Internal circulation type cooling system suitable for post-boron diffusion equipment
By designing an internal circulation cooling system, the top, sides and furnace opening of the boron expansion equipment are cooled through multi-layered cooling, which solves the problem of equipment overheating in high-temperature processes and improves the operating safety and stability of the equipment.
Patent Information
- Application Number
- CN202422533382.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-18
- Publication Date
- 2025-08-26
- Estimated Expiration
- 2034-10-18
AI Technical Summary
During the high-temperature process of existing boron expansion equipment, the high-temperature gas generated by the furnace body is not effectively cooled, resulting in frame deformation, electrical components damage and equipment overheating, affecting the safety of equipment operation.
An internal circulation cooling system is designed, including a cabinet top heat exchange assembly, a furnace body heat exchange assembly and a furnace port heat exchange assembly. Through the combination of a water-cooled radiator and a fan, multi-layer cooling of the furnace body cabinet roof, sides and furnace port is achieved, forming a closed-loop cooling cycle.
Effectively reduce the temperature of the furnace inside the equipment and the surface of the equipment, and improve the safety, reliability and stability of the equipment operation.
Smart Images
Figure CN223271678U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of solar cell manufacturing equipment, in particular to an internal circulation cooling system suitable for post-boron expansion equipment. Background Art
[0002] Among various new clean energy sources, solar energy is considered one of the most promising. Currently, silicon-based solar cells dominate the market. The average conversion efficiency of mainstream PERC cells in mass production is approaching its theoretical maximum efficiency of 24.5%, while the theoretical maximum efficiency of N-type TOPCon cells can reach 29.19%. Therefore, N-type TOPCon is rapidly becoming the mainstream next-generation cell process. Furthermore, the manufacturing process for N-type TOPCon solar cells is similar to that of PERC solar cells, making upgrades relatively inexpensive and economically viable. Upgrading to a TOPCon cell production line requires only the addition of boron diffusion equipment and contact passivation layer equipment.
[0003] A tubular low-pressure boron diffusion furnace using BX3 as a doping source is a key piece of equipment in the manufacturing of N-type TOPCon solar cells. During the process, BX3 enters the reaction chamber in gaseous form. At around 850°C, BX3 reacts with O2 to form B2O3. B2O3 then reacts with Si on the silicon wafer surface to form boron atoms. A high-temperature push-in process at 1050°C pushes the boron atoms into the silicon wafer surface, forming a boron-rich region and a deep PN junction. The high-temperature push-in process requires the reaction chamber to reach a maximum temperature of 1050°C. Typically, the reaction chamber needs to be heated to a higher temperature to reach the reaction temperature. Such high process temperatures inevitably generate significant heat radiation. If the high-temperature gases generated by the furnace are not cooled, they can cause deformation of the frame. Furthermore, large amounts of hot gas can enter the electrical control cabinet directly through the pores, potentially damaging electrical components, reducing their service life and impacting normal equipment operation. Excessive hot gas can also overheat the equipment's exterior, hindering operation and maintenance. Therefore, reducing the temperatures inside and outside the furnace is a pressing need. Utility Model Content
[0004] The technical problem to be solved by the present invention is to provide an internal circulation cooling system suitable for post-boron expansion equipment with a compact structure, high stability and significant cooling effect in response to the above-mentioned problems in the prior art.
[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is:
[0006] An internal circulation cooling system suitable for post-boron expansion equipment includes: a cabinet top heat exchange component, an inter-furnace heat exchange component and a furnace mouth heat exchange component; the cabinet top heat exchange component is arranged on the top of the furnace cabinet and extends from the side of the furnace cabinet to the bottom of the furnace cabinet to achieve cooling of the top and inside of the furnace cabinet; the inter-furnace heat exchange component is arranged between adjacent heating furnaces along the length direction of the heating furnace body to achieve cooling of the side of the heating furnace body; the furnace mouth heat exchange component is arranged in the furnace door of the heating furnace body to achieve cooling of the furnace mouth of the heating furnace body.
[0007] As a further improvement of the present invention, the cabinet top heat exchange assembly includes a first water-cooled radiator and an exhaust hood. The first water-cooled radiator is arranged on the top of the furnace body cabinet, and a protective hood with a fully enclosed structure is provided on the outside of the first water-cooled radiator. The exhaust hood is arranged on the side of the heating furnace body in a vertical direction, and the top of the exhaust hood is connected to the side of the protective hood to discharge the cold air flowing through the first water-cooled radiator. The bottom of the exhaust hood is located at the lower part of the furnace body cabinet. The air outlet from the bottom of the exhaust hood cools the inside of the furnace body cabinet and then circulates to the bottom of the first water-cooled radiator.
[0008] As a further improvement of the present invention, the cabinet top heat exchange assembly also includes an axial flow fan, which is arranged on the top of the exhaust hood and close to the protective cover to extract the cold air flowing through the first water-cooled radiator.
[0009] As a further improvement of the present invention, the cabinet top heat exchange assembly also includes a blower, and multiple blowers are arranged inside the exhaust hood to enable cold air to flow and cool inside the exhaust hood, and after cooling the inside of the furnace cabinet, recirculate to the bottom of the first water-cooled radiator.
[0010] As a further improvement of the present invention, the cabinet top heat exchange assembly also includes a second water-cooled radiator and a third water-cooled radiator, and the second water-cooled radiator and the third water-cooled radiator are both arranged inside the exhaust hood to cool the cold air entering the exhaust hood.
[0011] As a further improvement of the present invention, the first water-cooled radiator, the second water-cooled radiator and the third water-cooled radiator all have the same structural arrangement; the first water-cooled radiator includes a first cooling coil, a first heat dissipation fin and a first water inlet and outlet, the first cooling coil is formed by a plurality of layers of water-cooling tubes coiled in a serpentine shape, the first water inlet and outlet are respectively provided at both ends of the first cooling coil, and the first heat dissipation fin is arranged on the outside of the first cooling coil.
[0012] As a further improvement of the present invention, the inter-furnace heat exchange assembly includes a second cooling coil, a second heat dissipation fin and a second water inlet and outlet. The second cooling coil is formed by serpentine winding of multiple layers of water-cooling tubes. A second water inlet and outlet are respectively provided at both ends of the second cooling coil, and the second heat dissipation fin is arranged on the outside of the second cooling coil.
[0013] As a further improvement of the present invention, the inter-furnace heat exchange assembly also includes a liquid collecting pan, a liquid receiving pipe and a liquid receiving pan; the liquid receiving pan is located below the second cooling coil to receive the liquid leakage of the second cooling coil, the liquid collecting pan is arranged on the side of the liquid receiving pan, and the liquid receiving pipe is arranged at the bottom of the liquid collecting pan to drain the liquid collecting pan and the accumulated liquid in the liquid collecting pan.
[0014] As a further improvement of the present invention, the furnace mouth heat exchange assembly includes a third cooling coil, a third heat dissipation fin and a third water inlet and outlet. The third cooling coil is formed by serpentine winding of multiple layers of water-cooling tubes. A third water inlet and outlet are respectively provided at both ends of the third cooling coil. The third heat dissipation fin is arranged on the outside of the third cooling coil.
[0015] Compared with the prior art, the advantages of the present invention are:
[0016] The utility model is suitable for the internal circulation cooling system of the post-boron expansion equipment. The main structure of the cooling system is composed of a cabinet top heat exchange component, an inter-furnace heat exchange component and a furnace mouth heat exchange component. Specifically, the cabinet top heat exchange component is arranged on the top of the furnace cabinet and extends from the side of the furnace cabinet to the bottom of the furnace cabinet, thereby realizing cooling of the top and interior of the furnace cabinet; the inter-furnace heat exchange component is arranged between adjacent heating furnace bodies along the length direction of the heating furnace body, thereby realizing cooling of the side of the heating furnace body; the furnace mouth heat exchange component is arranged in the furnace door of the heating furnace body, thereby realizing cooling of the furnace mouth of the heating furnace body. Through the cooling system of the utility model, the temperature outside the furnace body and the surface of the equipment inside the post-boron expansion equipment is effectively reduced, and the safety and reliability of the equipment operation are improved. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 This is a schematic diagram of the structural principle of the manipulator device in a specific embodiment of the present utility model;
[0018] Figure 2 This is a schematic diagram of the structural principle of the fixing module in a specific embodiment of the present utility model;
[0019] Figure 3 This is a schematic diagram of the structural principle of the lower fixing plate in a specific embodiment of the present utility model;
[0020] Figure 4 This is a schematic diagram of the structural principle of the lower fixing plate in a specific embodiment of the present utility model;
[0021] Legend: 1. Cabinet top heat exchange assembly; 11. First water-cooled radiator; 12. Second water-cooled radiator; 13. Third water-cooled radiator; 14. Axial fan; 15. Blower; 16. Exhaust hood; 17. Protective cover; 111. First cooling coil; 112. First cooling fin; 113. First water inlet and outlet; 2. Inter-furnace heat exchange assembly; 21. Second cooling coil; 22. Second cooling fin; 23. Liquid collection tray; 24. Liquid receiving pipe; 25. Second water inlet and outlet; 26. Liquid receiving tray; 3. Furnace mouth heat exchange assembly; 31. Third cooling coil; 32. Third cooling fin; 33. Third water inlet and outlet; 100. Furnace cabinet; 101. Heating furnace. DETAILED DESCRIPTION
[0022] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but the scope of protection of the present invention is not limited thereby.
[0023] In the description of the present invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.
[0024] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, "multiple" means two or more, unless otherwise clearly and specifically defined.
[0025] Example
[0026] like Figures 1 to 4As shown, the internal circulation cooling system of the utility model suitable for post-boron expansion equipment includes: a cabinet top heat exchange component 1, a furnace body heat exchange component 2 and a furnace mouth heat exchange component 3. The cabinet top heat exchange component 1 is arranged on the top of the furnace body cabinet 100, and extends from the side of the furnace body cabinet 100 to the bottom of the furnace body cabinet 100 to achieve cooling of the top and interior of the furnace body cabinet 100. The furnace body heat exchange component 2 is arranged between adjacent heating furnace bodies 101 along the length direction of the heating furnace body 101 to achieve cooling of the side of the heating furnace body 101. The furnace mouth heat exchange component 3 is arranged in the furnace door of the heating furnace body 101 to achieve cooling of the furnace mouth of the heating furnace body 101. Through the cooling system of this embodiment, the temperature outside the furnace body and the surface of the equipment in the post-boron expansion equipment is effectively reduced, and the safety and reliability of the equipment operation are improved.
[0027] like Figure 1 As shown, the cabinet top heat exchange assembly 1 includes a first water-cooled radiator 11 and an exhaust hood 16. The first water-cooled radiator 11 is arranged on the top of the furnace cabinet 100, and a fully enclosing protective hood 17 is provided on the outside of the first water-cooled radiator 11. The exhaust hood 16 is arranged vertically on the side of the heating furnace body 101, and the top of the exhaust hood 16 is connected to the notch on the side of the protective hood 17 to discharge the cold air flowing through the first water-cooled radiator 11. The bottom of the exhaust hood 16 is located at the bottom of the furnace cabinet 100. After the air discharged from the bottom of the exhaust hood 16 cools the interior of the furnace cabinet 100, the hot air is recirculated to the bottom of the first water-cooled radiator 11, where it undergoes heat exchange cooling.
[0028] like Figure 1 As shown, in this embodiment, the cabinet top heat exchange assembly 1 also includes an axial flow fan 14, which is arranged on the top of the exhaust hood 16 and close to the protective cover 17, so as to extract the cold air in the first water-cooled radiator 11, so that the hot air exhausted from the furnace cabinet 100 flows in the first water-cooled radiator 11 for heat exchange.
[0029] like Figure 1 As shown, in this embodiment, the cabinet top heat exchange assembly 1 also includes a blower 15, and multiple blowers 15 are arranged inside the exhaust hood 16 to enable hot air to flow and cool in the exhaust hood 16. After cooling the inside of the furnace cabinet 100, the hot air formed is circulated to the first water-cooled radiator 11 through the gap at the bottom of the protective cover 17 for heat exchange cooling.
[0030] like Figure 1As shown, in this embodiment, the cabinet top heat exchange assembly 1 further includes a second water-cooled radiator 12 and a third water-cooled radiator 13. The second water-cooled radiator 12 and the third water-cooled radiator 13 are both disposed within the exhaust hood 16 to cool the cold air entering the exhaust hood 16 and enhance the cooling effect. It will be appreciated that in other embodiments, a corresponding number of water-cooled radiators may be disposed within the exhaust hood 16 based on actual cooling requirements to provide multi-stage cooling of the cold air within the exhaust hood 16.
[0031] In this embodiment, the exhaust hood 16 guides the cold air discharged by the axial flow fan 14 from the top of the furnace cabinet to the inside of the furnace cabinet 100 to cool the electrical equipment. The excess cold air is pressed into the side of the furnace body through the exhaust hood 16 by the blower 15 to cool the outside of the furnace body.
[0032] In this embodiment, the first water-cooled radiator 11, the second water-cooled radiator 12 and the third water-cooled radiator 13 all have the same structural configuration and are all made of metal or other high-temperature resistant materials, but differ in size. Figure 2 As shown, the first water-cooled radiator 11 includes a first cooling coil 111, a first heat dissipation fin 112, and a first water inlet and outlet 113. The first cooling coil 111 is formed by a serpentine coil of multiple layers of water-cooling tubes. The first water inlet and outlet 113 are respectively provided at both ends of the first cooling coil 111. The first heat dissipation fin 112 is provided on the outside of the first cooling coil 111. The first heat dissipation fin 112 is made of metal material. The first water inlet and outlet 113 is connected to the external water inlet pipe and outlet pipe using a metal hose in the form of a compression joint. By controlling the water flow rate, the temperature outside the furnace body of the equipment is adjusted to achieve equipment energy consumption regulation. It can be understood that there is a water receiving tray at the bottom of the first cooling coil 111, and a water receiving pipe is provided below the water receiving tray. The water receiving tray is mainly used to collect liquid in case of accidental water leakage from the cooling coil.
[0033] like Figure 3 As shown, the inter-furnace heat exchange assembly 2 includes a second cooling coil 21, second heat sink fins 22, and second water inlet and outlet 25. The second cooling coil 21 is formed by a serpentine coil of multiple layers of water-cooling tubes. The second water inlet and outlet 25 are respectively provided at both ends of the second cooling coil 21, and the second heat sink fins 22 are arranged on the outside of the second cooling coil 21. The second cooling coil 21 is made of metal or other high-temperature resistant materials, and the second heat sink fins 22 are made of metal. The second water inlet and outlet 25 are connected to the external water inlet and outlet pipes using metal hoses in the form of compression fittings. By controlling the water flow rate, the temperature inside the equipment and outside the furnace is adjusted to achieve equipment energy consumption regulation.
[0034] Furthermore, the inter-furnace heat exchange assembly 2 also includes a liquid collection pan 23, a liquid receiving pipe 24, and a liquid collection pan 26. The liquid collection pan 26 is located below the second cooling coil 21 to receive liquid leakage from the second cooling coil 21. The liquid collection pan 23 is located on the side of the liquid collection pan 26, and the liquid collection pipe 24 is located at the bottom of the liquid collection pan 23 to drain the accumulated liquid in the liquid collection pan 26 and the liquid collection pan 23.
[0035] like Figure 4 As shown, the furnace mouth heat exchange assembly 3 includes a third cooling coil 31, third heat sink fins 32, and third water inlet and outlet 33. The third cooling coil 31 is formed by a serpentine coil of multiple layers of water-cooling tubes. The third water inlet and outlet 33 are located at each end of the third cooling coil 31, and the third heat sink fins 32 are located outside the third cooling coil 31. The third cooling coil 31 is made of metal or other high-temperature-resistant materials, and the third heat sink fins 32 are made of metal. The third water inlet and outlet 33 are connected to the external water inlet and outlet pipes using metal hoses with compression fittings. By controlling the water flow rate, the temperature inside the equipment and outside the furnace is adjusted to achieve energy regulation.
[0036] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiment. All technical solutions based on the concept of the present invention are within the scope of protection of the present invention. It should be noted that for those skilled in the art, certain improvements and modifications that do not depart from the principles of the present invention should also be considered within the scope of protection of the present invention.
Claims
1. An internal circulation cooling system suitable for post-boron expansion equipment, characterized in that: include: A cabinet top heat exchange component (1), an inter-furnace heat exchange component (2), and a furnace mouth heat exchange component (3); the cabinet top heat exchange component (1) is arranged on the top of the furnace cabinet (100) and extends from the side of the furnace cabinet (100) to the bottom of the furnace cabinet (100) to achieve cooling of the top and inside of the furnace cabinet (100); the inter-furnace heat exchange component (2) is arranged between adjacent heating furnaces (101) along the length direction of the heating furnace body (101) to achieve cooling of the sides of the heating furnace body (101); the furnace mouth heat exchange component (3) is arranged in the furnace door of the heating furnace body (101) to achieve cooling of the furnace mouth of the heating furnace body (101).
2. The internal circulation cooling system suitable for post-boron expansion equipment according to claim 1, characterized in that: The cabinet top heat exchange assembly (1) comprises a first water-cooled radiator (11) and an exhaust hood (16), wherein the first water-cooled radiator (11) is arranged on the top of the furnace cabinet (100), and a protective hood (17) with a fully enclosed structure is provided on the outside of the first water-cooled radiator (11), and the exhaust hood (16) is arranged on the side of the heating furnace body (101) along the vertical direction, and the top of the exhaust hood (16) is connected to the side of the protective hood (17) to discharge the cold air flowing through the first water-cooled radiator (11), and the bottom of the exhaust hood (16) is located at the lower part of the furnace cabinet (100), and the air discharged from the bottom of the exhaust hood (16) cools the interior of the furnace cabinet (100) and then circulates to the bottom of the first water-cooled radiator (11).
3. The internal circulation cooling system suitable for post-boron expansion equipment according to claim 2, characterized in that: The cabinet top heat exchange assembly (1) further comprises an axial flow fan (14), which is arranged on the top of the exhaust hood (16) and close to the protective hood (17) to extract cold air flowing through the first water-cooled radiator (11).
4. The internal circulation cooling system suitable for post-boron expansion equipment according to claim 3, characterized in that: The cabinet top heat exchange assembly (1) further includes a blower (15), and a plurality of blowers (15) are arranged inside the exhaust hood (16) to enable cold air to flow inside the exhaust hood (16), cool the inside of the furnace cabinet (100), and then circulate to the bottom of the first water-cooled radiator (11).
5. The internal circulation cooling system suitable for post-boron expansion equipment according to claim 4, characterized in that: The cabinet top heat exchange assembly (1) further comprises a second water-cooled radiator (12) and a third water-cooled radiator (13), wherein the second water-cooled radiator (12) and the third water-cooled radiator (13) are both arranged inside the exhaust hood (16) to cool the cold air entering the exhaust hood (16).
6. The internal circulation cooling system suitable for post-boron expansion equipment according to claim 5, characterized in that: The first water-cooled radiator (11), the second water-cooled radiator (12) and the third water-cooled radiator (13) all have the same structural arrangement; the first water-cooled radiator (11) comprises a first cooling coil (111), first heat dissipation fins (112) and a first water inlet and outlet (113); the first cooling coil (111) is formed by serpentine winding of multiple layers of water-cooling tubes; the first water inlet and outlet (113) are respectively provided at both ends of the first cooling coil (111); and the first heat dissipation fins (112) are arranged on the outside of the first cooling coil (111).
7. The internal circulation cooling system for post-boron expansion equipment according to any one of claims 1 to 6, characterized in that: The inter-furnace heat exchange assembly (2) comprises a second cooling coil (21), second heat dissipation fins (22) and a second water inlet and outlet (25); the second cooling coil (21) is formed by a plurality of layers of water-cooling tubes coiled in a serpentine shape; the second water inlet and outlet (25) are respectively provided at both ends of the second cooling coil (21); and the second heat dissipation fins (22) are arranged outside the second cooling coil (21).
8. The internal circulation cooling system suitable for post-boron expansion equipment according to claim 7, characterized in that: The inter-furnace heat exchange assembly (2) further comprises a liquid collecting pan (23), a liquid receiving pipe (24) and a liquid receiving pan (26); the liquid receiving pan (26) is located below the second cooling coil (21) to receive liquid leakage from the second cooling coil (21); the liquid collecting pan (23) is arranged on the side of the liquid receiving pan (26); and the liquid receiving pipe (24) is arranged at the bottom of the liquid collecting pan (23) to drain the accumulated liquid in the liquid receiving pan (26) and the liquid collecting pan (23).
9. The internal circulation cooling system for post-boron expansion equipment according to any one of claims 1 to 6, characterized in that: The furnace mouth heat exchange assembly (3) comprises a third cooling coil (31), third heat dissipation fins (32) and a third water inlet and outlet (33); the third cooling coil (31) is formed by a plurality of layers of water-cooling tubes coiled in a serpentine shape; the third water inlet and outlet (33) are respectively provided at both ends of the third cooling coil (31); and the third heat dissipation fins (32) are arranged on the outside of the third cooling coil (31).