Air inlet cooling structure of MPCVD equipment

Abstract

The utility model discloses an MPCVD equipment inlet air cooling structure which comprises a sealing cover body, a first water cooling cavity, an air inlet cavity and a second water cooling cavity are formed in the sealing cover body, the air inlet cavity is located between the first water cooling cavity and the second water cooling cavity, a plurality of air outlet holes are formed in the inner bottom wall of the air inlet cavity, and the air outlet holes are communicated with the first water cooling cavity and the second water cooling cavity. The multiple air outlet holes penetrate through the inner top wall of the sealing cover body. A first water inlet, a first water outlet, a second water inlet, a second water outlet and an air inlet are formed in the outer surface of the sealing cover body. Cooling liquid flows in the first water-cooling cavity and the second water-cooling cavity, heat of the sealing cover body can be taken away, cooling and heat dissipation of the sealing cover body are achieved, the temperature of the sealing cover body is prevented from being too high, meanwhile, heat of the air inlet cavity between the first water-cooling cavity and the second water-cooling cavity can be taken away, heat dissipation is conducted on the air inlet cavity, and the service life of the air inlet cavity is prolonged. The temperature of the air inlet cavity is prevented from being too high.

Description

Technical Field

[0001] The utility model relates to the technical field of accessories for MPCVD equipment, in particular to an air intake cooling structure for MPCVD equipment. Background Art

[0002] Microwave plasma chemical vapor deposition (MPCVD) is a method used to grow artificial diamonds. This method places a seed crystal in a vacuum chamber and introduces a carbon-containing mixed gas containing nitrogen, methane and hydrogen. Methane is the source of carbon atoms for synthetic diamonds, while nitrogen acts as a catalyst to increase the growth rate of diamonds. Hydrogen can inhibit the formation of graphite. Under the action of microwave plasma, the carbon-containing gas is dissociated and carbon atoms are deposited into a diamond film on the diamond substrate.

[0003] For example, the patent with application number CN221275888U includes a sealing cover body and a piping system; the interior of the sealing cover body is provided with a first cooling water chamber, a second cooling water chamber and a third cooling water chamber, and the second cooling water chamber and the third cooling water chamber are connected by a water inlet channel; the outer end surface of the sealing cover body is provided with a first water inlet, a first water outlet, a second water inlet and a second water outlet, the first water inlet and the first water outlet are connected to the first cooling water chamber, the second water inlet is connected to the second cooling water chamber, and the second water outlet is connected to the third cooling water chamber; the piping system includes a water inlet pipe, a circulation pipe and a water outlet pipe.

[0004] Although the above-mentioned device can cool and dissipate heat for the sealing cover body through the first cooling water chamber, the second cooling water chamber and the third cooling water chamber, its air intake structure is far away from the first cooling water chamber, the second cooling water chamber and the third cooling water chamber, and cannot cool the air intake structure well, which may easily cause safety hazards such as fire or explosion, and has low safety. Utility Model Content

[0005] In response to the above-mentioned defects, the purpose of the present invention is to propose an air intake cooling structure for MPCVD equipment to solve the problem that the sealing cover of the existing MPCVD equipment cannot cool the air intake structure well, which easily causes safety hazards such as fire or explosion and has low safety.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] An MPCVD equipment air intake cooling structure includes a sealing cover body, wherein a first water-cooling chamber, an air intake chamber, and a second water-cooling chamber are provided inside the sealing cover body, wherein the air intake chamber is located between the first water-cooling chamber and the second water-cooling chamber, and an inner bottom wall of the air intake chamber is provided with a plurality of air outlet holes, wherein the plurality of air outlet holes are all provided through the inner top wall of the sealing cover body;

[0008] The outer surface of the sealing cover body is provided with a first water inlet, a first water outlet, a second water inlet, a second water outlet and an air inlet, the first water inlet and the first water outlet are connected to the first water cooling cavity, the second water inlet and the second water outlet are connected to the second water cooling cavity, and the air inlet is connected to the air inlet cavity.

[0009] Preferably, the first water inlet is located below the first water outlet, and the second water inlet, the second water outlet and the air inlet are located at the top of the sealing cover body.

[0010] Preferably, two groups of guide plate groups are symmetrically provided on the inner bottom wall of the second water-cooling chamber, and the guide plate groups include a plurality of arc-shaped plates, and the plurality of arc-shaped plates of the two groups of guide plate groups are coaxial and equidistantly arranged.

[0011] Preferably, the contours of the second water inlet and the second water outlet in the top projection plane are located between the contours of the two groups of guide plate groups in the top projection plane.

[0012] Preferably, a plurality of the air outlet holes are arranged in a circular array on the inner bottom wall of the air inlet cavity, and a plurality of the air outlet holes are arranged around the second water-cooling cavity.

[0013] Preferably, a side wall of the sealing cover body is provided with a plurality of observation windows, and part of the window bodies of the plurality of observation windows are located in the first water-cooling cavity.

[0014] The technical solution provided by the utility model may have the following beneficial effects:

[0015] By flowing the coolant in the first water-cooling chamber and the second water-cooling chamber, the heat of the sealing cover body can be taken away, thereby cooling and dissipating the heat of the sealing cover body, and preventing the temperature of the sealing cover body from being too high. At the same time, the heat of the air intake chamber between the first water-cooling chamber and the second water-cooling chamber can be taken away to dissipate the heat of the air intake chamber, and prevent the temperature of the air intake chamber from being too high. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the internal structure of the sealing cover body of the utility model;

[0018] Figure 3 It is a bottom view of the internal structure of the sealing cover body of the present utility model.

[0019] Among them: 1. Sealing cover body; 11. Observation window; 2. First water-cooling chamber; 21. First water inlet; 22. First water outlet; 3. Second water-cooling chamber; 31. Second water inlet; 32. Second water outlet; 33. Guide plate group; 4. Air inlet chamber; 41. Air inlet; 42. Air outlet. DETAILED DESCRIPTION

[0020] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0021] In the description of the present invention, it should be understood that the terms "longitudinal", "transverse", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore should not be understood as limiting the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more such features, and are used to distinguish between the described features, without distinction of order or importance.

[0022] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0023] Below is the accompanying drawings Figures 1 to 3 The technical solution of the utility model is further illustrated through specific implementation methods.

[0024] like Figure 1-3 As shown, an air intake cooling structure for MPCVD equipment includes a sealing cover body 1, wherein a first water-cooling chamber 2, an air intake chamber 4, and a second water-cooling chamber 3 are provided inside the sealing cover body 1. The air intake chamber 4 is located between the first water-cooling chamber 2 and the second water-cooling chamber 3. The inner bottom wall of the air intake chamber 4 is provided with a plurality of air outlet holes 42, and the plurality of air outlet holes 42 are all provided through the inner top wall of the sealing cover body 1;

[0025] The outer surface of the sealing cover body 1 is provided with a first water inlet 21, a first water outlet 22, a second water inlet 31, a second water outlet 32 ​​and an air inlet 41. The first water inlet 21 and the first water outlet 22 are connected to the first water-cooling chamber 2, the second water inlet 31 and the second water outlet 32 ​​are connected to the second water-cooling chamber 3, and the air inlet 41 is connected to the air inlet chamber 4.

[0026] By flowing the coolant in the first water-cooling chamber 2 and the second water-cooling chamber 3, the heat of the sealing cover body 1 can be taken away, thereby cooling and dissipating the heat of the sealing cover body 1, and preventing the temperature of the sealing cover body 1 from being too high. At the same time, the heat of the air intake chamber 4 between the first water-cooling chamber 2 and the second water-cooling chamber 3 can be taken away to dissipate the heat of the air intake chamber 4, and prevent the temperature of the air intake chamber 4 from being too high.

[0027] like Figure 1-2 As shown, the first water inlet 21 is located below the first water outlet 22 , and the second water inlet 31 , the second water outlet 32 ​​and the air inlet 41 are located at the top of the sealing cover body 1 .

[0028] Specifically, the first water inlet 21 is located below the first water outlet 22, and the second water inlet 31 and the second water outlet 32 ​​are located at the top of the sealing cover body 1, so that after the coolant fills the first water-cooling chamber 2 and the second water-cooling chamber 3, it flows out from the first water outlet 22 and the second water outlet 32 ​​respectively, so that the coolant can fully contact the sealing cover body 1 to take away the heat of the sealing cover body 1, thereby achieving better cooling and heat dissipation effect of the sealing cover body 1.

[0029] like Figure 3 As shown, two groups of guide plate groups 33 are symmetrically provided on the inner bottom wall of the second water-cooling chamber 3 . The guide plate groups 33 include a plurality of arc-shaped plates. The arc-shaped plates of the two groups of guide plate groups 33 are coaxial and equidistantly arranged.

[0030] Specifically, by providing a guide plate group 33 composed of several curved plates, the coolant can flow in the gaps between the several curved plates and the gaps between the second water-cooling cavity 3 and the curved plates, so that the coolant can flow evenly in the second water-cooling cavity 3 and increase the contact area between the coolant and the second water-cooling cavity 3, thereby better taking away the heat of the sealing cover body 1.

[0031] like Figure 3 As shown, the outlines of the second water inlet 31 and the second water outlet 32 ​​in the top projection plane are located between the outlines of the two groups of guide plate groups 33 in the top projection plane.

[0032] Specifically, the coolant entering the second water inlet 31 can fully contact the guide plate group 33 and then flow out from the second water outlet 32, so that the coolant can fully contact the sealing cover body 1 to take away the heat of the sealing cover body 1, thereby making the cooling and heat dissipation effect of the sealing cover body 1 better.

[0033] like Figure 2 As shown, a plurality of the air outlet holes 42 are arranged in a circular array on the inner bottom wall of the air inlet cavity 4 , and a plurality of the air outlet holes 42 are arranged around the second water-cooling cavity 3 .

[0034] Specifically, the reaction gas is introduced into the air inlet cavity 4 through the air inlet 41, and then flows into the interior of the sealing cover body 1 through several air outlet holes 42 arranged in a circular array. Several air outlet holes 62 arranged in a circular array can make the reaction gas evenly enter the reaction cavity covered by the sealing cover body 1 from the air inlet cavity 4.

[0035] like Figure 1-2 As shown, a plurality of observation windows 11 are provided on the side wall of the sealing cover body 1 , and part of the window bodies of the plurality of observation windows 11 are located in the first water-cooling chamber 2 .

[0036] Specifically, the observation window 11 can be provided to facilitate the user to observe the growth of diamonds inside the sealing cover body 1 , and the heat of the observation window 11 can be taken away by the coolant in the first water-cooling chamber 2 to cool the observation window 11 .

[0037] The technical principles of the present invention have been described above with reference to specific embodiments. These descriptions are intended solely to illustrate the principles of the present invention and should not be construed in any way as limiting the scope of protection of the present invention. Based on the explanations herein, those skilled in the art will be able to devise other specific implementations of the present invention without inventive effort, and such implementations will fall within the scope of protection of the present invention.

Claims

1. An MPCVD equipment air intake cooling structure, characterized in that: The invention comprises a sealing cover body (1), wherein a first water-cooling cavity (2), an air inlet cavity (4) and a second water-cooling cavity (3) are provided inside the sealing cover body (1), wherein the air inlet cavity (4) is located between the first water-cooling cavity (2) and the second water-cooling cavity (3), and the inner bottom wall of the air inlet cavity (4) is provided with a plurality of air outlet holes (42), and the plurality of air outlet holes (42) are all provided through the inner top wall of the sealing cover body (1); The outer surface of the sealing cover body (1) is provided with a first water inlet (21), a first water outlet (22), a second water inlet (31), a second water outlet (32) and an air inlet (41); the first water inlet (21) and the first water outlet (22) are connected to the first water-cooling cavity (2); the second water inlet (31) and the second water outlet (32) are connected to the second water-cooling cavity (3); and the air inlet (41) is connected to the air inlet cavity (4).

2. The MPCVD equipment air intake cooling structure according to claim 1, characterized in that: The first water inlet (21) is located below the first water outlet (22), and the second water inlet (31), the second water outlet (32) and the air inlet (41) are located at the top of the sealing cover body (1).

3. The MPCVD equipment air intake cooling structure according to claim 1, characterized in that: Two groups of guide plate groups (33) are symmetrically provided on the inner bottom wall of the second water-cooling chamber (3), and the guide plate groups (33) include a plurality of arc-shaped plates. The arc-shaped plates of the two groups of guide plate groups (33) are coaxial and arranged at equal intervals.

4. The MPCVD equipment air intake cooling structure according to claim 3, characterized in that: The outlines of the second water inlet (31) and the second water outlet (32) in a top-view projection plane are located between the outlines of the two groups of guide plate groups (33) in a top-view projection plane.

5. The MPCVD equipment air intake cooling structure according to claim 1, characterized in that: A plurality of the air outlet holes (42) are arranged in a circular array on the inner bottom wall of the air inlet cavity (4), and a plurality of the air outlet holes (42) are arranged around the second water-cooling cavity (3).

6. The MPCVD equipment air intake cooling structure according to claim 1, characterized in that: The side wall of the sealing cover body (1) is provided with a plurality of observation windows (11), and part of the window bodies of the plurality of observation windows (11) are located in the first water-cooling cavity (2).

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