Coated harmonic oscillator excitation detection structure and coated harmonic oscillator Q value test system

Abstract

The utility model discloses a film-coated harmonic oscillator excitation detection structure and a film-coated harmonic oscillator Q value test system, the excitation detection structure comprises a vacuum tank and an excitation detection unit located in the vacuum tank, the excitation detection unit comprises a PCB, a fixed seat and a clamping mechanism, the fixed seat is installed at the bottom of the vacuum tank, the PCB is installed on the top surface of the fixed seat, and the clamping mechanism is installed on the bottom surface of the fixed seat. A plurality of electrodes are fixed to the PCB, a first through hole is formed in the center of the PCB, the clamping mechanism is installed on the fixing base, and the top of the clamping mechanism penetrates through the first through hole and is used for clamping an inner anchor column of the coated harmonic oscillator, so that a set gap is formed between the lip edge of the coated harmonic oscillator and the PCB. According to the utility model, the Q value test of the coated harmonic oscillator is carried out by adopting a mode that the PCB electrode and the coated harmonic oscillator form a capacitor, so that the real working condition of the hemispherical resonator gyroscope assembled by adopting the planar electrode and the hemispherical harmonic oscillator can be accurately restored, and the contrast of test data before and after the assembly is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of solid gyroscope testing, in particular to a film-coated resonator excitation detection structure and a film-coated resonator Q value testing system. Background Art

[0002] The Q value of a coated hemispherical resonator is directly related to the properties of the assembled HRG. Before assembly, the rigid axis position, operating frequency, frequency split, and Q uniformity must be measured. Currently, these parameters measured using piezoelectric ceramic excitation on coated hemispherical resonators differ from those measured after assembly. This is primarily due to the capacitive effect between the metal coating on the electrodes and the metal coating on the hemispherical resonator, which forms a gap through the assembly gap. This ultimately creates an electrostatic force in the hemispherical resonator region, driving the hemispherical resonator to vibrate based on the operating mode, thereby enabling the HRG to operate. The differences in excitation methods before and after assembly can lead to test errors, rendering the post-coating hemispherical resonator test data ineffective in guiding HRG assembly. For example, the measurement of Q nonuniformity is closely related to the HRG's zero bias and angular random walk. Therefore, it is necessary to unify the Q value testing methods for the hemispherical resonator after coating, that is, before assembly, with the Q value evaluation methods after assembly. Utility Model Content

[0003] In response to the problems in the background technology, the utility model proposes a coated resonator excitation detection structure and a coated resonator Q value testing system with the excitation detection structure. The Q value test of the coated resonator is performed using a capacitance method, which greatly improves the comparability of the Q value test data before and after assembly.

[0004] The utility model adopts the following technical solutions:

[0005] A film-coated resonator excitation detection structure includes a vacuum tank and an excitation detection unit located in the vacuum tank. The excitation detection unit includes a PCB board, a fixing seat and a clamping mechanism. The fixing seat is installed at the bottom of the vacuum tank. The PCB board is installed on the top surface of the fixing seat. A plurality of electrodes are fixed thereon. A first through hole is opened in the center of the PCB board. The clamping mechanism is installed on the fixing seat. The top of the clamping mechanism passes through the first through hole and is used to clamp the inner anchor column of the film-coated resonator so that a set gap is formed between the lip edge of the film-coated resonator and the PCB board.

[0006] Optionally, the excitation detection unit also includes a base, which is installed on the bottom of the vacuum tank, and a fixed seat is arranged on the top surface of the base. The center of the top surface of the base protrudes upward to form a boss. A second through hole is provided on the fixed seat to cooperate with the boss. The first through hole and the second through hole are connected to form a channel. The boss is clamped in the channel, and its top extends out from the channel. A accommodating groove is provided on the top surface of the boss, and the clamping mechanism is placed in the accommodating groove.

[0007] Optionally, the clamping mechanism includes a clamp and a core shaft, the clamp includes a clamping portion and a connecting portion connected to the lower end of the clamping portion, the clamp is located in the accommodating groove, and the connecting portion is detachably connected to the lower portion of the groove wall of the accommodating groove;

[0008] The top surface of the clamping portion is provided with a positioning hole that cooperates with the core shaft, and the core shaft is placed in the positioning hole. The side wall of the clamping portion is circumferentially spaced with a plurality of first side grooves that are connected to the positioning hole. The first side grooves extend upward to penetrate the top surface of the clamping portion, so that the clamping portion forms a structure consisting of a plurality of clamping blocks connected at the bottom.

[0009] The outer wall surface of the clamping part forms a first conical surface that is larger at the top and smaller at the bottom, and the upper part of the accommodating groove wall forms a second conical surface that cooperates with the first conical surface. The clamping part is clamped in the accommodating groove through the cooperation of the first conical surface and the second conical surface, so that multiple clamping blocks enclose the positioning hole and hold the core shaft tightly, and the top surface of the core shaft and the top side wall of the positioning hole enclose a clamping space at the lower part of the inner anchor column.

[0010] Optionally, a second side groove communicating with the positioning hole is formed on the surface of the clamping block, and the second side groove extends downward to penetrate the bottom surface of the clamping portion.

[0011] Optionally, a threaded portion is provided at the bottom of the core shaft, and the threaded portion passes through the bottom surface of the positioning hole and is threadedly connected to the connecting portion.

[0012] Optionally, the connecting portion is threadedly connected to the lower portion of the accommodating groove.

[0013] Optionally, the fixing seat and the base are made of non-conductive material.

[0014] As the same inventive concept, the utility model also provides a Q-value test system for a film-coated resonator, comprising a high-voltage power supply, an excitation signal generator, a vacuum pump, a control system, and the above-mentioned excitation detection structure. The high-voltage power supply, the excitation signal generator, the vacuum pump, and the control system are located outside the vacuum tank. The leads of the high-voltage power supply are sealed and pass through the vacuum tank and are electrically connected to the inner anchor column of the film-coated resonator; the leads of the excitation signal generator pass through the vacuum tank and are electrically connected to the electrodes on the PCB board; the leads of the control system pass through the vacuum tank and are electrically connected to the electrodes on the PCB board.

[0015] The vacuum pump is connected to the vacuum tank. The high-voltage power supply, vacuum pump and excitation signal generator are all electrically connected to the control system. The control system is used to control the vacuum pump to evacuate the vacuum tank.

[0016] The control system is also used to control the conduction between the high-voltage power supply and the inner anchor column of the coated resonator, so that the high-voltage power supply generates a high-voltage electric field between the coated resonator and the electrode.

[0017] The control system is also used to control the excitation signal generator to be connected to at least one electrode, so that the excitation signal generator applies an excitation signal to the electrode connected thereto, thereby exciting the hemispherical resonant gyroscope to vibrate.

[0018] The control system is also used to control one of the electrodes to be turned on, so that the turned-on electrode detects the Q value of the lip edge of the coated resonator and the corresponding position of the electrode, and receives the Q value signal transmitted back by the electrode.

[0019] Optionally, a lead through hole is provided on the edge of the base, a wire hole corresponding to the lead through hole is provided on the bottom surface of the fixing seat, and a wire groove communicating with the wire hole is provided on the side wall of the fixing seat.

[0020] The lead of the high-voltage power supply is introduced into the vacuum tank from the bottom of the vacuum tank, passes through the lead through hole, the wire hole and the wire groove, and is electrically connected to the inner anchor column of the coated resonator;

[0021] The leads of the excitation signal generator and the control system are introduced into the vacuum tank from the bottom of the vacuum tank, and then pass through the lead through-hole, the wire hole and the wire groove in sequence, and finally are electrically connected to the electrodes on the top surface of the PCB board.

[0022] Optionally, a plurality of pins are provided on the edge of the top surface of the PCB board, the plurality of pins correspond one-to-one to the plurality of electrodes, the pins are electrically connected to the corresponding electrodes, and the leads of the excitation signal generator and the control system are electrically connected to the corresponding electrodes through the pins.

[0023] Compared with the prior art, the advantages of the present invention are:

[0024] Conventional piezoelectric ceramic excitation cannot detect the electrification effect of the film layer and cannot reflect the most realistic characteristics of the oscillator after coating. The utility model uses PCB electrodes and coated resonators to form a capacitor to test the Q value of the coated resonator. It can accurately restore the actual working conditions of a hemispherical resonator gyroscope assembled with planar electrodes and a hemispherical resonator, greatly improving the comparability of test data before and after assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to make the present invention more easily understood, the present invention will be described in more detail with reference to the specific embodiments shown in the accompanying drawings. These drawings only depict typical embodiments of the present invention and should not be considered as limiting the scope of protection of the present invention.

[0026] Figure 1 This is a schematic diagram of the main structure of the coated resonator excitation and detection structure of Example 1 of the present utility model.

[0027] Figure 2 This is a schematic diagram of the three-dimensional structure of the film-coated resonator excitation and detection structure of Example 1 of the present utility model (the vacuum tank is omitted).

[0028] Figure 3 This is a schematic diagram of the explosion structure of the film-coated resonator excitation detection structure of Example 1 of the present utility model (the vacuum tank is omitted).

[0029] Figure 4 This is a schematic cross-sectional view of the film-coated resonator excitation and detection structure of Example 1 of the present utility model (the vacuum tank is omitted).

[0030] Figure 5 This is a schematic cross-sectional structure diagram of another cross-sectional position of the film-coated resonator excitation detection structure of Example 1 of the present utility model (the vacuum tank is omitted).

[0031] Figure 6 This is a schematic diagram of the three-dimensional structure of the clamp in Example 1 of the present utility model.

[0032] Figure 7 This is a structural diagram of a Q-value testing system for a coated resonator according to Example 2 of the present utility model.

[0033] Figure 8 This is a flow chart of a method for testing the Q value of a coated resonator using the system of Example 2 of the present utility model.

[0034] Figure 9 This is a curve fitting diagram after the damping axis position is identified using the system of Example 2 of the utility model.

[0035] Reference numerals:

[0036] 1. Coated resonator; 2. PCB board; 21. First through hole; 22. Pin; 23. Electrode; 3. Fixing seat; 31. Second through hole; 32. Wire hole; 33. Wire groove; 4. Mandrel; 41. Threaded portion; 5. Clamp; 51. Clamping portion; 52. Connecting portion; 53. Positioning hole; 54. First side groove; 55. Clamping block; 56. First conical surface; 57. Second side groove; 6. Base; 61. Boss; 62. Accommodating groove; 63. Second conical surface; 64. Lead through hole; 7. Bottom plate; 8. Workbench; 9. Vacuum tank; 100. Excitation detection structure; 200. Control system; 300. Excitation signal generator; 400. High-voltage power supply; 500. Vacuum pump. DETAILED DESCRIPTION

[0037] The following describes the implementation methods of the present invention with reference to the accompanying drawings so that those skilled in the art can better understand the present invention and implement it. However, the enumerated embodiments are not intended to limit the present invention. Unless there is a conflict, the following embodiments and the technical features in the embodiments can be combined with each other, and the same components are represented by the same figure marks.

[0038] Example 1:

[0039] like Figures 1-6 As shown, this embodiment provides a film-coated resonator excitation detection structure, including a vacuum tank 9, and an excitation detection unit located in the vacuum tank 9, the excitation detection unit including a PCB board 2, a fixing seat 3 and a clamping mechanism, the fixing seat 3 is installed at the bottom of the vacuum tank 9, the PCB board 2 is installed on the top surface of the fixing seat 3, a plurality of electrodes 23 are fixed thereon, a first through hole 21 is opened in the center of the PCB board 2, the clamping mechanism is installed on the fixing seat 3, and its top passes through the first through hole 21, and is used to clamp the inner anchor column of the film-coated resonator 1 so that there is a set gap between the lip edge of the film-coated resonator 1 and the PCB board 2.

[0040] Therefore, each electrode 23 on the PCB board and the lip edge of the coated resonator 1 form a capacitor. Some of the electrodes are used as excitation electrodes and the other electrodes are used as detection electrodes to perform Q value testing of the coated resonator. This can accurately restore the actual working conditions of a hemispherical resonator gyroscope assembled with a planar electrode and a hemispherical resonator, greatly improving the comparability of test data before and after assembly.

[0041] In this embodiment, the excitation detection unit also includes a base 6, which is installed at the bottom of the vacuum tank 9. The fixing seat 3 is arranged on the top surface of the base 6. The center of the top surface of the base 6 protrudes upward to form a boss 61. The fixing seat 3 is provided with a second through hole 31 that cooperates with the boss 61. The first through hole 21 and the second through hole 31 are connected to form a channel. The boss 61 is stuck in the channel, and its top extends out from the channel. The top surface of the boss 61 is provided with a receiving groove 62, and the clamping mechanism is placed in the receiving groove 62.

[0042] In this embodiment, the clamping mechanism includes a clamp 5 and a core shaft 4. The clamp 5 includes a clamping portion 51 and a connecting portion 52 connected to the lower end of the clamping portion 51. The clamp 5 is located in the accommodating groove 62, and its connecting portion 52 is detachably connected to the lower portion of the groove wall of the accommodating groove 62.

[0043] The top surface of the clamping portion 51 is provided with a positioning hole 53 that cooperates with the core shaft 4. The core shaft 4 is placed in the positioning hole 53. The side wall of the clamping portion 51 is circumferentially spaced apart with a plurality of first side grooves 54 that communicate with the positioning hole 53. The first side grooves 54 extend upward to penetrate the top surface of the clamping portion 51, so that the clamping portion 51 forms a structure consisting of a plurality of clamping blocks 55 connected at the bottom.

[0044] The outer wall surface of the clamping portion 51 forms a first conical surface 56 that is larger at the top and smaller at the bottom, and the upper part of the wall of the accommodating groove 62 forms a second conical surface 63 that cooperates with the first conical surface 56. The clamping portion 51 is clamped in the accommodating groove 62 through the cooperation of the first conical surface 56 and the second conical surface 63, so that multiple clamping blocks 55 enclose to form the positioning hole 53 and hold the core shaft 4 tightly, and the top surface of the core shaft 4 and the top side wall of the positioning hole 53 enclose to form the clamping space at the lower part of the inner anchor column.

[0045] The above-mentioned clamping mechanism, through the cooperation of the first conical surface 56 and the second conical surface 63, enables the multiple clamping blocks 55 of the clamp 5 to gather from all sides to the inner anchor column of the clamping core shaft 4 and the coated resonator 1, thereby ensuring the concentricity of the coated resonator 1 and the clamp 5, reducing the clamping deviation in the vertical direction, and preventing the workpiece from being clamped crooked, so that the inclination of the coated resonator 1 in the vertical direction can be less than 3um, thereby achieving rapid clamping and disassembly of the resonator, ensuring the clamping of the coated resonator, and ensuring the parallelism of the lip edge of the resonator and the PCB electrode assembly, thereby ensuring a uniform assembly gap.

[0046] In addition, since the middle section of the assembly of the core shaft 4 and the fixture 5 adopts a space-avoiding method, the front end clamping force of the core shaft 4 and the workpiece is increased, so that the core shaft 4 bears most of the clamping force, and the overall contact area between the fixture 5 and the core shaft 4 is reduced, thereby avoiding the Q value anchor rod loss caused by the selection of other materials or fixing methods such as beeswax, asphalt, POM plastic, etc., and the anchor rod loss caused by the vibrator column being installed too deep or too short, so that the Q value measurement has a high retention rate, which can most realistically reflect the Q value status of the vibrator.

[0047] In this embodiment, a second side groove 57 communicating with the positioning hole 53 is formed on the surface of the clamping block 55 . The second side groove 57 extends downward to penetrate the bottom surface of the clamping portion 51 , so that the core shaft 4 and the clamp 5 have more space to avoid air.

[0048] In this embodiment, the bottom of the mandrel 4 is provided with a threaded portion 41, which passes through the bottom surface of the positioning hole 53 and is threadedly connected to the connecting portion 52. In addition, the connecting portion 52 is threadedly connected to the lower portion of the receiving groove 62. This not only facilitates disassembly but also enables stable clamping.

[0049] In this embodiment, in order to avoid interference with the Q value test, the fixing seat 3 and the base 6 are made of non-conductive materials.

[0050] Example 2:

[0051] like Figure 7 As shown, this embodiment provides a Q-value test system for a film-coated resonator, comprising a high-voltage power supply 400, an excitation signal generator 300, a vacuum pump 500, a control system 200, and the excitation detection structure 100 of Example 1. The high-voltage power supply 400, the excitation signal generator 300, the vacuum pump 500, and the control system 200 are located outside the vacuum tank 9. The leads of the high-voltage power supply 400 are sealed and pass through the vacuum tank 9 and are electrically connected to the inner anchor column of the film-coated resonator 1; the leads of the excitation signal generator 300 are passed through the vacuum tank 9 and are electrically connected to the electrodes 23 on the PCB board 2; the leads of the control system 200 are passed through the vacuum tank 9 and are electrically connected to the electrodes 23 on the PCB board 2.

[0052] The vacuum pump 500 is connected to the vacuum tank 9. The high-voltage power supply 400, the vacuum pump 500 and the excitation signal generator 300 are all electrically connected to the control system 200. The control system 200 is used to control the vacuum pump 500 to evacuate the vacuum tank 9.

[0053] The control system 200 is also used to control the high-voltage power supply 400 to be connected to the inner anchor column of the coated resonator 1, so that the high-voltage power supply 400 generates a high-voltage electric field between the coated resonator 1 and the electrode 23.

[0054] The control system 200 is further configured to control the excitation signal generator 300 to be in conduction with at least one electrode 23, so that the excitation signal generator 300 applies an excitation signal to the electrode 23 in conduction therewith, thereby exciting the hemispherical resonant gyroscope to vibrate.

[0055] The control system 200 is further configured to control one of the electrodes 23 to be turned on, so that the turned-on electrode 23 detects the Q value of the corresponding position between the lip edge of the coated resonator 1 and the electrode 23 , and receives the Q value signal transmitted back by the electrode 23 .

[0056] Therefore, this embodiment uses the PCB electrode and the coated resonator to form a capacitor to perform the Q value test of the coated resonator, which can accurately restore the actual working conditions after the hemispherical resonator gyroscope is assembled with a planar electrode and a hemispherical resonator, thereby greatly improving the comparability of the test data before and after assembly.

[0057] In this embodiment, the edge of the base 6 is provided with a lead through hole 64, the bottom surface of the fixing base 3 is provided with a wire hole 32 corresponding to the lead through hole 64, and the side wall of the fixing base 3 is provided with a wire groove 33 connected to the wire hole 32.

[0058] The lead wire of the high-voltage power supply 400 is introduced into the vacuum tank 9 from the bottom thereof, passes through the lead wire through-hole 64, the wire hole 32 and the wire groove 33, and is electrically connected to the inner anchor post of the film-coated resonator 1;

[0059] The leads of the excitation signal generator 300 and the control system 200 are introduced into the vacuum tank 9 from the bottom of the vacuum tank 9 and then pass through the lead through hole 64, the wire hole 32 and the wire groove 33 in sequence, and finally electrically connected to the electrode 23 on the top surface of the PCB board 2.

[0060] Therefore, the fixing seat 3 of the excitation detection structure 100 adopts an internal hole design, integrating all the mounting screw holes and wiring harnesses inside the fixing seat 3, thereby reducing the space of a single test position and reducing the risk of the wiring harness being tangled or torn during rotation or revolution due to exposure of the wiring harness, thereby greatly reducing the maintenance failure rate of the equipment.

[0061] In this embodiment, a plurality of pins 22 are provided on the edge of the top surface of the PCB board 2, and the plurality of pins 22 correspond one-to-one to the plurality of electrodes 23. The pins 22 are electrically connected to the corresponding electrodes 23, and the leads of the excitation signal generator 300 and the control system 200 are electrically connected to the corresponding electrodes 23 through the pins 22.

[0062] like Figure 8 As shown, the following is an example of a specific implementation of the Q value test of the coated resonator in this embodiment:

[0063] Step 1: Place the vacuum tank 9 on the workbench 8, and introduce the wires that need to be connected to the electrodes 23 on the PCB board 2 from the outside into the vacuum tank 9 through the bottom plate 7. The introduced wire harness includes a high-voltage DC power line and several shielded wires. The high-voltage DC power line is used to connect to the anchor column of the coated resonator 1, and the shielded wire is used to connect to the electrodes 23 on the PCB board 2. The number of the shielded wires cannot be less than the number of electrode positions.

[0064] Step 2: Fix the PCB board 2 to the fixing base 3 with 8 screws. The PCB board 2 can be made into 8-electrode or 16-electrode as needed.

[0065] Step 3: Tighten the mandrel 4 onto the fixture 5 by means of a threaded connection, and then slightly tighten the fixture 5 onto the base 6; use four screws to fix the fixing base 3 and the base 6 together. To provide insulation, the fixing base 3 and the base 6 are made of non-conductive materials, such as nylon or fluoroplastics; pass the high-voltage DC power line through the lead through-hole 64, the wire hole 32, and the wire groove 33, and then electrically connect it to the inner anchor column of the coated resonator 1; pass the shielding wire through the lead through-hole 64, the wire hole 32, and the wire groove 33, and then connect it to the pin 22 on the PCB electrode;

[0066] Step 4: Place the coated resonator 1 on the end face of the core shaft 4, and tighten the clamp 5 through the hexagonal screw hole under the base 6 so that the coated resonator 1 is tightly held by the clamp 5. Due to the airtight design of the core shaft 2, the clamp 5 is prevented from exerting excessive tightening force on the coated resonator 1, protecting the anchor column of the coated resonator 1 from damage caused by excessive clamping, and making the gap between the coated resonator 1 and the PCB board 2 uniform;

[0067] Step 5: Attach Figure 2 The tightened assembly is placed on the base plate 7, which can be removably bonded, or a boss can be designed on the base plate 7 to connect with the through hole in the middle of the base 6 using a slight interference fit.

[0068] Step 6: The vacuum tank 9 is evacuated using a vacuum pump 500. When the vacuum degree reaches below 10 μtorr, the control system 200 controls the high-voltage power supply 400 to be connected to the inner anchor column of the film-coated resonator 1, so that the high-voltage power supply 400 generates a high-voltage electric field between the film-coated resonator 1 and the electrode 23. The control system 200 controls the excitation signal generator 300 to be connected to one of the electrodes 23. Through the capacitance effect formed between the film-coated resonator 1 and the electrode 23, the film-coated resonator 1 is driven by the electrostatic force to vibrate. The control system 200 controls One of the remaining electrodes 23 is turned on, and the electrode 23 forms a detection electrode, which detects the Q value of the lip edge of the coated resonator and the position corresponding to the electrode. The electrode sends the detected Q value signal back to the control system 200, thereby obtaining the Q value and other data to be measured. Then, all the remaining electrodes are traversed, and finally the electrode with a relative 90° direction is selected as the excitation electrode, and the Q value of the position corresponding to the previous excitation electrode is measured. Finally, multiple Q values ​​corresponding to the number of electrodes and the circumferential angle value of the lip edge of the coated resonator corresponding to each Q value are obtained. See the attached Figure 8 ;

[0069] Step 7: The damping axis of the hemispherical resonator can be identified as needed. The specific steps are as follows: the control system 200 constructs a damping axis identification model based on each Q value and the circumferential angle of the coated resonator lip corresponding to the Q value, and identifies the damping axis position of the coated resonator. The curve fitting diagram after identification is shown in the attached figure. Figure 9 The peak and trough positions of the fitted sine curve in the figure are the positions of the high damping axis and the low damping axis.

[0070] Specifically, the PCB board 2 in this embodiment is distributed with 16 electrodes and is equipped with an angle ruler and an unlimited stepping motor that can rotate 360 ​​degrees without limit. The motor can rotate 360 ​​degrees without limit and for an unlimited number of times under vacuum conditions, and can achieve fixed-point excitation at any point in the 16 electrode angles, which can be used to accurately measure the modal changes and precession angle effects of the hemispherical resonator.

[0071] When assembling a planar electrode hemispherical resonator gyroscope, an 8-electrode structure is usually used. However, the Q value data tested using a 16-electrode PCB electrode structure can meet the requirements for assembly Q value comparison. The extra 8-electrode test data is used to fit the damping axis position. Although this damping axis position is not very accurate, it meets the assembly requirements of the 8-electrode hemispherical resonator and can effectively reduce the time spent on searching for the damping axis separately.

[0072] Moreover, when the single-point excitation amplitude is small and affects the Q value test results, the hemispherical resonator excitation with double amplitude can be increased by connecting two opposite electrode positions in series. If the excitation amplitude is still insufficient, the excitation amplitude can be further increased by connecting four electrode positions in series at 90° to each other.

[0073] In addition, the device can continuously vibrate to verify the durability of the membrane layer (such as whether the membrane layer will fall off after long-term vibration) or the vibrator itself (such as whether the vibrator still has microcracks, whether long-term vibration will cause breakage, and how much voltage or amplitude the vibrator can withstand).

[0074] This device uses a customized PCB board as the excitation oscillation source, which is low-cost, easy to mass-produce, and convenient to replace.

[0075] The PCB electrode excitation device described in the present invention can realize single control or multiple simultaneous controls, and realize the synchronization of the vibrator's life test and conventional test, so that it has the functions of two types of machines (quality inspection and life test), saving the cost of vacuum tanks and vacuum equipment caused by multiple process equipment.

[0076] The embodiments described above are merely preferred embodiments of the present invention. The phrases "in one embodiment," "in another embodiment," "in yet another embodiment," or "in other embodiments" used in this specification may refer to one or more of the same or different embodiments of the present disclosure. Any common changes and substitutions made by those skilled in the art within the scope of the present invention are intended to be encompassed within the scope of protection of the present invention.

Claims

1. A film-coated resonator excitation detection structure, characterized in that: The invention comprises a vacuum tank (9) and an excitation detection unit located in the vacuum tank (9), wherein the excitation detection unit comprises a PCB (2), a fixing seat (3) and a clamping mechanism, wherein the fixing seat (3) is installed at the bottom of the vacuum tank (9), the PCB (2) is installed on the top surface of the fixing seat (3), and a plurality of electrodes (23) are fixed thereon, a first through hole (21) is provided at the center of the PCB (2), and the clamping mechanism is installed on the fixing seat (3), and the top of the clamping mechanism passes through the first through hole (21) and is used to clamp the inner anchor column of the film-coated resonator (1), so that a set gap exists between the lip edge of the film-coated resonator (1) and the PCB (2).

2. The film-coated resonator excitation detection structure according to claim 1, characterized in that: The excitation detection unit further comprises a base (6), which is mounted on the bottom of the vacuum tank (9), a fixing seat (3) is arranged on the top surface of the base (6), the center of the top surface of the base (6) protrudes upward to form a boss (61), a second through hole (31) is provided on the fixing seat (3) and matches the boss (61), the first through hole (21) and the second through hole (31) are connected to form a channel, the boss (61) is clamped in the channel, and the top of the boss (61) extends out of the channel, a receiving groove (62) is provided on the top surface of the boss (61), and a clamping mechanism is placed in the receiving groove (62).

3. The film-coated resonator excitation detection structure according to claim 2, characterized in that: The clamping mechanism comprises a clamp (5) and a core shaft (4); the clamp (5) comprises a clamping portion (51) and a connecting portion (52) connected to the lower end of the clamping portion (51); the clamp (5) is located in the receiving groove (62); and the connecting portion (52) is detachably connected to the lower portion of the groove wall of the receiving groove (62); The top surface of the clamping portion (51) is provided with a positioning hole (53) that cooperates with the core shaft (4), and the core shaft (4) is placed in the positioning hole (53). The side wall of the clamping portion (51) is circumferentially spaced with a plurality of first side grooves (54) that are connected to the positioning hole (53). The first side grooves (54) extend upward to penetrate the top surface of the clamping portion (51), so that the clamping portion (51) forms a structure composed of a plurality of clamping blocks (55) connected at the bottom. The outer wall surface of the clamping portion (51) forms a first conical surface (56) that is larger at the top and smaller at the bottom, and the upper part of the groove wall of the accommodating groove (62) forms a second conical surface (63) that matches the first conical surface (56). The clamping portion (51) is clamped in the accommodating groove (62) through the cooperation of the first conical surface (56) and the second conical surface (63), so that the multiple clamping blocks (55) enclose the positioning hole (53) and hold the core shaft (4), and the top surface of the core shaft (4) and the top side wall surface of the positioning hole (53) enclose a clamping space at the lower part of the inner anchor column.

4. The film-coated resonator excitation detection structure according to claim 3, characterized in that: A second side groove (57) communicating with the positioning hole (53) is formed on the surface of the clamping block (55), and the second side groove (57) extends downward to penetrate the bottom surface of the clamping portion (51).

5. The film-coated resonator excitation detection structure according to claim 3, characterized in that: A threaded portion (41) is provided at the bottom of the core shaft (4), and the threaded portion (41) passes through the bottom surface of the positioning hole (53) and is threadedly connected to the connecting portion (52).

6. The film-coated resonator excitation detection structure according to claim 3, characterized in that: The connecting portion (52) is threadedly connected to the lower portion of the accommodating groove (62).

7. The film-coated resonator excitation detection structure according to any one of claims 2 to 6, characterized in that: The fixing seat (3) and the base (6) are made of non-conductive material.

8. A Q value test system for a film-coated resonator, characterized in that: The invention comprises a high-voltage power supply (400), an excitation signal generator (300), a vacuum pump (500), a control system (200), and an excitation detection structure (100) according to any one of claims 1 to 7, wherein the high-voltage power supply (400), the excitation signal generator (300), the vacuum pump (500) and the control system (200) are located outside a vacuum tank (9), the leads of the high-voltage power supply (400) are sealed and passed through the vacuum tank (9) and are electrically connected to the inner anchor column of the coated resonator (1); the leads of the excitation signal generator (300) are passed through the vacuum tank (9) and are electrically connected to the electrodes (23) on the PCB (2), and the leads of the control system (200) are passed through the vacuum tank (9) and are electrically connected to the electrodes (23) on the PCB (2). The vacuum pump (500) is in communication with the vacuum tank (9), and the high-voltage power supply (400), the vacuum pump (500) and the excitation signal generator (300) are all electrically connected to the control system (200). The control system (200) is used to control the vacuum pump (500) to evacuate the vacuum tank (9). The control system (200) is also used to control the high-voltage power supply (400) to be connected to the inner anchor column of the film-coated resonator (1), so that the high-voltage power supply (400) generates a high-voltage electric field between the film-coated resonator (1) and the electrode (23). The control system (200) is further used to control the excitation signal generator (300) to be connected to at least one electrode (23), so that the excitation signal generator (300) applies an excitation signal to the electrode (23) connected thereto, thereby exciting the hemispherical resonant gyroscope to generate vibration. The control system (200) is further used to control one of the electrodes (23) to be turned on, so that the turned-on electrode (23) detects the Q value of the corresponding position between the lip edge of the coated resonator (1) and the electrode (23), and receives the Q value signal returned by the electrode (23).

9. The Q-value test system for a film-coated resonator according to claim 8, characterized in that: A lead wire through hole (64) is provided on the edge of the base (6), a wire through hole (32) corresponding to the lead wire through hole (64) is provided on the bottom surface of the fixing seat (3), and a wire through groove (33) communicating with the wire through hole (32) is provided on the side wall of the fixing seat (3). The lead wire of the high-voltage power supply (400) is introduced into the vacuum tank (9) from the bottom of the vacuum tank (9), passes through the lead wire through hole (64), the wire hole (32) and the wire groove (33), and is electrically connected to the inner anchor column of the film-coated resonator (1); Leads of the excitation signal generator (300) and the control system (200) are introduced into the vacuum tank (9) from the bottom of the vacuum tank (9), and then sequentially pass through the lead through hole (64), the wire hole (32) and the wire groove (33), and finally are electrically connected to the electrode (23) on the top surface of the PCB board (2).

10. The Q-value test system for a film-coated resonator according to claim 9, characterized in that: A plurality of pins (22) are provided on the edge of the top surface of the PCB board (2), the plurality of pins (22) correspond one-to-one to the plurality of electrodes (23), the pins (22) are electrically connected to the corresponding electrodes (23), and the leads of the excitation signal generator (300) and the control system (200) are electrically connected to the corresponding electrodes (23) through the pins (22).

Images