Inflation device for flat-bottom port of quartz furnace tube rotary disc

Abstract

The utility model discloses an inflating device for a flat-bottom port of a quartz furnace tube rotary disc, and relates to the technical field of quartz furnace tube sheets. Comprising a fixed beam, a propelling mechanism is connected in the fixed beam, one end of the propelling mechanism is connected with a sealing inflation mechanism, the propelling mechanism comprises a nut outer sleeve installed in the fixed beam, a rotating connector is connected in the nut outer sleeve in a threaded mode, and a rotating handle is arranged on the rotating connector. And a rotary joint is arranged at one end of the propelling screw rod. After the quartz furnace tube rotating disc flat-bottom port inflating device is used, nitrogen filled in the quartz furnace tube rotating disc flat-bottom port inflating device can be ensured not to leak under the condition of a horseshoe opening, loose supply can also be performed by propelling the screw rod device, a silica gel plate surface is continuously ensured to be attached to a quartz tube opening, one-time clamping and one-time working procedure are basically completed, and the working efficiency is greatly improved. The quartz tubes with the diameter ranging from phi 200 mm to phi 500 mm can meet the using conditions, the working efficiency is greatly improved, it is guaranteed that the process is smoothly completed, and operation is very convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz furnace tube slices, in particular to a quartz furnace tube rotary disc slice flat-bottom port inflation device. Background Art

[0002] The basic structure of a quartz furnace tube is a cylindrical tube with a semicircular head at the blind end and a flange at the open end. The tube is welded to the flange and then mounted on a rotary table for semicircular head sealing. This process is known in the industry as the flattening process. Since the orifice of a large-diameter cylindrical tube is generally not perfectly perpendicular to the sidewall, the difference between the highest and lowest points of the cut is approximately 0.5-1.5 mm, and sometimes even larger. This type of orifice is generally called a horseshoe opening. After the tube is plugged into the horseshoe opening, the port gasket of the plug must also rotate with it when the quartz tube rotates. In this case, the gasket must swing to match the rotation of the horseshoe opening. The pressurized heating required for flattening raises the tube temperature, and the sealing material must be resistant to deformation or damage during the heat.

[0003] During the development of this utility model, the inventors discovered the following problems with the prior art: The previous method for flattening quartz furnace tube plates used in the semiconductor industry utilized a circular disc-shaped fixture with a silicone plate attached to the rear side of the quartz tube, which was then secured within the inner chamber of a rotary table machine using a set screw. Because the plate lacked universal swing adjustment, the height of the long and short sides of the horseshoe-shaped opening could cause the tube plug to loosen during rotation, making it impossible to ensure a gas seal. This could lead to insufficient air pressure and leakage during the flattening process, making the process impossible or even poorly performing. Utility Model Content

[0004] To address the shortcomings of the prior art, the present invention provides a gas filling device for the flat bottom port of a quartz furnace tube rotating disc. This device solves the existing method for flattening quartz furnace tube discs in the semiconductor industry, which involves attaching a silicone plate to a circular disc-shaped fixture, directly blocking the rear side of the quartz tube, and then securing it within the inner chamber of the rotating disc machine with a screw. Due to the lack of universal swing adjustment, the height of the long and short sides of the horseshoe mouth during the rotation of the quartz tube can cause the tube plug to loosen, making it impossible to ensure a gas seal. This can lead to insufficient air pressure and leakage during the flattening process, making the process impossible to carry out or reducing the work quality.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a quartz furnace tube rotary disk flat bottom port inflation device, comprising a fixed beam, a propulsion mechanism connected inside the fixed beam, one end of the propulsion mechanism being connected to a sealing inflation mechanism, the propulsion mechanism comprising a nut sleeve installed in the fixed beam, the inner thread of the nut sleeve being connected to a rotary joint, a rotating handle being provided on the rotary joint, one end of the propulsion screw being provided with a rotary joint, the other end of the propulsion screw being provided with a universal ball head connector, the sealing inflation mechanism comprising a rear aluminum alloy support frame that can be adjustably connected to one end of the universal ball head connector, two pairs of fixed supports being connected to the upper portion of the rear aluminum alloy support frame, two pairs of sliding rods being connected to the rear aluminum alloy support frame, two pairs of springs being connected to the lower end of the rear aluminum alloy support frame, the two pairs of springs being connected to the front aluminum alloy support frame, and the lower ends of the two pairs of front aluminum alloy support frames being connected to silicone plates.

[0006] Preferably, the two pairs of sliding rods and the two pairs of fixed supports are arranged alternately.

[0007] Preferably, both pairs of fixed supports are provided with fixed locks.

[0008] Preferably, three guide wheels are rotatably connected in both pairs of the sliding rods, and the side surfaces of the guide wheels are higher than the side surfaces of the sliding rods.

[0009] Beneficial effects

[0010] The utility model provides an inflation device for the flat-bottom port of a rotating disk of a quartz furnace tube. The tube port is sealed by a silicone plate at the front end, the universal swing during rotation is controlled by a universal ball head device and a double-layer force-bearing buffer aluminum alloy disk, the sealing inflation device is axially advanced and withdrawn by a propulsion screw device, and during the flat-bottom process of the disk, inflation and pressure relief are performed by a hollow air-guiding screw. After the inflation device for the flat-bottom port of a rotating disk of a quartz furnace tube is used, it can be ensured that the nitrogen filled in the disk does not leak in the case of a horseshoe mouth, and it can also be loosened and replenished by the propulsion screw device, and the silicone plate surface is continuously ensured to fit the quartz tube port, and basically one clamping and one process are completed at a time, quartz tubes in the range of φ200-φ500mm can meet the use conditions, greatly improving work efficiency, ensuring the smooth completion of the process, and being very convenient to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0012] Figure 2 This is a schematic diagram of the parts disassembly of the utility model.

[0013] In the figure: 1. Propulsion mechanism; 2. Fixed lock; 3. Sealing and inflation mechanism; 4. Rotary joint; 5. Propulsion screw; 6. Rotating handle; 7. Nut sleeve; 8. Fixed beam; 9. Universal ball joint connector; 10. Sliding rod; 11. Rear aluminum alloy support frame; 12. Fixed support; 13. Spring; 14. Front aluminum alloy support frame; 15. Silicone plate. DETAILED DESCRIPTION

[0014] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0015] See also Figure 1-2 The utility model provides a technical solution: an inflation device for a flat-bottom port of a quartz furnace tube rotary disk, comprising a fixed beam 8, a propulsion mechanism 1 connected inside the fixed beam 8, one end of the propulsion mechanism 1 being connected to a sealing inflation mechanism 3, the propulsion mechanism 1 comprising a nut sleeve 7 installed in the fixed beam 8, the nut sleeve 7 having an internal thread connected to a rotary joint 4, a rotating handle 6 being provided on the rotary joint 4, one end of the propulsion screw 5 being provided with a rotary joint 4, and the other end of the propulsion screw 5 being provided with a universal ball head connector 9, the sealing inflation mechanism 3 comprising a rear aluminum alloy support frame 11 which can be adjustably connected to one end of the universal ball head connector 9, two pairs of fixed supports 12 being connected to the upper portion of the rear aluminum alloy support frame 11, two pairs of sliding rods 10 being connected to the rear aluminum alloy support frame 11, two pairs of springs 13 being connected to the lower end of the rear aluminum alloy support frame 11, the two pairs of springs 13 being connected to the front aluminum alloy support frame 14, and the lower ends of the two pairs of front aluminum alloy support frames 14 being connected to a silicone plate 15.

[0016] In this embodiment, specifically, two pairs of sliding rods 10 and two pairs of fixed supports 12 are arranged alternately.

[0017] In this embodiment, specifically, fixing locks 2 are provided in both pairs of fixing supports 12 .

[0018] In this embodiment, specifically, three guide wheels are rotatably connected in both pairs of slide bars 10 , and the side surfaces of the guide wheels are higher than the side surfaces of the slide bars 10 .

[0019] The detailed connection means are well-known technologies in this field. The following mainly introduces the working principle and process. The specific operations are as follows.

[0020] Embodiment: Fix the fixed beam 8 of the flat-bottom port inflation device of the quartz furnace tube rotary disk to the rear end of the rotary disk machine equipment, disassemble the universal ball joint connector 9, and separate the sealing inflation mechanism 3 from the propulsion mechanism 1. Manually push the sealing inflation mechanism 3 to fit the quartz tube mouth surface. At this time, the spring 13 between the rear aluminum alloy support frame 11 and the front aluminum alloy support frame 14 has a compression action, which proves that the force has been applied to fit. If it is not completely fitted, the side sliding guide wheel is adjusted axially forward and backward to achieve the sealing effect, and the fixing lock 2 is tightened to fix the device on the inner chamber of the rotary disk machine. Screw in the rotating handle 6 to connect the universal ball joint connector 9 in front of the propulsion screw 5 with the rear aluminum alloy support frame 11. Connect the nitrogen pipeline to the rotary joint 4 at the rear end and fill it with gas. The gas is introduced into the front quartz tube through the inner hollow hole of the screw through the silicone plate 15.

[0021] It should be noted that, in this document, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

Claims

1. A quartz furnace tube rotating disk flat bottom port charging device, comprising a fixed beam (8), characterized in that: The fixed beam (8) is internally connected to a propulsion mechanism (1), one end of which is connected to a sealing and inflating mechanism (3), the propulsion mechanism (1) comprising a nut housing (7) mounted in the fixed beam (8), the internal thread of the nut housing (7) being connected to a rotary joint (4), the rotary joint (4) being provided with a rotating handle (6), one end of the propulsion screw (5) being provided with a rotary joint (4), the other end of the propulsion screw (5) being provided with a universal ball joint connector (9), the sealing and inflating mechanism (3) The invention comprises a rear aluminum alloy support frame (11) which can be adjustably connected to one end of the universal ball head connector (9), two pairs of fixed supports (12) are connected to the upper portion of the rear aluminum alloy support frame (11), two pairs of slide bars (10) are connected to the upper portion of the rear aluminum alloy support frame (11), two pairs of springs (13) are connected to the lower end of the rear aluminum alloy support frame (11), the two pairs of springs (13) are connected to the front aluminum alloy support frame (14), and the two pairs of front aluminum alloy support frames (14) are connected to the lower ends of the silicone plates (15).

2. The quartz furnace tube rotating disk flat bottom port charging device according to claim 1, characterized in that: The two pairs of sliding rods (10) and the two pairs of fixed supports (12) are arranged in a staggered manner.

3. The quartz furnace tube rotating disk flat bottom port charging device according to claim 1, characterized in that: Both pairs of fixed supports (12) are provided with fixed locks (2).

4. The quartz furnace tube rotating disk flat bottom port charging device according to claim 1, characterized in that: Three guide wheels are rotatably connected in both pairs of the slide bars (10), and the side surfaces of the guide wheels are higher than the side surfaces of the slide bars (10).

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