] In a specific embodiment, Figure 6 and Figure 7 As shown, the socket 6 and the wiring copper bus are respectively located on both sides of the base plate 3. The base plate 3 is provided with a wire hole 301. The socket 6 is connected to the wiring copper bus by the wire passing through the wire hole 301. The wire hole 301 can reduce the length of the wire connecting the socket 6 and the wiring copper bus. The wire hole 301 corresponds to the socket 6 one by one, which is convenient for wire management and makes it easier to troubleshoot during maintenance.

[0047] In a specific embodiment, Figure 6 As shown, the plurality of sockets 6 are arranged in a circular array on the base plate 3, so that the plurality of bulbs 1 inserted in the sockets 6 can be arranged in a circular array, making the heating device heat more uniform.

[0048] In a specific embodiment, Figure 1 As shown, the lamp holder further includes an outer cover 7 detachably connected to the base plate 3 by bolts. The outer cover 7 is arranged on a side of the base plate 3 away from the water-cooled lampshade 2 , thereby providing protection for the base plate 3 .

[0049] In a specific embodiment, Figure 2 and Figure 5As shown, the outer cover 7 includes a main body 701 and an inspection window cover 702, and the main body 701 and the inspection window cover 702 are made of insulating material. The main body 701 is provided with a connector plug 8 connected to the wiring copper bus. The connector plug 8 on the main body 701 can be connected to an external power supply, so that the power supply supplies power to the heating equipment through the wiring copper bus. The inspection window cover 702 is detachably connected to the seat plate 3 by bolts. When maintenance is required, there is no need to remove the main body 701. Only the inspection window cover 702 needs to be removed to inspect the wires and wiring copper bus on the seat plate 3.

[0050] In a specific embodiment, Figure 1 As shown, it also includes a water pipe 9, such as Figure 5 As shown, a through hole A is provided in the middle of the lamp holder, one end of the water pipe 9 is connected to the water-cooled lampshade 2, and the other end of the water pipe 9 passes through the through hole A and is connected to an external cold water source. Figure 2 Of the two water pipes shown, one is a water inlet pipe and the other is a water return pipe. The cold water source is connected to the water channel of the water-cooled lampshade 2 through the water inlet pipe and the water return pipe, and the heat is taken away by circulating water.

[0051] In a specific embodiment, the socket 6 is a ceramic socket, which has high strength, long service life, and is flame retardant, and is suitable for heating equipment.

[0052] Example 2

[0053] This embodiment provides a heating device. The main structure of this embodiment is similar to that of Example 1. The difference between this embodiment and Example 1 is as follows:

[0054] In Example 1, the connection copper busbar includes a neutral copper busbar 4 and a live copper busbar 5 .

[0055] In this embodiment, the wiring copper bar includes a neutral copper bar 4 and multiple live copper bars 5. The neutral copper bar 4 is annular and is arranged in the middle of the base plate 3. The multiple live copper bars 5 are evenly distributed around the neutral copper bar 4. The multiple live copper bars 5 can connect a corresponding number of live wires.

[0056] Each socket 6 needs to be connected to a neutral copper bar 4 and a live copper bar 5 through wires. In order to ensure that the distance between each socket 6 and the neutral copper bar 4 and the live copper bar 5 is kept moderate, in this embodiment, as shown in FIG. Figure 7 As shown, the three live copper bars 5 are evenly distributed around the periphery of the neutral copper bar 4. This layout is intended to prevent the distance between a certain socket 6 and the neutral copper bar 4 or the live copper bar 5 from being too large, thereby avoiding the wires required for connection being too long. At the same time, it makes the wire arrangement more neat, facilitates wire management, and makes it easier to troubleshoot during maintenance;

[0057] The hardness of the wire is proportional to its cross-sectional size, that is, the thicker the wire, the greater its hardness, which makes the wiring process more complicated and difficult, indirectly increasing the cost of installation and subsequent maintenance. Compared with using a single live wire with a larger cross-sectional size for current transmission, the form of multiple live wires shared by the current in this embodiment can reduce the cross-sectional size of each live wire and reduce the difficulty and cost of wiring.

[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A heating device, characterized in that: include: A light bulb (1), a water-cooled lampshade (2) and a lamp holder, wherein the water-cooled lampshade (2) and the lamp holder are detachably connected; The lamp holder comprises a base plate (3), the base plate (3) being provided with a wiring copper bar, the wiring copper bar comprising a neutral copper bar (4) and at least one live copper bar (5), the base plate (3) being further provided with a socket (6) adapted to the plug (101) of the light bulb (1), the socket (6) being electrically connected to the neutral copper bar (4) and the live copper bar (5); When the plug (101) is inserted into the socket (6), the light bulb (1) is located in the water-cooled lampshade (2).

2. A heating device according to claim 1, characterized in that: The socket (6) and the copper busbar are respectively located on both sides of the base plate (3); a wire hole (301) is provided on the base plate (3); and the socket (6) is connected to the copper busbar via an electric wire passing through the wire hole (301).

3. A heating device according to claim 1, characterized in that: The plurality of sockets (6) are arranged in a circular array on the seat plate (3).

4. A heating device according to claim 3, characterized in that: The neutral copper bar (4) is annular and is arranged in the middle of the base plate (3). A plurality of live copper bars (5) are evenly distributed around the outer periphery of the neutral copper bar (4).

5. A heating device according to claim 1, characterized in that: The lamp holder further comprises an outer cover (7) detachably connected to the seat plate (3), wherein the outer cover (7) is arranged on a side of the seat plate (3) away from the water-cooled lampshade (2).

6. A heating device according to claim 5, characterized in that: The outer cover (7) comprises a main body (701) and an inspection window cover (702); the main body (701) is provided with a connector plug (8) connected to the wiring copper busbar; and the inspection window cover (702) is detachably connected to the seat plate (3).

7. A heating device according to claim 1, characterized in that: It also includes a water pipe (9), a through hole is provided in the middle of the lamp holder, one end of the water pipe (9) is connected to the water-cooled lampshade (2), and the other end of the water pipe (9) passes through the through hole and is connected to an external cold water source.

8. A heating device according to claim 1, characterized in that: The socket (6) is a ceramic socket.

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