Thermal insulation cylinder soft felt tightness detection device and auxiliary tool

Abstract

The utility model provides a heat preservation cylinder soft felt tightness detection device and an auxiliary tool, and relates to the field of monocrystalline silicon production. The auxiliary tool for detecting the tightness of the soft felt of the heat preservation cylinder comprises a base, the middle of which is provided with a placement table and extends outwards in different directions by taking the placement table as the center to form a plurality of extension plates; the multiple sliding seats are arranged on the multiple extension plates correspondingly, and sliding blocks are arranged on the sliding seats in a sliding mode; the plurality of connecting pieces are respectively arranged along the plurality of extension plates and are used for laying a conveying belt; wherein the placing table is used for placing the signal converter; the sliding block can slide and be fixed on the sliding seat to fix the signal converter; the outward end of the connecting piece is provided with a test plate, and the test plate can be provided with a sensing element between the heat preservation cylinder and the soft felt; the detection device comprises the auxiliary tool, a thin film pressure sensor and a display device, the tightness of the soft felt is quantitatively determined, and the stability of the heat preservation effect of the heat preservation cylinder is improved.

Description

Technical Field

[0001] The utility model relates to the field of single crystal silicon production, in particular to a device for detecting the tightness of a soft felt of an insulation tube and an auxiliary tooling. Background Art

[0002] During the Czochralski method of growing single silicon crystals, the success and quality of the growth are determined by the temperature distribution of the thermal field. A thermal field with a suitable temperature distribution not only ensures smooth growth of silicon single crystals, but also high quality. Single crystal furnaces are commonly used in Czochralski production. During the single crystal pulling process, the insulation barrel plays a crucial role, maintaining the furnace temperature and ensuring the stable thermal field required for crystal growth. Three types of graphite insulation barrels (upper, middle, and lower) are typically used in production. These barrels are wrapped in multiple layers of graphite felt to insulate the thermal field during the single crystal pulling process.

[0003] During the use of the insulation tube, the tightness (pressure) of the tightly wrapped soft felt will affect the insulation effect. However, in the existing technology, it is inconvenient to monitor the pressure in the tightly wrapped soft felt layer and there is a lack of means to detect the tightness of the soft felt. As a result, there are differences in the insulation effect during the crystal pulling process of the single crystal furnace, which not only affects production stability, but also increases the load on the heating device, resulting in additional power consumption and energy waste. Utility Model Content

[0004] In order to solve the problem that the prior art lacks a means to detect the tightness of the soft felt, which leads to differences in the thermal insulation effect during the crystal pulling process of a single crystal furnace, affecting the production stability and increasing the load of the heating device, the utility model provides a thermal insulation tube soft felt tightness detection device and auxiliary tooling that can quantitatively determine the tightness of the soft felt and maintain a stable thermal insulation effect of the thermal insulation tube.

[0005] The technical solution adopted in this utility model is:

[0006] An auxiliary tool for detecting the tightness of soft felt of an insulation tube, comprising:

[0007] The base has a placement platform at its center and a plurality of extension plates extending outward in different directions with the placement platform as the center;

[0008] A plurality of slide seats are respectively arranged on the plurality of extension plates, and a slider is slidably arranged on the slide seats; and

[0009] a plurality of connecting members, respectively provided along the plurality of extension plates, for laying a transmission belt of the thin film pressure sensor;

[0010] Among them, the placement table is used to place the signal converter of the thin film pressure sensor; the slider can slide and be fixed on the slide seat to fix the signal converter; the outward end of the connecting piece is provided with a test board, and the test board can set the sensing element of the thin film pressure sensor between the insulation tube and the soft felt.

[0011] Furthermore, the number of the extension plates is three, and the angle between two adjacent extension plates is 120°.

[0012] Furthermore, a slideway is provided inside the slide seat, the slideway is parallel to the extension plate, and the inward end of the connecting member is passed through the slideway.

[0013] Furthermore, a second sliding groove is provided on the sliding block, two fixing bolts are threadedly provided on the connecting piece, and the second sliding groove is slidably sleeved on the two fixing bolts.

[0014] Furthermore, the inward end of the connecting member is slidably arranged in the slideway; and the outward extending end of the extension plate is provided with a notch, and the outward end of the connecting member is slidably arranged in the notch.

[0015] Furthermore, a nut seat is provided above the slide seat, a clamping bolt is provided in the nut seat, and the clamping bolt can be adjusted to press against the connecting piece.

[0016] Furthermore, side guard plates are provided on both sides of the extension plate, and third sliding grooves are formed between the side guard plates and the extension plate on both sides; and sliding plates are provided on both sides below the connecting member, and the sliding plates on both sides are slidably provided in the third sliding grooves on both sides.

[0017] Furthermore, groove-shaped hooks are provided on both sides of the sliding block, and the hooks are sleeved on both sides of the exterior of the sliding seat.

[0018] Furthermore, an abutment head is provided at one end of the sliding block facing the placement table.

[0019] A device for detecting the tightness of a soft felt of an insulation tube, comprising:

[0020] The auxiliary tool for testing the tightness of the soft felt of the insulation tube as described above;

[0021] A thin film pressure sensor, wherein the signal converter thereof is placed on the placement table; the transmission belt thereof is arranged along the connecting member; and the sensing element thereof is arranged on the test board; and

[0022] The display device is connected to the signal converter and can display the pressure value detected by the thin film pressure sensor in real time.

[0023] The beneficial effects of the utility model are:

[0024] 1. The utility model provides a placement table on the base and a slider on the slide seat, so that the signal converter of the thin film pressure sensor can be conveniently fixed, and the transmission belt is fixed by providing a connecting piece to prevent the transmission belt from being pulled or squeezed. The sensing element of the membrane pressure sensor is then arranged between the graphite insulation tube and the soft felt in conjunction with the test plate to perform pressure detection, thereby realizing real-time quantitative determination of the tightness of the soft felt wrapped around the insulation tube, and facilitating timely adjustment by the operator, thereby solving the problem of lack of means for detecting the tightness of the soft felt in the prior art, resulting in differences in the insulation effect during the crystal pulling process of the single crystal furnace, which not only affects production stability but also increases the load on the heating device. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0026] Figure 1 A three-dimensional schematic diagram of an auxiliary tooling according to an embodiment of the present utility model;

[0027] Figure 2 for Figure 1 A magnified view of point A;

[0028] Figure 3 for Figure 1 Enlarged view of point B;

[0029] Figure 4 A top view of the auxiliary tooling according to an embodiment of the present utility model;

[0030] Figure 5 A top view of a slider according to an embodiment of the present invention;

[0031] Figure 6 A top view of a slide seat according to an embodiment of the present invention;

[0032] Figure 7 A top view of a connector according to an embodiment of the present invention;

[0033] Figure 8 This is a side view of a connecting piece according to an embodiment of the present invention.

[0034] Reference numerals: 100 - base, 120 - placement table, 140 - extension plate, 141 - notch, 142 - side guard plate, 143 - third slide slot;

[0035] 200-slide seat, 210-first slide groove, 220-nut seat, 222-tightening bolt, 230-slideway, 240-support member;

[0036] 300-slider, 310-butt joint, 320-second slide, 330-hook;

[0037] 400-connecting piece, 410-screw hole, 412-fixing bolt, 420-docking plate, 430-test plate, 440-sliding part, 442-sliding plate;

[0038] 500-Graphite insulation cylinder. DETAILED DESCRIPTION

[0039] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0040] The disclosure below provides many different embodiments or examples for realizing different structures of the present invention. In order to simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present invention.

[0041] The embodiments of the utility model are described in detail below with reference to the accompanying drawings.

[0042] Example 1

[0043] In the prior art, in order to maintain the appropriate tightness of the soft felt in the insulation tube and stabilize the thermal field, the only method usually used is to strengthen the fixing effect of the soft felt. However, the tightness of the soft felt can only be observed with the naked eye, making it difficult to quantify the tightness of the soft felt. In order to quantify the tightness of the soft felt so that it can be adjusted to the appropriate tightness and maintain the stable insulation effect of the insulation tube, this embodiment provides an auxiliary tool for detecting the tightness of the soft felt of the insulation tube. It is used to set a thin film pressure sensor between the outer wall of the insulation tube and the soft felt for pressure monitoring, thereby accurately and quantitatively determining the tightness of the wrapped soft felt, facilitating the operator to make timely adjustments and ensure a stable insulation effect. Please refer to Figures 1-8The insulation tube of this embodiment is a graphite insulation tube 500, and the soft felt is graphite soft felt. The auxiliary tooling for detecting the tightness of the insulation tube soft felt of this embodiment mainly includes: a base 100, a slide seat 200, a slider 300 and a connector 400, etc.

[0044] The base 100 is the basic component of the entire tooling, and other components are mainly installed around the base 100. Figure 1 、 Figure 4 As shown in , the base 100 is generally flat, with a circular placement platform 120 at its center. Three strip-shaped extension plates 140 extend outward from the placement platform 120, and a rectangular notch 141 is opened inward at one end of the extension plate 140. The placement platform 120 is used to place the signal converter of the thin film pressure sensor; the extension plate 140 is used to set the slide 200, the connector 400 and other components along the radial direction of the graphite insulation cylinder 500. The angle between two adjacent extension plates 140 is 120 degrees, providing a stable structure for fixing the thin film pressure sensor; the notch 141 allows the connector 400 to extend from the top of the base 100 into the bottom of the base 100, thereby setting the sensing element of the thin film pressure sensor between the graphite insulation cylinder 500 and the soft felt.

[0045] The three slides 200 are respectively arranged on the three extension plates 140 and are located inwardly near the end of the placement table 120. The main body of the slide 200 is roughly rectangular, with two support members 240 arranged below it. A first slide groove 210 is opened above it, and a slide 230 is arranged inside, which is connected to the first slide groove 210. The slide groove 230 is arranged parallel to the extension plate 140 and is used to set the inward end of the connecting member 400. The first slide groove 210 extends from the end of the slide 200 inwardly toward the center of the tooling to the other end of the slide 200, but does not extend to the other end of the slide 200. The first slide groove 210 is used to slide the slider 300 above the connecting member 400.

[0046] In this embodiment, a slider 300 is slidably mounted within the first slot 210 of each slide 200. The upper portion of the slider 300 is generally rectangular and positioned above the first slot 210. The upper and lower portions of the slider 300 are generally cuboid and slidably embedded within the first slot 210. Furthermore, an abutment 310 is provided at the upper end of the slider 300 facing the center platform 120. The abutment 310 is generally cylindrical and has a rounded end facing the center of the tooling. This abutment 310 is used to abut the signal converter of the thin film pressure sensor placed on the platform 120, securing the converter in place through three-way abutment.

[0047] Three connectors 400 are respectively arranged along the three extension plates 140. The connectors 400 are in the shape of long strips and are mainly used to lay the transmission belt of the thin film pressure sensor, thereby connecting the signal converter of the thin film pressure sensor with the sensing element, and protecting the transmission belt from pulling, collision and squeezing. Among them, one end of the connector 400 is inserted into the opening on the side of the slide 230 facing away from the center of the tooling. When the transmission belt is set, it extends from this end and connects with the signal converter placed on the workpiece middle placement table 120. The other end of the connector 400 extends outward in a direction away from the center of the tooling, extending to above the notch 141 at the outward end of the extension plate 140. An L-shaped docking plate 420 is provided at the outward end of the connector 400. The upper part of the docking plate 420 is perpendicular to the extension plate 140 and is arranged through the notch 141. The lower part of the docking plate 420 is parallel to the extension plate 140 and is provided with a docking hole. Test plate 430 is connected to the lower portion of docking plate 420. Test plate 430 is also L-shaped, with its upper portion parallel to extension plate 140 and provided with docking holes. Bolts and nuts connect these holes to the lower portion of docking plate 420. The lower portion of test plate 430 is perpendicular to extension plate 140 and is used to secure the sensing element of the thin film pressure sensor. During installation, the conveyor belt extends from the lower portion of docking plate 420 and connects to the sensing element. To test pressure, the lower portion of test plate 430 is placed against the outer wall of graphite insulation tube 500. After the graphite insulation tube 500 is wrapped with felt, the sensing element can then collect pressure signals.

[0048] A specific working method of this embodiment is:

[0049] First, before wrapping the graphite felt, the sensing elements of the three groups of thin film pressure sensors are fixed on the test plate 430; then, the transmission belt is fixed along the connecting piece 400, and the signal converter is placed on the placement table 120; then, the position of the slider 300 on the slide 200 is adjusted so that the abutment 310 abuts and fixes the signal converter; next, the base 100 of the tooling is placed above the graphite insulation tube 500 so that the test plate 430 is located outside the graphite insulation tube 500; then, starting from the sensing element, the graphite felt begins to wrap the graphite insulation tube 500 and the test plate 430 layer by layer; finally, the three groups of clamps are respectively put on the upper, middle and lower parts of the wrapped graphite felt, and tightened with a pistol drill. During the process of wrapping and tightening the felt, the force on the thin film pressure sensor is converted through signal transmission and connected to the computer to display the real-time pressure of the three groups of thin film pressure sensors, so that the wrapping and tightening degree can be adjusted in real time according to the displayed parameters, so that the soft felt can maintain a suitable tightness.

[0050] In summary, in this embodiment, the auxiliary tooling for detecting the tightness of the soft felt of the insulation tube is provided by setting the placement table 120 of the base 100 and the slider 300 on the slide 200, so that the signal converter of the thin film pressure sensor can be conveniently fixed, and the transmission belt is fixed by setting the connecting piece 400 to prevent the transmission belt from being pulled and squeezed, and then the sensing element of the membrane pressure sensor is set between the graphite insulation tube 500 and the soft felt in conjunction with the test plate 430 to perform pressure detection, thereby realizing real-time quantitative determination of the tightness of the soft felt wrapped in the insulation tube, and facilitating timely adjustment by the operator, thereby solving the problem that there is a lack of means for detecting the tightness of the soft felt in the prior art, resulting in differences in the insulation effect during the crystal pulling process of the single crystal furnace, which not only affects the production stability but also increases the load of the heating device.

[0051] In this embodiment, a second slot 320 is defined in the middle of the slider 300, and two threaded holes 410 are provided through the connector 400. Two fixing bolts 412 are threadedly mounted within the two screw holes 410, and the fixing bolts 412 are positioned within the first slot 210. The connecting line of the two fixing bolts 412 is parallel to the extension plate 140, and the second slot 320 is slidably mounted above the stems of the two fixing bolts 412. The heads of the two fixing bolts 412 are positioned above the second slot 320, ensuring that the fixing bolts 412 do not interfere with the sliding movement of the slider 300 along the extension plate 140. To secure the slider 300, the two fixing bolts 412 are rotated and tightened. The heads of the fixing bolts 412 engage the slider 300, securing it in the desired position and thereby stably contacting the signal converter in the middle of the workpiece. The lower ends of the stems of the fixing bolts 412 contact the conveyor belt mounted on the lower surface of the connector 400, thereby maintaining a stable position.

[0052] In addition, in this embodiment, two groove-shaped hooks 330 are provided on both sides of the slider 300. The side plates above the groove-shaped hooks 330 are connected to the upper surface of the slider 300, and the bottom plate and the side plates below are mounted on both sides of the outside of the slide 200, thereby preventing the slider 300 from detaching from the slide 200 or offsetting, thereby enhancing the stability of the tooling.

[0053] In this embodiment, longer side guard plates 142 are provided on both sides of the extension plate 140. The side guard plates 142 have an L-shaped cross-section. The portions of the side guard plates 142 perpendicular to the extension plate 140 are tightly connected to both sides of the extension plate 140. The portions of the side guard plates 142 parallel to the extension plate 140 are provided above the extension plate 140 and spaced apart from the extension plate 140, thereby forming third sliding grooves 143 between the side guard plates 142 on both sides and the extension plate 140. Furthermore, a sliding portion 440 is provided below the connector 400. The sliding portion 440 is located near one end of the test plate 430 and is provided on both sides of the sliding portion 440 with sliding plates 442 slidably disposed within the third sliding grooves 143 on both sides. During use, the sliding plate 442 slides in the third slide groove 143, and the outward end of the connecting member 400 can slide in the groove 141, while the inward end of the connecting member 400 can slide in the slide 230, so that the distance between the test plate 430 at the outward end of the connecting member 400 and the center of the tooling can be adjusted, which is convenient for adapting to the needs of insulation tubes of different sizes. When it is necessary to test the tightness of the soft felt on insulation tubes of different sizes, there is no need to repeatedly disassemble and assemble the film pressure sensor, and only the sliding adjustment of the connecting member 400 is required.

[0054] At the same time, in this embodiment, a cylindrical nut seat 220 is provided above the slide 200 and in the interval between the first slide groove 210 and the other end of the slide 200. The inward end of the nut seat 220 is connected to the slide 230, and the outward end of the nut seat 220 is threadedly provided with a clamping bolt 222. When it is necessary to fix the connecting piece 400, the clamping bolt 222 can be adjusted so that its lower end presses against the connecting piece 400 to fix it in the required position.

[0055] It should also be pointed out that in one or more other embodiments, a plurality of extension plates 140, such as 4, 5 or 6, may be provided, and a corresponding number of slide seats 200, sliders 300 and connectors 400 may be provided in conjunction with the provision of the thin film pressure sensor.

[0056] Example 2

[0057] The second embodiment is further provided based on the above embodiment. The second embodiment provides a device for detecting the tightness of a soft felt in an insulation tube. The device mainly includes the auxiliary tool for detecting the tightness of the soft felt in the above embodiment, a film pressure sensor, and a display device.

[0058] The thin film pressure sensor in the second embodiment primarily consists of a signal converter, a transmission tape, and a sensing element. The signal converter is placed on a placement table 120 of the auxiliary tooling. The transmission tape is laid along the lower surface of the auxiliary tooling's connector 400. The sensing element is mounted on the aforementioned test board 430 of the auxiliary tooling.

[0059] The display device is a computer, which is connected to the signal converter through a circuit signal and can display the pressure value detected by the thin film pressure sensor in real time.

[0060] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely preferred examples of the present invention and are not intended to limit the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and improvements fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. An auxiliary tool for detecting the tightness of soft felt of an insulation tube, characterized in that: Include: A base (100), wherein the center portion is a placement platform (120), and a plurality of extension plates (140) are formed by extending outward in different directions with the placement platform (120) as the center; A plurality of slide seats (200) are respectively arranged on the plurality of extension plates (140), and a slider (300) is slidably arranged on the slide seats (200); and A plurality of connecting members (400) are respectively arranged along the plurality of extension plates (140) and are used for laying a transmission belt of a thin film pressure sensor; The placement table (120) is used to place the signal converter of the thin film pressure sensor; the slider (300) can slide and be fixed on the slide seat (200) to fix the signal converter; the connecting member (400) is provided with a test plate (430) at one end facing outward, and the test plate (430) can be used to set the sensing element of the thin film pressure sensor between the heat preservation tube and the soft felt.

2. The auxiliary tool for detecting tightness of the soft felt of the thermal insulation tube according to claim 1, characterized in that: The number of the extension plates (140) is three, and the angle between two adjacent extension plates (140) is 120°.

3. The auxiliary tool for detecting tightness of the soft felt of the thermal insulation tube according to claim 1, characterized in that: A slideway (230) is provided inside the slide seat (200), the slideway (230) is parallel to the extension plate (140), and the inward end of the connecting member (400) is passed through the slideway (230).

4. The auxiliary tool for detecting tightness of the soft felt of the thermal insulation tube according to claim 3, characterized in that: The slider (300) is provided with a second sliding groove (320), and the connecting member (400) is threadedly provided with two fixing bolts (412), and the second sliding groove (320) is slidably sleeved on the two fixing bolts (412).

5. The auxiliary tool for detecting tightness of the soft felt of the thermal insulation tube according to claim 3, characterized in that: The connecting member (400) is slidably disposed in the slideway (230) at one end facing inward; and a notch (141) is provided at one end of the extension plate (140) extending outward, and the connecting member (400) is slidably disposed in the notch (141) at one end facing outward.

6. The auxiliary tool for detecting tightness of the soft felt of the thermal insulation tube according to claim 5, characterized in that: A nut seat (220) is provided above the slide seat (200), and a clamping bolt (222) is provided in the nut seat (220). The clamping bolt (222) can be adjusted to press against the connecting member (400).

7. The auxiliary tool for detecting tightness of the soft felt of the thermal insulation tube according to claim 5, characterized in that: Side guard plates (142) are provided on both sides of the extension plate (140), and third sliding grooves (143) are formed between the side guard plates (142) and the extension plate (140) on both sides; and sliding plates (442) are provided on both sides below the connecting member (400), and the sliding plates (442) on both sides are slidably provided in the third sliding grooves (143) on both sides.

8. The auxiliary tool for detecting tightness of the soft felt of the thermal insulation tube according to claim 1, characterized in that: Groove-shaped hooks (330) are provided on both sides of the slider (300), and the hooks (330) are sleeved on both sides of the exterior of the slide seat (200).

9. The auxiliary tool for detecting tightness of the soft felt of the thermal insulation tube according to claim 1, characterized in that: An abutment joint (310) is provided at one end of the sliding block (300) facing the placement platform (120).

10. A device for detecting the tightness of a soft felt for an insulation tube, characterized in that: Include: The auxiliary tool for detecting tightness of the soft felt of the insulation tube according to any one of claims 1 to 9; A thin film pressure sensor, whose signal converter is placed on the placement platform (120); Its transmission belt is arranged along the connecting member (400); The sensing element is arranged on the test board (430); and The display device is connected to the signal converter and can display the pressure value detected by the thin film pressure sensor in real time.

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