Vacuum electrode and vacuum device

Abstract

The utility model discloses a vacuum electrode and a vacuum device.The vacuum electrode comprises a shell, an electrode core, an insulating sleeve and a sealing element, the shell comprises a first shell and a second shell, the first shell comprises a first opening and a second opening, the second shell comprises a third opening and a fourth opening, the second opening is connected with the third opening, and the electrode core is connected with the insulating sleeve; the first shell and the second shell form an accommodating cavity; the electrode core comprises a feeder line and a first electrode plug, the feeder line comprises a transmission end and a fixed end, the first electrode plug comprises a fixed part and a transmission part, the fixed part of the first electrode plug is arranged in the containing cavity, the transmission part of the first electrode plug penetrates out of the fourth opening, and the fixed end of the feeder line is fixedly connected with the fixed part of the first electrode plug. The transmission end of the feeder line penetrates out of the first opening; the insulating sleeve sleeves the peripheral side of the feeder line and is located in the accommodating cavity; and the first electrode plug is hermetically connected with the shell through a sealing piece. The vacuum electrode and the vacuum device provided by the embodiment of the utility model are simple in production, assembly and maintenance process and good in sealing performance and reliability.

Description

Technical Field

[0001] The present application relates to the field of vacuum technology, and in particular to a vacuum electrode and a vacuum device. Background Art

[0002] With the rapid development of vacuum system technology, vacuum electrodes are now widely used in scientific research, semiconductor manufacturing, laser technology, aerospace, and some medical devices. They conduct electrical energy or signals between the external atmosphere and a vacuum environment through an isolation barrier (such as the vacuum chamber housing of a vacuum device). In biological mass spectrometry, in particular, vacuum electrodes can be used to conduct electrical energy or signals between the external atmosphere and a vacuum environment to control the ion source, detector, and other components of the mass spectrometer, ensuring accurate biomolecule analysis in a high vacuum environment. As a key component of a vacuum system, the vacuum electrode has a significant impact on various performance indicators of the vacuum system.

[0003] However, the production and manufacturing of existing vacuum electrodes often adopts relatively complex processes, or although the processes are simple, the insulation, durability, ease of use, sealing or heat dissipation effects are not ideal. They are not well adapted to the needs of strong sealing in high stress and high vacuum environments, and their scalability is not strong. Utility Model Content

[0004] In view of this, the present application provides a vacuum electrode and a vacuum device, which have simple process, good insulation, strong sealing, durability and reliability, and good scalability, and can pass through an isolation barrier (such as the vacuum chamber shell of a vacuum system) to conduct electrical energy or electrical signals between the external atmospheric environment and the vacuum environment.

[0005] In a first aspect, the present application provides a vacuum electrode, comprising:

[0006] The housing includes a first housing and a second housing, the first housing includes a first opening and a second opening, the second housing includes a third opening and a fourth opening, the second opening is connected to the third opening, and the first housing and the second housing form a receiving chamber;

[0007] The electrode core includes a first electrode plug and a feeder, the feeder includes a transmission end and a fixed end, the first electrode plug includes a fixed portion and a transmission portion, the fixed portion of the first electrode plug is disposed in the accommodating cavity, the transmission portion of the first electrode plug passes through the fourth opening, the fixed end of the feeder is fixedly connected to the fixed portion of the first electrode plug, and the transmission end of the feeder passes through the first opening;

[0008] An insulating sleeve is provided on the peripheral side of the feeder and is located in the accommodating cavity;

[0009] The first electrode plug is sealed and connected to the housing via the sealing member.

[0010] In some embodiments, the second opening and the third opening are connected by threaded connection, interference fit, welding and / or bonding.

[0011] In some embodiments, a gap is formed between the electrode core and the insulating sleeve; and / or a gap is formed between the first shell and the insulating sleeve.

[0012] In some embodiments, the fixing portion of the first electrode plug includes a boss, and the boss is used to place the sealing member.

[0013] In some embodiments, the fixing portion of the first electrode plug is connected to the fixing end of the feeder by means of threads, pins and / or welding.

[0014] In some embodiments, the vacuum electrode further comprises a second electrode plug.

[0015] In some embodiments, the second electrode plug is connected to the transmission end of the feeder by means of threads, pins and / or welding.

[0016] In some embodiments, the sealing member includes a gasket, a sealant, an adhesive, a filler, and / or a sealing ring.

[0017] In a second aspect, the present application further provides a vacuum device, comprising a vacuum chamber housing and any one of the vacuum electrodes provided in the embodiments of the present application, wherein the vacuum chamber housing is sealed and connected to the electrode.

[0018] The present application discloses a vacuum electrode and vacuum device, comprising: a shell, an electrode core, an insulating sleeve, and a sealing member. The shell comprises a first shell and a second shell, the first shell comprising a first opening and a second opening, the second shell comprising a third opening and a fourth opening, the second opening being connected to the third opening, and the first shell and the second shell forming a receiving chamber. The electrode core comprises a feeder and a first electrode plug, the feeder comprising a transmission end and a fixed end, the first electrode plug comprising a fixed portion and a transmission portion, the fixed portion of the first electrode plug being disposed within the receiving chamber, the transmission portion of the first electrode plug extending through the fourth opening, the fixed end of the feeder being fixedly connected to the fixed portion of the first electrode plug, and the transmission end of the feeder extending through the first opening. The insulating sleeve is disposed around the feeder and located within the receiving chamber. The first electrode plug is sealed to the shell via a sealing member. The vacuum electrode and vacuum device provided by the embodiments of the present application have the advantages of simple process, good insulation, strong sealing, durability and reliability, strong scalability, and easy assembly and disassembly. They can conduct electrical energy or electrical signals between an external atmospheric environment and a vacuum environment through an isolation barrier. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained from these drawings without any creative work.

[0020] Figure 1 This is a schematic structural diagram of an embodiment of the vacuum electrode proposed in this application;

[0021] Figure 2 This is an exploded schematic diagram of an embodiment of the vacuum electrode proposed in this application;

[0022] Figure 3 This is an exploded schematic diagram of an embodiment of the vacuum electrode proposed in this application;

[0023] Figure 4 This is a schematic structural diagram of an embodiment of the vacuum electrode proposed in this application;

[0024] Figure 5a This is a schematic diagram of the structure of the vacuum electrode housing proposed in this application;

[0025] Figure 5b for Figure 5a A partial cross-sectional schematic diagram of the structure shown along direction BB;

[0026] Figure 6a This is a schematic structural diagram of an embodiment of the vacuum electrode proposed in this application;

[0027] Figure 6b for Figure 6a A partial cross-sectional schematic diagram of the structure shown along the AA direction;

[0028] Figure 7a This is a schematic structural diagram of a local component of the vacuum electrode proposed in this application from a first angle;

[0029] Figure 7b This is a schematic structural diagram of a partial component of the vacuum electrode proposed in this application from a second angle;

[0030] Figure 8 This is a partial cross-sectional structural diagram of an embodiment of the vacuum electrode proposed in this application;

[0031] Figure 9 This is a partial cross-sectional structural diagram of an embodiment of the vacuum electrode proposed in this application;

[0032] Figure 10 This is a partial cross-sectional structural diagram of an embodiment of the vacuum electrode proposed in this application;

[0033] Figure 11This is a schematic diagram of an application scenario of an embodiment of the vacuum electrode proposed in this application.

[0034] Description of reference numerals:

[0035] 1. Vacuum electrode; 2. Vacuum device; 10. Shell; 20. Electrode core; 30. Insulating sleeve; 40. Seal; 50. Vacuum chamber shell; 60. Vacuum chamber cavity; 11. First shell; 12. Second shell; 13. Accommodating cavity; 14. Protrusion; 21. Feeder; 22. First electrode plug; 23. Second electrode plug; 31. Gap; 111. First opening; 112. Second opening; 121. Third opening; 122. Fourth opening; 211. Transmission end; 212. Fixed end; 221. Fixed portion; 222. Transmission portion; 223. Boss; 311. First gap; 312. Second gap. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0037] It should be understood that all directional indications in the embodiments of the present application (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0038] It should also be understood that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element through an intervening element.

[0039] The terms used in this specification are for the purpose of describing specific embodiments only and are not intended to limit this application. For example, the terms "first," "second," and so on are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, the term "first" or "second" may explicitly or implicitly include at least one of the features.

[0040] It should be further understood that the term "and / or" used in this specification and the appended claims refers to and includes any and all possible combinations of one or more of the associated listed items.

[0041] In material manufacturing, mechanical manufacturing, biomass spectrometry and scientific instruments, vacuum devices have been widely used in a variety of application scenarios such as key semiconductor processes, surface science research, sample molecule transmission, precise experimental measurement, and space environment simulation to provide a pure space without interference from gas molecules, thereby preventing material oxidation, reducing pollution, and improving accuracy and reliability. As one of the core components of a vacuum device, the vacuum electrode conducts electrical energy or electrical signals between the external atmospheric environment and the vacuum environment through an isolation barrier (such as the vacuum chamber shell of the vacuum device). Currently, the commonly used vacuum electrodes include multi-needle vacuum electrodes and single-needle vacuum electrodes.

[0042] However, these existing vacuum electrodes often use ceramic sintering technology to seal ceramics to metals. This process is complex and sophisticated, with high manufacturing costs. They are easily damaged by external impacts and difficult to repair. Once re-purchase and customization are required, it is easy to cause long delays, reducing experimental or production efficiency. In some special application scenarios such as special-shaped vacuum chambers, complex particle deflection, and non-standard equipment customization, because these vacuum electrodes use ceramic sintering technology, they are less scalable and modifiable. It is difficult to independently change the shape, length, and size of the electrode core. They cannot be independently replaced to achieve expansion and improvements such as extension and bending of the electrode core. Re-customization is often required, reducing work efficiency.

[0043] Based on this, the present application provides a vacuum electrode and a vacuum device, aiming to provide a solution with simpler process, good scalability, easy assembly, durability and ease of use, and good insulation and sealing performance, thereby realizing the conduction of electrical energy or electrical signals between the external atmospheric environment and the vacuum environment through the isolation barrier.

[0044] See also Figures 1 to 4 ,as well as Figure 5a and Figure 5b The embodiment of the present application provides a vacuum electrode 1, which may include at least: a shell 10, an electrode core 20, an insulating sleeve 30 and a sealing member 40.

[0045] Among them, the shell 10 includes at least a first shell 11 and a second shell 12, the first shell 11 includes at least a first opening 111 and a second opening 112, the second shell 12 includes at least a third opening 121 and a fourth opening 122, the second opening 112 can be connected to the third opening 121, and the first shell 11 and the second shell 12 can form a accommodating cavity 13.

[0046] Furthermore, the electrode core 20 may include at least a feeder 21 and a first electrode plug 22, the feeder 21 includes at least a transmission end 211 and a fixed end 212, the first electrode plug 22 includes at least a fixed portion 221 and a transmission portion 222, the fixed portion 221 of the first electrode plug 22 may be disposed in the accommodating cavity 13, the transmission portion 222 of the first electrode plug 22 may pass through the fourth opening 122, the fixed end 212 of the feeder 21 may be fixedly connected to the fixed portion 221 of the first electrode plug 22, and the transmission end 211 of the feeder 21 may pass through the first opening 111.

[0047] Furthermore, the insulating sleeve 30 can be sleeved around the feeder 21 and located in the accommodating cavity 13 .

[0048] Furthermore, the first electrode plug 22 may be sealedly connected to the housing 10 via a sealing member 40 .

[0049] In some embodiments, the connection between the first electrode plug 22 and the feeder 21 may further include a pin connection, a welding connection, and / or a detachable connection, such as a threaded connection.

[0050] It should be noted that, through the detachable connection between the first electrode plug 22 and the feeder 21 , the electrode core 20 can be stored in parts during transportation, reducing the probability of damage to the equipment due to external impact, and maintaining good performance after reassembly.

[0051] In some embodiments, the fixing portion 221 of the first electrode plug 22 and the fixing end 212 of the feed line 21 may be connected by screw threads, pins, and / or welding.

[0052] It should be noted that the fixing portion 221 of the first electrode plug 22 is connected to the fixing end 212 of the feeder 21 via pins and / or welding, which can reduce contact resistance and improve the efficiency of energy or signal conduction of the vacuum electrode 1 .

[0053] In some embodiments, the material of the housing 10 , the first housing 11 , and the second housing 12 may include plastic and / or ceramic.

[0054] In some embodiments, the insulating sleeve 30 may be made of glass and / or ceramic.

[0055] By selecting insulating materials such as ceramic as the material of the housing 10 , the first housing 11 , the second housing 12 and the insulating sleeve 30 , the insulating performance of the vacuum electrode 1 can be improved.

[0056] In some embodiments, the seal 40 includes a gasket, a sealant, an adhesive, a filler, and / or a sealing ring.

[0057] By selecting a gasket, a sealant, an adhesive, a filler and / or a sealing ring as the sealing member 40 , the insulation performance of the vacuum electrode 1 can be improved.

[0058] In some embodiments, the connection between the second opening 112 and the third opening 121 may include at least a detachable connection, such as a threaded connection, and may also include an interference fit, welding, and / or bonding.

[0059] The detachable connection can facilitate users to remove the electrode core 20, the insulating sleeve 30 and / or the seal 40. When the electrode core 20, the insulating sleeve 30 and / or the seal 40 are damaged by external impact, and / or the electrode core 20 needs to be replaced, expanded and improved, and / or the sealing performance and insulation performance of the vacuum electrode 1 are degraded and need to be repaired, the user can remove the electrode core 20, the insulating sleeve 30 and / or the seal 40 by disassembling the shell, thereby improving the usability and expandability of the vacuum electrode 1.

[0060] For example, if the user finds that the length of the electrode core 20 needs to be increased during experiments and processes, the user can remove the electrode core 20, the insulating sleeve 30, and the seal 40 by releasing the threaded connection between the first shell 11 and the second shell 12. After replacing the corresponding components such as the feeder 21, the new electrode core 20, the insulating sleeve 30, and the seal 40 are assembled into the shell 10, and then the first shell 11 and the second shell 12 are threaded together to enhance the sealing of the vacuum electrode 1.

[0061] It should be noted that the existing electrode core 20 and insulating sleeve 30 are often made using a ceramic sintering process and are non-detachable. As a result, when users need to extend or shorten the electrode core 20, they must re-purchase customized electrode core 20 and insulating sleeve 30, resulting in reduced work efficiency.

[0062] See also Figure 6a and Figure 6b In some embodiments, a gap 31 is formed between the electrode core 20 and the insulating sleeve 30; and / or a gap 31 is formed between the first shell 11 and the insulating sleeve 30, wherein the gap 31 may include at least a first gap 311 and / or a second gap 312.

[0063] It should be noted that the formation of the gap 31 can enhance the insulation performance of the vacuum electrode 1 , and can also facilitate users to disassemble and assemble the vacuum electrode 1 , thereby enhancing the usability and scalability of the vacuum electrode 1 .

[0064] See also Figure 7a and Figure 7b In some embodiments, the fixing portion 221 of the first electrode plug 22 may include a boss 223 , and the boss 223 is used to place the sealing member 40 .

[0065] The design of the boss 223 allows the seal 40 to be placed between the first housing 11 and the first electrode plug 22. Furthermore, the user can apply force to the first electrode plug 22 through the connection between the first housing 11 and the second housing 12, thereby compressing the seal 40 and achieving a better sealing effect. The fixing portion 221 of the first electrode plug 22 includes the boss 223, which is used to position the seal 40.

[0066] See also Figure 8 In some embodiments, the transmission end 211 of the feed line 21 may be formed into a cap shape or a teardrop shape, thereby improving the electric field distribution or increasing the energy transmission efficiency.

[0067] In some embodiments, see Figure 9 , Figure 9 The schematic diagram of the structure of an embodiment of a vacuum electrode 1 provided in an embodiment of the present application is shown. The electrode core 20 may further include a second electrode plug 23, wherein the second electrode plug 23 is detachably connected to the transmission end 211 of the feeder 21, and may specifically include a threaded or snap-fit ​​connection.

[0068] Furthermore, the second electrode plug 23 may also be connected to the transmission end 211 of the feeder 21 through a pin and / or welding.

[0069] See also Figure 10 and Figure 11 In some embodiments, the housing 10 may further include a protrusion 14 for sealingly connecting with the vacuum device 2 .

[0070] Furthermore, the vacuum device 2 may include at least a vacuum chamber housing 50 and a vacuum electrode 1 .

[0071] For example, the vacuum electrode 1 can be sealed and connected to the vacuum chamber housing 50 via the protrusion 14. The vacuum device 2 can utilize the vacuum electrode 1 to pass through an isolation barrier (such as the vacuum chamber housing 50 of the vacuum device 2) to conduct electrical energy or electrical signals between the external atmospheric environment and the vacuum environment (such as the vacuum chamber cavity 60).

[0072] Furthermore, the raised portion 14 may include a flange.

[0073] It should be noted that, through the design of the protrusion 14 , the user can fix the vacuum electrode 1 on the vacuum chamber housing 50 by using a pressing device, which simplifies the user's installation process and ensures and improves the sealing performance.

[0074] In some embodiments, the transmission portion 222 of the first electrode plug 22 can be electrically connected to a power source, a sensor, a controller, or other equipment, and the second electrode plug 23 can be electrically connected to a controller, an electromagnetic field generating device, a sensor, or other equipment.

[0075] Illustratively, by connecting the transmission portion 222 of the first electrode plug 22 with a wire, the vacuum electrode 1 can be used to feed or receive electrical energy or electrical signals to the vacuum chamber cavity 60, thereby achieving the technical effect of conducting electrical energy or electrical signals between the external atmospheric environment and the vacuum environment through the isolation barrier.

[0076] It should be understood that the structural diagrams shown in the accompanying drawings are merely illustrative and do not necessarily include all connections between structures. In the description of this application, unless otherwise specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0077] It should also be understood that the terms used in this specification are for the purpose of describing specific embodiments only and are not intended to limit the present application. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms unless the context clearly indicates otherwise.

[0078] It will also be understood that the term "and / or" used in this specification and the appended claims refers to and includes any and all possible combinations of one or more of the associated listed items.

[0079] It should also be understood that the term "and / or" used in this specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, including these combinations. It should be noted that, in this article, the terms "include", "comprise" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or system that includes a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also includes elements that are inherent to such process, method, article or system. In the absence of further restrictions, an element defined by the sentence "including a..." does not exclude the presence of other identical elements in the process, method, article or system that includes the element.

[0080] Those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples without mutual contradiction.

[0081] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present application, and such modifications or substitutions should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A vacuum electrode, characterized in that: include: A housing, the housing comprising a first housing and a second housing, the first housing comprising a first opening and a second opening, the second housing comprising a third opening and a fourth opening, the second opening being connected to the third opening, the first housing and the second housing forming a receiving chamber; an electrode core, the electrode core comprising a feeder and a first electrode plug, the feeder comprising a transmission end and a fixed end, the first electrode plug comprising a fixed portion and a transmission portion, the fixed portion of the first electrode plug being disposed within the accommodating cavity, the transmission portion of the first electrode plug passing through the fourth opening, the fixed end of the feeder being fixedly connected to the fixed portion of the first electrode plug, and the transmission end of the feeder passing through the first opening; an insulating sleeve, the insulating sleeve being arranged on the circumference of the feeder and located in the accommodating cavity; A sealing member is provided, through which the first electrode plug is sealedly connected to the housing.

2. The vacuum electrode according to claim 1, characterized in that The second opening and the third opening are connected in a manner including threaded connection, interference fit, welding and / or bonding.

3. The vacuum electrode according to claim 1, characterized in that A gap is formed between the electrode core and the insulating sleeve; and / or a gap is formed between the first shell and the insulating sleeve.

4. The vacuum electrode according to claim 1, wherein The fixing portion of the first electrode plug includes a boss, and the boss is used to place the sealing member.

5. The vacuum electrode according to claim 1, wherein The first shell is provided with a flange, and the flange is used for sealing connection with the vacuum device.

6. The vacuum electrode according to claim 1, characterized in that The fixing portion of the first electrode plug is connected to the fixing end of the feeder by means of threads, pins and / or welding.

7. The vacuum electrode according to any one of claims 1 to 6, characterized in that: The vacuum electrode further includes a second electrode plug.

8. The vacuum electrode according to claim 7, characterized in that The second electrode plug is connected to the transmission end of the feeder through threads, pins and / or welding.

9. The vacuum electrode according to any one of claims 1 to 6, characterized in that: The sealing element includes a gasket, a sealant, an adhesive, a filler and / or a sealing ring.

10. A vacuum device, characterized in that: include: A vacuum chamber housing and a vacuum electrode according to any one of claims 1 to 9, wherein the vacuum chamber housing is sealedly connected to the electrode.

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