Ion injection filament installation assembly

Abstract

The utility model relates to the technical field of semiconductors, and provides an ion implantation filament installation assembly, which comprises a cathode, a fixing unit and a distance calibration unit, the cathode is movably arranged on the fixing unit along a first direction; the cathode is provided with a blocking piece, and the blocking piece is located on one side, in the first direction, of the fixing unit so as to limit the limiting position of the cathode moving relative to the fixing unit in the first direction. The distance calibration unit is detachably arranged on the cathode, and the distance calibration unit is located between the blocking piece and the fixing unit and used for calibrating the distance between the cathode and a filament. According to the configuration, the distance between the filament and the cathode is accurately calibrated through the thickness size of the distance calibration unit, and a stable ion source can be provided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to an ion implantation filament installation assembly. Background Art

[0002] During semiconductor fabrication, ion implantation is often used to dope semiconductor materials. This process is performed in an ion implanter. Ion implanters rely on a heated filament to emit electrons, which heat a cathode. When the cathode is sufficiently hot, it emits electrons under a certain voltage. These electrons collide with atoms of the dopant gas, ionizing them and producing ions.

[0003] A heating voltage, called the bias voltage, is applied between the filament and the cathode. The current generated by the electrons emitted by the filament and impacting the cathode is called the bias current. The magnitude of the bias current affects the number of electrons released from the cathode, and the magnitude of the bias voltage, in turn, affects the magnitude of the bias current. The distance between the filament and cathode is a key factor in bias voltage adjustment. When the distance between the filament and cathode is too small, electron impacts increase, resulting in a larger bias current. In this case, the bias voltage must be lowered to reduce electron release. When the distance between the filament and cathode is too large, electron impacts decrease, resulting in a smaller bias current. Therefore, the bias voltage must be increased to accelerate electrons. Therefore, to provide a stable ion source, the bias current is usually set to a fixed value, requiring a stable, controllable distance between the filament and cathode.

[0004] The existing filament installation method is usually manual installation, and the distance between the filament and the cathode is manually measured, which results in low filament installation efficiency and high uncertainty in the distance between the filament and the cathode.

[0005] Therefore, based on the above technical problems, an ion implantation filament mounting assembly is needed to ensure a stable and controllable distance between the filament and the cathode. Utility Model Content

[0006] The purpose of the utility model is to provide an ion implantation filament installation assembly, in which the installation position of the cathode relative to the filament can be accurately calibrated by a distance calibration unit, thereby ensuring a stable and controllable distance between the cathode and the filament.

[0007] The utility model provides an ion implantation filament installation assembly, comprising: a cathode, a fixing unit and a distance calibration unit;

[0008] The cathode is arranged on the fixing unit so as to move along the first direction;

[0009] The cathode has a blocking member, which is located on one side of the fixing unit along the first direction to limit the limit position of the cathode's movement relative to the fixing unit along the first direction;

[0010] The distance calibration unit is detachably arranged on the cathode. The distance calibration unit is located between the blocking member and the fixing unit and is used to calibrate the distance between the cathode and the filament.

[0011] Optionally, the distance calibration unit includes a first distance calibration member and a second distance calibration member, the first distance calibration member and the second distance calibration member are detachably connected, and the first distance calibration member and the second distance calibration member are each provided with a groove on their mating surface. After the first distance calibration member and the second distance calibration member are connected, the two grooves are combined to form a through hole passing through the distance calibration unit, and a portion of the cathode is located in the through hole.

[0012] Optionally, a slot is provided on the distance calibration unit, and the distance calibration unit is detachably inserted into the cathode through the slot.

[0013] Optionally, the fixing unit includes a fixing member and a locking member, the cathode is arranged on the fixing member so as to move along the first direction, and the locking member is connected to the fixing member for locking the cathode.

[0014] Optionally, a mounting hole is formed on the fixing member along the first direction, and a portion of the cathode moves along the first direction and passes through the mounting hole.

[0015] Optionally, the locking member is connected to the fixing member and is used to apply a force to the fixing unit to deform the mounting hole, thereby locking the relative position of the cathode and the fixing member.

[0016] Optionally, the cathode further includes a cup body and an intermediate rod, the cup body is open on one side along the first direction, the intermediate rod is connected to the inside of the cup body, the intermediate rod extends along the first direction and extends out of the cup body through the open end of the cup body, and the intermediate rod is arranged on the fixed unit to move along the first direction.

[0017] Optionally, the blocking member is connected to an end of the intermediate rod away from the cup body along the first direction.

[0018] Optionally, when the distance calibration unit includes a first distance calibration member and a second distance calibration member, the intermediate rod passes through the through hole;

[0019] When a slot is provided on the distance calibration unit, the distance calibration unit can be detachably inserted into the middle rod through the slot.

[0020] Optionally, when a mounting hole is provided on the fixing member, the intermediate rod moves along the first direction and passes through the mounting hole.

[0021] With this configuration, the distance calibration unit can be detachably mounted on the cathode, and the thickness of the distance calibration unit is used to accurately calibrate the distance between the filament and the cathode. The distance between the cathode and the cathode can be precisely controlled within a set range, thereby enabling the ion injection filament to have a stable bias current, which helps to provide a stable ion source; and the installation assembly helps to improve the installation efficiency and installation accuracy of the filament. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic structural diagram of a cathode according to an embodiment of the present invention;

[0023] Figure 2 This is a schematic diagram of the main structure of a fixing unit according to an embodiment of the present invention;

[0024] Figure 3 This is a side structural diagram of a fixing unit according to an embodiment of the present invention;

[0025] Figure 4 This is a schematic diagram of the main structure of a distance calibration unit according to an embodiment of the present invention;

[0026] Figure 5 This is a side structural diagram of a distance calibration unit according to an embodiment of the present invention;

[0027] Figure 6 This is a schematic diagram of the filament installation of an embodiment of the utility model Figure 1 ;.

[0028] Figure 7 This is a schematic diagram of the filament installation of an embodiment of the utility model Figure 2 ;

[0029] Figure 8 This is a schematic diagram of the filament installation of an embodiment of the utility model Figure 3 ;

[0030] Figure 9 This is a schematic diagram of the filament installation of an embodiment of the utility model Figure 4 ;

[0031] Figure 10 This is a structural diagram of a distance calibration unit according to another embodiment of the present invention.

[0032] Among them, in the accompanying drawings:

[0033] 10- cathode; 11- cup; 12- middle rod; 13- blocking member;

[0034] 20-fixing unit; 21-fixing member; 22-locking member; 23-mounting hole; 24-through slot; 25-deformation slot;

[0035] 30-distance calibration unit; 31-first distance calibration member; 32-second distance calibration member; 33-through hole; 34-slot;

[0036] 40-filament;

[0037] a-First direction. DETAILED DESCRIPTION

[0038] The following is a detailed description of the ion implantation filament mounting assembly proposed by the present invention, with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the accompanying drawings are highly simplified and not to exact scale, and are intended solely to facilitate and clarify the purpose of illustrating the embodiments of the present invention.

[0039] As used in the present invention, the singular forms "a", "an", and "the" include plural objects, the term "or" is generally used to include the meaning of "and / or", the term "several" is generally used to include the meaning of "at least one", and the terms "at least two" or "a plurality" are generally used to include the meaning of "two or more". In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features specified as "first", "second", and "third" may explicitly or implicitly include one or at least two of the features. In addition, as used in the present invention, "installed", "connected", "connected", and one element is "set" on another element should be understood in a broad sense, usually only indicating that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements can be direct or indirect through an intermediate element, and cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element can be in any orientation such as inside, outside, above, below or on one side of another element, unless the content clearly indicates otherwise. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used relative to the exemplary embodiments as they are shown in the figures, with the upward or upper direction toward the top of the corresponding figure, and the downward or lower direction toward the bottom of the corresponding figure.

[0040] This embodiment provides an ion implantation filament installation assembly, including: a cathode 10 , a fixing unit 20 and a distance calibration unit 30 .

[0041] Please refer to Figure 1 As shown, the cathode 10 includes a cup body 11 , an intermediate rod 12 and a blocking member 13 .

[0042] The cup body 11 is an overall cylindrical cup-shaped structure, and one side of the cup body 11 is open along the first direction a, wherein the first direction a corresponds to the axial direction of the cup body 11 .

[0043] The intermediate rod 12 is connected to the inside of the cup body 11 , extends along the first direction a and passes through the open end of the cup body 11 and extends out of the cup body 11 . The intermediate rod 12 is a cylindrical rod, and is coaxially arranged with the cup body 11 .

[0044] The cathode 10 has a blocking member 13 . Specifically, the blocking member 13 is connected to one end of the intermediate rod 12 away from the cup body 11 along the first direction a.

[0045] In this embodiment, the blocking member 13 is a disc structure, which is coaxially arranged with the intermediate rod 12, and the outer diameter of the blocking member 13 is larger than the outer diameter of the intermediate rod 12. In an alternative embodiment, the blocking member 13 can be configured as a cuboid or other structures.

[0046] In this embodiment, cathode 10 employs a cylindrical cup-shaped structure with a cylindrical intermediate rod. In alternative embodiments, the cross-sectional shapes of cup 11 and intermediate rod 12 can be adjusted based on actual usage requirements, for example, with both cup 11 and intermediate rod 12 having hexagonal cross-sections. Cathode 10 may also employ other existing structures, which will not be further described here.

[0047] Please refer to Figure 2 As shown, the fixing unit 20 includes a fixing member 21 and a locking member 22. The fixing member 21 is elongated and has a mounting hole 23 defined along the first direction a. The first direction a is perpendicular to the length of the fixing member 21. Furthermore, the fixing member 21 has a through-groove 24 defined along its length. The through-groove 24 extends through one end of the fixing member 21 along its length and through the mounting hole 23. The fixing member 21 also has a deformation groove 25 defined along its length. The deformation groove 25 extends through the mounting hole 23. The deformation groove 25 and the through-groove 24 are aligned along the length of the fixing member 21 and are located on either side of the mounting hole 23. The provision of the deformation groove 25 and the through-groove 24 allows the fixing member 21 to have a two-part structure at one end of the mounting hole 23. The two halves can be forced together by an external force, thereby forcing the mounting hole 23 to deform.

[0048] In this embodiment, the intermediate rod 12 is movable and passes through the mounting hole 23. The locking member 22 is used to lock the relative position relationship between the intermediate rod 12 and the fixing member 21.

[0049] In this embodiment, the locking member 22 is a bolt-nut structure. The stud of the bolt passes through the fixing member 21 in a direction perpendicular to the length of the intermediate rod 12 and passes through the deformation groove 25 and is threadedly connected to the nut. After the nut is tightened, it squeezes the fixing member 21, causing the mounting hole 23 to deform.

[0050] In this embodiment, the deformation of the mounting hole 23 is achieved through the deformation groove 25, the through groove 24, and the locking member 22, thereby locking the intermediate rod 12 and the fixing member 21 in position. In alternative embodiments, locking can be achieved through other structures. For example, the fixing member 21 may not be provided with the deformation groove 25 and the through groove 24. The fixing member 21 may directly have a threaded hole extending through the mounting hole 23. The locking member 22 is a bolt that threadably engages with the threaded hole. When tightened, the end of the bolt directly contacts the intermediate rod 12 located in the mounting hole 23, thereby locking the intermediate rod 12 in position. In addition, the locking member 22 may also adopt other known structures, which will not be described in detail here.

[0051] Please refer to Figure 4 and Figure 5 As shown, the distance calibration unit 30 includes a first distance calibration component 31 and a second distance calibration component 32. Figure 4 The first distance calibration member 31 and the second distance calibration member 32 are bilaterally symmetrical structures. The first distance calibration member 31 and the second distance calibration member 32 can be detachably connected, for example, by bolts passing through the two, or by pins and pin holes respectively provided at the joint surfaces of the two.

[0052] The first distance calibration member 31 and the second distance calibration member 32 are each provided with a semicircular groove on their mating surface. After the first distance calibration member 31 and the second distance calibration member 32 are connected, the two grooves are combined to form a through hole 33 that passes through the distance calibration unit 30. The aperture of the through hole 33 is the same as the diameter of the intermediate rod 12.

[0053] The through hole 33 is provided for the intermediate rod 12 to pass through, and the detachable arrangement of the first distance calibration member 31 and the second distance calibration member 32 is for installing the distance calibration unit 30 on the intermediate rod 12 or removing the distance calibration unit 30 from the intermediate rod 12.

[0054] like Figure 5As shown, the thickness dimension L of the distance calibration unit 30 is the calibrated distance between the filament and the cathode. The specific dimension of L is the same as the target distance between the filament and the cathode. Typically, the distance between the filament and the cathode is less than 10 mm, so L is adaptively less than 10 mm. For example, based on the required distance between the filament and the cathode, the value of L can be set in the range of 0.7 mm to 0.95 mm, and specifically L can be 0.8 mm. The specific value of L can be adaptively adjusted based on the actual distance between the filament and the cathode.

[0055] Please refer to Figure 7 , which is an assembly diagram of the cathode 10 , the fixing unit 20 and the distance calibration unit 30 .

[0056] The distance calibration unit 30 is mounted on the middle rod 12 , and the middle rod 12 passes through the through hole 33 of the distance calibration unit 30 .

[0057] The fixing unit 20 is mounted on the intermediate rod 12, wherein the intermediate rod 12 passes through a mounting hole 23 in the fixing unit 20. The fixing unit 20 is also fixedly connected to the housing of the ion implantation apparatus, that is, the fixing unit 20 is stationary relative to the housing of the ion implantation apparatus. The intermediate rod 12 can slide relative to the fixing unit 20 within the mounting hole 23, so the cathode 10 can slide relative to the fixing unit 20 to adjust its position.

[0058] like Figure 6 As shown, the first distance calibration member 31 is connected to the second distance calibration member 32, and the intermediate rod 12 passes through the through hole 33 of the distance calibration unit 30. The distance calibration unit 30 is mounted on the intermediate rod 12 and abuts against the blocking member 13.

[0059] The mounting hole 23 of the fixing unit 20 allows the intermediate rod 12 to pass through, so that the intermediate rod 12 can be installed on the fixing unit 20. To facilitate the installation of the fixing unit 20, the blocking member 13 and the intermediate rod 12 can be configured as a detachable structure. When installing the fixing unit 20, the blocking member 13 is first removed, the intermediate rod 12 is passed through the mounting hole 23 of the fixing unit 20, and then the blocking member 13 is reinstalled on the end of the intermediate rod 12. The blocking member 13 can be detachably connected to the intermediate rod 12 by a threaded connection; or the blocking member 13 can be provided with a slot, through which the blocking member 13 is axially detachably inserted into the end of the intermediate rod 12. The detachable connection method between the blocking member 13 and the intermediate rod 12 can be adaptively adjusted based on actual usage requirements.

[0060] The distance calibration unit 30 is located between the blocking member 13 and the fixing unit 20, and the fixing unit 20 abuts against the distance calibration unit 30. At this time, the distance between the blocking member 13 and the fixing unit 20 is the thickness L of the distance calibration unit 30.

[0061] like Figure 7As shown, filament 40 is then installed. Filament 40 is located inside cup 11 and rests against the bottom of cup 11. During installation, filament 40 is also equipped with a filament fixing member (not shown) for fixing the filament to the housing of the ion implantation apparatus to ensure that the filament is fixed in position relative to the housing. The filament fixing member is, for example, an insulating connecting rod, one end of which is connected to the filament and the other end is connected to the housing of the ion implantation apparatus.

[0062] like Figure 8 As shown, the distance calibration unit 30 is then removed, and a gap of distance L is formed between the blocking member 13 and the fixing unit 20. The locking member 22 is then loosened to ensure that the intermediate rod 12 can move relative to the fixing unit 20 along the first direction a.

[0063] like Figure 9 As shown, the cathode 10 is now pushed to move in the first direction a, causing the intermediate rod 12 to move relative to the fixing unit 20 in the first direction a. When the blocking member 13 abuts the fixing unit 20, the cathode 10 moves to the limit position. At this time, the distance between the filament 40 and the bottom of the cup 11 is the calibrated distance L. The intermediate rod 12 is then locked by the locking member 22 to lock the position of the cathode 10 relative to the fixing unit 20.

[0064] The above-mentioned installation assembly is used to accurately calibrate the distance between the filament 40 and the cathode 10 through the thickness dimension L of the distance calibration unit 30, so as to accurately control the distance between the two within a set range, thereby making the ion injection filament have a stable bias current, which helps to provide a stable ion source; moreover, the installation assembly helps to improve the installation efficiency and installation accuracy of the filament.

[0065] In this embodiment, the fixing unit 20 cooperates with the middle rod 12 of the cathode 10 . In other alternative embodiments, the fixing unit 20 may also cooperate with the cup body 11 of the cathode 10 .

[0066] In this embodiment, the distance calibration unit 30 is detachably provided on the intermediate rod 12. In other alternative embodiments, the distance calibration unit 30 may also cooperate with the cup body 11 of the cathode 10.

[0067] Please refer to Figure 10 FIG. 3 is another embodiment of a distance calibration unit 30 . The distance calibration unit 30 is an integrated structure. The distance calibration unit 30 is a U-shaped structure as a whole. A slot 34 is provided thereon. The bottom of the slot 34 is adapted to the outer contour of the intermediate rod 12 .

[0068] The distance calibration unit 30 can be detachably mounted on the intermediate rod 12 by plugging. Figure 10As described, the opening direction of the slot 34 is perpendicular to the length direction of the intermediate rod 12. The distance calibration unit 30 is inserted into the intermediate rod 12. When it needs to be disassembled, the distance calibration unit 30 is pulled up to separate the distance calibration unit 30 from the intermediate rod 12. This method facilitates the disassembly and assembly of the distance calibration unit 30.

[0069] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0070] The above description is only a description of the preferred embodiment of the present invention and does not limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. An ion implantation filament mounting assembly, characterized in that: include: cathode, fixing unit and distance calibration unit; The cathode is arranged on the fixing unit so as to move along the first direction; The cathode has a blocking member, which is located on one side of the fixing unit along the first direction to limit the limit position of the cathode's movement relative to the fixing unit along the first direction; The distance calibration unit is detachably arranged on the cathode. The distance calibration unit is located between the blocking member and the fixing unit and is used to calibrate the distance between the cathode and the filament.

2. The ion implantation filament mounting assembly according to claim 1, wherein: The distance calibration unit includes a first distance calibration member and a second distance calibration member, which are detachably connected. The first distance calibration member and the second distance calibration member are each provided with a groove on their mating surface. After the first distance calibration member and the second distance calibration member are connected, the two grooves are combined to form a through hole that passes through the distance calibration unit, and a portion of the cathode is located in the through hole.

3. The ion implantation filament mounting assembly according to claim 1, wherein: The distance calibration unit is provided with a slot, and the distance calibration unit is detachably inserted into the cathode through the slot.

4. The ion implantation filament mounting assembly according to claim 1, wherein: The fixing unit includes a fixing member and a locking member. The cathode is arranged on the fixing member so as to move along a first direction. The locking member is connected to the fixing member for locking the cathode.

5. The ion implantation filament mounting assembly according to claim 4, wherein: A mounting hole is formed on the fixing member along the first direction, and a portion of the cathode moves along the first direction and passes through the mounting hole.

6. The ion implantation filament mounting assembly according to claim 5, wherein: The locking member is connected to the fixing member and is used to apply a force to the fixing unit to deform the mounting hole, thereby locking the relative position of the cathode and the fixing member.

7. The ion implantation filament mounting assembly according to claim 1, wherein: The cathode also includes a cup body and an intermediate rod. The cup body is open on one side along the first direction. The intermediate rod is connected to the inside of the cup body. The intermediate rod extends along the first direction and extends out of the cup body through the open end of the cup body. The intermediate rod is arranged on the fixing unit to move along the first direction.

8. The ion implantation filament mounting assembly according to claim 7, wherein: The blocking member is connected to one end of the middle rod away from the cup body along the first direction.

9. The ion implantation filament mounting assembly according to claim 2, wherein: The cathode also includes a cup body and an intermediate rod. The cup body is open on one side along the first direction. The intermediate rod is connected to the inside of the cup body. The intermediate rod extends along the first direction and extends out of the cup body through the open end of the cup body. The intermediate rod is arranged on the fixing unit to move along the first direction.

10. The ion implantation filament mounting assembly according to claim 9, wherein: The intermediate rod passes through the through hole.

11. The ion implantation filament installation assembly according to claim 3, wherein: The cathode also includes a cup body and an intermediate rod. The cup body is open on one side along the first direction. The intermediate rod is connected to the inside of the cup body. The intermediate rod extends along the first direction and extends out of the cup body through the open end of the cup body. The intermediate rod is arranged on the fixing unit to move along the first direction.

12. The ion implantation filament mounting assembly according to claim 11, wherein: The distance calibration unit is detachably inserted into the middle rod through the slot.

13. The ion implantation filament mounting assembly according to claim 5, wherein: The cathode also includes a cup body and an intermediate rod. The cup body is open on one side along the first direction. The intermediate rod is connected to the inside of the cup body. The intermediate rod extends along the first direction and extends out of the cup body through the open end of the cup body. The intermediate rod is arranged on the fixing unit to move along the first direction.

14. The ion implantation filament mounting assembly according to claim 13, wherein: The intermediate rod moves along the first direction and passes through the mounting hole.

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